JP5566829B2 - 液体自動供給機構およびこれを備える塗布装置 - Google Patents

液体自動供給機構およびこれを備える塗布装置 Download PDF

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Publication number
JP5566829B2
JP5566829B2 JP2010207775A JP2010207775A JP5566829B2 JP 5566829 B2 JP5566829 B2 JP 5566829B2 JP 2010207775 A JP2010207775 A JP 2010207775A JP 2010207775 A JP2010207775 A JP 2010207775A JP 5566829 B2 JP5566829 B2 JP 5566829B2
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Japan
Prior art keywords
liquid
supply
liquid material
receiving
unit
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JP2010207775A
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English (en)
Japanese (ja)
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JP2012061424A (ja
JP2012061424A5 (ko
Inventor
和正 生島
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Musashi Engineering Inc
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Musashi Engineering Inc
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Publication date
Application filed by Musashi Engineering Inc filed Critical Musashi Engineering Inc
Priority to JP2010207775A priority Critical patent/JP5566829B2/ja
Priority to KR1020137006402A priority patent/KR101795612B1/ko
Priority to CN201180042922.3A priority patent/CN103118802B/zh
Priority to PCT/JP2011/070920 priority patent/WO2012036179A1/ja
Priority to TW100133333A priority patent/TWI573628B/zh
Publication of JP2012061424A publication Critical patent/JP2012061424A/ja
Publication of JP2012061424A5 publication Critical patent/JP2012061424A5/ja
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D19/00Degasification of liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Liquid Crystal (AREA)
JP2010207775A 2010-09-16 2010-09-16 液体自動供給機構およびこれを備える塗布装置 Active JP5566829B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010207775A JP5566829B2 (ja) 2010-09-16 2010-09-16 液体自動供給機構およびこれを備える塗布装置
KR1020137006402A KR101795612B1 (ko) 2010-09-16 2011-09-14 액체 자동 공급 기구 및 이것을 구비하는 도포 장치
CN201180042922.3A CN103118802B (zh) 2010-09-16 2011-09-14 液体自动供给机构和具备其的涂布装置
PCT/JP2011/070920 WO2012036179A1 (ja) 2010-09-16 2011-09-14 液体自動供給機構およびこれを備える塗布装置
TW100133333A TWI573628B (zh) 2010-09-16 2011-09-16 A liquid automatic supply mechanism and a coating device provided with the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010207775A JP5566829B2 (ja) 2010-09-16 2010-09-16 液体自動供給機構およびこれを備える塗布装置

Publications (3)

Publication Number Publication Date
JP2012061424A JP2012061424A (ja) 2012-03-29
JP2012061424A5 JP2012061424A5 (ko) 2013-11-14
JP5566829B2 true JP5566829B2 (ja) 2014-08-06

Family

ID=45831636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010207775A Active JP5566829B2 (ja) 2010-09-16 2010-09-16 液体自動供給機構およびこれを備える塗布装置

Country Status (5)

Country Link
JP (1) JP5566829B2 (ko)
KR (1) KR101795612B1 (ko)
CN (1) CN103118802B (ko)
TW (1) TWI573628B (ko)
WO (1) WO2012036179A1 (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6218219B2 (ja) * 2013-07-12 2017-10-25 東レエンジニアリング株式会社 エアベントシステム
JP2015182039A (ja) * 2014-03-25 2015-10-22 株式会社Screenホールディングス 塗布装置および脱泡方法
PL2954958T3 (pl) * 2014-06-11 2018-07-31 Umicore Ag & Co. Kg Urządzenie do powlekania podłoża
JP6244421B1 (ja) * 2016-07-27 2017-12-06 株式会社キャタラー 排ガス浄化用触媒の製造方法及び製造装置
JP6993276B2 (ja) * 2018-03-27 2022-01-13 株式会社Ihi回転機械エンジニアリング 液材供給装置
JP7277127B2 (ja) * 2018-04-11 2023-05-18 キヤノン株式会社 吐出材充填方法、吐出材吐出装置、およびインプリント装置
CN111036442B (zh) * 2019-10-08 2023-04-11 吉林大学 一种用于动物试验脱毛过程的棉签处理器
CN111290178B (zh) * 2020-02-25 2022-08-05 深圳市华星光电半导体显示技术有限公司 液晶滴注装置
CN113198643B (zh) * 2021-04-25 2022-04-22 浙江中聚材料有限公司 一种太阳能背板涂布装置
CN116273729B (zh) * 2023-01-28 2023-10-20 中山市美速光电技术有限公司 一种用于超微间距光纤阵列的点胶装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3259309B2 (ja) * 1992-01-23 2002-02-25 カシオ計算機株式会社 液状樹脂の脱泡方法およびその装置
US6431670B1 (en) * 2000-02-14 2002-08-13 Hewlett-Packard Company Ink level sensing method and apparatus
JP2001267399A (ja) * 2000-03-14 2001-09-28 Canon Inc 基板有無検知方法及び基板保管装置
JP2001267339A (ja) * 2000-03-15 2001-09-28 Sanyu Rec Co Ltd 電子部品の製造装置及び製造方法
JP4330295B2 (ja) * 2001-09-10 2009-09-16 大日本印刷株式会社 ペースト塗布方法
JP2005209778A (ja) * 2004-01-21 2005-08-04 Hitachi Maxell Ltd レジスト塗布装置、フォトレジストの塗布方法及び光ディスクの製造方法
US7344230B2 (en) * 2004-09-07 2008-03-18 Fujifilm Dimatix, Inc. Fluid drop ejection system capable of removing dissolved gas from fluid
EP1656863B1 (en) * 2004-11-11 2011-03-02 Nestec S.A. Self-cleaning mixing head for producing a milk-based mixture and beverage production machines comprising such a mixing head
JP4985191B2 (ja) * 2006-08-15 2012-07-25 東京エレクトロン株式会社 バッファタンク、中間貯留装置、液処理装置及び処理液の供給方法
JP4607919B2 (ja) * 2007-05-23 2011-01-05 武蔵エンジニアリング株式会社 ガントリー型作業装置

Also Published As

Publication number Publication date
WO2012036179A1 (ja) 2012-03-22
KR101795612B1 (ko) 2017-11-08
CN103118802B (zh) 2017-04-26
JP2012061424A (ja) 2012-03-29
TW201221229A (en) 2012-06-01
TWI573628B (zh) 2017-03-11
CN103118802A (zh) 2013-05-22
KR20130143560A (ko) 2013-12-31

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