JP5539077B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5539077B2 JP5539077B2 JP2010156372A JP2010156372A JP5539077B2 JP 5539077 B2 JP5539077 B2 JP 5539077B2 JP 2010156372 A JP2010156372 A JP 2010156372A JP 2010156372 A JP2010156372 A JP 2010156372A JP 5539077 B2 JP5539077 B2 JP 5539077B2
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- Prior art keywords
- bump
- electrode pad
- semiconductor chip
- semiconductor device
- bumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
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- 229910052782 aluminium Inorganic materials 0.000 description 4
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- 230000015556 catabolic process Effects 0.000 description 3
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
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- 229910052814 silicon oxide Inorganic materials 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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Description
1 半導体チップ
11 半導体基板
12,13 配線層
14,15 絶縁層
181,182,183 貫通ビア
2 電極パッド
21 第1電極パッド
22 第2電極パッド
3,3’ 被覆膜
31 開口
4 中間層
41,41’ 応力緩和層
411 開口
42,42’ 樹脂層
43a,43b,43c,43e 再配線層
431,431a,431b,431c,431e 下地層
432,432a,432b,432c,432e 金属層
44,44a,44b ポスト
49 溝
49a 第1の縁
49b 第2の縁
5 バンプ
51,53 第1バンプ
52,54 第2バンプ
7 基板
71 基材
711 主面
712 裏面
72 主面配線層
73 裏面配線層
74 スルーホール電極
8 実装基板
81,811,812 実装パッド
82 配線
85 樹脂コート
87 ワイヤ
88 封止樹脂
S1,S2 断面積
S3,S4,S5,S6 面積
L1,L2 寸法
L3,L4,L5,L6 長さ
Claims (18)
- 半導体チップと、
上記半導体チップに積層された第1電極パッドと、
上記半導体チップの厚さ方向に交差する第1方向に延びる第1の縁と、上記厚さ方向および上記第1方向のいずれにも交差する第2方向に延びる第2の縁とに規定された矩形状を呈する中間層と、
上記半導体チップとともに上記中間層を挟むように配置された複数のバンプと、
上記半導体チップに積層された第2電極パッドと、を備え、
上記複数のバンプのいずれか一つは、上記複数のバンプのうち、上記第1方向の一端且つ上記第2方向の一端に配置され並びに上記第1電極パッドに導通する第1バンプであり、
上記複数のバンプのいずれか一つは、上記第2電極パッドを経由して上記第1電極パッドに導通している第2バンプであり、
上記半導体チップは、上記第1電極パッドおよび上記第2電極パッドを導通させる配線層を含む、半導体装置。 - 上記第1電極パッドおよび上記第2電極パッドを露出させる被覆膜を更に備え、
上記中間層は、上記被覆膜に積層された応力緩和層と、上記応力緩和層に積層され、且つ、上記厚さ方向視において上記第1バンプと重なる部位を有する第1再配線層と、上記応力緩和層に積層され、且つ、上記厚さ方向視において上記第2バンプと重なる部位を有する第2再配線層と、を含み、
上記第1再配線層と上記第2再配線層とは互いに離間している、請求項1に記載の半導体装置。 - 上記第1電極パッドおよび上記第2電極パッドを露出させる被覆膜を更に備え、
上記中間層は、上記被覆膜に積層された応力緩和層と、上記応力緩和層に積層され、且つ、上記第1バンプおよび上記第2バンプを導通させる再配線層と、を含む、請求項1に記載の半導体装置。 - 半導体チップと、
上記半導体チップに積層された第1電極パッドと、
上記半導体チップの厚さ方向に交差する第1方向に延びる第1の縁と、上記厚さ方向および上記第1方向のいずれにも交差する第2方向に延びる第2の縁とに規定された矩形状を呈する中間層と、
上記半導体チップとともに上記中間層を挟むように配置された複数のバンプと、を備え、
上記複数のバンプのいずれか一つは、上記複数のバンプのうち、上記第1方向の一端且つ上記第2方向の一端に配置され並びに上記第1電極パッドに導通する第1バンプであり、上記複数のバンプのいずれか一つは、上記第1電極パッドに導通する第2バンプであり、
上記中間層は、上記第1バンプに接し且つ上記半導体チップの厚さ方向に延びる第1ポストと、上記第2バンプに接し且つ上記半導体チップの厚さ方向に向かって延びる第2ポストと、を更に含み、
上記第1ポストと上記第1バンプとの接合面積は、上記第2ポストと上記第2バンプとの接合面積より大きい、半導体装置。 - 半導体チップと、
上記半導体チップに積層された第1電極パッドと、
上記半導体チップの厚さ方向に交差する第1方向に延びる第1の縁と、上記厚さ方向および上記第1方向のいずれにも交差する第2方向に延びる第2の縁とに規定された矩形状を呈する中間層と、
上記半導体チップとともに上記中間層を挟むように配置された複数のバンプと、を備え、
上記複数のバンプのいずれか一つは、上記複数のバンプのうち、上記第1方向の一端且つ上記第2方向の一端に配置され並びに上記第1電極パッドに導通する第1バンプであり、上記複数のバンプのいずれか一つは、上記第1電極パッドに導通する第2バンプであり、
上記中間層は、上記第1バンプに接し且つ上記半導体チップの厚さ方向に延びる第1ポストと、上記第2バンプに接し且つ上記半導体チップの厚さ方向に向かって延びる第2ポストと、を更に含み、
上記第1方向および上記第2方向に広がる平面による上記第1ポストの断面積は、上記第1方向および上記第2方向に広がる平面による上記第2ポストの断面積より大きい、半導体装置。 - 半導体チップと、
上記半導体チップに積層された第1電極パッドと、
上記半導体チップの厚さ方向に交差する第1方向に延びる第1の縁と、上記厚さ方向および上記第1方向のいずれにも交差する第2方向に延びる第2の縁とに規定された矩形状を呈する中間層と、
上記半導体チップとともに上記中間層を挟むように配置された複数のバンプと、を備え、
上記複数のバンプのいずれか一つは、上記複数のバンプのうち、上記第1方向の一端且つ上記第2方向の一端に配置され並びに上記第1電極パッドに導通する第1バンプであり、上記複数のバンプのいずれか一つは、上記第1電極パッドに導通する第2バンプであり、
上記中間層は、上記第1バンプに接し且つ上記半導体チップの厚さ方向に延びる第1ポストと、上記第2バンプに接し且つ上記半導体チップの厚さ方向に向かって延びる第2ポストと、を更に含み、
上記第1ポストは第1寸法を直径として上記厚さ方向に延びる円柱状であり、上記第2ポストは上記第1寸法より小さい第2寸法を直径として上記厚さ方向に延びる円柱状である、半導体装置。 - 上記第1寸法は、上記第2寸法の1.1倍〜1.5倍である、請求項6に記載の半導体装置。
- 半導体チップと、
上記半導体チップに積層された第1電極パッドと、
上記半導体チップの厚さ方向に交差する第1方向に延びる第1の縁と、上記厚さ方向および上記第1方向のいずれにも交差する第2方向に延びる第2の縁とに規定された矩形状を呈する中間層と、
上記半導体チップとともに上記中間層を挟むように配置された複数のバンプと、を備え、
上記複数のバンプのいずれか一つは、上記複数のバンプのうち、上記第1方向の一端且つ上記第2方向の一端に配置され並びに上記第1電極パッドに導通する第1バンプであり、上記複数のバンプのいずれか一つは、上記第1電極パッドに導通する第2バンプであり、 上記厚さ方向視において上記第1バンプは第1長さを直径とする円形状であり、上記厚さ方向視において上記第2バンプは上記第1長さより小さい第2長さを直径とする円形状である、半導体装置。 - 上記第1長さは、上記第2長さの1.1倍〜1.5倍である、請求項8に記載の半導体装置。
- 上記中間層は、上記半導体チップを搭載している主面および上記主面の反対側を向く裏面を有する基材と、上記主面に形成された主面配線層と、上記裏面に形成され且つ上記主面配線層と導通する裏面配線層と、を含み、
上記裏面配線層は上記第1バンプおよび上記第2バンプのいずれにも接する、請求項8または9に記載の半導体装置。 - 上記第1電極パッドを露出させる被覆膜を更に備え、
上記中間層は、上記被覆膜に積層された応力緩和層と、上記応力緩和層に積層され、且つ、上記第1バンプおよび上記第2バンプを導通させる再配線層と、を含む、請求項1に記載の半導体装置。 - 上記中間層は、上記第1バンプに接し且つ上記半導体チップの厚さ方向に延びる第1ポストと、上記第2バンプに接し且つ上記半導体チップの厚さ方向に向かって延びる第2ポストと、を更に含む、請求項1に記載の半導体装置。
- 上記第2バンプは、上記中間層における再配線層を経由して上記第1電極パッドに導通しており、
上記第1バンプおよび上記第2バンプは、上記再配線層を経由して互いに導通している、請求項1に記載の半導体装置。 - 上記第1バンプおよび上記第2バンプの体積はいずれも同一である、請求項1ないし13のいずれかに記載の半導体装置。
- 上記複数のバンプは、25個以上である、請求項1ないし14のいずれかに記載の半導体装置。
- 上記第2バンプは、上記複数のバンプのうち上記第1バンプに最も隣接しているものである、請求項1ないし15のいずれかに記載の半導体装置。
- 上記第1バンプおよび上記第2バンプはいずれも機能ピンである、請求項1ないし16のいずれかに記載の半導体装置。
- 上記複数のバンプのうち四角に配置されたものは上記第1バンプである、請求項1ないし17のいずれかに記載の半導体装置。
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PCT/JP2011/065693 WO2012005352A1 (ja) | 2010-07-09 | 2011-07-08 | 半導体装置 |
US13/809,211 US9070673B2 (en) | 2010-07-09 | 2011-07-08 | Semiconductor device |
US14/722,895 US9508672B2 (en) | 2010-07-09 | 2015-05-27 | Semiconductor device |
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