JP5335576B2 - 半導体ウエーハの加工方法 - Google Patents
半導体ウエーハの加工方法 Download PDFInfo
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- JP5335576B2 JP5335576B2 JP2009152714A JP2009152714A JP5335576B2 JP 5335576 B2 JP5335576 B2 JP 5335576B2 JP 2009152714 A JP2009152714 A JP 2009152714A JP 2009152714 A JP2009152714 A JP 2009152714A JP 5335576 B2 JP5335576 B2 JP 5335576B2
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- Prior art keywords
- wafer
- support member
- bonded wafer
- semiconductor
- bonded
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
Description
波長 :1064nm
繰り返し周波数 :100kHz
パルス幅 :40ns
平均出力 :1W
集光スポット径 :φ1μm
加工送り速度 :100mm/秒
6 半導体回路
8 埋め込み電極
8´ 貫通電極
18 分割溝
20 支持部材
24 貼り合わせウエーハ
30 レーザビーム照射ユニット
34 集光器(レーザ照射ヘッド)
38 変質層
52 環状フレーム
54 粘着テープ
60 分割装置
Claims (2)
- 表面に格子状に形成された複数の分割予定ラインによって区画された複数の半導体回路を有し、該各半導体回路は、該半導体回路から少なくとも半導体デバイスの仕上がり厚さ以上の深さに埋設された複数の埋め込み電極を有し、ウエーハ面内の厚さばらつきが所定の許容値内である半導体ウエーハの加工方法であって、
半導体デバイスの仕上がり厚さ以上の深さの分割溝を前記ウエーハの前記各分割予定ラインに沿って形成する分割溝形成ステップと、
円盤状の支持部材の表面を前記ウエーハの前記半導体回路を有する面に剥離可能な接着剤で接着して、貼り合わせウエーハを製造する貼り合わせウエーハ製造ステップと、
該貼り合わせウエーハの前記支持部材の裏面側から該支持部材に対して透過性を有する波長のレーザビームを前記分割予定ラインに沿って照射して、該支持部材の内部に変質層を形成する変質層形成ステップと、
前記支持部材の内部に変質層が形成された前記貼り合わせウエーハの前記ウエーハ側の裏面を研削装置のチャックテーブル上に直接載置して、該貼り合わせウエーハを吸引保持する貼り合わせウエーハ第1保持ステップと、
該貼り合わせウエーハの前記支持部材を研削して該貼り合わせウエーハの厚さばらつきを吸収する支持部材研削ステップと、
前記貼り合わせウエーハの前記支持部材の研削面を研削装置のチャックテーブル上に直接載置して、該貼り合わせウエーハを吸引保持する貼り合わせウエーハ第2保持ステップと、
該貼り合わせウエーハの前記ウエーハの裏面をデバイスの仕上がり厚さ相当に研削して、該ウエーハを個々の半導体デバイスに分割するウエーハ研削ステップと、
前記貼り合わせウエーハの前記支持部材の裏面をエッチング装置のチャックテーブル上に直接載置して、個々の半導体デバイスに分割された該ウエーハをエッチングして、ウエーハの裏面から前記埋め込み電極を突出させるエッチングステップと、
該貼り合わせウエーハに外力を付与して、該貼り合わせウエーハの前記支持部材を該支持部材の内部に形成された前記変質層に沿って破断する支持部材破断ステップと、
を具備した半導体ウエーハの加工方法。 - 前記支持部材破断ステップは、前記貼り合わせウエーハの前記支持部材の裏面を環状のフレームに装着されたダイシングテープの表面に接着する貼り合わせウエーハ支持ステップと、
該ダイシングテープを半径方向に拡張して該支持部材に外力を付与し、該支持部材を前記変質層に沿って破断するダイシングテープ拡張ステップとを含んでいる請求項1記載の半導体ウエーハの加工方法。
Priority Applications (2)
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JP2009152714A JP5335576B2 (ja) | 2009-06-26 | 2009-06-26 | 半導体ウエーハの加工方法 |
DE102010030339.9A DE102010030339B4 (de) | 2009-06-26 | 2010-06-22 | Bearbeitungsverfahren für Halbleiterwafer |
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JP2009152714A JP5335576B2 (ja) | 2009-06-26 | 2009-06-26 | 半導体ウエーハの加工方法 |
Publications (2)
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JP2011009562A JP2011009562A (ja) | 2011-01-13 |
JP5335576B2 true JP5335576B2 (ja) | 2013-11-06 |
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JP2009152714A Active JP5335576B2 (ja) | 2009-06-26 | 2009-06-26 | 半導体ウエーハの加工方法 |
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JP (1) | JP5335576B2 (ja) |
DE (1) | DE102010030339B4 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4852178B1 (ja) * | 2011-04-26 | 2012-01-11 | 株式会社テクノホロン | ダイシング装置 |
JP6435545B2 (ja) * | 2014-08-01 | 2018-12-12 | リンテック株式会社 | 個片体製造方法 |
JP6821261B2 (ja) * | 2017-04-21 | 2021-01-27 | 株式会社ディスコ | 被加工物の加工方法 |
DE102017130929A1 (de) * | 2017-12-21 | 2019-06-27 | RF360 Europe GmbH | Verfahren zum Produzieren einer funktionalen Dünnfilmschicht |
JP2020057709A (ja) * | 2018-10-03 | 2020-04-09 | 株式会社ディスコ | ウェーハの加工方法 |
JP2021008013A (ja) * | 2019-07-02 | 2021-01-28 | 株式会社ディスコ | ウェーハの加工方法 |
WO2024058094A1 (ja) * | 2022-09-14 | 2024-03-21 | リンテック株式会社 | 半導体装置の製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0724262B2 (ja) * | 1987-01-30 | 1995-03-15 | 日本電気株式会社 | 半導体素子の製造方法 |
JP4035066B2 (ja) | 2003-02-04 | 2008-01-16 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP4261260B2 (ja) * | 2003-06-26 | 2009-04-30 | 日東電工株式会社 | 半導体ウエハの研削方法および半導体ウエハ研削用粘着シート |
JP4333466B2 (ja) * | 2004-04-22 | 2009-09-16 | 日立電線株式会社 | 半導体基板の製造方法及び自立基板の製造方法 |
JP2006196701A (ja) * | 2005-01-13 | 2006-07-27 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JP2006245209A (ja) * | 2005-03-02 | 2006-09-14 | Disco Abrasive Syst Ltd | 半導体チップの製造方法 |
JP2006253402A (ja) * | 2005-03-10 | 2006-09-21 | Nec Electronics Corp | 半導体装置の製造方法 |
JP2008130704A (ja) | 2006-11-20 | 2008-06-05 | Sony Corp | 半導体装置の製造方法 |
JP2009043992A (ja) * | 2007-08-09 | 2009-02-26 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP4732423B2 (ja) * | 2007-11-13 | 2011-07-27 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP5231136B2 (ja) * | 2008-08-22 | 2013-07-10 | 株式会社ディスコ | 光デバイスウエーハの加工方法 |
JP5221279B2 (ja) * | 2008-10-22 | 2013-06-26 | 株式会社ディスコ | 積層デバイスの製造方法 |
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JP2011009562A (ja) | 2011-01-13 |
DE102010030339B4 (de) | 2019-08-22 |
DE102010030339A1 (de) | 2010-12-30 |
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