JP5306224B2 - コンプライアンスを有するマイクロ電子アセンブリ及びそのための方法 - Google Patents
コンプライアンスを有するマイクロ電子アセンブリ及びそのための方法 Download PDFInfo
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- JP5306224B2 JP5306224B2 JP2009542929A JP2009542929A JP5306224B2 JP 5306224 B2 JP5306224 B2 JP 5306224B2 JP 2009542929 A JP2009542929 A JP 2009542929A JP 2009542929 A JP2009542929 A JP 2009542929A JP 5306224 B2 JP5306224 B2 JP 5306224B2
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- conductive
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- dielectric
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- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Description
本出願は、その開示内容を引用することにより本明細書の一部をなすものとするMICROELECTRONIC ASSEMBLIES HAVING COMPLIANCY AND METHODS THEREFORと題される2006年12月20日に出願された出願第11/643,021号の利益を主張する。本出願は、その開示内容を引用することにより本明細書の一部をなすものとする2006年2月23日に出願された米国特許出願第11/360,230号に関連する。
本発明は、ウエハレベル半導体チップパッケージングに関する。特に、本発明は、改良されたコンプライアントウエハおよびコンプライアント半導体パッケージ構造と、該構造を形成するための方法とに関する。
Claims (40)
- マイクロ電子アセンブリを形成する方法であって、
第1の表面と該第1の表面でアクセスできる接点とを有するマイクロ電子素子を設けるステップと、
前記マイクロ電子素子の第1の表面上にわたってコンプライアント誘電バンプを設けるステップと、
前記コンプライアント誘電バンプ上および前記マイクロ電子素子の第1の表面上にわたって犠牲層を堆積させ、前記犠牲層が前記コンプライアント誘電バンプを覆うようにするステップと、
前記犠牲層および前記コンプライアント誘電バンプを研削して、前記コンプライアント誘電バンプの上面を平坦化し、前記コンプライアント誘電バンプの平坦化された上面を露出させるステップと、
研削ステップ後に、前記犠牲層のうちの少なくとも一部を除去して、前記接点の少なくともいくつかを露出させるステップと、
前記接点と電気的に接続される第1の端部と前記コンプライアント誘電バンプの平坦化された上面に位置する第2の端部とを有する導電トレースを形成するステップと
を含む、マイクロ電子アセンブリを形成する方法。 - 前記導電トレースの第2の端部に接触する導電要素を設けるステップを更に含む、請求項1に記載の方法。
- 前記導電要素は、半田球と導電ポストと導電ピンとから成るグループから選択される請求項2に記載の方法。
- 前記犠牲層を除去するステップ中に前記ウエハ上の前記接点が露出されるものである請求項1に記載の方法。
- 前記コンプライアント誘電バンプは、平坦化された上面を取り囲む傾斜した側面を有し、前記犠牲層を除去するステップ中に傾斜した側面が露出されるものである請求項1に記載の方法。
- 前記犠牲層を除去するステップの後、前記マイクロ電子素子の第1の表面上および前記コンプライアント誘電バンプ上にわたってシリコーン層を堆積させるステップと、
前記マイクロ電子素子の第1の表面に前記接点を露出させるために前記シリコーン層を選択的に除去するステップと
を更に含む請求項1に記載の方法。 - 前記マイクロ電子素子が半導体ウエハを備えるものである請求項1に記載の方法。
- 前記マイクロ電子素子が少なくとも1つのメモリチップを備えるものである請求項1に記載の方法。
- 前記マイクロ電子素子が少なくとも1つのDDRチップを備えるものである請求項1に記載の方法。
- 前記半導体ウエハをダイスカットすることを更に含む請求項7に記載の方法。
- 前記導電トレースの第2の端部に接触する導電ポストを設けるステップを更に含み、前記導電ポストは、前記コンプライアント誘電バンプ上に位置するとともに、前記マイクロ電子素子の第1の表面から離れて突出し、前記導電ポストが前記マイクロ電子素子の前記接点と電気的に相互接続されるものである請求項1に記載の方法。
- 前記導電ポストは、前記マイクロ電子アセンブリにおける最も高いポイントを規定するチップを有するものである請求項11に記載の方法。
- 前記コンプライアント誘電バンプを設けるステップは、
弾性率が低い材料の層を堆積させ、
前記コンプライアント誘電バンプを形成するために低弾性率材料の前記層の一部を選択的に除去する、
ことを含む、請求項1に記載の方法。 - 前記コンプライアント誘電バンプを設けるステップは、
硬化可能な材料から成るバンプを前記マイクロ電子素子の第1の表面上にスクリーン印刷し、
前記硬化可能な材料を硬化させて、前記コンプライアント誘電バンプを形成する、
ことを含む、請求項1に記載の方法。 - 前記犠牲層が光画像化可能層を備えるものである請求項1に記載の方法。
- 前記犠牲層がシリコーンを備えるものである請求項15に記載の方法。
- 前記コンプライアント誘電バンプは、シリコーンと、軟化エポキシと、ポリイミドと、熱硬化性高分子と、フッ素重合体と、熱可塑性高分子とから成るグループから選択される材料を備えるものである請求項1に記載の方法。
- 研削ステップの後、前記コンプライアント誘電バンプは略平坦な上面を有している請求項1に記載の方法。
- 前記導電トレースは、銅と金とニッケルと合金、および、これらの組み合わせ、並びに、これらの複合体から成るグループから選択される材料を備えるものである請求項1に記載の方法。
- 前記導電ポストのそれぞれは、前記コンプライアント誘電バンプのうちの1つに隣接するベースと、前記コンプライアント誘電バンプのうちの1つから離れたチップとを有するものである請求項1に記載の方法。
- 前記導電ポストのそれぞれが50〜300ミクロンの範囲内の高さを有するものである請求項19に記載の方法。
- 前記導電ポストのうちの少なくとも1つは、100〜600ミクロンの直径を有するベースと40〜200ミクロンの直径を有するチップとを有する円錐台形状を成している請求項19に記載の方法。
- 前記導電要素は、銅、銅合金、金、および、これらの組み合わせから成るグループから選択される材料を備える、請求項1に記載の方法。
- マイクロ電子アセンブリを形成する方法であって、
第1の表面と該第1の表面でアクセスできる接点とを有するマイクロ電子素子を設けるステップと、
前記マイクロ電子素子の第1の表面上にわたって誘電バンプを設けるステップと、
前記誘電バンプ上にわたって犠牲層を堆積させるステップと、
前記犠牲層および前記誘電バンプを研削して、前記誘電バンプの上面を平坦化し、平坦化された上面を露出させるステップと、
研削ステップ後に、前記犠牲層のうちの少なくとも一部を除去して、前記誘電バンプおよび前記接点を露出させるステップと、
前記マイクロ電子素子の第1の表面上および前記誘電バンプ上にわたって誘電層を堆積させるステップと、
前記マイクロ電子素子の第1の表面に前記接点を露出させるために前記誘電層を選択的に除去するステップと、
前記接点と電気的に接続される第1の端部と前記誘電バンプの平坦化された上面に位置する第2の端部とを有する導電トレースを形成するステップと、
前記導電トレースの第2の端部と接触する導電要素を設けるステップと
を含む、マイクロ電子アセンブリを形成する方法。 - 前記導電要素は、半田球と、導電ポストと、導電ピンとから成るグループから選択される、請求項24に記載の方法。
- 前記マイクロ電子素子は、1つ以上のメモリチップを含む半導体ウエハを備えるものである請求項25に記載の方法。
- 前記犠牲層が、光画像化可能であってシリコーンを備えるものである請求項24に記載の方法。
- 前記誘電バンプは、シリコーンと軟化エポキシとポリイミドと熱硬化性高分子とフッ素重合体と熱可塑性高分子とから成るグループから選択される材料を備えるものである請求項24に記載の方法。
- 研削ステップの後、前記誘電バンプが略平坦な上面を有するものである請求項24に記載の方法。
- 前記導電トレースは、銅、金、ニッケルと合金、および、これらの組み合わせ、並びに、これらの複合体から成るグループから選択される材料を備えるものである請求項24に記載の方法。
- 前記導電要素が前記誘電バンプ上に配置される導電ポストを備え、前記導電ポストのそれぞれが50〜300ミクロンの範囲内の高さを有するものである請求項24に記載の方法。
- 前記導電要素は、銅、銅合金、金、および、これらの組み合わせから成るグループから選択される材料を備えるものである、請求項24に記載の方法。
- マイクロ電子アセンブリを形成する方法であって、
第1の表面と該第1の表面でアクセスできる接点とを有する半導体ウエハを設けるステップと、
前記半導体ウエハの第1の表面上にわたってコンプライアント誘電バンプを形成するステップと、
前記コンプライアント誘電バンプ上にわたって犠牲層を堆積させるステップと、
前記犠牲層および前記コンプライアント誘電バンプを研削して、前記コンプライアント誘電バンプの上面を平坦化し、前記コンプライアント誘電バンプの平坦化された上面を露出させるステップと、
研削ステップ後に、前記犠牲層を除去して、前記コンプライアント誘電バンプおよび前記接点を露出させるステップと、
前記マイクロ電子素子の第1の表面上および前記コンプライアント誘電バンプ上にわたってシリコーン層を堆積させるステップと、
前記半導体ウエハの第1の表面でアクセスできる前記接点を露出させるために前記シリコーン層を選択的に除去するステップと、
前記接点と電気的に接続される第1の端部と前記コンプライアント誘電バンプの平坦化された上面に位置する第2の端部とを有する導電トレースを形成するステップと、
前記導電トレースの第2の端部と接触する導電要素を設けるステップと
ことを含む、マイクロ電子アセンブリを形成する方法。 - 前記導電要素が導電ポストを備えるものである請求項33に記載の方法。
- 前記導電トレースの第2の端部上に前記コンプライアント誘電バンプ上に位置させて前記導電ポストをメッキするステップを更に含むものである請求項34に記載の方法。
- 前記半導体ウエハをダイスカットして、複数の個々のチップパッケージを設けるステップを更に含む請求項33に記載の方法。
- 第1の表面と該第1の表面でアクセスできる接点とを有する半導体ウエハと、
前記半導体ウエハの第1の表面上に位置するコンプライアント誘電バンプであって、前記各コンプライアント誘電バンプが平坦な上面を有する、コンプライアント誘電バンプと、
前記半導体ウエハの第1の表面上および前記コンプライアント誘電バンプ上の少なくとも端部に位置する誘電層であって、前記コンプライアント誘電バンプの平坦な上面および前記接点が前記誘電層を通じてアクセスできるものである、誘電層と、
前記誘電層上に形成され、前記接点と電気的に接続される導電トレースであって、前記コンプライアント誘電バンプの平坦化された上面から前記接点に延びている、導電トレースと、
前記平坦化された上面を覆い、前記導電トレースと接触する導電要素と
を備えてなる、マイクロ電子アセンブリ。 - 前記導電要素は、半田球と導電ポストと導電ピンとから成るグループから選択される請求項37に記載のアセンブリ。
- 前記半導体ウエハが1つ以上のメモリチップを備えるものである請求項37に記載のアセンブリ。
- 前記ウエハが1つ以上のダブルデータレート(DDR)チップを備えるものである請求項39に記載のアセンブリ。
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