JP5208373B2 - 慣性力センサ - Google Patents

慣性力センサ Download PDF

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Publication number
JP5208373B2
JP5208373B2 JP2006109507A JP2006109507A JP5208373B2 JP 5208373 B2 JP5208373 B2 JP 5208373B2 JP 2006109507 A JP2006109507 A JP 2006109507A JP 2006109507 A JP2006109507 A JP 2006109507A JP 5208373 B2 JP5208373 B2 JP 5208373B2
Authority
JP
Japan
Prior art keywords
trimming
arms
tuning fork
inertial force
force sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006109507A
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English (en)
Japanese (ja)
Other versions
JP2007279001A5 (enExample
JP2007279001A (ja
Inventor
智 大内
宏幸 相澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006109507A priority Critical patent/JP5208373B2/ja
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to EP07741307A priority patent/EP1978330A4/en
Priority to US12/296,273 priority patent/US8215190B2/en
Priority to CN2007800096464A priority patent/CN101405569B/zh
Priority to PCT/JP2007/057871 priority patent/WO2007117008A1/ja
Priority to CN201210001632.0A priority patent/CN102589538B/zh
Publication of JP2007279001A publication Critical patent/JP2007279001A/ja
Publication of JP2007279001A5 publication Critical patent/JP2007279001A5/ja
Priority to US13/491,943 priority patent/US8590403B2/en
Application granted granted Critical
Publication of JP5208373B2 publication Critical patent/JP5208373B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2006109507A 2006-04-12 2006-04-12 慣性力センサ Expired - Fee Related JP5208373B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2006109507A JP5208373B2 (ja) 2006-04-12 2006-04-12 慣性力センサ
US12/296,273 US8215190B2 (en) 2006-04-12 2007-04-10 Inertial force sensor
CN2007800096464A CN101405569B (zh) 2006-04-12 2007-04-10 惯性力传感器
PCT/JP2007/057871 WO2007117008A1 (ja) 2006-04-12 2007-04-10 慣性力センサ
EP07741307A EP1978330A4 (en) 2006-04-12 2007-04-10 INERTIA FORCE SENSOR
CN201210001632.0A CN102589538B (zh) 2006-04-12 2007-04-10 惯性力传感器
US13/491,943 US8590403B2 (en) 2006-04-12 2012-06-08 Inertial force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006109507A JP5208373B2 (ja) 2006-04-12 2006-04-12 慣性力センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011071617A Division JP5209076B2 (ja) 2011-03-29 2011-03-29 慣性力センサ

Publications (3)

Publication Number Publication Date
JP2007279001A JP2007279001A (ja) 2007-10-25
JP2007279001A5 JP2007279001A5 (enExample) 2009-04-30
JP5208373B2 true JP5208373B2 (ja) 2013-06-12

Family

ID=38581280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006109507A Expired - Fee Related JP5208373B2 (ja) 2006-04-12 2006-04-12 慣性力センサ

Country Status (5)

Country Link
US (2) US8215190B2 (enExample)
EP (1) EP1978330A4 (enExample)
JP (1) JP5208373B2 (enExample)
CN (2) CN102589538B (enExample)
WO (1) WO2007117008A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5208373B2 (ja) * 2006-04-12 2013-06-12 パナソニック株式会社 慣性力センサ
JP5716557B2 (ja) * 2011-06-14 2015-05-13 セイコーエプソン株式会社 振動片、ジャイロセンサー、電子機器、振動片の製造方法
JP2013234873A (ja) * 2012-05-07 2013-11-21 Seiko Epson Corp 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6435596B2 (ja) 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体
CN103712720B (zh) * 2014-01-02 2015-08-19 杭州士兰集成电路有限公司 电容式压力传感器和惯性传感器集成器件及其形成方法
CN104826328B (zh) * 2015-06-03 2016-11-09 苏州桀勇不锈钢制品有限公司 一种娱乐球杆
US10190928B1 (en) * 2016-11-17 2019-01-29 X Development Llc Flexible sensor for measuring flex or torque

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2009379C3 (de) * 1970-02-27 1975-01-30 Gebrueder Junghans Gmbh, 7230 Schramberg Piezoelektrischer Oszillator in Form einer Stimmgabel als Zeitnormal für zeithaltende Geräte
JPS5379398A (en) * 1976-12-23 1978-07-13 Nec Corp Square plate form piezoelectric vibrator
DE3936695A1 (de) * 1989-06-14 1990-12-20 Murata Manufacturing Co Piezoelektrischer resonator
US5386726A (en) * 1989-10-03 1995-02-07 Akai Electric Co., Ltd. Vibratory gyroscope
JPH09257490A (ja) * 1996-03-27 1997-10-03 Murata Mfg Co Ltd 振動ジャイロ
JPH10163779A (ja) * 1996-12-04 1998-06-19 Ngk Insulators Ltd 圧電部材の製造方法
US6101878A (en) * 1997-03-24 2000-08-15 Denso Corporation Angular rate sensor and method of improving output characteristic thereof
US5939631A (en) * 1998-03-13 1999-08-17 Bei Technologies Inc. Low impedance single-ended tuning fork and method
JP3891737B2 (ja) * 1999-04-19 2007-03-14 シャープ株式会社 発振器及びその発振特性調整方法
US6293585B1 (en) * 1999-07-12 2001-09-25 Gagetek Technologies Holdings Company Torsional sensing load cell
WO2002018875A1 (en) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3778809B2 (ja) * 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 音叉型振動ジャイロ及びその電極トリミング方法
DE10139443A1 (de) 2001-08-10 2003-03-06 Eads Deutschland Gmbh Verfahren und Vorrichtung zum Trimmen von Sensoren mit schwingenden Strukturen
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
JP3791485B2 (ja) * 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP2004093158A (ja) * 2002-08-29 2004-03-25 Kinseki Ltd 圧電振動式慣性センサー素子とその製造方法及びレーザー加工装置
US7043986B2 (en) 2003-02-05 2006-05-16 Ngk Insulators, Ltd. Vibrators and vibratory gyroscopes
JP4141432B2 (ja) * 2003-11-10 2008-08-27 日本電波工業株式会社 音叉型水晶振動子
JP4529444B2 (ja) * 2004-01-13 2010-08-25 パナソニック株式会社 角速度センサ
JP2005345404A (ja) * 2004-06-07 2005-12-15 Nec Tokin Corp 圧電振動ジャイロ用振動子及びその製造方法
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP2006166275A (ja) * 2004-12-10 2006-06-22 Seiko Epson Corp 水晶デバイスの製造方法
JP5208373B2 (ja) * 2006-04-12 2013-06-12 パナソニック株式会社 慣性力センサ
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス

Also Published As

Publication number Publication date
CN101405569A (zh) 2009-04-08
US20090120187A1 (en) 2009-05-14
CN102589538A (zh) 2012-07-18
JP2007279001A (ja) 2007-10-25
US8215190B2 (en) 2012-07-10
US8590403B2 (en) 2013-11-26
CN102589538B (zh) 2015-04-08
WO2007117008A1 (ja) 2007-10-18
EP1978330A1 (en) 2008-10-08
US20120240678A1 (en) 2012-09-27
EP1978330A4 (en) 2010-04-14
CN101405569B (zh) 2012-07-04

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