JP5584845B1 - 太陽電池およびその製造方法、ならびに太陽電池モジュール - Google Patents
太陽電池およびその製造方法、ならびに太陽電池モジュール Download PDFInfo
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- JP5584845B1 JP5584845B1 JP2014516121A JP2014516121A JP5584845B1 JP 5584845 B1 JP5584845 B1 JP 5584845B1 JP 2014516121 A JP2014516121 A JP 2014516121A JP 2014516121 A JP2014516121 A JP 2014516121A JP 5584845 B1 JP5584845 B1 JP 5584845B1
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Classifications
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic System
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells; solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
- H10K30/83—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes comprising arrangements for extracting the current from the cell, e.g. metal finger grid systems to reduce the serial resistance of transparent electrodes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
Description
実施例1のヘテロ接合太陽電池を、以下のようにして製造した。
自己集合性化合物として、テトラデシルホスホン酸(TDPA)が用いられた点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
第一導電層形成後に、基板12がオクタデシルホスホン酸(ODPA)のイソプロパノール溶液中に浸漬される時間が1分間であった点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
第一導電層形成後に、基板12がオクタデシルホスホン酸(ODPA)のイソプロパノール溶液中に浸漬される時間が60分間であった点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
自己組織化単分子膜層9の形成後のアニール処理の後に、基板12の自己集合性化合物の溶液への浸漬とアニール処理という一連の処理を、1度目と同じ条件でさらに2回繰り返して実施し、前記一連の処理を合計3回実施した点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
自己組織化単分子膜層9の形成後のアニール処理の温度が60℃であった点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
自己組織化単分子膜層9の形成後のアニール処理の温度が180℃であった点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
実施例1において、第一導電層形成後、単分子膜層形成工程を実施することなく、めっき法による第二導電層形成を行ったところ、第二導電層が形成されたものの、透明電極層のほぼ全面にめっきにより銅が析出する不具合が生じており、セルの入射面側が銅で覆われてしまい、太陽電池として機能するものが得られなかった。
実施例1において、透明電極層形成後、単分子膜層形成工程を実施した後、第一導電層の形成を試みた、すなわち第一導電層形成工程と単分子膜層形成工程の順番を入れ替えたところ、第一導電層がウェハ表面に付着せずに剥離する不具合が生じて、集電極を形成することができず、太陽電池として機能するものが得られなかった。
スクリーン印刷による第一導電層の形成後に、単分子膜層形成工程とアニール工程とめっき工程を全て行わずに、レーザー加工機によるセル外周部の除去を行った点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。
第一導電層の形成後、自己組織化単分子膜層の形成を行わずに、フォトリソグラフィ法によるレジストのパターニングが行われ後、めっき法により第二導電層形成が形成された点を除いて、実施例1と同様にしてヘテロ接合太陽電池が作製された。レジストのパターニングでは、まず、第一導電層までが形成された基板にスピンコート法によりフォトレジストが基板全面に塗布され。フォトレジストを乾燥させた後、第一導電層の形状に対応した開口パターンを有するフォトマスクを介してフォトレジストに紫外線を照射した。更に、現像液に浸漬することにより、第一導電層上にフォトレジストの開口パターンを形成した。その後、めっき装置に導入し、第一導電層に通電することによりフォトレジストの開口パターン部に第二導電層を形成した。その後、フォトレジストをレジスト剥離液により除去し、実施例1と同様にレーザー加工による絶縁処理を実施した。
2.真性シリコン系薄膜
3.導電型シリコン系薄膜
6.透明電極層
70.集電極
71.第一導電層
72.第二導電層
8.裏面金属電極
9.自己組織化単分子膜層
90.領域A
91.領域B
9A.領域A上の自己組織化単分子膜層
9B.領域B上の自己組織化単分子膜層
50.光電変換部
100.太陽電池
101.ヘテロ接合太陽電池
10.めっき装置
11.めっき槽
12.基板
13.陽極
14.基板ホルダ
15.電源
16.めっき液
Claims (14)
- 太陽電池の製造方法であって、前記太陽電池は、一主面側の最表面に透明電極層を有する光電変換部、および前記透明電極層上に形成された集電極を備え、前記集電極が前記光電変換部側から第一導電層および第二導電層を有し、
前記透明電極層上に前記第一導電層が形成される第一導電層形成工程;
前記透明電極層上の前記第一導電層が形成されていない領域に自己組織化単分子膜層が形成される単分子膜層形成工程;および
前記第一導電層とめっき液とを接触させ、めっき法により第二導電層が形成される第二導電層形成工程、
をこの順に有する、太陽電池の製造方法。 - 前記単分子膜層形成工程において、前記透明電極層上の前記第一導電層が形成されている領域の少なくとも一部にも、自己組織化単分子膜層が形成される、請求項1に記載の太陽電池の製造方法。
- 前記単分子膜層形成工程後、前記第二導電層形成工程前に、前記第一導電層が形成されている領域上の自己組織化単分子膜層が除去される単分子膜層除去工程をさらに有する、請求項2に記載の太陽電池の製造方法。
- 前記単分子膜層除去工程が、前記めっき液中で行われる、請求項3に記載の太陽電池の製造方法。
- 前記単分子膜層形成工程において、前記透明電極層上に前記自己組織化単分子膜を形成するための調製液からなる層が形成され、前記調製液は自己集合性化合物を含有する溶液である、請求項1〜4のいずれか1項に記載の太陽電池の製造方法。
- 前記単分子膜層形成工程において、前記調製液からなる層を形成後、さらに加熱が行われる、請求項5に記載の太陽電池の製造方法。
- 前記調製液の自己集合性化合物が、アルキルホスホン酸化合物またはアルキルシラン化合物である、請求項5または6に記載の太陽電池の製造方法。
- 前記第二導電層形成工程後において、前記第一導電層が形成されていない領域の透明電極層表面の水との接触角θAが50°以上160°以下である、請求項1〜7のいずれか1項に記載の太陽電池の製造方法。
- 前記第二導電層形成工程前における前記第一導電層が形成されていない領域の透明電極層表面の水との接触角θA’と、前記第二導電層形成工程後における前記第一導電層が形成されていない領域の透明電極層表面の水との接触角θAとの差θA’−θAが、0°〜60°である、請求項1〜8のいずれか1項に記載の太陽電池の製造方法。
- 前記第二導電層形成工程において、前記第二導電層として銅を主成分とする層が形成される、請求項1〜9のいずれか1項に記載の太陽電池の製造方法。
- 前記光電変換部は、結晶シリコン基板上に、シリコン系薄膜および前記透明電極層をこの順に備える、請求項1〜10のいずれか1項に記載の太陽電池の製造方法。
- 結晶シリコン基板上にシリコン系薄膜および透明電極層をこの順に有する光電変換部、ならびに前記透明電極層上の集電極、を有する太陽電池であって、
前記透明電極層は、前記光電変換部の最表面に形成されており、
前記集電極は、前記光電変換部側から順に第一導電層と第二導電層とを含み、
前記透明電極層表面の前記第一導電層が形成されていない領域の全面に、自己組織化単分子膜層が形成されており、
前記自己組織化単分子膜層は、アルキルホスホン酸化合物またはアルキルシラン化合物を有する、太陽電池。 - 前記第一導電層が形成されていない領域の表面の水との接触角θAが50°以上160°以下である、請求項12に記載の太陽電池。
- 請求項12または13に記載の太陽電池を備える太陽電池モジュール。
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