JP5451515B2 - 薬液供給システム、これを備える基板処理装置、およびこの基板処理装置を備える塗布現像システム - Google Patents
薬液供給システム、これを備える基板処理装置、およびこの基板処理装置を備える塗布現像システム Download PDFInfo
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
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- B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
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- Condensed Matter Physics & Semiconductors (AREA)
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Materials For Photolithography (AREA)
Description
(変形例1)
図9(a)は、本実施形態の変形例1による薬液供給システム57Aを示す概略図である。この薬液供給システム57Aにおいては、入口タンク71と出口タンク76との間に2つの配管721,722が接続されている。配管721には一次ポンプ731、フィルタ741、および二次ポンプ751がこの順に設けられ、配管722には一次ポンプ732、フィルタ742、および二次ポンプ752がこの順に設けられている。また、一次ポンプ731,732には、バイパス管731a,732aが対応して設けられ、二次ポンプ751,752には、バイパス管751a,752aが対応して設けられている。
図9(b)は、本実施形態の変形例2による薬液供給システム57Bを示す概略図である。この薬液供給システム57Bにおいては、入口タンク71と出口タンク76とを繋ぐ戻り配管77に、一次ポンプ78a、フィルタ78b、および二次ポンプ78cが設けられている。これによれば、出口タンク76に貯留されるレジスト液が、一次ポンプ78aおよび二次ポンプ78cによって入口タンク71へ戻される際にも、フィルタ78bによりろ過される。したがって、入口タンク71と出口タンク76との間でレジスト液が1回環流する際に、2回ろ過されるため、図7に示す薬液供給システム57と同じ効果が発揮されるだけでなく、ろ過効果を更に高めることができる。また、薬液供給システム57Bにおいても、一次ポンプ78aに対して並列にバイパス管78dが設けられ、二次ポンプ78cに対して並列にバイパス管78eが設けられている。
Claims (13)
- 薬液を貯留する第1の容器および第2の容器と、
前記第1の容器と前記第2の容器とを繋ぐ第1の配管に設けられ、前記第1の容器に貯留される薬液を前記第2の容器へ流す第1のポンプと、
前記第1の配管に設けられ、前記第1の容器から前記第2の容器へ向かって前記第1の配管内を流れる薬液をろ過する第1のフィルタと、
前記第1の容器と前記第2の容器とを繋ぐ第2の配管と、
前記第2の配管に設けられ、前記第2の容器に貯留される薬液を前記第1の容器へ流す第2のポンプと
を備える薬液供給システム。 - 前記第2の配管に設けられる第2のフィルタを更に備える、請求項1に記載の薬液供給システム。
- 前記第1の容器と前記第2の容器とを繋ぐ第3の配管と、
前記第3の配管に設けられ、前記第1の容器に貯留される薬液を前記第2の容器へ流す第3のポンプと、
前記第3の配管に設けられ、前記第1の容器から前記第2の容器へ向かって前記第3の配管内を流れる薬液をろ過する第3のフィルタと、
を更に備える、請求項1または2に記載の薬液供給システム。 - 前記第1の配管に設けられる第4のポンプを更に備え、
前記第1の配管において、前記第1のポンプおよび前記第4のポンプの間に前記第1のフィルタが配置される、請求項1から3のいずれか一項に記載の薬液供給システム。 - 前記第1の配管に設けられ、当該第1の配管の内径よりも小さいオリフィスを有する絞り弁を更に備える、請求項1から4のいずれか一項に記載の薬液供給システム。
- 前記第1の配管に設けられ、当該第1の配管内を流れる薬液の流量を測定する流量計を更に備える、請求項1から5のいずれか一項に記載の薬液供給システム。
- 前記第1の配管に設けられ、当該第1の配管内を流れる薬液の圧力を測定する圧力計を更に備える、請求項1から6のいずれか一項に記載の薬液供給システム。
- 前記第2の配管に設けられる第5のポンプを更に備え、
前記第2の配管において、前記第2のポンプと前記第5のポンプとの間に前記第2のフィルタが配置される、請求項2に記載の薬液供給システム。 - 前記第3の配管に設けられ、当該第3の配管の内径よりも小さいオリフィスを有する絞り弁を更に備える、請求項3に記載の薬液供給システム。
- 前記第3の配管に設けられ、当該第3の配管内を流れる薬液の流量を測定する流量計を更に備える、請求項3または9に記載の薬液供給システム。
- 前記第3の配管に設けられ、当該第3の配管内を流れる薬液の圧力を測定する圧力計を更に備える、請求項3、9、および10のいずれか一項に記載の薬液供給システム。
- 薬液を用いて基板を処理する基板処理装置であって、
処理する基板を保持する基板保持部と、
請求項1から11のいずれか一項に記載の薬液供給システムと、
前記薬液供給システムからの薬液を前記基板へ供給する供給部と
を備える基板処理装置。 - 基板にレジスト膜を形成し、露光された前記レジスト膜を現像する塗布現像システムであって、
処理する基板を保持し回転する基板保持回転部と、該基板保持回転部により保持される前記基板にレジスト液を供給する供給部とを含むレジスト塗布ユニット;
処理する基板を保持し回転する基板保持回転部と、前記レジスト塗布ユニットにおいて形成され、露光されたレジスト膜を有し、前記基板保持回転部により保持される前記基板に現像液を供給する供給部とを含む現像処理ユニット;
請求項1から11のいずれか一項に記載の薬液供給システムであって、前記レジスト塗布ユニットに薬液としてレジスト液を供給する第1の薬液供給システム;および
請求項1から11のいずれか一項に記載の薬液供給システムであって、前記塗布現像ユニットに薬液として現像液を供給する第2の薬液供給システム
を備える塗布現像システム。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010106656A JP5451515B2 (ja) | 2010-05-06 | 2010-05-06 | 薬液供給システム、これを備える基板処理装置、およびこの基板処理装置を備える塗布現像システム |
TW100106904A TWI444785B (zh) | 2010-05-06 | 2011-03-02 | A liquid supply system including a substrate processing apparatus and a coating developing system provided with the substrate processing apparatus |
TW103115024A TWI479280B (zh) | 2010-05-06 | 2011-03-02 | A substrate processing apparatus and a liquid medicine supply method |
PCT/JP2011/056255 WO2011138881A1 (ja) | 2010-05-06 | 2011-03-16 | 薬液供給システム、これを備える基板処理装置、およびこの基板処理装置を備える塗布現像システム |
KR1020147004500A KR101542704B1 (ko) | 2010-05-06 | 2011-03-16 | 기판 처리 장치 및 약액 공급 방법 |
US13/695,844 US9086190B2 (en) | 2010-05-06 | 2011-03-16 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus |
KR1020127027167A KR101452608B1 (ko) | 2010-05-06 | 2011-03-16 | 약액 공급 시스템, 이를 구비하는 기판 처리 장치 및 이 기판 처리 장치를 구비하는 도포 현상 시스템 |
US14/736,582 US10035173B2 (en) | 2010-05-06 | 2015-06-11 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus |
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JP2010106656A JP5451515B2 (ja) | 2010-05-06 | 2010-05-06 | 薬液供給システム、これを備える基板処理装置、およびこの基板処理装置を備える塗布現像システム |
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JP2013267523A Division JP5658349B2 (ja) | 2013-12-25 | 2013-12-25 | 基板処理装置及び薬液供給方法 |
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JP5451515B2 true JP5451515B2 (ja) | 2014-03-26 |
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Country Status (5)
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US (2) | US9086190B2 (ja) |
JP (1) | JP5451515B2 (ja) |
KR (2) | KR101542704B1 (ja) |
TW (2) | TWI444785B (ja) |
WO (1) | WO2011138881A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US10507484B2 (en) | 2016-02-16 | 2019-12-17 | SCREEN Holdings Co., Ltd. | Pump apparatus and substrate treating apparatus |
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US10507484B2 (en) | 2016-02-16 | 2019-12-17 | SCREEN Holdings Co., Ltd. | Pump apparatus and substrate treating apparatus |
TWI786767B (zh) * | 2020-12-29 | 2022-12-11 | 南韓商細美事有限公司 | 化學液體供應裝置及包括化學液體供應裝置之用以處理基板的設備 |
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US20130068324A1 (en) | 2013-03-21 |
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US20150279702A1 (en) | 2015-10-01 |
WO2011138881A1 (ja) | 2011-11-10 |
US9086190B2 (en) | 2015-07-21 |
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