JP4999964B2 - 液体吐出ヘッドおよびその製造方法 - Google Patents
液体吐出ヘッドおよびその製造方法 Download PDFInfo
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- JP4999964B2 JP4999964B2 JP2010127072A JP2010127072A JP4999964B2 JP 4999964 B2 JP4999964 B2 JP 4999964B2 JP 2010127072 A JP2010127072 A JP 2010127072A JP 2010127072 A JP2010127072 A JP 2010127072A JP 4999964 B2 JP4999964 B2 JP 4999964B2
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- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- WQMWHMMJVJNCAL-UHFFFAOYSA-N 2,4-dimethylpenta-1,4-dien-3-one Chemical compound CC(=C)C(=O)C(C)=C WQMWHMMJVJNCAL-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene group Chemical group C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
本発明の第1の実施形態の液体吐出ヘッドの製造方法の一例を以下に示す。図2は本発明の液体吐出ヘッドの製造方法の一例を示す模式的断面図であり、図1(b)と同様の断面図である。
本発明の第2の実施形態の液体吐出ヘッドの製造方法の一例を以下に示す。図3は本発明の液体吐出ヘッドの製造方法の一例を示す模式的断面図であり、図1(b)と同様の断面図である。
本発明の第3の実施形態の液体吐出ヘッドの製造方法の一例を以下に示す。図4は本発明の液体吐出ヘッドの製造方法の一例を示す模式的断面図であり、図1(b)と同様の断面図である。
図5は第4の実施形態の製造方法を示す図であり、図2と同様の断面図である。
2 基板
3 9 流路壁部材
102 一方の面
103 撥液部材
104 106 側外面
Claims (3)
- 液体を吐出する吐出口に連通する流路の壁を備える樹脂で形成された流路壁部材と、基板と、該基板の端面を覆うように設けられた樹脂組成物から形成された被覆樹脂部材と、を有し、前記流路壁部材と前記基板の一方の面とが接することで前記流路が形成されている液体吐出ヘッドにおいて、
前記流路壁部材の側外面と前記基板の一方の面との交線の少なくとも一部を覆い、前記流路壁部材の側外面と前記基板の一方の面とに渡る様に、撥液部材が設けられており、
前記撥液部材の水の接触角は90度以上であり、前記撥液部材の前記樹脂組成物の接触角は前記流路壁部材及び前記基板の一方の面の前記樹脂組成物の接触角よりも大きいことを特徴とする液体吐出ヘッド。 - 前記撥液部材は、前記交線全体に渡って設けられていることを特徴とする請求項1に記載の液体吐出ヘッド。
- 前記基板の端面と前記一方の面とに接するように、封止部材が設けられていることを特徴とする請求項1または2に記載の液体吐出ヘッド。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010127072A JP4999964B2 (ja) | 2009-06-16 | 2010-06-02 | 液体吐出ヘッドおよびその製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009143524 | 2009-06-16 | ||
JP2009143524 | 2009-06-16 | ||
JP2010127072A JP4999964B2 (ja) | 2009-06-16 | 2010-06-02 | 液体吐出ヘッドおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011020440A JP2011020440A (ja) | 2011-02-03 |
JP4999964B2 true JP4999964B2 (ja) | 2012-08-15 |
Family
ID=43306086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010127072A Expired - Fee Related JP4999964B2 (ja) | 2009-06-16 | 2010-06-02 | 液体吐出ヘッドおよびその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8220901B2 (ja) |
JP (1) | JP4999964B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6000715B2 (ja) * | 2011-09-29 | 2016-10-05 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP6214343B2 (ja) * | 2013-10-30 | 2017-10-18 | キヤノン株式会社 | インクジェット記録ヘッド用封止剤およびインクジェット記録ヘッド |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999015337A1 (fr) * | 1997-09-22 | 1999-04-01 | Cimeo Precision Co., Ltd. | Plaquette perforee de tete a jet d'encre, procede permettant de la produire et tete a jet d'encre obtenue |
JPH11240156A (ja) * | 1997-12-22 | 1999-09-07 | Canon Inc | インクジェット記録ヘッド、該インクジェット記録ヘッド用基体、インクジェットカートリッジおよびインクジェット記録装置 |
JP3610215B2 (ja) * | 1997-12-26 | 2005-01-12 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
JP3592172B2 (ja) | 1999-01-27 | 2004-11-24 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法、該製法によって製造されたインクジェット記録ヘッド及び該インクジェット記録ヘッドを搭載したインクジェット記録装置 |
JP4756900B2 (ja) * | 2005-04-22 | 2011-08-24 | キヤノン株式会社 | インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法 |
JP2006297827A (ja) * | 2005-04-22 | 2006-11-02 | Canon Inc | インクジェット記録ヘッド |
JP4889450B2 (ja) * | 2005-11-11 | 2012-03-07 | 株式会社リコー | 液体吐出ヘッド及び画像形成装置、液滴を吐出する装置、記録方法 |
JP4976739B2 (ja) * | 2006-04-25 | 2012-07-18 | キヤノン株式会社 | 記録ヘッド、およびその製造方法 |
US20120007918A1 (en) * | 2010-07-07 | 2012-01-12 | Toshiba Tec Kabushiki Kaisha | Inkjet recording head, inkjet printer, and inkjet recording method |
-
2010
- 2010-05-12 US US12/778,829 patent/US8220901B2/en not_active Expired - Fee Related
- 2010-06-02 JP JP2010127072A patent/JP4999964B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8220901B2 (en) | 2012-07-17 |
JP2011020440A (ja) | 2011-02-03 |
US20100315467A1 (en) | 2010-12-16 |
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