201248680 六、發明說明 【發明所屬之技術領域】 本發明係關於於放電容器內形成反射膜的準分子燈’ 尤其，關於於該反射膜形成光監視用之採光口的準分子燈 者。 【先前技術】 先前，作爲準分子燈，公知有於除了放電容器之內面 的光放射面的部分，形成由反射紫外光之氧化矽主體的微 粒子所成的反射膜者。於此種燈中，於放電容器之光放射 面的外表面，爲了達成取出光之本來的功能，例如使用將 金膠塗佈成格子狀之網目狀的透光性電極。 另一方面，作爲形成於對向於前述光放射面之不取出 光的非光射出面之外表面的外部電極，功能上不需要有透 光性，但是，大多狀況中，根據製造工程的簡素化及在該 放電容器內產生之放電的穩定性等的觀點，與前述光放射 面相同，直接使用透光性電極來進行。 然而，於各種紫外光照射裝置之準分子燈中，根據被 要求紫外光的穩定放射，進行監視其紫外光的光量，爲 此’於反射膜的一部分形成採光口，監視從該採光口取出 之紫外光。 此種技術係例如可從日本特開2 0 1 0 - 2 2 5 3 4 3號公報等 得知。 於圖7、圖8及圖9揭示此先前技術。圖7係準分子 -5- 201248680 燈的俯視圖’圖8係圖7的A - A剖面圖，圖9係圖7的 B - B剖面圖。於圖中，準分子燈2 0具有由石英玻璃等所 成的放電容器21。以金膠等形成爲網目狀之一對透光性 外部電極22、23對向形成於該放電容器21的外表面。然 後’於放電容器21的內表面，除了光放射面之外，形成 反射膜24。 於此反射膜24的一部分形成採光口 25，於其上方配 置光監視器2 6 ’監視從放電容器2 1放射之紫外光。 再者’於此先前例中，於前述外部電極22、23的端 部形成有平塗狀電極27，於放電容器21內形成有作爲始 動輔助電極的導電體28。 然而，於該先前技術中，因爲形成於反射膜24之採 光口 25的輪廓線25a形成爲與網目狀之透光性電極23的 素線23a直線連續地重疊，在對外部電極22、23之間施 加電壓時，如圖10所示，在放電容器21內部，電場容易 集中於形成採光口 25之輪廓線25a的反射膜24之邊緣部 份24a，放電X易於集中於該邊緣部分24a。 爲此，在外部電極22、23之間的放電成爲不穩定的 狀態，利用光監視器檢測從採光口 25取出之紫外光的光 量時，檢測之訊號値會產生數個峰値而變成雜訊，有無法 進行穏定之紫外光的監視之問題。 又，因放電集中在反射膜24的邊緣部分24a而採光 口 25的中央附近難以產生放電，即使產生放電也變成明 顯衰弱的放電。爲此，有從採光口 25取出之紫外光的光 -6- 201248680 束量減少，低估利用光監視器檢測之光量的問題。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開20 1 0-22 5343號公報 【發明內容】 [發明所欲解決之課題] 本發明係有鑑於以上先前技術的問題點所發明者，於 放電容器的外表面，設置一對網目狀的透光性外部電極， 於前述放電容器的內表面則形成反射膜，並且於該反射膜 形成光監視用之採光口的準分子燈中，提供形成前述採光 口之輪廓線的反射膜之邊緣部份中不讓放電集中，在放電 容器內維持穩定的放電，不使來自採光口之紫外光的光束 量減少之構造。 [用以解決課題之手段] 有鑑於前述先前技術的問題點，在本發明中，特徵爲 形成於設置在放電容器內之反射膜的光監視器用之採光口 的輪廓線，與設置於放電容器之外表面的網目狀之透光性 電極的素線不會直線重疊。 [發明的效果] 藉由採用此種構造’放電不會集中於形成採光口之輪 廓線的反射膜之邊緣部，在採光口整面產生一樣的放電， 201248680 來自採光口之紫外光的光束量不會減少，可達成正常的光 監視者。 【實施方式】 圖1係揭示本發明之準分子燈的第1實施例的俯視 圖’圖2係其B-B剖面圖，圖3係圖2的a部放大圖。 於圖中’於準分子燈1之放電容器2的外表面，設置 有將金膠塗佈成格子狀之網目狀的透光性電極3、4。然 後’於該放電容器2的內表面，除了光放射面2a之外， 形成反射膜5。然後’於該反射膜5之與前述光射出面2a 相反側的非光射出面2b之一端，形成有光監視器用的採 光口 6。 此採光口 6如圖示般’作爲反射膜5的端部開放之形 狀亦可，不開放而作爲獨立開口亦可》 然後，尤其從圖3可知’前述採光口 6的輪廓線6a 係以與網目狀之透光性電極4的素線4a不會直線連續地 重疊之方式錯開。 對於爲了實現採光口 6的輪廓線6a與外部電極4的 素線4a不直線連續地重曼來說，如圖*所示，採光口 6 之輪廓線6a的形狀作爲非直線式，例如半圓形狀等亦 可’或如圖5所示，以外部電極4的素線4a與放電容器 2的軸線存在有角度之方式構成亦可。 再者’於前述實施例中，已塗式於外部電極3、4的 端部設置平塗狀的電極7，於相當於其端部之放電容器2 -8- 201248680 的內面’形成始動輔助電極8者，但是，不一定需要設置 該等。 爲了證實本發明的效果而進行實驗。 <本發明的燈> 作爲本發明的燈，使用如圖1所示之發光長爲 1 540mm ’於放電空間內封入〇.〇5 MPa的氙氣，採光口 6 爲略矩形狀，且其輪廓線6a與外部電極4的素線4a不直 線重疊者。 <比較例的燈> 作爲比較例的燈，如圖7所示，準備採光口 25的輪 廓線25a與外部電極23的素線23a直線重疊之構造者。 將該等燈，以點燈頻率爲50KHz，輸入電力爲3 00W 的條件來點燈。然後，於圖6揭示測定各燈之紫外光的光 量之結果。於圖中，縱軸係表示紫外光之光量的訊號値， 橫軸爲時間。 於比較例的燈中，光監視器之測定値較低，而且，時 間上產生數個峰値，放電不穩定，此係放電集中於反射膜 的邊緣部所致。 相對於此，在本發明的燈中，表示光量的訊號値穩定 地不會降低。 如上所述，於本發明中，因爲使形成於設置在放電容 器內面之反射膜的採光口之輪廓線與網目狀之外部電極的 -9- 201248680 素線不直線連續地重壘，故放電不會集中於形成採光口之 反射膜的邊緣部分，可實現在放電容器內穩定的放電，並 且可發揮即使在採光口整面也產生均勻的放電，可進行正 確之紫外光的監視之效果。 再者，於前述實施例的說明中，放電容器2作爲角型 管形狀來進行說明，但是並不限定於此，當然也可採用圓 型管形狀等之各種形狀。 【圖式簡單說明】 [圖1 ]揭示本發明第1實施例的準分子燈之構造的俯 視圖。 [圖2]圖1的B-B剖面圖。 [圖3]圖2的A部放大圖。 [圖4]本發明的第2實施例。 [圖5 ]本發明的第3實施例。 [圖6]揭示本發明效果的圖表。 [圖7]先前技術的俯視圖。 [圖8]圖7的A-A剖面圖。 [圖9]圖7的B-B剖面圖。 [圖10]圖9的A部放大圖。 【主要元件符號說明】 1 :準分子燈 2，2 1 :放電容器 -10- 201248680 2a :光射出面 2b :非光射出面 3 :透光性外部電極（光射出面側） 4 :透光性外部電極（非光射出面側） 4 a，2 3 a :素線 5，24 :反射膜 6，2 5 :採光口 6 a，2 5 a :輪廓線 7，27 :平塗狀電極 8 :始動輔助電極 2 2，2 3 :透光性外部電極 24a :邊緣部分 2 6 :光監視器 28 :導電體201248680 VI. Field of the Invention The present invention relates to an excimer lamp for forming a reflection film in a discharge vessel. In particular, an excimer lamp for forming a lighting port for light monitoring with respect to the reflection film. [Prior Art] Conventionally, as the excimer lamp, a portion formed by a fine particle of a ruthenium oxide body which reflects ultraviolet light is formed in a portion other than the light emitting surface of the inner surface of the discharge vessel. In such a lamp, in order to achieve the original function of extracting light on the outer surface of the light-emitting surface of the discharge vessel, for example, a translucent electrode in which a gold gel is applied in a lattice-like mesh shape is used. On the other hand, the external electrode formed on the outer surface of the non-light-emitting surface that does not extract light on the light-emitting surface does not need to have translucency as a function. However, in many cases, the manufacturing process is simple. From the viewpoint of the stability of the discharge generated in the discharge vessel and the like, the light-transmitting electrode is directly used in the same manner as the light-emitting surface. However, in the excimer lamp of various ultraviolet light irradiation devices, the amount of ultraviolet light is monitored according to the stable emission of the required ultraviolet light, and for this purpose, a portion of the reflective film is formed to form a lighting port, and the monitoring is taken out from the lighting port. Ultraviolet light. Such a technique is known, for example, from Japanese Laid-Open Patent Publication No. 2000-202. This prior art is disclosed in Figures 7, 8 and 9. Figure 7 is a plan view of a lamp -5 - 201248680 lamp. Figure 8 is a cross-sectional view taken along line A - A of Figure 7, and Figure 9 is a cross-sectional view taken along line B - B of Figure 7. In the figure, the excimer lamp 20 has a discharge vessel 21 made of quartz glass or the like. The light-transmitting external electrodes 22 and 23 are formed opposite to each other on the outer surface of the discharge vessel 21 by forming the metal paste or the like into a mesh shape. Then, on the inner surface of the discharge vessel 21, a reflection film 24 is formed in addition to the light emission surface. A portion of the reflective film 24 forms a lighting opening 25, and an optical monitor 26 is disposed above it to monitor the ultraviolet light radiated from the discharge vessel 21. Further, in this prior example, a flat coated electrode 27 is formed at the end of the external electrodes 22, 23, and a conductor 28 as a starting auxiliary electrode is formed in the discharge vessel 21. However, in the prior art, since the outline 25a of the lighting opening 25 formed in the reflective film 24 is formed to continuously overlap the linear line 23a of the mesh-shaped translucent electrode 23 in a straight line, in the pair of external electrodes 22, 23 When a voltage is applied between them, as shown in Fig. 10, in the inside of the discharge vessel 21, the electric field is easily concentrated on the edge portion 24a of the reflection film 24 which forms the outline 25a of the lighting opening 25, and the discharge X is easily concentrated on the edge portion 24a. For this reason, the discharge between the external electrodes 22 and 23 becomes unstable, and when the light amount of the ultraviolet light taken out from the lighting port 25 is detected by the optical monitor, the detected signal 产生 generates a plurality of peaks and becomes noise. There is a problem that monitoring of ultraviolet light that cannot be determined. Further, since the discharge is concentrated on the edge portion 24a of the reflection film 24, discharge is less likely to occur in the vicinity of the center of the lighting port 25, and even if discharge occurs, the discharge becomes significantly weak. For this reason, the light of the ultraviolet light taken out from the lighting port 25 -6-201248680 is reduced, and the problem of the amount of light detected by the optical monitor is underestimated. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A No. 20 1 0-22 5343 SUMMARY OF INVENTION [Problems to be Solved by the Invention] The present invention has been invented in view of the above problems of the prior art. A pair of mesh-shaped translucent external electrodes are disposed on the outer surface of the discharge vessel, a reflective film is formed on the inner surface of the discharge vessel, and an excimer lamp for forming a light-collecting port for light monitoring is formed in the reflective film. Providing a structure in which the discharge portion of the reflection film forming the outline of the lighting port is prevented from being concentrated, a stable discharge is maintained in the discharge vessel, and the amount of the ultraviolet light from the lighting port is not reduced. [Means for Solving the Problem] In view of the problems of the prior art described above, in the present invention, the outline of the lighting port for the optical monitor formed in the reflection film provided in the discharge vessel is provided in the discharge vessel The plain lines of the mesh-like translucent electrodes on the outer surface do not overlap linearly. [Effects of the Invention] By adopting such a configuration, the discharge does not concentrate on the edge portion of the reflective film forming the outline of the lighting opening, and the same discharge is generated on the entire surface of the lighting opening, 201248680 The amount of the ultraviolet light from the lighting opening It will not be reduced, and a normal light monitor can be achieved. [Embodiment] Fig. 1 is a plan view showing a first embodiment of an excimer lamp according to the present invention. Fig. 2 is a cross-sectional view taken along line B-B of Fig. 2, and Fig. 3 is an enlarged view of a portion of Fig. 2. In the figure, the outer surfaces of the discharge vessel 2 of the excimer lamp 1 are provided with translucent electrodes 3 and 4 which are formed in a mesh shape in which gold paste is applied in a lattice shape. Then, on the inner surface of the discharge vessel 2, a reflective film 5 is formed in addition to the light radiating surface 2a. Then, at one end of the non-light emitting surface 2b of the reflecting film 5 opposite to the light exit surface 2a, a lighting opening 6 for the optical monitor is formed. As shown, the lighting port 6 may have a shape in which the end portion of the reflecting film 5 is open, and may be opened as an independent opening. Then, particularly from FIG. 3, the outline 6a of the lighting port 6 is associated with The plain line 4a of the mesh-shaped translucent electrode 4 is not shifted in such a manner that the linear lines are continuously overlapped. In order to realize that the outline 6a of the lighting port 6 and the plain line 4a of the external electrode 4 are not linearly continuous, as shown in FIG. *, the shape of the outline 6a of the lighting opening 6 is a non-linear type, for example, a semicircular shape. Alternatively, or as shown in FIG. 5, the prime wire 4a of the external electrode 4 may be formed to have an angle with respect to the axis of the discharge vessel 2. Further, in the foregoing embodiment, the flat-coated electrode 7 is applied to the ends of the external electrodes 3, 4, and the starting surface of the discharge vessel 2-8-201248680 corresponding to the end thereof is formed to start the auxiliary. The electrode 8 is, however, it is not necessary to provide such a setting. Experiments were conducted in order to confirm the effects of the present invention. <Lamp of the present invention> As the lamp of the present invention, the xenon gas of 〇.〇5 MPa is sealed in the discharge space using the luminous length of 1 540 mm as shown in Fig. 1, and the lighting port 6 is slightly rectangular, and The outline 6a and the plain line 4a of the external electrode 4 do not overlap linearly. <Lamp of Comparative Example> As a lamp of a comparative example, as shown in Fig. 7, a structure in which the outline 25a of the lighting port 25 and the plain line 23a of the external electrode 23 are linearly overlapped is prepared. The lamps were turned on at a lighting frequency of 50 kHz and an input power of 300 watts. Next, the result of measuring the amount of ultraviolet light of each lamp is disclosed in Fig. 6. In the figure, the vertical axis represents the signal 値 of the amount of ultraviolet light, and the horizontal axis represents time. In the lamp of the comparative example, the measurement of the optical monitor was low, and a number of peaks were generated in the time, and the discharge was unstable, and the discharge was concentrated on the edge portion of the reflective film. On the other hand, in the lamp of the present invention, the signal 表示 indicating the amount of light is stably not lowered. As described above, in the present invention, since the outline of the lighting opening formed in the reflecting film provided on the inner surface of the discharge vessel and the outer surface of the mesh-like external electrode are not linearly continuous, the discharge is performed. It does not concentrate on the edge portion of the reflective film forming the lighting opening, and can achieve stable discharge in the discharge vessel, and can exert a uniform discharge even on the entire surface of the lighting opening, and can perform the effect of monitoring the correct ultraviolet light. Further, in the description of the above embodiment, the discharge vessel 2 has been described as an angular tube shape. However, the present invention is not limited thereto, and various shapes such as a circular tube shape may be employed. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A plan view showing the structure of an excimer lamp according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line B-B of FIG. 1. FIG. Fig. 3 is an enlarged view of a portion A of Fig. 2; Fig. 4 is a view showing a second embodiment of the present invention. Fig. 5 is a third embodiment of the present invention. Fig. 6 is a chart showing the effects of the present invention. [Fig. 7] A top view of the prior art. Fig. 8 is a cross-sectional view taken along line A-A of Fig. 7; Fig. 9 is a cross-sectional view taken along line B-B of Fig. 7; Fig. 10 is an enlarged view of a portion A of Fig. 9; [Explanation of main component symbols] 1 : Excimer lamp 2, 2 1 : Discharge capacitor -10- 201248680 2a : Light exit surface 2b : Non-light exit surface 3 : Translucent external electrode (light exit surface side) 4 : Light transmission External electrode (non-light exit side) 4 a, 2 3 a : Plain line 5, 24: Reflective film 6, 2 5 : Lighting port 6 a, 2 5 a : Outline line 7, 27: Flat coated electrode 8 : Starting auxiliary electrode 2 2, 2 3 : Transmissive external electrode 24a: Edge portion 2 6 : Light monitor 28: Conductor
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