JP5443978B2 - 半導体装置の製造方法および半導体装置 - Google Patents
半導体装置の製造方法および半導体装置 Download PDFInfo
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- JP5443978B2 JP5443978B2 JP2009514084A JP2009514084A JP5443978B2 JP 5443978 B2 JP5443978 B2 JP 5443978B2 JP 2009514084 A JP2009514084 A JP 2009514084A JP 2009514084 A JP2009514084 A JP 2009514084A JP 5443978 B2 JP5443978 B2 JP 5443978B2
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- 239000004065 semiconductor Substances 0.000 title claims description 108
- 238000004519 manufacturing process Methods 0.000 title claims description 39
- 239000007772 electrode material Substances 0.000 claims description 105
- 239000000758 substrate Substances 0.000 claims description 98
- 239000011810 insulating material Substances 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 146
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 75
- 229910052710 silicon Inorganic materials 0.000 description 75
- 239000010703 silicon Substances 0.000 description 75
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 29
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 19
- 229920005591 polysilicon Polymers 0.000 description 19
- 229910004298 SiO 2 Inorganic materials 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66719—With a step of forming an insulating sidewall spacer
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66727—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the source electrode
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Description
2、42 シリコン基板(基板)
2a、22a、42a トレンチ(第1凹部)
2b、22b、42b トレンチ(第2凹部)
3、43 電極(第1電極材)
4、44a、44b、44c 電極(第2電極材)
6 配線層
13 ポリシリコン膜(電極材)
14 酸化膜(絶縁材)
14a TEOS膜(絶縁材)
22 シリコン層(半導体層)
23 共通電極(第1電極材)
24 ゲート電極(第2電極材)
26、46 ソース電極(配線層)
まず、図1を参照して、本発明の第1実施形態による半導体装置1の構造について説明する。
この第2実施形態では、図10〜図12を参照して、上記第1実施形態と異なり、半導体装置20にFET(電界効果トランジスタ)を設けた例について説明する。
この第3実施形態では、図17〜図19を参照して、上記第1実施形態と異なり、シリコン基板42の上部にn+型層42cおよびp型層42dを設けた例について説明する。
Claims (4)
- 基板または半導体層に第1凹部および第2凹部を形成する工程と、
前記第1凹部および第2凹部の内部に、前記第1凹部および第2凹部の上端部よりも下側になるように、それぞれ第1電極材および第2電極材を配置する工程と、
前記基板または半導体層と前記第1電極材および第2電極材とを覆うように絶縁材を配置する工程と、
前記基板または半導体層と前記第1電極材との上面の少なくとも一部が露出するとともに、前記第2電極材の上面が露出しないように、全面エッチバックすることにより、前記絶縁材を全面にわたって除去する工程と、
前記基板または半導体層の前記第1凹部および第2凹部側に配線層を配置する工程とを備え、
前記基板または半導体層に第1凹部および第2凹部を形成する工程は、前記第1凹部の幅が、前記第2凹部の幅より大きくなるように、前記第1凹部および第2凹部を形成する工程を含み、
前記絶縁材を配置する工程は、
前記第1電極材の上面の中央部上の前記絶縁材の厚みが、前記基板または半導体層上の前記絶縁材の厚みと同じ大きさになるとともに、前記第2電極材の上面上の前記絶縁材の厚みが、前記基板または半導体層上の前記絶縁材の厚みよりも大きくなるように、前記絶縁材を配置する工程を含むことを特徴とする半導体装置の製造方法。 - 前記第1電極材および第2電極材を配置する工程は、前記第1電極材の幅が、前記第2電極材の幅より大きくなるように、前記第1電極材および第2電極材を配置する工程を含むことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記絶縁材を配置する工程は、
前記第1凹部の幅の1/2より小さく、かつ、前記第2凹部の幅の1/2以上の厚みに前記絶縁材を配置する工程を含むことを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記第1電極材および第2電極材を配置する工程は、
前記基板または半導体層の前記第1凹部および第2凹部側を覆うとともに、前記第1凹部および第2凹部を埋め込むように、前記第1凹部の幅の1/2以上の厚みに電極材を配置する工程と、
前記基板または半導体層の上面が露出するとともに、前記第1凹部および第2凹部の内部の前記電極材が残るように、前記電極材を除去することにより、前記第1凹部および第2凹部の内部にそれぞれ前記第1電極材および第2電極材を配置する工程とを含むことを特徴とする請求項1に記載の半導体装置の製造方法。
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JP2009514084A JP5443978B2 (ja) | 2007-04-27 | 2008-04-25 | 半導体装置の製造方法および半導体装置 |
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JP2007118928 | 2007-04-27 | ||
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JP2009514084A JP5443978B2 (ja) | 2007-04-27 | 2008-04-25 | 半導体装置の製造方法および半導体装置 |
PCT/JP2008/058098 WO2008139897A1 (ja) | 2007-04-27 | 2008-04-25 | 半導体装置の製造方法および半導体装置 |
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JP5443978B2 true JP5443978B2 (ja) | 2014-03-19 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104900703A (zh) * | 2015-05-12 | 2015-09-09 | 上海格瑞宝电子有限公司 | 一种沟槽mosfet终端结构和沟槽mosfet器件及其制备方法 |
CN112382566B (zh) * | 2020-11-12 | 2023-06-16 | 重庆万国半导体科技有限公司 | 一种沟槽功率器件及其制造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002373988A (ja) * | 2001-06-14 | 2002-12-26 | Rohm Co Ltd | 半導体装置およびその製法 |
JP2004179277A (ja) * | 2002-11-26 | 2004-06-24 | New Japan Radio Co Ltd | 半導体装置の製造方法 |
JP2004207476A (ja) * | 2002-12-25 | 2004-07-22 | Mitsubishi Electric Corp | 電力用半導体装置及び電力用半導体装置の製造方法 |
JP2004311547A (ja) * | 2003-04-03 | 2004-11-04 | Seiko Instruments Inc | 縦形mosトランジスタの製造方法 |
JP2005191487A (ja) * | 2003-12-26 | 2005-07-14 | Seiko Instruments Inc | 半導体装置およびその製造法 |
JP2006100404A (ja) * | 2004-09-28 | 2006-04-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2006100317A (ja) * | 2004-09-28 | 2006-04-13 | Nec Electronics Corp | 半導体装置 |
-
2008
- 2008-04-25 WO PCT/JP2008/058098 patent/WO2008139897A1/ja active Application Filing
- 2008-04-25 JP JP2009514084A patent/JP5443978B2/ja active Active
- 2008-04-25 TW TW097115451A patent/TW200910429A/zh unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002373988A (ja) * | 2001-06-14 | 2002-12-26 | Rohm Co Ltd | 半導体装置およびその製法 |
JP2004179277A (ja) * | 2002-11-26 | 2004-06-24 | New Japan Radio Co Ltd | 半導体装置の製造方法 |
JP2004207476A (ja) * | 2002-12-25 | 2004-07-22 | Mitsubishi Electric Corp | 電力用半導体装置及び電力用半導体装置の製造方法 |
JP2004311547A (ja) * | 2003-04-03 | 2004-11-04 | Seiko Instruments Inc | 縦形mosトランジスタの製造方法 |
JP2005191487A (ja) * | 2003-12-26 | 2005-07-14 | Seiko Instruments Inc | 半導体装置およびその製造法 |
JP2006100404A (ja) * | 2004-09-28 | 2006-04-13 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2006100317A (ja) * | 2004-09-28 | 2006-04-13 | Nec Electronics Corp | 半導体装置 |
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JPWO2008139897A1 (ja) | 2010-07-29 |
WO2008139897A1 (ja) | 2008-11-20 |
TW200910429A (en) | 2009-03-01 |
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