JP5606266B2 - インクジェットヘッド - Google Patents
インクジェットヘッド Download PDFInfo
- Publication number
- JP5606266B2 JP5606266B2 JP2010240034A JP2010240034A JP5606266B2 JP 5606266 B2 JP5606266 B2 JP 5606266B2 JP 2010240034 A JP2010240034 A JP 2010240034A JP 2010240034 A JP2010240034 A JP 2010240034A JP 5606266 B2 JP5606266 B2 JP 5606266B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- protective film
- nozzle
- ink
- piezoelectric member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001681 protective effect Effects 0.000 claims description 85
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 12
- 239000000976 ink Substances 0.000 description 81
- 239000000853 adhesive Substances 0.000 description 27
- 230000001070 adhesive effect Effects 0.000 description 27
- 238000000034 method Methods 0.000 description 25
- 239000000178 monomer Substances 0.000 description 19
- 238000006116 polymerization reaction Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 16
- 238000007740 vapor deposition Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000001678 irradiating effect Effects 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000052 poly(p-xylylene) Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- -1 polyparaxylylene Polymers 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Description
インク圧力室を形成する圧電部材と、前記圧電部材の前記インク圧力室に対向した側面に配置された電極と、前記インク圧力室の開口側の前記圧電部材の上面に接着されるとともに前記インク圧力室に連通するノズル穴を有するノズルプレートと、前記圧電部材の上面と前記ノズルプレートの下面とを接着する接着剤と、前記ノズルプレートの前記圧電部材から離間した上面、前記ノズル穴の内壁、及び、前記ノズルプレートが前記圧電部材の上面に接する下面から繋がり、前記圧電部材と前記ノズルプレートとの接着部、及び、前記電極を覆う保護膜と、を備え、前記ノズルプレートの上面における前記ノズル穴の周囲においては、前記保護膜の少なくとも一部が欠落していることを特徴とするインクジェットヘッドが提供される。
インク圧力室を形成する圧電部材、及び、前記圧電部材の側面に配置された電極を形成し、前記圧電部材とノズルプレートとを接着し、前記ノズルプレートの表面、前記圧電部材と前記ノズルプレートとの接着部、及び、前記電極を覆う保護膜を形成し、少なくとも前記ノズル穴の周囲においては、レーザー光を照射することにより、前記ノズルプレートの上面を覆う前記保護膜の少なくとも一部を除去する、ことを特徴とするインクジェットヘッドの製造方法が提供される。
10…主要部
11…絶縁基板 11T…上面
13…圧電部材 13T…上面 13S…側面
14…インク圧力室
16…電極
20…ノズルプレート 20T…上面 20B…下面
21…ノズル穴 21I…内壁 21A…逆テーパ部 21B…順テーパ部
60…保護膜 61…突起
AP…接着部
100…蒸着重合装置
Claims (6)
- インク圧力室を形成する圧電部材と、
前記圧電部材の前記インク圧力室に対向した側面に配置された電極と、
前記インク圧力室の開口側の前記圧電部材の上面に接着されるとともに前記インク圧力室に連通するノズル穴を有するノズルプレートと、
前記ノズルプレートの前記圧電部材から離間した上面、前記ノズル穴の内壁、及び、前記ノズルプレートが前記圧電部材の上面に接する下面から繋がり、前記圧電部材と前記ノズルプレートとの接着部、及び、前記電極を覆う保護膜と、を備え、
前記ノズルプレートの上面における前記ノズル穴の周囲においては、前記保護膜の少なくとも一部が欠落していることを特徴とするインクジェットヘッド。 - 前記ノズルプレートの上面を覆う前記保護膜には、前記ノズル穴の周囲において窪みが形成されたことを特徴とする請求項1に記載のインクジェットヘッド。
- 前記ノズル穴は、前記ノズルプレートの上面と下面との間で最小径となるつづみ型の断面形状を有することを特徴とする請求項1または2に記載のインクジェットヘッド。
- 前記ノズル穴において、前記ノズルプレートの上面から最小径となる位置までの距離は、前記ノズルプレートの厚さの10%であることを特徴とする請求項3に記載のインクジェットヘッド。
- 前記ノズルプレートは、樹脂製であることを特徴とする請求項1乃至4のいずれか1項に記載のインクジェットヘッド。
- 前記ノズルプレートは、金属製であることを特徴とする請求項1または2に記載のインクジェットヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010240034A JP5606266B2 (ja) | 2010-10-26 | 2010-10-26 | インクジェットヘッド |
US13/029,735 US8573756B2 (en) | 2010-10-26 | 2011-02-17 | Ink-jet head and method of manufacturing the same |
US14/010,330 US20130340220A1 (en) | 2010-10-26 | 2013-08-26 | Ink-jet head and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010240034A JP5606266B2 (ja) | 2010-10-26 | 2010-10-26 | インクジェットヘッド |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014171921A Division JP2015006800A (ja) | 2014-08-26 | 2014-08-26 | インクジェットヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012091381A JP2012091381A (ja) | 2012-05-17 |
JP5606266B2 true JP5606266B2 (ja) | 2014-10-15 |
Family
ID=45972672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010240034A Expired - Fee Related JP5606266B2 (ja) | 2010-10-26 | 2010-10-26 | インクジェットヘッド |
Country Status (2)
Country | Link |
---|---|
US (2) | US8573756B2 (ja) |
JP (1) | JP5606266B2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012187864A (ja) * | 2011-03-11 | 2012-10-04 | Toshiba Tec Corp | インクジェットヘッド |
ITTO20120426A1 (it) | 2012-05-11 | 2013-11-12 | St Microelectronics Srl | Processo di fabbricazione di una piastra degli ugelli, piastra degli ugelli, e dispositivo di eiezione di liquido dotato della piastra degli ugelli |
JP2013193447A (ja) | 2012-03-22 | 2013-09-30 | Toshiba Tec Corp | インクジェットヘッド |
GB2504777A (en) * | 2012-08-10 | 2014-02-12 | Xaar Technology Ltd | Droplet ejection apparatus |
JP5995710B2 (ja) * | 2012-12-27 | 2016-09-21 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
JP6317064B2 (ja) * | 2013-02-28 | 2018-04-25 | ダイセルポリマー株式会社 | 複合成形体とその製造方法 |
JP5814963B2 (ja) * | 2013-03-08 | 2015-11-17 | 東芝テック株式会社 | インクジェットヘッド、インクジェット記録装置、およびインクジェットヘッドの製造方法 |
JP6194767B2 (ja) | 2013-03-14 | 2017-09-13 | 株式会社リコー | 液体吐出ヘッド及び画像形成装置 |
US10328699B2 (en) | 2015-07-27 | 2019-06-25 | Kyocera Corporation | Liquid ejection head and recording device using same |
WO2017038806A1 (ja) * | 2015-09-01 | 2017-03-09 | 株式会社アルバック | 酸化物誘電体素子及び酸化物誘電体素子の製造方法 |
JP2019005988A (ja) * | 2017-06-23 | 2019-01-17 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
JP7023644B2 (ja) * | 2017-09-13 | 2022-02-22 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2020019204A (ja) | 2018-07-31 | 2020-02-06 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置及び液体吐出ヘッドの製造方法 |
JP7185512B2 (ja) * | 2018-12-06 | 2022-12-07 | エスアイアイ・プリンテック株式会社 | ヘッドチップ、液体噴射ヘッドおよび液体噴射記録装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4988423A (en) * | 1987-06-19 | 1991-01-29 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating interconnection structure |
JPH07329293A (ja) * | 1994-06-03 | 1995-12-19 | Citizen Watch Co Ltd | インクジェットヘッドおよびその製造方法 |
JP2000263794A (ja) * | 1999-03-17 | 2000-09-26 | Fujitsu Ltd | インクジェット記録装置のノズル基体の製造方法と、そのインクジェット記録装置のノズル基体およびそれを使用したインクジェット記録装置 |
JP2002001955A (ja) | 2000-06-26 | 2002-01-08 | Toshiba Tec Corp | インクジェットプリンタヘッドおよびその製造方法 |
US6387719B1 (en) * | 2001-02-28 | 2002-05-14 | Lexmark International, Inc. | Method for improving adhesion |
US6520617B2 (en) * | 2001-07-02 | 2003-02-18 | Hewlett-Packard Company | Drop emitting apparatus |
US6582057B2 (en) | 2001-10-22 | 2003-06-24 | Toshiba Tec Kabushiki Kaisha | Ink jet printer head and method for manufacturing the same |
JP3943971B2 (ja) * | 2002-03-19 | 2007-07-11 | 東芝テック株式会社 | インクジェットプリンタヘッドおよびその製造方法 |
TW561107B (en) * | 2002-03-29 | 2003-11-11 | Nano Dynamics Inc | Nozzle plate and manufacturing method thereof |
JP2004042399A (ja) * | 2002-07-10 | 2004-02-12 | Canon Inc | インクジェット記録ヘッド |
JP2006256282A (ja) * | 2005-03-18 | 2006-09-28 | Fuji Xerox Co Ltd | 液滴吐出ヘッド及びその製造方法、並びに、液滴吐出装置 |
JP2006334619A (ja) * | 2005-06-01 | 2006-12-14 | Fuji Xerox Co Ltd | レーザ加工装置、及び液滴吐出ヘッドのノズル、並びに液滴吐出ヘッドのノズルの形成方法 |
JP4867405B2 (ja) * | 2006-03-08 | 2012-02-01 | 富士ゼロックス株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
KR20110062778A (ko) * | 2009-12-04 | 2011-06-10 | 삼성전기주식회사 | 잉크젯 헤드 |
-
2010
- 2010-10-26 JP JP2010240034A patent/JP5606266B2/ja not_active Expired - Fee Related
-
2011
- 2011-02-17 US US13/029,735 patent/US8573756B2/en not_active Expired - Fee Related
-
2013
- 2013-08-26 US US14/010,330 patent/US20130340220A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20130340220A1 (en) | 2013-12-26 |
US8573756B2 (en) | 2013-11-05 |
US20120098897A1 (en) | 2012-04-26 |
JP2012091381A (ja) | 2012-05-17 |
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