JP5386769B2 - 検査治具 - Google Patents
検査治具 Download PDFInfo
- Publication number
- JP5386769B2 JP5386769B2 JP2008251320A JP2008251320A JP5386769B2 JP 5386769 B2 JP5386769 B2 JP 5386769B2 JP 2008251320 A JP2008251320 A JP 2008251320A JP 2008251320 A JP2008251320 A JP 2008251320A JP 5386769 B2 JP5386769 B2 JP 5386769B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- contact
- electrode portion
- contactor
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008251320A JP5386769B2 (ja) | 2008-09-29 | 2008-09-29 | 検査治具 |
CN2009101750786A CN101713790B (zh) | 2008-09-29 | 2009-09-27 | 检查治具、电极结构及电极结构的制造方法 |
KR1020090091587A KR101098320B1 (ko) | 2008-09-29 | 2009-09-28 | 검사치구, 전극구조 및 전극구조의 제조방법 |
TW098132897A TWI422829B (zh) | 2008-09-29 | 2009-09-29 | 檢查治具、電極構造及電極構造之製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008251320A JP5386769B2 (ja) | 2008-09-29 | 2008-09-29 | 検査治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010085107A JP2010085107A (ja) | 2010-04-15 |
JP5386769B2 true JP5386769B2 (ja) | 2014-01-15 |
Family
ID=42213872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008251320A Expired - Fee Related JP5386769B2 (ja) | 2008-09-29 | 2008-09-29 | 検査治具 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5386769B2 (zh) |
KR (1) | KR101098320B1 (zh) |
CN (1) | CN101713790B (zh) |
TW (1) | TWI422829B (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5540971B2 (ja) * | 2010-07-30 | 2014-07-02 | 日本電産リード株式会社 | 接触子、接続治具及び接触子の製造方法 |
WO2012014905A1 (ja) * | 2010-07-30 | 2012-02-02 | 日本電産リード株式会社 | 接触子及び接触子の製造方法 |
JP2012083234A (ja) * | 2010-10-13 | 2012-04-26 | Hioki Ee Corp | プローブおよび測定装置 |
JP5804237B2 (ja) * | 2011-01-24 | 2015-11-04 | 日本電産リード株式会社 | 検査用治具 |
JP6033130B2 (ja) * | 2013-03-13 | 2016-11-30 | 新光電気工業株式会社 | プローブガイド板及びその製造方法 |
KR101565992B1 (ko) | 2014-07-16 | 2015-11-06 | 주식회사 새한마이크로텍 | 동축형 프로브 핀을 포함하는 다층기판 검사용 지그 |
CN104282596B (zh) * | 2014-10-30 | 2017-12-08 | 通富微电子股份有限公司 | 半导体测试治具的形成方法 |
US10006939B2 (en) | 2014-10-30 | 2018-06-26 | Tongfu Microelectronics Co., Ltd. | Testing probe and semiconductor testing fixture, and fabrication methods thereof |
CN104319248B (zh) * | 2014-10-30 | 2018-04-13 | 通富微电子股份有限公司 | 半导体测试治具的形成方法 |
CN104280677B (zh) * | 2014-10-30 | 2017-11-10 | 通富微电子股份有限公司 | 半导体测试治具 |
CN104407182B (zh) * | 2014-10-30 | 2018-09-21 | 通富微电子股份有限公司 | 半导体测试治具 |
CN104330593B (zh) * | 2014-10-30 | 2017-09-29 | 通富微电子股份有限公司 | 测试针头和半导体测试治具 |
CN104360112B (zh) * | 2014-10-30 | 2018-04-06 | 通富微电子股份有限公司 | 半导体测试治具及其形成方法 |
US10001509B2 (en) | 2014-10-30 | 2018-06-19 | Tongfu Microelectronics Co., Ltd. | Semiconductor testing fixture and fabrication method thereof |
CN104282585B (zh) * | 2014-10-30 | 2017-05-24 | 通富微电子股份有限公司 | 测试针头和半导体测试夹具的形成方法 |
US10006943B2 (en) | 2014-10-30 | 2018-06-26 | Tongfu Microelectronics Co., Ltd. | Semiconductor testing fixture and fabrication method thereof |
CN104319247B (zh) * | 2014-10-30 | 2018-05-18 | 通富微电子股份有限公司 | 测试针头和半导体测试夹具 |
CN104347448B (zh) * | 2014-10-30 | 2018-08-10 | 通富微电子股份有限公司 | 半导体测试治具的形成方法 |
CN104280678B (zh) * | 2014-10-30 | 2018-11-27 | 通富微电子股份有限公司 | 半导体测试治具 |
US10067162B2 (en) | 2014-10-30 | 2018-09-04 | Tongfu Microelectronics Co., Ltd. | Testing probe, semiconductor testing fixture and fabrication method thereof |
CN104407183B (zh) * | 2014-10-30 | 2018-10-23 | 通富微电子股份有限公司 | 测试针头和半导体测试治具的形成方法 |
CN104280580B (zh) * | 2014-10-30 | 2018-01-30 | 通富微电子股份有限公司 | 测试针头和半导体测试治具 |
CN104280581B (zh) * | 2014-10-30 | 2018-01-30 | 通富微电子股份有限公司 | 测试针头和半导体测试治具 |
CN104316864B (zh) * | 2014-10-30 | 2018-06-22 | 通富微电子股份有限公司 | 半导体测试治具 |
US10119993B2 (en) | 2014-10-30 | 2018-11-06 | Tongfu Microelectronics Co., Ltd. | Testing probe and semiconductor testing fixture, and fabrication methods thereof |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0829475A (ja) * | 1994-07-12 | 1996-02-02 | Fuji Photo Film Co Ltd | 実装基板検査装置のコンタクトプローブ |
JP2002228682A (ja) * | 2001-02-02 | 2002-08-14 | Tokyo Electron Ltd | プローブ |
JP3690796B2 (ja) * | 2002-01-31 | 2005-08-31 | 株式会社コーヨーテクノス | 検査冶具及びその製造方法並びに回路基板の製造方法 |
JP4251855B2 (ja) * | 2002-11-19 | 2009-04-08 | 株式会社ヨコオ | 高周波・高速用デバイスの検査治具の製法 |
JP2005030878A (ja) * | 2003-07-11 | 2005-02-03 | Yokowo Co Ltd | 検査用プローブ |
JP2005315775A (ja) | 2004-04-30 | 2005-11-10 | Fujitsu Autom Ltd | 片面移動式プローブを用いた4端子検査方法及び4端子検査用治具 |
KR20070070069A (ko) * | 2005-12-28 | 2007-07-03 | 니혼덴산리드가부시키가이샤 | 기판 검사 장치 및 기판 검사 방법 |
-
2008
- 2008-09-29 JP JP2008251320A patent/JP5386769B2/ja not_active Expired - Fee Related
-
2009
- 2009-09-27 CN CN2009101750786A patent/CN101713790B/zh not_active Expired - Fee Related
- 2009-09-28 KR KR1020090091587A patent/KR101098320B1/ko not_active IP Right Cessation
- 2009-09-29 TW TW098132897A patent/TWI422829B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN101713790A (zh) | 2010-05-26 |
JP2010085107A (ja) | 2010-04-15 |
TW201013192A (en) | 2010-04-01 |
KR20100036197A (ko) | 2010-04-07 |
KR101098320B1 (ko) | 2011-12-26 |
TWI422829B (zh) | 2014-01-11 |
CN101713790B (zh) | 2012-05-30 |
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