ITUB20156052A1 - Soluzione precursore e metodo per la preparazione di un materiale piezoelettrico privo di piombo - Google Patents

Soluzione precursore e metodo per la preparazione di un materiale piezoelettrico privo di piombo

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Publication number
ITUB20156052A1
ITUB20156052A1 ITUB2015A006052A ITUB20156052A ITUB20156052A1 IT UB20156052 A1 ITUB20156052 A1 IT UB20156052A1 IT UB2015A006052 A ITUB2015A006052 A IT UB2015A006052A IT UB20156052 A ITUB20156052 A IT UB20156052A IT UB20156052 A1 ITUB20156052 A1 IT UB20156052A1
Authority
IT
Italy
Prior art keywords
lead
preparation
piezoelectric material
precursor solution
free piezoelectric
Prior art date
Application number
ITUB2015A006052A
Other languages
English (en)
Inventor
Angela Cimmino
Giovanna Salzillo
Valeria Casuscelli
Matteo Andrea Di
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUB2015A006052A priority Critical patent/ITUB20156052A1/it
Priority to EP16175558.2A priority patent/EP3176142B1/en
Priority to US15/192,648 priority patent/US10696597B2/en
Priority to CN202011253180.6A priority patent/CN112374885B/zh
Priority to CN201610509925.8A priority patent/CN106810252B/zh
Priority to US15/582,124 priority patent/US20170236994A1/en
Publication of ITUB20156052A1 publication Critical patent/ITUB20156052A1/it

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ITUB2015A006052A 2015-12-01 2015-12-01 Soluzione precursore e metodo per la preparazione di un materiale piezoelettrico privo di piombo ITUB20156052A1 (it)

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US10696597B2 (en) 2015-12-01 2020-06-30 Stmicroelectronics S.R.L. Precursor solution and method for the preparation of a lead-free piezoelectric material
ITUB20156052A1 (it) * 2015-12-01 2017-06-01 St Microelectronics Srl Soluzione precursore e metodo per la preparazione di un materiale piezoelettrico privo di piombo
ITUB20156056A1 (it) * 2015-12-01 2017-06-01 St Microelectronics Srl Soluzione precursore da precursori anidri o deidrati e metodo per la preparazione di un materiale piezoelettrico privo di piombo
CN110776913B (zh) * 2019-11-21 2022-04-12 上海大学(浙江·嘉兴)新兴产业研究院 一种BaTiO3量子点的制备方法
CN112397643B (zh) * 2020-11-17 2023-04-18 武汉理工大学 一种在室温附近具有高电卡效应的薄膜材料及其制备方法
IT202100009503A1 (it) * 2021-04-15 2022-10-15 St Microelectronics Srl Metodo per la preparazione di un materiale piezoelettrico privo di piombo e soluzione precursore

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808315A (en) * 1986-04-28 1989-02-28 Asahi Kasei Kogyo Kabushiki Kaisha Porous hollow fiber membrane and a method for the removal of a virus by using the same
WO1990013149A1 (en) * 1989-04-27 1990-11-01 Queen's University At Kingston SOL GEL PROCESS FOR PREPARING Pb(Zr,Ti)O3 THIN FILMS
CN1267654A (zh) * 2000-04-06 2000-09-27 中国科学院上海技术物理研究所 锆钛酸铅铁电薄膜材料的制备方法
FR2881133B1 (fr) * 2005-01-27 2007-03-02 Commissariat Energie Atomique Procede de preparation de solutions sol-gel stable precurseurs de ceramiques oxydes a base de plomb, de titane, de zirconium et de lanthanide(s) et procede de preparation de ladite ceramique
JP2008094972A (ja) * 2006-10-12 2008-04-24 Adeka Corp 塗布液および該塗布液を用いたチタン酸系セラミックス膜の製造方法
JP5344456B2 (ja) 2008-03-11 2013-11-20 独立行政法人物質・材料研究機構 非鉛系圧電材料
JP4924543B2 (ja) * 2008-06-09 2012-04-25 住友金属鉱山株式会社 誘電体膜形成用塗布液の製造方法
CN103265282A (zh) * 2013-05-14 2013-08-28 齐齐哈尔大学 一种钛酸钡钙和铌酸钾钠交替旋涂无铅压电厚膜的制备方法
CN104098331B (zh) * 2014-07-15 2016-08-17 东南大学 锆钛酸钡钙无铅压电薄膜的制备方法
ITUB20156052A1 (it) * 2015-12-01 2017-06-01 St Microelectronics Srl Soluzione precursore e metodo per la preparazione di un materiale piezoelettrico privo di piombo

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
GAO L N ET AL: "Study of dielectric characteristics of graded Ba1-xCaxZr0.05Ti0.95O3 thin films grown by a sol-gel process", JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, KLUWER ACADEMIC PUBLISHERS, BO, vol. 45, no. 1, 14 November 2007 (2007-11-14), pages 51 - 55, XP019577711, ISSN: 1573-4846 *
GUANGQING KANG ET AL: "(1 - x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 Ferroelectric Thin Films Prepared from Chemical Solutions", JOURNAL OF THE AMERICAN CERAMIC SOCIETY., 1 October 2011 (2011-10-01), US, pages n/a - n/a, XP055289467, ISSN: 0002-7820, DOI: 10.1111/j.1551-2916.2011.04877.x *
HONGGUANG WANG ET AL: "Infrared optical properties of ferroelectric 0.5BaZr0.2Ti0.8O3-0.5Ba0.7Ca0.3TiO3 thin films", CERAMICS INTERNATIONAL., vol. 41, no. 1, 1 January 2015 (2015-01-01), NL, pages 475 - 480, XP055289561, ISSN: 0272-8842, DOI: 10.1016/j.ceramint.2014.08.094 *
JALALIAN A ET AL: "Ferroelectric and Ferromagnetic Nanofibers: Synthesis, Properties and Applications", JOURNAL OF PHYSICS: CONFERENCE SERIES, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 352, no. 1, 5 March 2012 (2012-03-05), pages 12006, XP020220205, ISSN: 1742-6596, DOI: 10.1088/1742-6596/352/1/012006 *
KLARA CASTKOVA ET AL: "Chemical Synthesis, Sintering and Piezoelectric Properties of Ba 0.85 Ca 0.15 Zr 0.1 Ti 0.9 O 3 Lead-Free Ceramics", JOURNAL OF THE AMERICAN CERAMIC SOCIETY., vol. 98, no. 8, 8 May 2015 (2015-05-08), US, pages 2373 - 2380, XP055289661, ISSN: 0002-7820, DOI: 10.1111/jace.13642 *
TOYODA M ET AL: "Preparation and characterization of (Ba,Ca)(Ti,Zr)O3 thin films through sol-gel processing", JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, SPRINGER, NEW YORK, NY, US, vol. 16, no. 1-2, 1 October 1999 (1999-10-01), pages 7 - 12, XP002278132, ISSN: 0928-0707, DOI: 10.1023/A:1008700802301 *
TUNG-HSIEN HSIEH ET AL: "A study on the synthesis of (Ba,Ca)(Ti,Zr)O nano powders using Pechini polymeric precursor method", CERAMICS INTERNATIONAL, ELSEVIER, AMSTERDAM, NL, vol. 38, no. 1, 1 August 2011 (2011-08-01), pages 755 - 759, XP028118693, ISSN: 0272-8842, [retrieved on 20110809], DOI: 10.1016/J.CERAMINT.2011.08.001 *
WEIWEI WU ET AL: "Electrospinning lead-free 0.5Ba(Zr0.2Ti0.8)O3-0.5(Ba0.7Ca0.3)TiO3 nanowires and their application in energy harvesting", JOURNAL OF MATERIALS CHEMISTRY A: MATERIALS FOR ENERGY AND SUSTAINABILITY, vol. 1, no. 25, 1 January 2013 (2013-01-01), GB, pages 7332, XP055289278, ISSN: 2050-7488, DOI: 10.1039/c3ta10792b *

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