JP5679737B2 - 液体吐出ヘッドおよびその製造方法 - Google Patents

液体吐出ヘッドおよびその製造方法 Download PDF

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Publication number
JP5679737B2
JP5679737B2 JP2010188487A JP2010188487A JP5679737B2 JP 5679737 B2 JP5679737 B2 JP 5679737B2 JP 2010188487 A JP2010188487 A JP 2010188487A JP 2010188487 A JP2010188487 A JP 2010188487A JP 5679737 B2 JP5679737 B2 JP 5679737B2
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Japan
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flow path
wall member
path wall
substrate
mold
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Japanese (ja)
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JP2011068129A (ja
JP2011068129A5 (enExample
Inventor
謙児 藤井
謙児 藤井
浅井　和宏
和宏 浅井
渡辺　誠
渡辺　　誠
田川　義則
義則 田川
今仲　良行
良行 今仲
勇治 田丸
勇治 田丸
久保　康祐
康祐 久保
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Canon Inc
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Canon Inc
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Priority to JP2010188487A priority Critical patent/JP5679737B2/ja
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Publication of JP2011068129A5 publication Critical patent/JP2011068129A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2010188487A 2009-08-25 2010-08-25 液体吐出ヘッドおよびその製造方法 Active JP5679737B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010188487A JP5679737B2 (ja) 2009-08-25 2010-08-25 液体吐出ヘッドおよびその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009194455 2009-08-25
JP2009194455 2009-08-25
JP2010188487A JP5679737B2 (ja) 2009-08-25 2010-08-25 液体吐出ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2011068129A JP2011068129A (ja) 2011-04-07
JP2011068129A5 JP2011068129A5 (enExample) 2013-09-12
JP5679737B2 true JP5679737B2 (ja) 2015-03-04

Family

ID=43070447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010188487A Active JP5679737B2 (ja) 2009-08-25 2010-08-25 液体吐出ヘッドおよびその製造方法

Country Status (7)

Country Link
US (1) US8342659B2 (enExample)
EP (1) EP2289700B1 (enExample)
JP (1) JP5679737B2 (enExample)
KR (1) KR101331318B1 (enExample)
CN (1) CN101992598B (enExample)
BR (1) BRPI1003190B1 (enExample)
RU (1) RU2427470C1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5393423B2 (ja) * 2009-12-10 2014-01-22 キヤノン株式会社 インク吐出ヘッド及びその製造方法
JP5791368B2 (ja) 2011-05-20 2015-10-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP6000715B2 (ja) 2011-09-29 2016-10-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5955082B2 (ja) 2012-04-26 2016-07-20 キヤノン株式会社 記録ヘッド及びインクジェット記録装置
JP6929639B2 (ja) 2016-01-08 2021-09-01 キヤノン株式会社 液体吐出ヘッド、液体吐出装置及び液体の供給方法
US10040290B2 (en) 2016-01-08 2018-08-07 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection apparatus, and method of supplying liquid
EP3762278B1 (en) 2018-06-25 2021-10-27 Autotech Engineering S.L. A body side structural frame of a vehicle
JP2024049554A (ja) * 2022-09-29 2024-04-10 キヤノン株式会社 液体吐出ヘッドおよび記録装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5235351A (en) * 1984-03-31 1993-08-10 Canon Kabushiki Kaisha Liquid ejection recording head including a symbol indicating information used for changing the operation of the head
JPH0574748A (ja) 1991-09-12 1993-03-26 Hitachi Ltd 来歴情報記録方式、及び半導体集積回路
JP3459703B2 (ja) * 1995-06-20 2003-10-27 キヤノン株式会社 インクジェットヘッドの製造方法、およびインクジェットヘッド
ATE475537T1 (de) * 1998-08-31 2010-08-15 Seiko Epson Corp Druckvorrichtung und druckkopfeinheit
JP3928681B2 (ja) * 1999-02-18 2007-06-13 富士ゼロックス株式会社 半導体装置およびその製造方法
JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
WO2003070470A1 (en) 2002-02-19 2003-08-28 Brother Kogyo Kabushiki Kaisha Ink jet head and ink jet printer
US7171748B2 (en) * 2002-08-30 2007-02-06 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
JP2005111976A (ja) * 2003-09-18 2005-04-28 Ricoh Co Ltd 消耗部品、部品装着構造、及び画像形成装置
JP2005181560A (ja) 2003-12-18 2005-07-07 Nippon Hoso Kyokai <Nhk> 光導波路デバイス
JP4235820B2 (ja) * 2004-05-07 2009-03-11 ブラザー工業株式会社 インクジェット記録ヘッド、ヘッドユニット及びインクジェット記録ヘッドの製造方法
JP4194580B2 (ja) * 2004-06-02 2008-12-10 キヤノン株式会社 ヘッド基板、記録ヘッド、ヘッドカートリッジ、及び記録装置
JP2006082329A (ja) 2004-09-15 2006-03-30 Canon Inc インクジェット記録ヘッドの製造方法
JP2006351772A (ja) * 2005-06-15 2006-12-28 Fujifilm Holdings Corp 半導体チップの識別情報記録方法及び撮像装置
JP4341688B2 (ja) 2006-04-12 2009-10-07 セイコーエプソン株式会社 液体収容容器
FR2906646B1 (fr) 2006-10-03 2009-01-30 Microcomposants De Haute Secur Procede de marquage individuel de circuits integres et circuit integre marque selon ce procede.
US7571970B2 (en) * 2007-07-13 2009-08-11 Xerox Corporation Self-aligned precision datums for array die placement
JP2009274266A (ja) 2008-05-13 2009-11-26 Canon Inc 半導体チップ及び、インクジェット記録ヘッド

Also Published As

Publication number Publication date
JP2011068129A (ja) 2011-04-07
US8342659B2 (en) 2013-01-01
BRPI1003190A2 (pt) 2012-05-02
RU2427470C1 (ru) 2011-08-27
BRPI1003190B1 (pt) 2019-11-05
KR101331318B1 (ko) 2013-11-20
KR20110021659A (ko) 2011-03-04
EP2289700A1 (en) 2011-03-02
US20110050828A1 (en) 2011-03-03
EP2289700A8 (en) 2011-04-27
EP2289700B1 (en) 2013-07-03
CN101992598B (zh) 2014-05-07
CN101992598A (zh) 2011-03-30

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