JP5280045B2 - ウェハーの熱処理時のスリップ転位を防止することができるウェハー支持ピン及びウェハーの熱処理方法 - Google Patents
ウェハーの熱処理時のスリップ転位を防止することができるウェハー支持ピン及びウェハーの熱処理方法 Download PDFInfo
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- JP5280045B2 JP5280045B2 JP2007325089A JP2007325089A JP5280045B2 JP 5280045 B2 JP5280045 B2 JP 5280045B2 JP 2007325089 A JP2007325089 A JP 2007325089A JP 2007325089 A JP2007325089 A JP 2007325089A JP 5280045 B2 JP5280045 B2 JP 5280045B2
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- 238000010438 heat treatment Methods 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 40
- 235000012431 wafers Nutrition 0.000 claims description 172
- 238000005530 etching Methods 0.000 claims description 24
- 230000006641 stabilisation Effects 0.000 claims description 17
- 238000011105 stabilization Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 9
- 238000003672 processing method Methods 0.000 claims description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 5
- 239000002210 silicon-based material Substances 0.000 claims description 4
- 238000012545 processing Methods 0.000 description 24
- 230000005484 gravity Effects 0.000 description 11
- 230000035882 stress Effects 0.000 description 11
- 230000008646 thermal stress Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 238000004854 X-ray topography Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002618 waking effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (11)
- ウェハーの熱処理時に、ウェハーを底面から支持するウェハー支持ピンにおいて、
前記ウェハーと接触する先端部がラウンド処理されており、かつテーパー状であり、
該テーパー部分の長さが2mm〜17mmであり、
前記ラウンド処理された部分の曲率半径が0.7mm以上であり、前記ラウンド処理された部分の直径は0.5mm〜1.5mmであることを特徴とするウェハー支持ピン。 - 少なくとも前記先端部が、石英材質からなることを特徴とする、請求項1に記載のウェハー支持ピン。
- 少なくとも前記先端部が、単結晶または多結晶シリコン材質からなることを特徴とする、請求項1に記載のウェハー支持ピン。
- 前記単結晶または多結晶シリコンには、NまたはCがドーピングされていることを特徴とする、請求項3に記載のウェハー支持ピン。
- 少なくとも前記先端部が、SiCまたはSi3N4で表面コーティングされていることを特徴とする、請求項3に記載のウェハー支持ピン。
- 前記熱処理の後、前記ウェハーと支持ピンとの接触部分に対して5分間ライトエッチングしてから、ピンマークの断面積を測定したとき、断面積が1.0×10−3〜2.0×10−2cm2になることを特徴とする、請求項1に記載のウェハー支持ピン。
- 請求項1〜6のいずれか一項に記載のウェハー支持ピンによってウェハーを底面から点接触で支持しながらウェハーに対して熱処理を行う方法において、
熱処理温度が1150℃〜1250℃範囲であり、
前記ウェハーの半径が145mm以上であり、かつ前記ウェハーの質量が100g以上であることを特徴とする熱処理方法。 - 請求項1〜6のいずれか一項に記載のウェハー支持ピンによってウェハーを底面から点接触で支持しながらウェハーに対して熱処理を行う方法において、
前記熱処理の後、前記ウェハーと支持ピンとの接触部分に対して5分間ライトエッチングしてから、ピンマークの断面積を測定したとき、断面積が1.0×10−3〜2.0×10−2cm2になることを特徴とする熱処理方法。 - 請求項1〜6のいずれか一項に記載のウェハー支持ピンによってウェハーを底面から点接触で支持しながら、ウェハーに対して1120℃以上の高温で急速熱処理する方法において、
最高目標温度まで温度を上昇させる昇温区間に、前記最高目標温度より低い温度で中間安定化する区間を含むことを特徴とする急速熱処理方法。 - 請求項1〜6のいずれか一項に記載のウェハー支持ピンによってウェハーを底面から点接触で支持しながら、ウェハーを第1温度で急速熱処理した後、温度を上昇させて第2温度で急速熱処理するウェハーの急速熱処理方法であって、
前記第1温度から第2温度に昇温させる区間に、前記第1温度と第2温度の間の温度で中間安定化する区間を含むことを特徴とする急速熱処理方法。 - 前記第1温度は900℃〜1200℃であり、前記第2温度は1120℃〜1250℃であり、前記第1温度より第2温度が高く、
中間安定化する段階は1〜10秒間行うことを特徴とする、請求項10に記載の急速熱処理方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060134791A KR100818842B1 (ko) | 2006-12-27 | 2006-12-27 | 웨이퍼의 열처리시 슬립을 방지할 수 있는 웨이퍼 지지 핀및 웨이퍼의 열처리 방법 |
KR10-2006-0134791 | 2006-12-27 |
Publications (2)
Publication Number | Publication Date |
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JP2008166763A JP2008166763A (ja) | 2008-07-17 |
JP5280045B2 true JP5280045B2 (ja) | 2013-09-04 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007325089A Active JP5280045B2 (ja) | 2006-12-27 | 2007-12-17 | ウェハーの熱処理時のスリップ転位を防止することができるウェハー支持ピン及びウェハーの熱処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7767596B2 (ja) |
JP (1) | JP5280045B2 (ja) |
KR (1) | KR100818842B1 (ja) |
CN (1) | CN101275286A (ja) |
SG (1) | SG144129A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101109822B1 (ko) * | 2010-01-26 | 2012-02-13 | 주식회사 엘지실트론 | 웨이퍼의 열처리시 전위 결함을 저감할 수 있는 웨이퍼 지지 핀 및 그 제조 방법 |
JP2012151371A (ja) * | 2011-01-20 | 2012-08-09 | Nuflare Technology Inc | 荷電粒子ビーム描画装置および荷電粒子ビーム描画方法 |
JP6086056B2 (ja) | 2013-11-26 | 2017-03-01 | 信越半導体株式会社 | 熱処理方法 |
JP6520050B2 (ja) * | 2014-10-31 | 2019-05-29 | 株式会社Sumco | リフトピン、該リフトピンを用いたエピタキシャル成長装置およびエピタキシャルウェーハの製造方法 |
JP6369297B2 (ja) * | 2014-11-12 | 2018-08-08 | 株式会社Sumco | 半導体ウェーハの支持方法及びその支持装置 |
US10734262B2 (en) | 2015-12-30 | 2020-08-04 | Mattson Technology, Inc. | Substrate support in a millisecond anneal system |
JP6637321B2 (ja) * | 2016-02-03 | 2020-01-29 | 株式会社Screenホールディングス | 熱処理用サセプタおよび熱処理装置 |
CN106340487A (zh) * | 2016-10-21 | 2017-01-18 | 北京鼎泰芯源科技发展有限公司 | 用于晶圆退火的载片盘、退火装置及晶圆退火方法 |
JP7321768B2 (ja) | 2018-05-23 | 2023-08-07 | 信越化学工業株式会社 | 化学気相成長装置および被膜形成方法 |
CN115418725B (zh) * | 2022-07-28 | 2024-04-26 | 浙江大学杭州国际科创中心 | 一种氮化硅薄膜热退火方法和装置 |
Family Cites Families (16)
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US5788763A (en) | 1995-03-09 | 1998-08-04 | Toshiba Ceramics Co., Ltd. | Manufacturing method of a silicon wafer having a controlled BMD concentration |
JPH08288372A (ja) * | 1995-04-11 | 1996-11-01 | Nippon Pillar Packing Co Ltd | ウエハ支持プレート |
JPH09205130A (ja) * | 1996-01-17 | 1997-08-05 | Applied Materials Inc | ウェハ支持装置 |
DE69738020T2 (de) * | 1996-06-28 | 2008-07-31 | Sumco Corp. | Verfahren und anordnung zur thermischen behandlung eines einkristallinischen plättchens, einkristallinisches plättchen und verfahren zur herstellung eines einkristallinischen plättchens |
JP2001185607A (ja) * | 1999-12-27 | 2001-07-06 | Canon Inc | 基板吸着保持装置およびデバイス製造方法 |
DE10003639C2 (de) * | 2000-01-28 | 2003-06-18 | Steag Rtp Systems Gmbh | Vorrichtung zum thermischen Behandeln von Substraten |
JP4589545B2 (ja) * | 2001-02-19 | 2010-12-01 | 新日本製鐵株式会社 | ウェハ支持部材、ウェハ保持具およびウェハ保持装置 |
DE60144045D1 (de) * | 2000-10-16 | 2011-03-31 | Nippon Steel Corp | Waferhalterung, waferhalterungsanordnung und wärmebehandlungsofen |
US6497403B2 (en) * | 2000-12-28 | 2002-12-24 | Memc Electronic Materials, Inc. | Semiconductor wafer holder |
KR20010067805A (ko) * | 2001-03-29 | 2001-07-13 | 정기로 | 급속 열처리 장치용 에지링 |
KR20030033187A (ko) * | 2001-10-18 | 2003-05-01 | 주식회사 실트론 | 반도체용 에피택셜 웨이퍼의 제조방법 |
FR2845202B1 (fr) * | 2002-10-01 | 2004-11-05 | Soitec Silicon On Insulator | Procede de recuit rapide de tranches de materiau semiconducteur. |
JP4363401B2 (ja) * | 2003-03-26 | 2009-11-11 | 信越半導体株式会社 | 熱処理用ウェーハ支持具及び熱処理装置 |
JP2005093608A (ja) * | 2003-09-16 | 2005-04-07 | Hitachi Kokusai Electric Inc | 基板処理装置 |
US7329947B2 (en) * | 2003-11-07 | 2008-02-12 | Sumitomo Mitsubishi Silicon Corporation | Heat treatment jig for semiconductor substrate |
JP2006005177A (ja) * | 2004-06-17 | 2006-01-05 | Tokyo Electron Ltd | 熱処理装置 |
-
2006
- 2006-12-27 KR KR1020060134791A patent/KR100818842B1/ko active IP Right Grant
-
2007
- 2007-12-17 JP JP2007325089A patent/JP5280045B2/ja active Active
- 2007-12-26 US US12/005,415 patent/US7767596B2/en active Active
- 2007-12-27 CN CNA2007103070824A patent/CN101275286A/zh active Pending
- 2007-12-27 SG SG200719150-5A patent/SG144129A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
US7767596B2 (en) | 2010-08-03 |
KR100818842B1 (ko) | 2008-04-01 |
SG144129A1 (en) | 2008-07-29 |
CN101275286A (zh) | 2008-10-01 |
JP2008166763A (ja) | 2008-07-17 |
US20080176415A1 (en) | 2008-07-24 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |