JP5344456B2 - 非鉛系圧電材料 - Google Patents
非鉛系圧電材料 Download PDFInfo
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Description
50年間の間、殆どの圧電応用はPZT(Pb(Ti,Zr)O3多結晶体)に支配されている。この材料系は、これまで最高の圧電特性(無添加のPZTの圧電係数d33の最高値は約220pC/Nで、添加による改良されたソフトPZTは約400−580pC/N)を持つため、半世紀以来、圧電材料の“代名詞”となっている。しかし、PZTは有毒な鉛が大量に含むため、環境問題の観点から近年厳しく規制されつつある。そのため、PZTに匹敵する高性能非鉛の圧電材料の開発は世界的に緊迫した課題になっている。
この背景の中、近年非鉛圧電材料は数多く研究されてきたが、しかし、圧電・電歪特性はPZTに遠く及ばない(殆どの材料のd33は200pC/N以下)。最近開発されたKNN−LT((K,Na)NbO3−LiTaO3)及びKNN−LN((K,Na)NbO3−LiNbO3)系非鉛圧電材料の圧電係数d33は約150−300pC/Nと比較的に良いが、ソフトPZTまでは及んでいない。
更にKNN−LT及びKNN−LN系は合成困難、コスト高い(高価な元素Ta,Laを大量に含むため)など重要な欠点を持っている。
殆どのMPB組成において、室温から70℃の温度範囲で高い圧電特性(d33>350pC/N)を確認しており(図5)、室温付近での応用は十分適している。また、この材料を添加元素で特性を更に改善する可能性がある。
この材料系は非常に安定な酸化物からできた材料であるため、KNN系や(Bi0.5Na0.5)TiO3のような揮発問題は持っていない、大変良い焼結性を持ち、製造は非常に容易である。また、NbやTaなど高価な原料を使用しないため、原料コストと製造コストが低い。更に、KNN系のような潮解性或いは湿気に敏感する問題もない。
以上の特徴から、本発明で提案した材料系は室温付近(或いは室温以下)の応用でPZTを代替できる有力候補である。
図2、図3より、δ%=50%において最も良い特性(d33=584pC/N)を持つことが分かる。
図4は分極したδ%=50%試料の電歪と電場の関係(室温)を示す。この材料の圧電特性はソフトPZTの最高峰であるPZT−5Hを含むすべてのPZTを凌駕することが分かる。
図5は、δ%=40%,45%,50%試料の圧電係数d33の温度依存性を示すグラフである。MPB付近のこの三組成は70℃まで大きな圧電係数を維持していることがわかる(δ%=45%,50%試料この温度範囲ではd33>350pC/N)。従って、本発明の非鉛圧電材料は室温付近の応用に適している。
それ故に、本発明では、{[(Ba1−x1M1x1)((Ti1−xZrx)1−y1N1y1)O3]―δ%[(Ba1−yCay)1−x2M2x2)(Ti1−y2N2y2)O3]}(M1,N1,M2, N2は添加元素)と示した。
BZT−BCTはA2+B4+O3型perovskite構造を持っているため、A2+サイトにBa2+とCa2+が占有し、B4+サイトにTi4+とZr4+が占有している。「組成イオンと同価数の元素」とは、A2+サイトに置換する元素の場合は2+価の元素(例えばSr2+)、B4+サイトに置換する元素の場合は4+価の元素(例えばHf4+、Sn4+)である。また、「同価の添加元素」は異なる価数の元素の組み合わせで作り出すことも可能である(例えばA2+サイトに1/2Bi3+1/2Na+(平均価数は2+)で置換してもよい)。
Acceptor添加元素:
A2+の位置に置換する+2以下の価数を持つ添加元素(M1,M2):K+、Na+、Li+、Ag+など
B4+の位置に置換する+4価以下の添加元素(N1, N2):Mn3+、Fe3+、Co3+、Ni2+、Cu2+など。
「Acceptor元素添加」は圧電材料のロスを低減するために良く使われる改良法である。本発明においても、BZT−BCTを利用しながら、「Acceptor元素添加」による改良した材料が本発明の範囲である。
Donor添加元素:
A2+の位置に置換する+2以上の価数の添加元素:La3+、Bi3+、Y3+、Ce3+、Rh3+など
B4+の位置に置換する+4価以上の添加元素:Nb5+、Ta5+など。
「Donor元素添加」は圧電材料の圧電特性を向上するために良く使われる改良法である。本発明においても、BZT−BCTを利用しながら、「donor元素添加」による改良した材料が本発明の範囲である。
原料:BaZrO3 (99.9%), CaCO3 (99.9%) BaCO3(99. 9%) and TiO2 (99.9%)
作り方:標準固相焼結法。合成は1350℃2時間、焼結は1450℃3時間。(合成温 度は1200℃―1400℃、焼結温度は1300℃―1500℃が必要)
電極:Ag電極
分極条件:Curie温度以上の温度(110℃)で試料にcoercive fieldより2倍程度の電場をかけながら試料を室温までゆっくり冷やす。
試料の形状とサイズ:試料の厚みは6.5mm、直径は8mmのディスクである。
圧電特性の測定方法: 圧電係数d33はZJ−6B型d33メーターによる測定。電場― 変位測定はRadiant Technologies社Workstation及びMTI2000光学変位センサーによる測定。
この図で明らかになったように、本発明の非鉛圧電材料は他の非鉛圧電材料より2倍から数倍以上の圧電特性を持つだけでなく、殆どのPZTも凌駕する圧電特性を持っている。この図は本発明の先進性をよく表す。
電場―変位関係は大きい電場下の圧電特性を表す。この図より、本発明の非鉛圧電材料の大電場下の圧電特性はすべてのPZTより大きく上回ることが分かる。
MPB付近のこの三組成は70℃まで大きな圧電係数を維持していることがわかる。従って、本発明の非鉛圧電材料は室温付近の応用に適している。
家電製品や時計の電子音源
魚群探知機やソナーなどの水中探査源
ガスライターの着火源
金属 ・ コンクリート ・ 地殻など固体中の探査源
加湿器や吸入器の霧化源
各種洗浄機の超音波源
自動車のバック ・ コーナーセンサ
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Claims (2)
- Pb等の有害元素を含まない非鉛系圧電材料であって、Ba(Zr 0.2 Ti 0.8 )O 3 −δ%(Ba 0.7 Ca 0.3 )TiO 3 の擬二元系固溶体(略称BZT−δ%BCT)からなり、δが50であることを特徴とする非鉛系圧電材料。
- 請求項1に記載の非鉛系圧電材料において、擬二元系固溶体は、結晶相境界(morphotrophic phase boundary、MPB)が存在することを特徴とする非鉛系圧電材料。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2008061044A JP5344456B2 (ja) | 2008-03-11 | 2008-03-11 | 非鉛系圧電材料 |
US12/921,465 US8182713B2 (en) | 2008-03-11 | 2009-03-10 | Lead-free piezoelectric material |
EP09718943.5A EP2251313B1 (en) | 2008-03-11 | 2009-03-10 | Non-lead-type piezoelectric material |
CN2009801088731A CN101970374B (zh) | 2008-03-11 | 2009-03-10 | 非铅类压电材料 |
KR1020107022502A KR101251745B1 (ko) | 2008-03-11 | 2009-03-10 | 비연계 압전 재료 |
PCT/JP2009/054540 WO2009113535A1 (ja) | 2008-03-11 | 2009-03-10 | 非鉛系圧電材料 |
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JP2008061044A JP5344456B2 (ja) | 2008-03-11 | 2008-03-11 | 非鉛系圧電材料 |
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JP2009215111A JP2009215111A (ja) | 2009-09-24 |
JP5344456B2 true JP5344456B2 (ja) | 2013-11-20 |
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JP2008061044A Expired - Fee Related JP5344456B2 (ja) | 2008-03-11 | 2008-03-11 | 非鉛系圧電材料 |
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US (1) | US8182713B2 (ja) |
EP (1) | EP2251313B1 (ja) |
JP (1) | JP5344456B2 (ja) |
KR (1) | KR101251745B1 (ja) |
CN (1) | CN101970374B (ja) |
WO (1) | WO2009113535A1 (ja) |
Cited By (8)
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EP2953177A1 (en) | 2014-05-30 | 2015-12-09 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic device |
US9614141B2 (en) | 2015-01-09 | 2017-04-04 | Canon Kabushiki Kaisha | Piezoelectric ceramic, piezoelectric element, piezoelectric device and piezoelectric ceramic manufacturing method |
EP3174191A1 (en) | 2015-11-27 | 2017-05-31 | Canon Kabushiki Kaisha | Ultrasonic motor with annular piezoelectric vibrator for optical apparatus |
US9698337B2 (en) | 2015-01-09 | 2017-07-04 | Canon Kabushiki Kaisha | Piezoelectric ceramic, piezoelectric element, and electronic appliance |
US9981292B2 (en) | 2014-05-30 | 2018-05-29 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, method for manufacturing piezoelectric element, and electronic device |
US10516091B2 (en) | 2015-11-27 | 2019-12-24 | Canon Kabushiki Kaisha | Ultrasonic motor, drive control system, optical apparatus, and vibrator |
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US11647677B2 (en) | 2018-06-08 | 2023-05-09 | Canon Kabushiki Kaisha | Piezoelectric ceramics, piezoelectric element, and electronic apparatus |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2011181764A (ja) * | 2010-03-02 | 2011-09-15 | Tdk Corp | 圧電体素子及びその製造方法 |
JP2011243722A (ja) * | 2010-05-18 | 2011-12-01 | Seiko Epson Corp | 圧電素子、液滴噴射ヘッドおよび液滴噴射装置 |
CN101935212A (zh) * | 2010-09-09 | 2011-01-05 | 西北工业大学 | 一种锆钛酸钡钙无铅压电陶瓷及其制备方法 |
JP5979992B2 (ja) | 2011-07-05 | 2016-08-31 | キヤノン株式会社 | 圧電材料 |
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CN101970374A (zh) | 2011-02-09 |
EP2251313B1 (en) | 2014-07-30 |
EP2251313A1 (en) | 2010-11-17 |
JP2009215111A (ja) | 2009-09-24 |
US20110037015A1 (en) | 2011-02-17 |
CN101970374B (zh) | 2013-11-06 |
KR20110016864A (ko) | 2011-02-18 |
WO2009113535A1 (ja) | 2009-09-17 |
KR101251745B1 (ko) | 2013-04-05 |
EP2251313A4 (en) | 2012-11-21 |
US8182713B2 (en) | 2012-05-22 |
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