JP5580300B2 - 放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム - Google Patents
放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム Download PDFInfo
- Publication number
- JP5580300B2 JP5580300B2 JP2011513102A JP2011513102A JP5580300B2 JP 5580300 B2 JP5580300 B2 JP 5580300B2 JP 2011513102 A JP2011513102 A JP 2011513102A JP 2011513102 A JP2011513102 A JP 2011513102A JP 5580300 B2 JP5580300 B2 JP 5580300B2
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- JP
- Japan
- Prior art keywords
- trench
- radiation detector
- pixel
- barrier material
- radiation
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
- G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08158304.9 | 2008-06-16 | ||
| EP08158304 | 2008-06-16 | ||
| PCT/IB2009/052442 WO2010004453A2 (en) | 2008-06-16 | 2009-06-09 | Radiation detector and a method of manufacturing a radiation detector |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011525238A JP2011525238A (ja) | 2011-09-15 |
| JP2011525238A5 JP2011525238A5 (https=) | 2012-07-26 |
| JP5580300B2 true JP5580300B2 (ja) | 2014-08-27 |
Family
ID=41507503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011513102A Expired - Fee Related JP5580300B2 (ja) | 2008-06-16 | 2009-06-09 | 放射線検出器、放射線検出器を製造する方法、x線検出器及び撮像システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8564084B2 (https=) |
| EP (1) | EP2291680B1 (https=) |
| JP (1) | JP5580300B2 (https=) |
| CN (2) | CN102066976A (https=) |
| RU (1) | RU2493573C2 (https=) |
| WO (1) | WO2010004453A2 (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6013715B2 (ja) * | 2011-09-26 | 2016-10-25 | 株式会社アールエフ | X線グリッド製造方法および放射線撮像装置 |
| DE102011083392B3 (de) * | 2011-09-26 | 2012-12-27 | Siemens Aktiengesellschaft | Herstellungsverfahren für Wandlerschichten für Strahlungsdetektoren |
| CN103135121B (zh) * | 2011-11-28 | 2017-04-26 | Ge医疗系统环球技术有限公司 | 用于消除串扰的线段形模块ct探测器和方法 |
| JP5788859B2 (ja) * | 2012-12-28 | 2015-10-07 | 株式会社島津製作所 | 散乱x線除去用グリッド |
| KR101408138B1 (ko) | 2013-03-14 | 2014-06-17 | 한국원자력연구원 | 인쇄형 방사선 영상 센서, 이를 구비하는 방사선 영상 장치 및 이의 제조 방법 |
| RU2554889C2 (ru) * | 2013-06-11 | 2015-06-27 | Евгений Николаевич Галашов | Способ изготовления детектирующей матрицы рентгеновского излучения |
| DE102014201772B4 (de) | 2014-01-31 | 2017-10-12 | Siemens Healthcare Gmbh | Direktkonvertierender Röntgenstrahlungsdetektor, CT-System und Verfahren hierzu |
| US9459355B1 (en) * | 2015-06-30 | 2016-10-04 | General Electric Company | Radiation detector with stacked barrier layers and method of forming the same |
| EP3362819A4 (en) * | 2015-10-14 | 2019-06-05 | Shenzhen Xpectvision Technology Co., Ltd. | X-RAY DETECTORS TO LIMIT DIFFUSION OF CHARGE CARRIER |
| US10393891B2 (en) | 2016-05-03 | 2019-08-27 | Redlen Technologies, Inc. | Sub-pixel segmentation for semiconductor radiation detectors and methods of fabricating thereof |
| RU174187U1 (ru) * | 2016-12-29 | 2017-10-06 | Общество с ограниченной ответственностью "Научно-технический центр "МТ" (ООО "НТЦ-МТ") | Составное фотосчитывающее устройство с композитными дистанционерами для рентгеночувствительных панелей |
| CN207098052U (zh) * | 2017-02-17 | 2018-03-13 | 全普光电科技(上海)有限公司 | 一种天线结构以及超薄手机 |
| CN108186041B (zh) * | 2018-01-22 | 2020-12-04 | 苏州晶特晶体科技有限公司 | 一种一体化doi影像强化pet环形阵列结构及加工方法 |
| FR3079909B1 (fr) | 2018-04-05 | 2022-10-14 | Microoled | Dispositif electroluminescent a resolution et fiabilite ameliorees |
| US11169286B2 (en) | 2018-06-18 | 2021-11-09 | Redlen Technologies, Inc. | Methods of calibrating semiconductor radiation detectors using K-edge filters |
| EP3620826A1 (en) * | 2018-09-10 | 2020-03-11 | Koninklijke Philips N.V. | Multi-piece mono-layer radiation detector |
| JP7309858B2 (ja) * | 2018-09-10 | 2023-07-18 | コーニンクレッカ フィリップス エヌ ヴェ | デュアルセンササブピクセル放射線検出器 |
| US10928527B2 (en) | 2018-11-09 | 2021-02-23 | Redlen Technologies, Inc. | Charge sharing correction methods for pixelated radiation detector arrays |
| WO2020198931A1 (en) * | 2019-03-29 | 2020-10-08 | Shenzhen Xpectvision Technology Co., Ltd. | Radiation detectors with scintillators |
| US11372120B2 (en) | 2019-08-26 | 2022-06-28 | Redlen Technologies, Inc. | Charge sharing correction methods for sub-pixellated radiation detector arrays |
| WO2023087123A1 (en) * | 2021-11-16 | 2023-05-25 | Shenzhen Xpectvision Technology Co., Ltd. | Image sensors with shielded electronics layers |
| KR102767167B1 (ko) * | 2022-11-30 | 2025-02-13 | 주식회사 비투지홀딩스 | 방사선 디텍터 |
| CN119213560A (zh) * | 2023-08-07 | 2024-12-27 | 深圳帧观德芯科技有限公司 | 用于侧面入射成像且具有位于辐射吸收层中的辐射阻挡板的图像传感器 |
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| JPS58142283A (ja) | 1982-02-19 | 1983-08-24 | Toshiba Corp | 放射線検出器 |
| JPS58180068A (ja) * | 1982-04-15 | 1983-10-21 | Toshiba Corp | 半導体放射線検出器の製造方法 |
| JPS5964587A (ja) | 1982-10-05 | 1984-04-12 | Tohoku Metal Ind Ltd | 単結晶の製造方法 |
| JPS5965487A (ja) | 1982-10-07 | 1984-04-13 | Toshiba Corp | 高密度実装用放射線検出素子 |
| JPS6328076A (ja) | 1986-07-21 | 1988-02-05 | Matsushita Electric Ind Co Ltd | 半導体放射線検出器 |
| JP2611295B2 (ja) | 1987-12-28 | 1997-05-21 | 株式会社日立製作所 | 放射線検出器およびその製造方法 |
| JPH02218990A (ja) * | 1989-02-20 | 1990-08-31 | Shimadzu Corp | 放射線検出素子アレイおよび放射線画像撮影装置 |
| JPH05326572A (ja) * | 1992-05-25 | 1993-12-10 | Matsushita Electron Corp | 電荷転送装置 |
| JP3235717B2 (ja) * | 1995-09-28 | 2001-12-04 | キヤノン株式会社 | 光電変換装置及びx線撮像装置 |
| GB2318448B (en) * | 1996-10-18 | 2002-01-16 | Simage Oy | Imaging detector and method of production |
| US6236051B1 (en) * | 1998-03-27 | 2001-05-22 | Kabushiki Kaisha Toshiba | Semiconductor radiation detector |
| US6069362A (en) * | 1998-05-14 | 2000-05-30 | The University Of Akron | Multi-density and multi-atomic number detector media for applications |
| GB2350767A (en) * | 1999-06-03 | 2000-12-06 | Canon Res Ct Europ Ltd | X-ray CCD detector having a second scintillator layer on back-thinned substrate |
| WO2001008224A1 (en) * | 1999-07-26 | 2001-02-01 | Edge Medical Devices Ltd. | Digital detector for x-ray imaging |
| JP2001296363A (ja) * | 2000-04-14 | 2001-10-26 | Fuji Photo Film Co Ltd | 放射線検出装置 |
| JP2001305234A (ja) * | 2000-04-25 | 2001-10-31 | Nikon Corp | 半導体電子線検出器 |
| JP2001318153A (ja) * | 2000-05-01 | 2001-11-16 | Fuji Photo Film Co Ltd | 放射線画像変換スクリーンおよびその製造方法 |
| JP2002372586A (ja) * | 2001-06-13 | 2002-12-26 | Canon Inc | 放射線撮像ユニット、装置及びシステム |
| JP4707885B2 (ja) * | 2001-06-26 | 2011-06-22 | 浜松ホトニクス株式会社 | 光検出素子 |
| JP2003004855A (ja) * | 2001-06-26 | 2003-01-08 | Hamamatsu Photonics Kk | 放射線検出器 |
| JP4482253B2 (ja) | 2001-09-12 | 2010-06-16 | 浜松ホトニクス株式会社 | ホトダイオードアレイ、固体撮像装置、及び、放射線検出器 |
| JP2003086827A (ja) | 2001-09-12 | 2003-03-20 | Hamamatsu Photonics Kk | ホトダイオードアレイ、固体撮像装置、及び、放射線検出器 |
| US20030178570A1 (en) * | 2002-03-25 | 2003-09-25 | Hitachi Metals, Ltd. | Radiation detector, manufacturing method thereof and radiation CT device |
| US6867862B2 (en) * | 2002-11-20 | 2005-03-15 | Mehrdad Nikoonahad | System and method for characterizing three-dimensional structures |
| AU2003294822A1 (en) * | 2002-12-09 | 2004-06-30 | Quantum Semiconductor Llc | Cmos image sensor |
| EP1645868A4 (en) * | 2003-06-27 | 2007-03-28 | Univ Tsinghua | GAMMA RADIATION IMAGING SYSTEM FOR NON-DESTRUCTIVE INSPECTION OF LUGGAGE |
| CN100505284C (zh) * | 2004-06-18 | 2009-06-24 | 皇家飞利浦电子股份有限公司 | X射线图像检测器 |
| WO2006018779A2 (en) * | 2004-08-12 | 2006-02-23 | Philips Intellectual Property & Standards Gmbh | Anti-scatter-grid for a radiation detector |
| JP2006059901A (ja) * | 2004-08-18 | 2006-03-02 | Toshiba Corp | 放射線検出器 |
| JP2008510960A (ja) * | 2004-08-20 | 2008-04-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 保護層を有するマイクロエレクトロニクスシステム |
| US7260174B2 (en) * | 2004-09-13 | 2007-08-21 | General Electric Company | Direct conversion energy discriminating CT detector with over-ranging correction |
| JP2006145431A (ja) * | 2004-11-22 | 2006-06-08 | Ge Medical Systems Global Technology Co Llc | 放射線検出器、放射線撮像装置、放射線ct装置及び放射線検出器の製造方法 |
| US7193289B2 (en) * | 2004-11-30 | 2007-03-20 | International Business Machines Corporation | Damascene copper wiring image sensor |
| EP1875271B1 (en) * | 2005-04-22 | 2011-06-22 | Koninklijke Philips Electronics N.V. | Digital silicon photomultiplier for tof-pet |
| US7212604B2 (en) * | 2005-06-29 | 2007-05-01 | General Electric Company | Multi-layer direct conversion computed tomography detector module |
| US7259377B2 (en) * | 2005-12-15 | 2007-08-21 | General Electric Company | Diode design to reduce the effects of radiation damage |
| CN100483149C (zh) * | 2005-12-31 | 2009-04-29 | 同方威视技术股份有限公司 | 一种用于辐射成像的多阵列探测器模块结构 |
| DE102006027820B4 (de) | 2006-06-16 | 2008-04-03 | All Welding Technologies Ag | Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung |
| TWI443817B (zh) * | 2006-07-03 | 2014-07-01 | 濱松赫德尼古斯股份有限公司 | Photodiode array |
| DE102006033716A1 (de) * | 2006-07-20 | 2008-02-14 | Siemens Ag | Röntgendiagnostikeinrichtung mit einem digitalen Röntgendetektor und integrierter Dosismessung |
| DE102010004890A1 (de) * | 2010-01-18 | 2011-07-21 | Siemens Aktiengesellschaft, 80333 | Photodiodenarray, Strahlendetektor und Verfahren zur Herstellung eines solchen Photodiodenarrays und eines solchen Strahlendetektors |
-
2009
- 2009-06-09 CN CN2009801225245A patent/CN102066976A/zh active Pending
- 2009-06-09 EP EP20090786416 patent/EP2291680B1/en not_active Not-in-force
- 2009-06-09 US US12/996,400 patent/US8564084B2/en not_active Expired - Fee Related
- 2009-06-09 WO PCT/IB2009/052442 patent/WO2010004453A2/en not_active Ceased
- 2009-06-09 CN CN201910645070.5A patent/CN110398769B/zh active Active
- 2009-06-09 RU RU2011101443/28A patent/RU2493573C2/ru active
- 2009-06-09 JP JP2011513102A patent/JP5580300B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| RU2011101443A (ru) | 2012-07-27 |
| US20110079865A1 (en) | 2011-04-07 |
| CN110398769A (zh) | 2019-11-01 |
| RU2493573C2 (ru) | 2013-09-20 |
| EP2291680B1 (en) | 2015-05-06 |
| US8564084B2 (en) | 2013-10-22 |
| CN102066976A (zh) | 2011-05-18 |
| WO2010004453A2 (en) | 2010-01-14 |
| EP2291680A2 (en) | 2011-03-09 |
| CN110398769B (zh) | 2024-03-22 |
| JP2011525238A (ja) | 2011-09-15 |
| WO2010004453A3 (en) | 2010-06-10 |
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