JP5673675B2 - 透明電極の製造方法、透明電極および有機電子素子 - Google Patents
透明電極の製造方法、透明電極および有機電子素子 Download PDFInfo
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- 238000012360 testing method Methods 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- VELSFHQDWXAPNK-UHFFFAOYSA-N tetracontacyclo[25.6.5.516,28.44,32.35,11.321,34.28,10.212,15.222,35.229,31.113,20.124,38.02,6.014,19.017,25.018,23.030,37.033,36.547,54.446,53.448,58.126,51.150,52.03,45.07,42.09,61.039,40.041,43.044,63.049,76.055,78.056,62.057,68.059,64.060,67.065,69.066,71.070,73.072,75.074,77]octaheptaconta-1,3(45),4(48),5(61),6,8,10,12,14,16,18,20,22,24(39),25,27(38),28,30,32,34(42),35(40),36,41(43),44(63),46,49(76),50(77),51,53,55(78),56(62),57,59,64,66,68,70(73),71,74-nonatriacontaene Chemical compound c12c3c4c5c6c1c1c7c8c2c2c3c3c9c4c4c5c5c%10c%11c%12c%13c%14c%15c%12c%12c%16c%17c%18c%19c%20c%21c%17c%17c%22c%21c%21c%23c%20c%20c%19c%19c%24c%18c%16c%15c%15c%24c%16c(c7c%15c%14c1c6c5%13)c8c1c2c2c3c3c(c%21c5c%22c(c%11c%12%17)c%10c4c5c93)c%23c2c%20c1c%19%16 VELSFHQDWXAPNK-UHFFFAOYSA-N 0.000 description 1
- PCCVSPMFGIFTHU-UHFFFAOYSA-N tetracyanoquinodimethane Chemical compound N#CC(C#N)=C1C=CC(=C(C#N)C#N)C=C1 PCCVSPMFGIFTHU-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 150000003567 thiocyanates Chemical class 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- HERSKCAGZCXYMC-UHFFFAOYSA-N thiophen-3-ol Chemical compound OC=1C=CSC=1 HERSKCAGZCXYMC-UHFFFAOYSA-N 0.000 description 1
- MPKQTNAUFAZSIJ-UHFFFAOYSA-N thiophene-3,4-diol Chemical compound OC1=CSC=C1O MPKQTNAUFAZSIJ-UHFFFAOYSA-N 0.000 description 1
- GSXCEVHRIVLFJV-UHFFFAOYSA-N thiophene-3-carbonitrile Chemical compound N#CC=1C=CSC=1 GSXCEVHRIVLFJV-UHFFFAOYSA-N 0.000 description 1
- YNVOMSDITJMNET-UHFFFAOYSA-N thiophene-3-carboxylic acid Chemical compound OC(=O)C=1C=CSC=1 YNVOMSDITJMNET-UHFFFAOYSA-N 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-L thiosulfate(2-) Chemical compound [O-]S([S-])(=O)=O DHCDFWKWKRSZHF-UHFFFAOYSA-L 0.000 description 1
- 150000004764 thiosulfuric acid derivatives Chemical class 0.000 description 1
- 150000003585 thioureas Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
- H05B33/28—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/814—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/816—Multilayers, e.g. transparent multilayers
Description
該工程(1)の後の工程であり、該導電性金属層上に、π共役系導電性高分子とポリアニオンとを有する導電性ポリマーおよび下記のポリマー(A)、を含有する導電性ポリマー層を形成し、透明電極板を作製する工程(2)、
該工程(2)の後の工程であり、該透明電極板に化学エッチング処理を施し透明電極を作製する工程(3)、
を有することを特徴とする透明電極の製造方法。
〔ポリマー(A):下記一般式1、一般式2および一般式3で表される重合単位(繰り返し単位)の少なくとも一つを重合単位として、下記の条件で有するポリマー。
2.前記金属細線構造が、金属グリッドパターンであることを特徴とする前記1に記載の透明電極の製造方法。
工程(1)では、透明支持体上に、金属細線構造を有する導電性金属層を形成する。
本発明に係る透明支持体とは、JIS K 7361−1(ISO 13468−1に対応)の「プラスチック−透明材料の全光線透過率の試験方法」に準拠した方法で測定した可視光波長領域における全光線透過率が60%以上である基板をいう。
本発明に係る導電性金属層は、金属細線構造を有する。
工程(2)では、上記のように形成した導電性金属層上に、π共役系導電性高分子とポリアニオンとを有する導電性ポリマーおよび上記のポリマー(A)、を含有する導電性ポリマー層を形成し、透明電極板を作製する。
本発明に用いるπ共役系導電性高分子としては、特に限定されず、ポリチオフェン(基本のポリチオフェンを含む、以下同様)類、ポリピロール類、ポリインドール類、ポリカルバゾール類、ポリアニリン類、ポリアセチレン類、ポリフラン類、ポリパラフェニレンビニレン類、ポリアズレン類、ポリパラフェニレン類、ポリパラフェニレンサルファイド類、ポリイソチアナフテン類、ポリチアジル類の鎖状導電性ポリマーを利用することができる。中でも、導電性、透明性、安定性等の観点からポリチオフェン類やポリアニリン類が好ましい。ポリエチレンジオキシチオフェンであることが最も好ましい。
前駆体モノマーは、分子内にπ共役系を有し、適切な酸化剤の作用によって高分子化した際にもその主鎖にπ共役系が形成されるものである。例えば、ピロール類およびその誘導体、チオフェン類およびその誘導体、アニリン類およびその誘導体等が挙げられる。
ポリアニオンは、置換若しくは未置換のポリアルキレン、置換若しくは未置換のポリアルケニレン、置換若しくは未置換のポリイミド、置換若しくは未置換のポリアミド、置換若しくは未置換のポリエステルおよびこれらの共重合体であって、アニオン性基を有する構成単位とアニオン性基を有さない構成単位とからなるものである。
ポリマー(A)は、下記の一般式1、一般式2および一般式3で表される重合単位(繰り返し単位)の少なくとも一つを単位重合として、下記の条件で有するポリマーである。
検出器:Waters 2414 (Refractive Index Detector)
カラム:Shodex Asahipak GF−7M HQ
溶離液:ジメチルホルムアミド(20mM LiBr)
流速:1.0ml/min
温度:40℃
ポリマー(A)は、ラジカル重合により得られるが、特にリビングラジカル重合により合成されることが好ましい。
a1:2−ヒドロキシエチルビニルエーテル
b1:3−ヒドロキシプロピルビニルエーテル
c1:4−ヒドロキシブチルビニルエーテル
d1:5−ヒドロキシペンチルビニルエーテル
一般式2で表される構造単位を与えるモノマー
a2:2−ヒドロキシエチルアクリレート
b2:2−ヒドロキシエチルメタクリレート
c2:3−ヒドロキシプロピルメタクリレート
d2:4−ヒドロキシブチルアクリレート
e2:5−ヒドロキシペンチルアクリレート
一般式3で表される構造単位を与えるモノマー
a3:2−ヒドロキシエチルアクリルアミド
b3:2−ヒドロキシエチルメタクリルアミド
c3:3−ヒドロキシプロピルメタクリルアミド
d3:4−ヒドロキシブチルアクリルアミド
e3:5−ヒドロキシペンチルアクリルアミド
本発明に係る導電性ポリマー層は、上記の導電性ポリマーおよびポリマー(A)を含む塗布液を、下述するように導電性金属層上に塗布し、乾燥することで得られる。
工程(3)では、上記工程(1)、(2)により得られた、支持体上に導電性金属層および導電性ポリマー層を有する透明電極板に、化学エッチング処理を施し透明電極を作製する。
本発明に係る化学エッチング処理とは、溶液である下述するエッチング液による処理のことをいい、化学エッチング処理は、少なくとも透明電極板の導電性ポリマー層を有する表面(電極層表面)に、エッチング液を接触させることにより行われる。
本発明における有機電子素子は、本発明の方法で製造された透明電極と有機機能層とを有する。例えば、本発明の方法で形成された透明電極を第一電極として、この第一電極の上に有機機能層を形成し、さらにこの有機機能層の上に対向電極として第二電極を形成することによって、有機電子素子得ることができる。
<有機機能層構成>
〔有機発光層〕
本発明において、有機機能層としての有機発光層を有する有機EL素子は、有機発光層に加えて、ホール注入層、ホール輸送層、電子輸送層、電子注入層、ホールブロック層、電子ブロック層などの有機発光層と併用して発光を制御する層を有しても良い。
(ii)(第一電極部)/正孔輸送層/発光層/電子輸送層/(第二電極部)
(iii)(第一電極部)/正孔輸送層/発光層/正孔ブロック層/電子輸送層/(第二電極部)
(iv)(第一電極部)/正孔輸送層/発光層/正孔ブロック層/電子輸送層/陰極バッファー層/(第二電極部)
(v)(第一電極部)/陽極バッファー層/正孔輸送層/発光層/正孔ブロック層/電子輸送層/陰極バッファー層/(第二電極部)
ここで、発光層は、発光極大波長が各々430〜480nm、510〜550nm、600〜640nmの範囲にある単色発光層であってもよく、また、これらの少なくとも3層の発光層を積層して白色発光層としたものであってもよく、さらに発光層間には非発光性の中間層を有していてもよい。本発明の有機EL素子としては、白色発光層であることが好ましい。
本発明の透明電極は、上記の第一、または第二電極部で使用される。第一電極部が陽極で第二電極部が陰極であることが好ましい態様である。
有機光電変換素子は、第一電極部、バルクヘテロジャンクション構造(p型半導体層およびn型半導体層)を有する光電変換層(以下、バルクヘテロジャンクション層とも呼ぶ)、第二電極部が積層された構造を有する。
光電変換層は、光エネルギーを電気エネルギーに変換する層であって、p型半導体材料とn型半導体材料とを一様に混合したバルクヘテロジャンクション層を構成している。p型半導体材料は、相対的に電子供与体(ドナー)として機能し、n型半導体材料は、相対的に電子受容体(アクセプター)として機能する。
〔透明電極TCF−1の作製;比較例〕
両面にガスバリア層を設けた厚さ100μmのポリエチレンテレフタレートフィルム支持体上に、ITOを平均膜厚150nmで蒸着したのち、蒸着フィルムを180mm×180mm角に裁断し、透明電極TCF−1を作製した。
両面にガスバリア層を設けた厚さ100μmのポリエチレンテレフタレートフィルム支持体上に、銀ナノ粒子含有ペースト(三ツ星ベルト社製;MDot−SLP)を、印刷パターン幅50μm・パターン間隔1000μmのライングリッド状パターンを形成したスクリーン印刷用メッシュ(ミタニマイクロニクス株式会社製;MFT325)を用いてスクリーン印刷を行い、120℃で30分加熱したのち、印刷したフィルムを100mm×100mm角に裁断し、パターン幅50μm・パターン間隔1000μm、厚さ1μmの銀グリッドパターンからなる透明電極TCF−2を作製した。
TCF−2の上に、下記の方法で調製した導電性ポリマー液CP−1を、乾燥膜厚が500nmとなるようスピンコーターを用いて塗布し、120℃で20分熱処理を施した後、塗布フィルムを100mm×100mm角に裁断する以外はTCF−2と同様にして、透明電極TCF−3を作製した。
(ポリ(2−ヒドロキシエチルアクリレート)の合成)
50ml三口フラスコに2−ブロモイソブチリルブロミド(7.3g、35mmol)とトリエチルアミン(2.48g、35mmol)およびTHF(20ml)を加え、アイスバスにより内温を0℃に保持した。
装置:Wagers2695(Separations Module)
検出器:Waters 2414 (Refractive Index Detector)
カラム:Shodex Asahipak GF−7M HQ
溶離液:ジメチルホルムアミド(20mM LiBr)
流速:1.0ml/min
温度:40℃
得られた水溶性バインダー樹脂1を純水に溶解し、固形分20%の水溶性バインダー樹脂1水溶液を調製した。
水溶性バインダー樹脂1水溶液(固形分20%水溶液) 0.35g
PEDOT−PSS CLEVIOS PH510(固形分1.89%)(H.C.Starck社製) 1.59g
〔透明電極TCF−4の作製;本発明〕
TCF−3を、下記の方法で調製したエッチング液BF−1に、25℃で、60秒間浸漬したのち、水洗、乾燥させた以外はTCF−3と同様にして、透明電極TCF−4を作製した。
エチレンジアミン4酢酸第2鉄アンモニウム 60g
エチレンジアミン4酢酸 2g
メタ重亜硫酸ナトリウム 15g
チオ硫酸アンモニウム 70g
マレイン酸 5g
純水で1Lに仕上げ、硫酸またはアンモニア水でpHを5.5に調整し、エッチング液BF−1を調製した。
TCF−3において、導電性ポリマー液CP−1の代わりに、PEDOT−PSS CLEVIOS PH510(固形分1.89%)(H.C.Starck社製)を、乾燥膜厚が150nmとなるようスピンコーターを用いて塗布、乾燥させた以外はTCF−3と同様にして、透明電極TCF−5を作製した。
TCF−4において、導電性ポリマー液CP−1を塗布する前に、エッチング液BF−1に60秒間浸漬したのち、水洗、乾燥させた以外はTCF−4と同様にして、透明電極TCF−6を作製した。
TCF−4において、銀グリッドパターンの代わりに、下記のように作製した銀ナノワイヤフィルムを用いる以外はTCF−4と同様にして、透明電極TCF−7を作製した。
Adv.Mater.,2002,14,833〜837に記載の方法を参考に、ポリビニルピロリドンK30(分子量5万;ISP社製)を利用して、平均短径75nm、平均長さ35μmの銀ナノワイヤを作製し、限外濾過膜を用いて銀ナノワイヤを濾別、水洗処理した後、ヒドロキシプロピルメチルセルロース60SH−50(信越化学工業社製)を銀に対し25質量%加えた水溶液に再分散し、銀ナノワイヤ分散液を調製した。
TCF−7において、銀ナノワイヤフィルムの上に、さらにTCF−2と同じ方法でパターン幅50μm・パターン間隔1000μm、厚さ1μmの銀グリッドパターンを形成した以外はTCF−7と同様にして、透明電極TCF−8を作製した。
TCF−4において、導電性ポリマー液CP−1を、下記の様にして調製した導電性ポリマー液CP−2に変更する以外はTCF−4と同様にして、透明電極TCF−9を作製した。
ポリヒドロキシエチルアクリルアミド(数平均分子量2万、固形分50%水溶液) 0.14g
PEDOT−PSS CLEVIOS PH510(固形分1.89%)(H.C.Starck社製) 1.59g
〔透明電極TCF−10の作製;本発明〕
TCF−4において、導電性ポリマー液CP−1を、下記の様にして調製した導電性ポリマー液CP−3に変更する以外はTCF−4と同様にして、透明電極TCF−10を作製した。
ポリヒドロキシエチルビニルエーテル(数平均分子量2万、固形分50%水溶液) 0.14g
PEDOT−PSS CLEVIOS PH510(固形分1.89%)(H.C.Starck社製) 1.59g
〔透明電極TCF−11の作製;比較例〕
TCF−4において、水溶性バインダー樹脂1を、ヒドロキシエチルアクリレート(49mol%)、メチルアクリレート(51mol%)の共重合ポリマーとした導電性ポリマー液CP−4とした以外はTCF−4と同様にして、透明電極TCF−11を作製したところ、エッチング液BF−1に60秒間浸漬中に導電性ポリマー層ごと溶出し、透明電極を作製することが出来なかった。
導電性金属層、導電性ポリマー層を表2に記載のものとした他は、TCF−4の作製と同様にして、透明電極TCF−12〜15を作製した。
下記方法で、作製した各透明電極の導電部の透過率、表面比抵抗について測定し評価し、透明性と導電性を評価した。
透過率は、東京電色社製AUTOMATICHAZEMETER(MODEL TC−HIIIDP)を用いて、透明電極の全光線透過率を測定した。
表面比抵抗は、ダイアインスツルメンツ製抵抗率計ロレスタGPを用いて透明電極の表面比抵抗を四端子法で測定した。
作製した各透明電極を第一電極(陽極)に用いて、以下の手順でそれぞれ有機EL素子OLED−1〜−15を作製した。
下記方法で、上記のように作製した各有機EL素子の発光ムラを評価し、有機機能層の性能均一性の指標とし、整流比および輝度変化について評価し、耐久性の指標とした。
発光ムラは、KEITHLEY製ソースメジャーユニット2400型を用いて、各有機EL素子に直流電圧を印加して輝度が1000cd/m2になるよう発光させ、発光状態を下記基準で目視評価した。
○:殆ど均一発光しており、問題ない
△:部分的に若干発光ムラが見られるが、実用的に許容できる
×:全面に渡って発光ムラが見られ、許容できない
(整流比)
整流比は、各有機EL素子に、+3V/−3Vの電圧を印加した時の電流値を測定し、下記の計算式により整流比を求め、下記基準で評価した。電極間リークがあると、整流比が低い値となる。102以上であることが実用的範囲である。
◎:整流比103以上
○:整流比102以上103未満
△:整流比101以上102未満
×:整流比101未満
(輝度変化)
各有機EL素子について、初期の輝度が5000cd/m2になるよう一定電圧で連続発光させ、輝度が半減するまでの時間を求めた。OLED−1の半減時間を100とし、相対値で評価した。120以上が実用的に良好な範囲である。
Claims (7)
- 透明支持体上に、金属細線構造を有する導電性金属層を形成する工程(1)
該工程(1)の後の工程であり、該導電性金属層上に、π共役系導電性高分子とポリアニオンとを有する導電性ポリマーおよび下記のポリマー(A)、を含有する導電性ポリマー層を形成し、透明電極板を作製する工程(2)、
該工程(2)の後の工程であり、該透明電極板に化学エッチング処理を施し、前記導電性ポリマー層の表面に存在する、前記導電性ポリマーで被覆されていない導電性金属層を除去して透明電極を作製する工程(3)、
を有することを特徴とする透明電極の製造方法。
〔ポリマー(A):下記一般式1、一般式2および一般式3で表される重合単位(繰り返し単位)の少なくとも一つを重合単位として、下記の条件で有するポリマー。
- 前記金属細線構造が、金属グリッドパターンであることを特徴とする請求項1に記載の透明電極の製造方法。
- 前記導電性金属層が、金属ナノワイヤを含有することを特徴とする請求項1に記載の透明電極の製造方法。
- 請求項1から3のいずれか1項に記載の透明電極の製造方法によって製造されたことを特徴とする透明電極。
- 請求項4に記載の透明電極を具備することを特徴とする有機電子素子。
- 前記有機電子素子が、有機エレクトロルミネッセンス素子であることを特徴とする請求項5に記載の有機電子素子。
- 前記有機エレクトロルミネッセンス素子が有する有機機能層の厚さが1nm〜200nmであることを特徴とする請求項6に記載の有機電子素子。
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