JP5606145B2 - ワーク搬送システム - Google Patents
ワーク搬送システム Download PDFInfo
- Publication number
- JP5606145B2 JP5606145B2 JP2010109925A JP2010109925A JP5606145B2 JP 5606145 B2 JP5606145 B2 JP 5606145B2 JP 2010109925 A JP2010109925 A JP 2010109925A JP 2010109925 A JP2010109925 A JP 2010109925A JP 5606145 B2 JP5606145 B2 JP 5606145B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- transfer
- work
- transfer robot
- rail track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0093—Programme-controlled manipulators co-operating with conveyor means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
- G05B19/4182—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell manipulators and conveyor only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
Description
θa=θb・・・(1)
N=R・cosθn・・・(2)
12 ワーク
14、15 レール軌道
16、16a〜16d 搬送ロボット
17、17a〜17d ハンド
18a〜18d 作業装置
31 アーム
32 ヘッド
Claims (4)
- 生産ラインを構成する複数の作業装置の作業位置に順次ワークを搬送するワーク搬送システムにおいて、
前記複数の作業装置に沿って配置されたレール軌道と、
前記レール軌道上に互いに隣接して配置され、前記レール軌道上をそれぞれ独立して移動することで、互いに隣接する前記複数の作業装置の作業位置にそれぞれワークを搬送する複数の搬送ロボットと、を備え、
前記各搬送ロボットは、隣接する搬送ロボットとの間でワークを受渡しする受渡し機構を有し、
前記隣接して配置された2つの搬送ロボットは、各搬送ロボットがワークを搬送する各作業位置の距離および各作業位置における作業時間に応じて、各作業位置の間の前記レール軌道上で、ワークを直接受渡すことを特徴とするワーク搬送システム。 - 前記隣接して配置された2つの搬送ロボットにより、ワークを直接受渡す前記レール軌道上の位置は、各搬送ロボットがワークを搬送する各作業位置の距離および各作業位置における作業時間に応じて、任意に定めることができることを特徴とする請求項1に記載のワーク搬送システム。
- 生産ラインを構成する複数の作業装置の作業位置に順次ワークを搬送するワーク搬送システムにおいて、
前記複数の作業装置に沿って配置されたレール軌道と、
前記レール軌道上に互いに隣接して配置され、前記レール軌道上をそれぞれ独立して移動することで、互いに隣接する前記複数の作業装置の作業位置にそれぞれワークを搬送する複数の搬送ロボットと、を備え、
前記各搬送ロボットは、隣接する搬送ロボットとの間でワークを受渡しする受渡し機構を有し、
前記互いに隣接する2つの搬送ロボットによるワークの受渡しを、前記2つの搬送ロボットが前記レール軌道上を移動中に行うことを特徴とするワーク搬送システム。 - 前記受渡し機構は、
各搬送ロボットに搭載された、回転可能なアームと、
ワークを保持する保持手段を有し、前記アームの先端で回転可能なヘッドと、を備え、
前記レール軌道上の前記搬送ロボットの移動と前記アーム及び前記ヘッドの回転を同期させて、前記ヘッドの姿勢を水平に維持したままで垂直に前記ヘッドを移動させることでワークの受渡しを行うことを特徴とする請求項1乃至3のいずれか1項に記載のワーク搬送システム。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010109925A JP5606145B2 (ja) | 2010-05-12 | 2010-05-12 | ワーク搬送システム |
US13/094,072 US9022716B2 (en) | 2010-05-12 | 2011-04-26 | Work conveying system |
CN201110122046.7A CN102284881B (zh) | 2010-05-12 | 2011-05-12 | 加工输送系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010109925A JP5606145B2 (ja) | 2010-05-12 | 2010-05-12 | ワーク搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011235411A JP2011235411A (ja) | 2011-11-24 |
JP5606145B2 true JP5606145B2 (ja) | 2014-10-15 |
Family
ID=44911926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010109925A Active JP5606145B2 (ja) | 2010-05-12 | 2010-05-12 | ワーク搬送システム |
Country Status (3)
Country | Link |
---|---|
US (1) | US9022716B2 (ja) |
JP (1) | JP5606145B2 (ja) |
CN (1) | CN102284881B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5606145B2 (ja) * | 2010-05-12 | 2014-10-15 | キヤノン株式会社 | ワーク搬送システム |
JP5614553B2 (ja) * | 2012-09-14 | 2014-10-29 | 株式会社安川電機 | ロボット装置 |
JP2014117758A (ja) * | 2012-12-13 | 2014-06-30 | Fanuc Ltd | 複数のロボットを用いたロボット作業システム |
JP5741614B2 (ja) * | 2013-03-14 | 2015-07-01 | 株式会社安川電機 | 製造システム |
JP5747931B2 (ja) * | 2013-03-18 | 2015-07-15 | 株式会社安川電機 | ワークの組立装置及び組立方法 |
EP3125661B1 (en) * | 2014-03-24 | 2020-09-23 | FUJI Corporation | Die mounting system and die mounting method |
JP2016107363A (ja) * | 2014-12-04 | 2016-06-20 | 株式会社安川電機 | 作業システムおよび作業方法 |
GB201611174D0 (en) * | 2016-06-28 | 2016-08-10 | Johnson Matthey Fuel Cells Ltd | System and method for the manufacture of membrane electrode assemblies |
JP6426673B2 (ja) * | 2016-09-08 | 2018-11-21 | ファナック株式会社 | ロボットシステム |
CN106113020A (zh) * | 2016-09-08 | 2016-11-16 | 东莞市智赢智能装备有限公司 | 一种垂直式多关节机器人 |
JP6737827B2 (ja) * | 2018-03-29 | 2020-08-12 | ファナック株式会社 | 協働ロボットの制御装置及び制御方法 |
CN109625917B (zh) * | 2018-11-27 | 2021-05-14 | 江阴和港机械有限公司 | 一种机加工用自动化上下料系统 |
US11591170B2 (en) * | 2019-10-25 | 2023-02-28 | Dexai Robotics, Inc. | Robotic systems and methods for conveyance of items |
WO2023106228A1 (ja) * | 2021-12-06 | 2023-06-15 | 川崎重工業株式会社 | ロボットシステム |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6071548U (ja) * | 1983-10-20 | 1985-05-20 | 株式会社アマダ | プレス加工装置 |
JPS6281230A (ja) * | 1985-10-07 | 1987-04-14 | Orii:Kk | プレス加工用ワ−クの送給装置 |
US4909695A (en) * | 1986-04-04 | 1990-03-20 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
US4915564A (en) * | 1986-04-04 | 1990-04-10 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
SE462390B (sv) * | 1987-04-03 | 1990-06-18 | Core Link Ab | Anordning bestaaende av flera arbetsstationer foer tillverkning av kaernhylsor, vilka hylsor gripes och fasthaalles i orienteringskontrollerat laege |
JPH0233927U (ja) | 1988-08-29 | 1990-03-05 | ||
JPH03294127A (ja) * | 1990-04-05 | 1991-12-25 | Canon Inc | 物品供給方法 |
JPH06156667A (ja) | 1992-11-13 | 1994-06-03 | Mitsubishi Motors Corp | シャトル搬送装置 |
US6168667B1 (en) * | 1997-05-30 | 2001-01-02 | Tokyo Electron Limited | Resist-processing apparatus |
ITTO20010575A1 (it) * | 2001-06-15 | 2002-12-15 | Comau Spa | Linea di unita' operatrici per l'esecuzione di lavorazioni di macchina provvista di dispositivi traslatori modulari per il trasferimento dei |
DE20304022U1 (de) * | 2003-03-12 | 2004-07-22 | Kuka Schweissanlagen Gmbh | Fertigungsanlage für Bauteile, insbesondere Karosseriebauteile |
DE10352982B4 (de) * | 2003-11-13 | 2007-06-21 | Müller Weingarten AG | Gelenkarmtransportvorrichtung |
US20060258128A1 (en) * | 2005-03-09 | 2006-11-16 | Peter Nunan | Methods and apparatus for enabling multiple process steps on a single substrate |
EP1902815A3 (de) * | 2006-09-20 | 2008-04-30 | Grob, Margret | Bearbeitungslinie mit mehreren Transportvorrichtungen |
JP2008084983A (ja) * | 2006-09-26 | 2008-04-10 | Kaijo Corp | 搬送装置、洗浄システム、及び乾燥システム |
CN101480800B (zh) | 2009-01-20 | 2011-01-05 | 宁波三盾电子科技有限公司 | 印制电路板打孔机及其打孔方法 |
JP5606145B2 (ja) * | 2010-05-12 | 2014-10-15 | キヤノン株式会社 | ワーク搬送システム |
-
2010
- 2010-05-12 JP JP2010109925A patent/JP5606145B2/ja active Active
-
2011
- 2011-04-26 US US13/094,072 patent/US9022716B2/en active Active
- 2011-05-12 CN CN201110122046.7A patent/CN102284881B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011235411A (ja) | 2011-11-24 |
US20110280691A1 (en) | 2011-11-17 |
US9022716B2 (en) | 2015-05-05 |
CN102284881A (zh) | 2011-12-21 |
CN102284881B (zh) | 2014-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5606145B2 (ja) | ワーク搬送システム | |
CN103240591B (zh) | 装配设备和装配方法 | |
US8931999B2 (en) | Device and method for unstacking plate-shaped parts | |
JP5423415B2 (ja) | 生産システム | |
KR102448070B1 (ko) | 밴딩가공장치 | |
CN104625676A (zh) | 轴孔装配工业机器人系统及其工作方法 | |
JP4852896B2 (ja) | ワーク搬送装置、ワーク搬送装置の制御方法及びプレスライン | |
JP6252597B2 (ja) | ロボットシステム | |
JP5403120B2 (ja) | ハンドリング方法 | |
JP5298873B2 (ja) | ロボットシステム | |
US9687985B2 (en) | Robot hand having workpiece positioning function, robot system, and method of positioning and gripping workpiece | |
US11472023B2 (en) | Robotic apparatus | |
JP5741392B2 (ja) | 連続搬送組立装置 | |
CN109465817A (zh) | 机器人系统、机器人控制装置和被加工物的制造方法 | |
JP2017100208A (ja) | ロボットおよびロボットシステム | |
JP6299769B2 (ja) | ロボットシステム | |
CN106881427B (zh) | 输送装置、生产装置、多级的压力成型机和用于借助于生产装置由工件制造产品的方法 | |
JP5187048B2 (ja) | ハンドリングシステム | |
JP5733511B2 (ja) | ハンドガイド装置とその制御方法 | |
CN110743736B (zh) | 一种悬挂式六自由度混联喷涂机器人 | |
JPH06320364A (ja) | 部品自動組立装置 | |
JP5170225B2 (ja) | ワーク位置決め装置およびそれを用いた生産システム | |
JP4715266B2 (ja) | パネル搬送装置 | |
JP7124880B2 (ja) | ロボットシステム | |
TW201919831A (zh) | 機器人手部、機器人裝置、及電子機器的製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20120203 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20130228 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130510 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140225 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140428 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140729 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140826 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5606145 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |