KR100816568B1 - 액체 토출 헤드 제조 방법 - Google Patents
액체 토출 헤드 제조 방법 Download PDFInfo
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- KR100816568B1 KR100816568B1 KR1020060068933A KR20060068933A KR100816568B1 KR 100816568 B1 KR100816568 B1 KR 100816568B1 KR 1020060068933 A KR1020060068933 A KR 1020060068933A KR 20060068933 A KR20060068933 A KR 20060068933A KR 100816568 B1 KR100816568 B1 KR 100816568B1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/1632—Manufacturing processes machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/16—Production of nozzles
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- B41J2/164—Manufacturing processes thin film formation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Abstract
Description
Claims (9)
- 액체 토출 헤드 제조 방법이며,잉크에 잉크를 토출하기 위한 에너지를 인가하는 에너지 발생 소자들의 어레이를 포함하는 기판 상에 폴리에텔 아미드 수지로 만들어진 접착층을 코팅하는 접착층 코팅 단계와,에너지 발생 소자에 대해 배치된 유로벽을 접착층 상에 형성하는 유로벽 형성 단계와,접착층을 패턴화하기 위해 마스크로서 유로벽을 사용함으로써 접착층을 에칭하는 접착층 형성 단계와,유로벽을 덮기 위해 유로벽이 그 위에 형성되어 있는 기판 상에 매립 재료를 적층시키는 매립 재료 적층 단계와,유로벽의 상부가 노출되도록, 적층된 매립 재료의 상부를 대체로 편평하게 연마하는 편평화 단계와,연마된 매립 재료 및 노출된 유로벽의 상부 상에 오리피스 판을 형성하는 오리피스 판 형성 단계와,오리피스 판 내에 토출구를 형성하는 토출구 형성 단계와,매립 재료를 용출시키는 용출 단계를 포함하고,매립 재료 적층 단계는 접착층 형성 단계 후에 수행되는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 유로벽 형성 단계 이후 및 매립 재료 적층 단계 이전에 유로벽을 경화시키는 단계를 더 포함하는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 접착층은 접착층 형성 단계에서 건식 에칭에 의해 패턴화되는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 유로벽 및 오리피스 판은 동일한 수지로 만들어지는 액체 토출 헤드 제조 방법.
- 제4항에 있어서, 유로벽 및 오리피스 판은 네거티브 감광 수지로 만들어지고, 매립 재료는 포지티브 감광 수지로 만들어지는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 용출 단계 이전에, 토출 에너지 발생 소자를 구비한 면에 대향한 면으로부터 기판을 에칭하고, 잉크 유로와 연통하는 잉크 공급구를 형성하는 단계를 더 포함하고,용출 단계는 형성된 잉크 공급구로부터 매립 재료를 용출시키는 단계를 포함하는 액체 토출 헤드 제조 방법.
- 제6항에 있어서, 잉크 공급구를 형성하기 위한 마스크는 매립 재료가 유로벽 을 덮도록 적층된 상태에서 기판의 후면 상에 형성되는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 기판의 외측 주연부의 폴리에텔 아미드 수지는 접착층의 패턴화에 의해 남겨지는 액체 토출 헤드 제조 방법.
- 제1항에 있어서, 토출 에너지 발생 소자를 구비한 면에 대향하는 면으로부터 기판을 에칭하여, 잉크 유로와 연통하는 잉크 공급구를 형성하는 단계를 더 포함하고, 잉크 공급구를 형성하기 위한 마스크는 매립 재료가 유로벽을 덮기 위해 적층된 상태에서 기판의 후면 상에 형성되는 액체 토출 헤드 제조 방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005214812 | 2005-07-25 | ||
JPJP-P-2005-00214812 | 2005-07-25 | ||
JP2006171254A JP4881081B2 (ja) | 2005-07-25 | 2006-06-21 | 液体吐出ヘッドの製造方法 |
JPJP-P-2006-00171254 | 2006-06-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070013219A KR20070013219A (ko) | 2007-01-30 |
KR100816568B1 true KR100816568B1 (ko) | 2008-03-24 |
Family
ID=37678108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060068933A KR100816568B1 (ko) | 2005-07-25 | 2006-07-24 | 액체 토출 헤드 제조 방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7300596B2 (ko) |
JP (1) | JP4881081B2 (ko) |
KR (1) | KR100816568B1 (ko) |
Families Citing this family (38)
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US7523553B2 (en) * | 2006-02-02 | 2009-04-28 | Canon Kabushiki Kaisha | Method of manufacturing ink jet recording head |
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US8084361B2 (en) * | 2007-05-30 | 2011-12-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor fabrication method suitable for MEMS |
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KR20090030111A (ko) * | 2007-09-19 | 2009-03-24 | 삼성전자주식회사 | 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드 |
JP2009119650A (ja) * | 2007-11-13 | 2009-06-04 | Canon Inc | インクジェットヘッドの製造方法 |
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JP5063390B2 (ja) * | 2008-01-30 | 2012-10-31 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP2009208393A (ja) * | 2008-03-05 | 2009-09-17 | Canon Inc | インクジェット記録ヘッド |
JP2009220286A (ja) * | 2008-03-13 | 2009-10-01 | Canon Inc | 液体吐出記録ヘッド及その製造方法 |
KR20090117010A (ko) * | 2008-05-08 | 2009-11-12 | 삼성전자주식회사 | 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드 |
JP2010052149A (ja) * | 2008-08-26 | 2010-03-11 | Canon Inc | 記録ヘッドの製造方法 |
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JP5693068B2 (ja) | 2010-07-14 | 2015-04-01 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
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JP5791368B2 (ja) | 2011-05-20 | 2015-10-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP6039259B2 (ja) | 2011-07-25 | 2016-12-07 | キヤノン株式会社 | 液体吐出ヘッド、およびその製造方法 |
JP2013059904A (ja) | 2011-09-13 | 2013-04-04 | Canon Inc | 液体記録ヘッド及びにその製造方法 |
WO2013048382A1 (en) * | 2011-09-28 | 2013-04-04 | Hewlett-Packard Development Company, L.P. | Slot-to-slot circulation in a fluid ejection device |
JP2014028471A (ja) | 2012-07-31 | 2014-02-13 | Canon Inc | 液体吐出ヘッド及びその製造方法 |
JP6202869B2 (ja) | 2013-04-17 | 2017-09-27 | キヤノン株式会社 | 液体吐出ヘッド |
JP6223006B2 (ja) | 2013-06-12 | 2017-11-01 | キヤノン株式会社 | 液体吐出ヘッドチップ及びその製造方法 |
KR102379015B1 (ko) * | 2014-05-30 | 2022-03-29 | 세메스 주식회사 | 토출 헤드 및 이를 포함하는 기판 처리 장치 |
WO2017078716A1 (en) | 2015-11-05 | 2017-05-11 | Hewlett-Packard Development Company, L.P. | Three-dimensional features formed in molded panel |
JP2021109385A (ja) * | 2020-01-10 | 2021-08-02 | キヤノン株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
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JP3459703B2 (ja) | 1995-06-20 | 2003-10-27 | キヤノン株式会社 | インクジェットヘッドの製造方法、およびインクジェットヘッド |
JP3343875B2 (ja) | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
ES2232047T3 (es) | 1998-06-03 | 2005-05-16 | Canon Kabushiki Kaisha | Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal. |
JP3679668B2 (ja) * | 1999-12-20 | 2005-08-03 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
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CN100421945C (zh) * | 2003-09-17 | 2008-10-01 | 惠普开发有限公司 | 多个阻挡层 |
KR100538230B1 (ko) * | 2003-09-27 | 2005-12-21 | 삼성전자주식회사 | 모놀리틱 잉크젯 프린트헤드의 제조방법 |
JP4455282B2 (ja) * | 2003-11-28 | 2010-04-21 | キヤノン株式会社 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ |
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