JP2013193447A - インクジェットヘッド - Google Patents
インクジェットヘッド Download PDFInfo
- Publication number
- JP2013193447A JP2013193447A JP2012066330A JP2012066330A JP2013193447A JP 2013193447 A JP2013193447 A JP 2013193447A JP 2012066330 A JP2012066330 A JP 2012066330A JP 2012066330 A JP2012066330 A JP 2012066330A JP 2013193447 A JP2013193447 A JP 2013193447A
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- ink
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- pressure chamber
- frame member
- Prior art date
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- 239000000758 substrate Substances 0.000 claims abstract description 45
- 230000001681 protective effect Effects 0.000 claims abstract description 29
- 238000000231 atomic layer deposition Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 description 62
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 229920000052 poly(p-xylylene) Polymers 0.000 description 3
- -1 polychloroparaxylylene Polymers 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
Abstract
【解決手段】実施形態のインクジェットヘッドは、絶縁基板(2)と、前記絶縁基板上に列をなして形成された複数の圧電部材(3)であって、隣接する2つの間に、インクが供給される圧力室(11)を形成する圧電部材と、前記圧電部材の表面および前記絶縁基板の表面に連続して設けられた電極(12)とを有する。前記電極の前記インクに接触する面は有機保護膜(14)で覆われ、この有機保護膜は100℃以下の温度で成膜された親水膜(18)で覆われる。前記圧電部材の列を囲んで、前記絶縁基板上の前記電極の上に枠部材(4)が設けられ、この枠部材の上には、前記圧力室に開口するノズル(16)を有するノズルプレート(5)が設けられている。
【選択図】図3
Description
2b…絶縁基板の下面; 2c…絶縁基板の側面; 3…圧電部材: 4…枠部材
5…ノズルプレート; 6…駆動IC; 7…マニホールド; 8…共通インク室
9…インク供給口; 10…インク排出口; 11…圧力室; 12…電極
13…配線パターン; 14…有機保護膜; 18…親水膜; 20…被覆電極
15…接着層; 16…ノズル; 17…接続部。
Claims (5)
- 絶縁基板と、
前記絶縁基板上に列をなして形成された複数の圧電部材であって、隣接する2つの間に、インクが供給される圧力室を形成する圧電部材と、
前記圧電部材の表面および前記絶縁基板の表面に連続して設けられた電極と、
前記電極の前記インクに接触する面を覆う有機保護膜と、
前記有機保護膜を覆って100℃以下の温度で成膜された親水膜と、
前記圧電部材の列を囲んで前記絶縁基板上の前記電極の上に設けられた枠部材と、
前記枠部材上に設けられ、前記圧力室に開口するノズルを有するノズルプレートと
を具備することを特徴とするインクジェットヘッド。 - 前記有機保護膜および前記親水膜は、さらに前記絶縁基板と前記枠部材との間に位置することを特徴とする請求項1に記載のインクジェットヘッド。
- 前記有機保護膜および前記親水膜は、さらに前記枠部材と前記ノズルプレートとの間に位置することを特徴とする請求項1に記載のインクジェットヘッド。
- 前記親水膜は、原子層堆積法により成膜された膜であることを特徴とする請求項1乃至3のいずれか1項に記載のインクジェットヘッド。
- 前記親水膜は、TiO2膜、Al2O3膜またはHfO2膜であることを特徴とする請求項1乃至4のいずれか1項に記載のインクジェットヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012066330A JP2013193447A (ja) | 2012-03-22 | 2012-03-22 | インクジェットヘッド |
CN2012105929725A CN103317851A (zh) | 2012-03-22 | 2012-12-31 | 喷墨头 |
US13/764,891 US8905522B2 (en) | 2012-03-22 | 2013-02-12 | Ink-jet head and method of manufacturing ink-jet head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012066330A JP2013193447A (ja) | 2012-03-22 | 2012-03-22 | インクジェットヘッド |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013193447A true JP2013193447A (ja) | 2013-09-30 |
Family
ID=49187027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012066330A Pending JP2013193447A (ja) | 2012-03-22 | 2012-03-22 | インクジェットヘッド |
Country Status (3)
Country | Link |
---|---|
US (1) | US8905522B2 (ja) |
JP (1) | JP2013193447A (ja) |
CN (1) | CN103317851A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018043447A (ja) * | 2016-09-15 | 2018-03-22 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法 |
JP2019508285A (ja) * | 2016-01-28 | 2019-03-28 | ザール・テクノロジー・リミテッド | 液滴堆積ヘッド |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104708905B (zh) * | 2013-12-17 | 2016-03-23 | 珠海赛纳打印科技股份有限公司 | 液体喷射装置和打印机 |
CN108136776B (zh) | 2015-10-30 | 2020-08-11 | 惠普发展公司,有限责任合伙企业 | 流体喷射设备 |
JP6983679B2 (ja) * | 2018-01-26 | 2021-12-17 | 東芝テック株式会社 | インクジェットヘッド及びインクジェットプリンタ |
JP6983680B2 (ja) * | 2018-01-26 | 2021-12-17 | 東芝テック株式会社 | インクジェットヘッド、及びその製造方法、並びにインクジェットプリンタ |
JP2020082492A (ja) * | 2018-11-22 | 2020-06-04 | 東芝テック株式会社 | インクジェットヘッド及びインクジェット装置 |
JP2020146905A (ja) * | 2019-03-13 | 2020-09-17 | 東芝テック株式会社 | インクジェットヘッド及びインクジェットプリンタ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06143570A (ja) * | 1992-11-12 | 1994-05-24 | Seiko Epson Corp | インクジェットヘッド及びその製造方法 |
JPH06238897A (ja) * | 1993-02-19 | 1994-08-30 | Citizen Watch Co Ltd | インクジェットプリンターヘッド |
JPH10278259A (ja) * | 1997-04-02 | 1998-10-20 | Brother Ind Ltd | インクジェットヘッドおよびその製造方法 |
JP2010188715A (ja) * | 2009-01-21 | 2010-09-02 | Toshiba Tec Corp | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP2010214895A (ja) * | 2009-03-18 | 2010-09-30 | Toshiba Tec Corp | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP2012035606A (ja) * | 2010-08-11 | 2012-02-23 | Toshiba Tec Corp | インクジェットヘッドおよびその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US5243363A (en) * | 1988-07-22 | 1993-09-07 | Canon Kabushiki Kaisha | Ink-jet recording head having bump-shaped electrode and protective layer providing structural support |
JPH08118663A (ja) * | 1994-10-26 | 1996-05-14 | Mita Ind Co Ltd | インクジェットプリンタ用印字ヘッド及びその製造方法 |
JP3267937B2 (ja) * | 1998-09-04 | 2002-03-25 | 松下電器産業株式会社 | インクジェットヘッド |
JP2000168082A (ja) | 1998-12-11 | 2000-06-20 | Konica Corp | インクジェットヘッド及びインクジェットヘッドの製造方法 |
US6582057B2 (en) * | 2001-10-22 | 2003-06-24 | Toshiba Tec Kabushiki Kaisha | Ink jet printer head and method for manufacturing the same |
WO2003078167A1 (fr) * | 2002-03-18 | 2003-09-25 | Seiko Epson Corporation | Tete et dispositif de projection de liquide |
KR100580654B1 (ko) | 2004-10-29 | 2006-05-16 | 삼성전자주식회사 | 노즐 플레이트와 이를 구비한 잉크젯 프린트헤드 및 노즐플레이트의 제조 방법 |
JP5427730B2 (ja) * | 2010-08-19 | 2014-02-26 | 東芝テック株式会社 | インクジェットプリントヘッド及びインクジェットプリントヘッド製造方法 |
JP5606266B2 (ja) | 2010-10-26 | 2014-10-15 | 東芝テック株式会社 | インクジェットヘッド |
-
2012
- 2012-03-22 JP JP2012066330A patent/JP2013193447A/ja active Pending
- 2012-12-31 CN CN2012105929725A patent/CN103317851A/zh active Pending
-
2013
- 2013-02-12 US US13/764,891 patent/US8905522B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06143570A (ja) * | 1992-11-12 | 1994-05-24 | Seiko Epson Corp | インクジェットヘッド及びその製造方法 |
JPH06238897A (ja) * | 1993-02-19 | 1994-08-30 | Citizen Watch Co Ltd | インクジェットプリンターヘッド |
JPH10278259A (ja) * | 1997-04-02 | 1998-10-20 | Brother Ind Ltd | インクジェットヘッドおよびその製造方法 |
JP2010188715A (ja) * | 2009-01-21 | 2010-09-02 | Toshiba Tec Corp | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP2010214895A (ja) * | 2009-03-18 | 2010-09-30 | Toshiba Tec Corp | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP2012035606A (ja) * | 2010-08-11 | 2012-02-23 | Toshiba Tec Corp | インクジェットヘッドおよびその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019508285A (ja) * | 2016-01-28 | 2019-03-28 | ザール・テクノロジー・リミテッド | 液滴堆積ヘッド |
JP2018043447A (ja) * | 2016-09-15 | 2018-03-22 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8905522B2 (en) | 2014-12-09 |
CN103317851A (zh) | 2013-09-25 |
US20130250005A1 (en) | 2013-09-26 |
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