JP5235960B2 - 電力用半導体装置及びその製造方法 - Google Patents

電力用半導体装置及びその製造方法 Download PDF

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JP5235960B2
JP5235960B2 JP2010203423A JP2010203423A JP5235960B2 JP 5235960 B2 JP5235960 B2 JP 5235960B2 JP 2010203423 A JP2010203423 A JP 2010203423A JP 2010203423 A JP2010203423 A JP 2010203423A JP 5235960 B2 JP5235960 B2 JP 5235960B2
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layer
conductivity type
type
drift
epitaxial
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JP2010203423A
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Japanese (ja)
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JP2012060017A5 (enExample
JP2012060017A (ja
Inventor
淑 木村
保人 角
浩史 大田
裕行 入船
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Toshiba Corp
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Toshiba Corp
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Priority to JP2010203423A priority Critical patent/JP5235960B2/ja
Priority to CN201110254492.3A priority patent/CN102403357B/zh
Priority to US13/229,203 priority patent/US8643056B2/en
Publication of JP2012060017A publication Critical patent/JP2012060017A/ja
Publication of JP2012060017A5 publication Critical patent/JP2012060017A5/ja
Application granted granted Critical
Publication of JP5235960B2 publication Critical patent/JP5235960B2/ja
Priority to US14/138,940 priority patent/US9136324B2/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
    • H10D30/0291—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of vertical DMOS [VDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/665—Vertical DMOS [VDMOS] FETs having edge termination structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/051—Forming charge compensation regions, e.g. superjunctions
    • H10D62/058—Forming charge compensation regions, e.g. superjunctions by using trenches, e.g. implanting into sidewalls of trenches or refilling trenches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/109—Reduced surface field [RESURF] PN junction structures
    • H10D62/111—Multiple RESURF structures, e.g. double RESURF or 3D-RESURF structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H10D62/156—Drain regions of DMOS transistors
    • H10D62/157—Impurity concentrations or distributions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/051—Forming charge compensation regions, e.g. superjunctions
    • H10D62/054—Forming charge compensation regions, e.g. superjunctions by high energy implantations in bulk semiconductor bodies, e.g. forming pillars
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/393—Body regions of DMOS transistors or IGBTs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/60—Schottky-barrier diodes 

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Recrystallisation Techniques (AREA)
JP2010203423A 2010-09-10 2010-09-10 電力用半導体装置及びその製造方法 Expired - Fee Related JP5235960B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010203423A JP5235960B2 (ja) 2010-09-10 2010-09-10 電力用半導体装置及びその製造方法
CN201110254492.3A CN102403357B (zh) 2010-09-10 2011-08-31 半导体装置及其制造方法
US13/229,203 US8643056B2 (en) 2010-09-10 2011-09-09 Power semiconductor device and method of manufacturing the same
US14/138,940 US9136324B2 (en) 2010-09-10 2013-12-23 Power semiconductor device and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010203423A JP5235960B2 (ja) 2010-09-10 2010-09-10 電力用半導体装置及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013060978A Division JP2013149999A (ja) 2013-03-22 2013-03-22 半導体装置

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JP2012060017A JP2012060017A (ja) 2012-03-22
JP2012060017A5 JP2012060017A5 (enExample) 2012-09-27
JP5235960B2 true JP5235960B2 (ja) 2013-07-10

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US (2) US8643056B2 (enExample)
JP (1) JP5235960B2 (enExample)
CN (1) CN102403357B (enExample)

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Publication number Priority date Publication date Assignee Title
CN105789271B (zh) * 2011-09-27 2019-01-01 株式会社电装 半导体器件
TWI587503B (zh) 2012-01-11 2017-06-11 世界先進積體電路股份有限公司 半導體裝置及其製造方法
US9614043B2 (en) 2012-02-09 2017-04-04 Vishay-Siliconix MOSFET termination trench
JP5701802B2 (ja) * 2012-03-23 2015-04-15 株式会社東芝 電力用半導体装置
US9842911B2 (en) 2012-05-30 2017-12-12 Vishay-Siliconix Adaptive charge balanced edge termination
US8866221B2 (en) * 2012-07-02 2014-10-21 Infineon Technologies Austria Ag Super junction semiconductor device comprising a cell area and an edge area
CN103035723A (zh) * 2012-10-26 2013-04-10 上海华虹Nec电子有限公司 一种超级结深沟槽结构
JP6197294B2 (ja) * 2013-01-16 2017-09-20 富士電機株式会社 半導体素子
US9209292B2 (en) * 2013-07-18 2015-12-08 Infineon Technologies Austria Ag Charge compensation semiconductor devices
JP2015133380A (ja) 2014-01-10 2015-07-23 株式会社東芝 半導体装置
JP5918288B2 (ja) * 2014-03-03 2016-05-18 トヨタ自動車株式会社 半導体装置
JP6485034B2 (ja) * 2014-06-16 2019-03-20 富士電機株式会社 半導体装置の製造方法
US20150372132A1 (en) * 2014-06-23 2015-12-24 Vishay-Siliconix Semiconductor device with composite trench and implant columns
US9887259B2 (en) 2014-06-23 2018-02-06 Vishay-Siliconix Modulated super junction power MOSFET devices
KR20160005928A (ko) * 2014-07-08 2016-01-18 삼성전기주식회사 전력 반도체 소자
JP6375743B2 (ja) * 2014-07-15 2018-08-22 富士電機株式会社 半導体装置の製造方法
KR102098996B1 (ko) 2014-08-19 2020-04-08 비쉐이-실리코닉스 초접합 금속 산화물 반도체 전계 효과 트랜지스터
JP6185440B2 (ja) * 2014-09-16 2017-08-23 株式会社東芝 半導体装置
JP6534813B2 (ja) * 2015-01-08 2019-06-26 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
JP6510280B2 (ja) 2015-03-11 2019-05-08 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN104900702A (zh) * 2015-05-08 2015-09-09 西安西奈电子科技有限公司 一种纵向高压半导体器件
DE102016207117A1 (de) * 2016-04-27 2017-11-02 Robert Bosch Gmbh Leistungshalbleiterbauelement und Verfahren zur Herstellung des Leistungshalbleiterbauelements
JP2024113997A (ja) 2023-02-10 2024-08-23 三菱電機株式会社 半導体装置、電力変換装置及び半導体装置の製造方法
WO2025158983A1 (ja) * 2024-01-26 2025-07-31 ローム株式会社 半導体装置
US20250311318A1 (en) * 2024-04-01 2025-10-02 Wolfspeed, Inc. Power silicon carbide based semiconductor devices having super junction drift regions and methods of forming such devices

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JP2007243092A (ja) * 2006-03-13 2007-09-20 Toyota Motor Corp 半導体装置とその製造方法
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US8786010B2 (en) * 2011-04-27 2014-07-22 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture

Also Published As

Publication number Publication date
CN102403357A (zh) 2012-04-04
CN102403357B (zh) 2014-09-10
US8643056B2 (en) 2014-02-04
US20140117445A1 (en) 2014-05-01
US20120061721A1 (en) 2012-03-15
JP2012060017A (ja) 2012-03-22
US9136324B2 (en) 2015-09-15

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