JP5566829B2 - 液体自動供給機構およびこれを備える塗布装置 - Google Patents
液体自動供給機構およびこれを備える塗布装置 Download PDFInfo
- Publication number
- JP5566829B2 JP5566829B2 JP2010207775A JP2010207775A JP5566829B2 JP 5566829 B2 JP5566829 B2 JP 5566829B2 JP 2010207775 A JP2010207775 A JP 2010207775A JP 2010207775 A JP2010207775 A JP 2010207775A JP 5566829 B2 JP5566829 B2 JP 5566829B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- supply
- liquid material
- receiving
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims description 73
- 230000007246 mechanism Effects 0.000 title claims description 51
- 239000011248 coating agent Substances 0.000 title claims description 23
- 238000000576 coating method Methods 0.000 title claims description 23
- 239000011344 liquid material Substances 0.000 claims description 95
- 238000003860 storage Methods 0.000 claims description 20
- 238000007599 discharging Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 description 17
- 239000004973 liquid crystal related substance Substances 0.000 description 15
- 239000000758 substrate Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Mathematical Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Liquid Crystal (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010207775A JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
KR1020137006402A KR101795612B1 (ko) | 2010-09-16 | 2011-09-14 | 액체 자동 공급 기구 및 이것을 구비하는 도포 장치 |
CN201180042922.3A CN103118802B (zh) | 2010-09-16 | 2011-09-14 | 液体自动供给机构和具备其的涂布装置 |
PCT/JP2011/070920 WO2012036179A1 (ja) | 2010-09-16 | 2011-09-14 | 液体自動供給機構およびこれを備える塗布装置 |
TW100133333A TWI573628B (zh) | 2010-09-16 | 2011-09-16 | A liquid automatic supply mechanism and a coating device provided with the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010207775A JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012061424A JP2012061424A (ja) | 2012-03-29 |
JP2012061424A5 JP2012061424A5 (ko) | 2013-11-14 |
JP5566829B2 true JP5566829B2 (ja) | 2014-08-06 |
Family
ID=45831636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010207775A Active JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5566829B2 (ko) |
KR (1) | KR101795612B1 (ko) |
CN (1) | CN103118802B (ko) |
TW (1) | TWI573628B (ko) |
WO (1) | WO2012036179A1 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6218219B2 (ja) * | 2013-07-12 | 2017-10-25 | 東レエンジニアリング株式会社 | エアベントシステム |
JP2015182039A (ja) * | 2014-03-25 | 2015-10-22 | 株式会社Screenホールディングス | 塗布装置および脱泡方法 |
PL2954958T3 (pl) * | 2014-06-11 | 2018-07-31 | Umicore Ag & Co. Kg | Urządzenie do powlekania podłoża |
JP6244421B1 (ja) * | 2016-07-27 | 2017-12-06 | 株式会社キャタラー | 排ガス浄化用触媒の製造方法及び製造装置 |
JP6993276B2 (ja) * | 2018-03-27 | 2022-01-13 | 株式会社Ihi回転機械エンジニアリング | 液材供給装置 |
JP7277127B2 (ja) * | 2018-04-11 | 2023-05-18 | キヤノン株式会社 | 吐出材充填方法、吐出材吐出装置、およびインプリント装置 |
CN111036442B (zh) * | 2019-10-08 | 2023-04-11 | 吉林大学 | 一种用于动物试验脱毛过程的棉签处理器 |
CN111290178B (zh) * | 2020-02-25 | 2022-08-05 | 深圳市华星光电半导体显示技术有限公司 | 液晶滴注装置 |
CN113198643B (zh) * | 2021-04-25 | 2022-04-22 | 浙江中聚材料有限公司 | 一种太阳能背板涂布装置 |
CN116273729B (zh) * | 2023-01-28 | 2023-10-20 | 中山市美速光电技术有限公司 | 一种用于超微间距光纤阵列的点胶装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3259309B2 (ja) * | 1992-01-23 | 2002-02-25 | カシオ計算機株式会社 | 液状樹脂の脱泡方法およびその装置 |
US6431670B1 (en) * | 2000-02-14 | 2002-08-13 | Hewlett-Packard Company | Ink level sensing method and apparatus |
JP2001267399A (ja) * | 2000-03-14 | 2001-09-28 | Canon Inc | 基板有無検知方法及び基板保管装置 |
JP2001267339A (ja) * | 2000-03-15 | 2001-09-28 | Sanyu Rec Co Ltd | 電子部品の製造装置及び製造方法 |
JP4330295B2 (ja) * | 2001-09-10 | 2009-09-16 | 大日本印刷株式会社 | ペースト塗布方法 |
JP2005209778A (ja) * | 2004-01-21 | 2005-08-04 | Hitachi Maxell Ltd | レジスト塗布装置、フォトレジストの塗布方法及び光ディスクの製造方法 |
US7344230B2 (en) * | 2004-09-07 | 2008-03-18 | Fujifilm Dimatix, Inc. | Fluid drop ejection system capable of removing dissolved gas from fluid |
EP1656863B1 (en) * | 2004-11-11 | 2011-03-02 | Nestec S.A. | Self-cleaning mixing head for producing a milk-based mixture and beverage production machines comprising such a mixing head |
JP4985191B2 (ja) * | 2006-08-15 | 2012-07-25 | 東京エレクトロン株式会社 | バッファタンク、中間貯留装置、液処理装置及び処理液の供給方法 |
JP4607919B2 (ja) * | 2007-05-23 | 2011-01-05 | 武蔵エンジニアリング株式会社 | ガントリー型作業装置 |
-
2010
- 2010-09-16 JP JP2010207775A patent/JP5566829B2/ja active Active
-
2011
- 2011-09-14 WO PCT/JP2011/070920 patent/WO2012036179A1/ja active Application Filing
- 2011-09-14 CN CN201180042922.3A patent/CN103118802B/zh active Active
- 2011-09-14 KR KR1020137006402A patent/KR101795612B1/ko active IP Right Grant
- 2011-09-16 TW TW100133333A patent/TWI573628B/zh active
Also Published As
Publication number | Publication date |
---|---|
WO2012036179A1 (ja) | 2012-03-22 |
KR101795612B1 (ko) | 2017-11-08 |
CN103118802B (zh) | 2017-04-26 |
JP2012061424A (ja) | 2012-03-29 |
TW201221229A (en) | 2012-06-01 |
TWI573628B (zh) | 2017-03-11 |
CN103118802A (zh) | 2013-05-22 |
KR20130143560A (ko) | 2013-12-31 |
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