JP5287928B2 - エキシマランプ - Google Patents

エキシマランプ Download PDF

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Publication number
JP5287928B2
JP5287928B2 JP2011110031A JP2011110031A JP5287928B2 JP 5287928 B2 JP5287928 B2 JP 5287928B2 JP 2011110031 A JP2011110031 A JP 2011110031A JP 2011110031 A JP2011110031 A JP 2011110031A JP 5287928 B2 JP5287928 B2 JP 5287928B2
Authority
JP
Japan
Prior art keywords
light
discharge vessel
discharge
port
excimer lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011110031A
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English (en)
Japanese (ja)
Other versions
JP2012243435A (ja
Inventor
法隆 竹添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2011110031A priority Critical patent/JP5287928B2/ja
Priority to TW101109132A priority patent/TWI488217B/zh
Publication of JP2012243435A publication Critical patent/JP2012243435A/ja
Application granted granted Critical
Publication of JP5287928B2 publication Critical patent/JP5287928B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Vessels And Coating Films For Discharge Lamps (AREA)
JP2011110031A 2011-05-17 2011-05-17 エキシマランプ Expired - Fee Related JP5287928B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011110031A JP5287928B2 (ja) 2011-05-17 2011-05-17 エキシマランプ
TW101109132A TWI488217B (zh) 2011-05-17 2012-03-16 Excimer lamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011110031A JP5287928B2 (ja) 2011-05-17 2011-05-17 エキシマランプ

Publications (2)

Publication Number Publication Date
JP2012243435A JP2012243435A (ja) 2012-12-10
JP5287928B2 true JP5287928B2 (ja) 2013-09-11

Family

ID=47464965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011110031A Expired - Fee Related JP5287928B2 (ja) 2011-05-17 2011-05-17 エキシマランプ

Country Status (2)

Country Link
JP (1) JP5287928B2 (zh)
TW (1) TWI488217B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3491532B2 (ja) * 1998-07-01 2004-01-26 東亞合成株式会社 シャドウマスク製造時の裏止め材用硬化型組成物
JP6202332B2 (ja) * 2013-03-28 2017-09-27 株式会社Ｇｓユアサ 紫外線ランプ
JP6201925B2 (ja) * 2013-07-31 2017-09-27 株式会社Ｇｓユアサ 放電ランプ
KR102219742B1 (ko) * 2013-07-31 2021-02-23 가부시키가이샤 지에스 유아사 방전 램프
JP6191870B2 (ja) * 2013-11-22 2017-09-06 ウシオ電機株式会社 エキシマランプ
JP5892189B2 (ja) * 2014-04-11 2016-03-23 ウシオ電機株式会社 エキシマランプおよびエキシマランプ装置
JP2023171994A (ja) 2022-05-23 2023-12-06 ウシオ電機株式会社 光照射装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004097986A (ja) * 2002-09-11 2004-04-02 Japan Storage Battery Co Ltd 紫外線照射装置
JP4561448B2 (ja) * 2004-04-07 2010-10-13 株式会社Ｇｓユアサ 誘電体バリア放電ランプ及び紫外線照射装置
JP4946772B2 (ja) * 2007-10-11 2012-06-06 ウシオ電機株式会社 エキシマランプ
JP5126035B2 (ja) * 2008-03-18 2013-01-23 ウシオ電機株式会社 ランプユニットおよび光センサ
JP5266972B2 (ja) * 2008-08-29 2013-08-21 ウシオ電機株式会社 エキシマランプ
JP5051160B2 (ja) * 2009-03-17 2012-10-17 ウシオ電機株式会社 紫外線照射装置
JP5201042B2 (ja) * 2009-03-23 2013-06-05 ウシオ電機株式会社 エキシマランプ
JP5195675B2 (ja) * 2009-07-14 2013-05-08 ウシオ電機株式会社 エキシマランプ

Also Published As

Publication number Publication date
JP2012243435A (ja) 2012-12-10
TWI488217B (zh) 2015-06-11
TW201248680A (en) 2012-12-01

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