JP5308814B2 - サーモパイル赤外線センサアレイ - Google Patents
サーモパイル赤外線センサアレイ Download PDFInfo
- Publication number
- JP5308814B2 JP5308814B2 JP2008511546A JP2008511546A JP5308814B2 JP 5308814 B2 JP5308814 B2 JP 5308814B2 JP 2008511546 A JP2008511546 A JP 2008511546A JP 2008511546 A JP2008511546 A JP 2008511546A JP 5308814 B2 JP5308814 B2 JP 5308814B2
- Authority
- JP
- Japan
- Prior art keywords
- thermopile
- sensor array
- infrared sensor
- sensor
- thermopile infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/20—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming only infrared radiation into image signals
- H04N25/21—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming only infrared radiation into image signals for transforming thermal infrared radiation into image signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005023333.3 | 2005-05-17 | ||
| DE102005023333 | 2005-05-17 | ||
| PCT/DE2006/000841 WO2006122529A2 (de) | 2005-05-17 | 2006-05-16 | Thermopile infrarot sensorarray |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008541102A JP2008541102A (ja) | 2008-11-20 |
| JP2008541102A5 JP2008541102A5 (enExample) | 2011-08-18 |
| JP5308814B2 true JP5308814B2 (ja) | 2013-10-09 |
Family
ID=36691904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008511546A Expired - Fee Related JP5308814B2 (ja) | 2005-05-17 | 2006-05-16 | サーモパイル赤外線センサアレイ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7842922B2 (enExample) |
| JP (1) | JP5308814B2 (enExample) |
| DE (1) | DE112006000959B4 (enExample) |
| WO (1) | WO2006122529A2 (enExample) |
Families Citing this family (59)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5540406B2 (ja) * | 2007-03-21 | 2014-07-02 | セイコーNpc株式会社 | 赤外線センサ装置 |
| DE102007025585A1 (de) * | 2007-06-01 | 2008-12-04 | Siemens Ag | Verfahren zum Betreiben eines Verbrennungsmotors und Vorrichtung zur Bestimmung eines Betriebsparameters dessen |
| DE102007039228B8 (de) | 2007-08-20 | 2009-12-17 | Perkinelmer Optoelectronics Gmbh & Co.Kg | Sensorkappenanordnung Sensor Schaltung |
| JP2009079946A (ja) * | 2007-09-26 | 2009-04-16 | Seiko Npc Corp | サーモパイル型赤外線センサ |
| EP2169369A1 (en) * | 2008-09-25 | 2010-03-31 | General Electric Company | Miniature thermopile sensor |
| JP2012523692A (ja) * | 2009-04-12 | 2012-10-04 | ユーディー ホールディングス,エルエルシー | 赤外線検出器 |
| US8395118B2 (en) | 2009-04-12 | 2013-03-12 | Ud Holdings, Llc | Infrared detector having at least one switch for modulation and/or bypass |
| US8136984B1 (en) * | 2009-04-20 | 2012-03-20 | Fluke Corporation | Portable IR thermometer having thermal imaging capability |
| DE102010042108B4 (de) * | 2010-01-18 | 2013-10-17 | Heimann Sensor Gmbh | Thermopile-Infrarot-Sensor in monolithischer Si-Mikromechanik |
| JP5645245B2 (ja) * | 2010-02-23 | 2014-12-24 | パナソニックIpマネジメント株式会社 | 赤外線センサモジュール |
| JP5842118B2 (ja) * | 2010-06-24 | 2016-01-13 | パナソニックIpマネジメント株式会社 | 赤外線センサ |
| US9083278B2 (en) * | 2010-07-05 | 2015-07-14 | Stmicroelectronics S.R.L. | Device for transforming electromagnetic IR energy from spatially incoherent, low-power density, broad-band radiation in spatially coherent, high-power density, quasi-monochromatic radiation |
| US8927934B2 (en) * | 2010-09-13 | 2015-01-06 | Ricoh Company, Ltd. | Thermal infrared sensor and manufacturing method thereof |
| FR2966596B1 (fr) * | 2010-10-26 | 2012-12-07 | Commissariat Energie Atomique | Dispositif de detection d'un rayonnement electromagnetique. |
| US20150122999A1 (en) * | 2010-12-22 | 2015-05-07 | Seiko Epson Corporation | Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method |
| KR20120100643A (ko) * | 2011-03-04 | 2012-09-12 | 한국과학기술원 | Sa-FPA를 이용한 적외선 감지기 및 이의 제조 방법 |
| US9444027B2 (en) | 2011-10-04 | 2016-09-13 | Infineon Technologies Ag | Thermoelectrical device and method for manufacturing same |
| CN102509729B (zh) * | 2011-11-21 | 2014-02-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | 可调谐热光带通滤波器像素阵列的制作方法 |
| WO2013120652A1 (de) * | 2012-02-16 | 2013-08-22 | Heimann Sensor Gmbh | Thermopile infrarot-sensorstruktur mit hohem füllgrad |
| US9250126B2 (en) | 2012-10-26 | 2016-02-02 | Excelitas Technologies Singapore Pte. Ltd | Optical sensing element arrangement with integral package |
| GB2521476A (en) * | 2013-12-22 | 2015-06-24 | Melexis Technologies Nv | Infrared thermal sensor with good SNR |
| GB2521474A (en) * | 2013-12-22 | 2015-06-24 | Melexis Technologies Nv | Infrared thermal sensor with beams having different widths |
| JP2016151523A (ja) * | 2015-02-18 | 2016-08-22 | 浜松ホトニクス株式会社 | 赤外線検出装置 |
| US9978926B2 (en) | 2015-05-14 | 2018-05-22 | The Hong Kong University Of Science And Technology | Thermal radiation microsensor comprising thermoelectric micro pillars |
| JP6709285B2 (ja) * | 2015-10-05 | 2020-06-10 | ハイマン・ゼンゾル・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | モノリシックに集積された信号処理部を有する高解像度のサーモパイル赤外線センサアレイ |
| US10113837B2 (en) | 2015-11-03 | 2018-10-30 | N2 Imaging Systems, LLC | Non-contact optical connections for firearm accessories |
| EP4462360A3 (en) | 2016-01-20 | 2025-02-26 | Carrier Corporation | A building management system using object detection and tracking in a large space with a low resolution sensor |
| US10551246B2 (en) * | 2016-01-28 | 2020-02-04 | Ams Sensors Uk Limited | IR detector array device |
| US10128302B2 (en) | 2016-01-28 | 2018-11-13 | Ams Sensors Uk Limited | IR detector array device |
| WO2017139215A1 (en) | 2016-02-10 | 2017-08-17 | Carrier Corporation | Presence detection system |
| DE102016209315A1 (de) * | 2016-05-30 | 2017-11-30 | Robert Bosch Gmbh | Thermoelektrische Anordnung, insbesondere thermoelektrische Sensoranordnung, sowie entsprechendes Herstellungsverfahren |
| DE102017102833A1 (de) * | 2017-01-18 | 2018-07-19 | Heimann Sensor Gmbh | Hochauflösendes Thermopile Infrarot Sensorarray |
| US10403674B2 (en) | 2017-07-12 | 2019-09-03 | Meridian Innovation Pte Ltd | Scalable thermoelectric-based infrared detector |
| US10199424B1 (en) | 2017-07-19 | 2019-02-05 | Meridian Innovation Pte Ltd | Thermoelectric-based infrared detector having a cavity and a MEMS structure defined by BEOL metals lines |
| US10923525B2 (en) | 2017-07-12 | 2021-02-16 | Meridian Innovation Pte Ltd | CMOS cap for MEMS devices |
| RU2671295C1 (ru) * | 2017-08-17 | 2018-10-30 | Общество с ограниченной ответственностью "ГрафИмпресс" | Ячейка термопарного приемника ик изображения |
| WO2019087522A1 (ja) * | 2017-10-31 | 2019-05-09 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
| FR3073941B1 (fr) * | 2017-11-21 | 2021-01-15 | Commissariat Energie Atomique | Dispositif de detection d’un rayonnement electromagnetique a diaphotie reduite |
| US10436646B2 (en) | 2018-02-28 | 2019-10-08 | Ams Sensors Uk Limited | IR detector arrays |
| US12181351B2 (en) | 2018-02-28 | 2024-12-31 | Arthur Beckman | Thermopile assembly providing a massive electrical series of wire thermocouple elements |
| US10753709B2 (en) | 2018-05-17 | 2020-08-25 | Sensors Unlimited, Inc. | Tactical rails, tactical rail systems, and firearm assemblies having tactical rails |
| JP7142471B2 (ja) * | 2018-06-07 | 2022-09-27 | 浜松ホトニクス株式会社 | 光検出器 |
| JP7142470B2 (ja) * | 2018-06-07 | 2022-09-27 | 浜松ホトニクス株式会社 | 光検出器 |
| US10645348B2 (en) | 2018-07-07 | 2020-05-05 | Sensors Unlimited, Inc. | Data communication between image sensors and image displays |
| US11079202B2 (en) | 2018-07-07 | 2021-08-03 | Sensors Unlimited, Inc. | Boresighting peripherals to digital weapon sights |
| US10742913B2 (en) | 2018-08-08 | 2020-08-11 | N2 Imaging Systems, LLC | Shutterless calibration |
| US10921578B2 (en) | 2018-09-07 | 2021-02-16 | Sensors Unlimited, Inc. | Eyecups for optics |
| US11122698B2 (en) | 2018-11-06 | 2021-09-14 | N2 Imaging Systems, LLC | Low stress electronic board retainers and assemblies |
| US10801813B2 (en) | 2018-11-07 | 2020-10-13 | N2 Imaging Systems, LLC | Adjustable-power data rail on a digital weapon sight |
| US10796860B2 (en) | 2018-12-12 | 2020-10-06 | N2 Imaging Systems, LLC | Hermetically sealed over-molded button assembly |
| US11143838B2 (en) | 2019-01-08 | 2021-10-12 | N2 Imaging Systems, LLC | Optical element retainers |
| US11845653B2 (en) | 2019-04-01 | 2023-12-19 | Meridian Innovation Pte Ltd | Heterogenous integration of complementary metal-oxide-semiconductor and MEMS sensors |
| CN113677618B (zh) | 2019-04-01 | 2025-01-10 | 迈瑞迪创新科技有限公司 | 基于热电的红外探测器的单片后互补金属氧化物-半导体集成 |
| JP7316830B2 (ja) * | 2019-04-18 | 2023-07-28 | 三菱電機株式会社 | 誘導加熱調理器 |
| KR102826379B1 (ko) | 2019-07-09 | 2025-06-26 | 하이만 센서 게엠베하 | 진공 충전 웨이퍼 레벨 하우징 내에 열 적외선 센서 어레이를 생산하는 방법 |
| TWI734316B (zh) | 2019-12-24 | 2021-07-21 | 新唐科技股份有限公司 | 熱感測器及其製造方法 |
| CN114257242A (zh) * | 2020-09-22 | 2022-03-29 | 无锡华润上华科技有限公司 | 热电堆阵列及其信号读出电路 |
| CN112701211B (zh) * | 2020-12-29 | 2023-04-28 | 上海烨映微电子科技股份有限公司 | 红外热电堆封装结构及方法 |
| US11808633B2 (en) * | 2021-08-16 | 2023-11-07 | Oriental System Technology Inc. | Infrared thermopile sensor |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02144966A (ja) * | 1988-11-28 | 1990-06-04 | Matsushita Electron Corp | 半導体集積回路 |
| JPH0634661Y2 (ja) * | 1989-11-30 | 1994-09-07 | 新日本無線株式会社 | サーモパイル素子 |
| DE4102524C2 (de) * | 1990-01-30 | 2000-05-25 | Citizen Watch Co Ltd | Infrarotsensor |
| JPH0626925A (ja) * | 1992-07-06 | 1994-02-04 | Fujitsu Ltd | 赤外線検出器 |
| WO1994007115A1 (fr) * | 1992-09-17 | 1994-03-31 | Mitsubishi Denki Kabushiki Kaisha | Reseau de detecteurs a infrarouge et son procede de production |
| JPH06137935A (ja) * | 1992-10-22 | 1994-05-20 | Matsushita Electric Works Ltd | 赤外線センサ |
| DE19630150B4 (de) * | 1995-07-28 | 2009-03-05 | Denso Corp., Kariya-shi | Verfahren zum Entwerfen einer Halbleitervorrichtung |
| US5962854A (en) * | 1996-06-12 | 1999-10-05 | Ishizuka Electronics Corporation | Infrared sensor and infrared detector |
| US5808350A (en) * | 1997-01-03 | 1998-09-15 | Raytheon Company | Integrated IR, visible and NIR sensor and methods of fabricating same |
| JPH10227689A (ja) * | 1997-02-17 | 1998-08-25 | Mitsubishi Electric Corp | 赤外線検出器および赤外線フォーカルプレーンアレイ |
| ATE250213T1 (de) * | 1997-02-28 | 2003-10-15 | Em Microelectronic Marin Sa | Thermoelektrischer fühler |
| JP3097591B2 (ja) * | 1997-03-31 | 2000-10-10 | 日本電気株式会社 | 熱型赤外線検出素子 |
| DE19735379B4 (de) * | 1997-08-14 | 2008-06-05 | Perkinelmer Optoelectronics Gmbh | Sensorsystem und Herstellungsverfahren |
| JPH11148868A (ja) * | 1997-11-17 | 1999-06-02 | Masanori Okuyama | 熱検知素子およびその製造方法 |
| DE19923606A1 (de) | 1998-06-30 | 2000-01-13 | Bosch Gmbh Robert | Vorrichtung zur Erfassung elektromagnetischer Strahlung |
| CN1258820C (zh) | 1998-06-30 | 2006-06-07 | 罗伯特·博施有限公司 | 电磁辐射的探测装置 |
| DE19843984B4 (de) * | 1998-09-25 | 2013-10-24 | Robert Bosch Gmbh | Verfahren zur Herstellung von Strahlungssensoren |
| JP2000186958A (ja) * | 1998-12-24 | 2000-07-04 | Sharp Corp | 熱型赤外線検出素子 |
| JP2000298062A (ja) * | 1999-04-14 | 2000-10-24 | Nec Corp | 熱型機能デバイス、エネルギー検出装置および熱型機能デバイスの駆動方法 |
| US6504153B1 (en) * | 1999-07-26 | 2003-01-07 | Kabushiki Kaisha Toshiba | Semiconductor infrared detecting device |
| JP3523588B2 (ja) * | 1999-11-01 | 2004-04-26 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| JP2001296184A (ja) * | 2000-04-17 | 2001-10-26 | Denso Corp | 赤外線検出装置 |
| JP2001304973A (ja) | 2000-04-26 | 2001-10-31 | Denso Corp | 赤外線イメージセンサ |
| JP2001326367A (ja) * | 2000-05-12 | 2001-11-22 | Denso Corp | センサおよびその製造方法 |
| JP3655232B2 (ja) * | 2001-11-15 | 2005-06-02 | 株式会社東芝 | 赤外線センサ |
| US6649913B1 (en) | 2002-02-26 | 2003-11-18 | Raytheon Company | Method and apparatus providing focal plane array active thermal control elements |
| JP2004144715A (ja) * | 2002-10-28 | 2004-05-20 | Ishizuka Electronics Corp | 赤外線検出装置 |
| JP4231681B2 (ja) * | 2002-11-22 | 2009-03-04 | 株式会社堀場製作所 | サーモパイルアレイセンサ |
| DE10321639A1 (de) | 2003-05-13 | 2004-12-02 | Heimann Sensor Gmbh | Infrarotsensor mit optimierter Flächennutzung |
| DE10322860B4 (de) | 2003-05-21 | 2005-11-03 | X-Fab Semiconductor Foundries Ag | Schaltungsanordnung zum Auslesen elektronischer Signale aus hochauflösenden thermischen Sensoren |
-
2006
- 2006-05-16 WO PCT/DE2006/000841 patent/WO2006122529A2/de not_active Ceased
- 2006-05-16 DE DE112006000959T patent/DE112006000959B4/de not_active Expired - Fee Related
- 2006-05-16 JP JP2008511546A patent/JP5308814B2/ja not_active Expired - Fee Related
- 2006-05-16 US US11/913,443 patent/US7842922B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20080216883A1 (en) | 2008-09-11 |
| DE112006000959A5 (de) | 2008-01-24 |
| WO2006122529A2 (de) | 2006-11-23 |
| US7842922B2 (en) | 2010-11-30 |
| WO2006122529A3 (de) | 2007-01-25 |
| JP2008541102A (ja) | 2008-11-20 |
| DE112006000959B4 (de) | 2012-03-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100527 |
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| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100826 |
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