JP5184364B2 - 被覆された基材成形体の製造法、被覆を有する基材成形体及び被覆された基材成形体の使用 - Google Patents
被覆された基材成形体の製造法、被覆を有する基材成形体及び被覆された基材成形体の使用 Download PDFInfo
- Publication number
- JP5184364B2 JP5184364B2 JP2008534863A JP2008534863A JP5184364B2 JP 5184364 B2 JP5184364 B2 JP 5184364B2 JP 2008534863 A JP2008534863 A JP 2008534863A JP 2008534863 A JP2008534863 A JP 2008534863A JP 5184364 B2 JP5184364 B2 JP 5184364B2
- Authority
- JP
- Japan
- Prior art keywords
- molded body
- layer
- substrate molded
- ticn
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000576 coating method Methods 0.000 title description 14
- 239000011248 coating agent Substances 0.000 title description 12
- 239000007789 gas Substances 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 229930195733 hydrocarbon Natural products 0.000 claims description 10
- -1 monocyclic hydrocarbon Chemical class 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 150000002825 nitriles Chemical class 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 125000001477 organic nitrogen group Chemical group 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 3
- 150000001412 amines Chemical class 0.000 claims description 2
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 81
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 54
- 239000010410 layer Substances 0.000 description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 31
- 238000005229 chemical vapour deposition Methods 0.000 description 14
- 238000005520 cutting process Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 12
- 238000000151 deposition Methods 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 238000000465 moulding Methods 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000002347 wear-protection layer Substances 0.000 description 4
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- CKUAXEQHGKSLHN-UHFFFAOYSA-N [C].[N] Chemical compound [C].[N] CKUAXEQHGKSLHN-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011195 cermet Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical class O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 235000019256 formaldehyde Nutrition 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005049393.9 | 2005-10-15 | ||
| DE102005049393.9A DE102005049393B4 (de) | 2005-10-15 | 2005-10-15 | Verfahren zur Herstellung eines beschichteten Substratkörpers, Substratkörper mit einer Beschichtung und Verwendung des beschichteten Substratkörpers |
| PCT/DE2006/001755 WO2007045209A1 (de) | 2005-10-15 | 2006-10-07 | Verfahren zur herstellung eines beschichteten substratkörpers, substratkörper mit einer beschichtung und verwendung des beschichteten substratkörpers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009511283A JP2009511283A (ja) | 2009-03-19 |
| JP2009511283A5 JP2009511283A5 (enExample) | 2009-09-10 |
| JP5184364B2 true JP5184364B2 (ja) | 2013-04-17 |
Family
ID=37800013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008534863A Expired - Fee Related JP5184364B2 (ja) | 2005-10-15 | 2006-10-07 | 被覆された基材成形体の製造法、被覆を有する基材成形体及び被覆された基材成形体の使用 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8012535B2 (enExample) |
| EP (1) | EP1934382A1 (enExample) |
| JP (1) | JP5184364B2 (enExample) |
| CN (1) | CN101305112B (enExample) |
| DE (1) | DE102005049393B4 (enExample) |
| WO (1) | WO2007045209A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1897970B2 (en) * | 2006-09-05 | 2016-06-15 | Tungaloy Corporation | Coated cutting tool and method for producing the same |
| CN103108716B (zh) * | 2010-09-07 | 2015-07-01 | 住友电工硬质合金株式会社 | 表面被覆切削工具 |
| CN102847962B (zh) * | 2011-06-29 | 2016-05-04 | 三菱综合材料株式会社 | 硬质包覆层发挥优异的耐崩刀性的表面包覆切削工具 |
| DE102011087715A1 (de) | 2011-12-05 | 2013-07-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete körper aus metall, hartmetall, cermet oder keramik sowie verfahren zur herstellung derartiger körper |
| EP3000913B1 (en) | 2014-09-26 | 2020-07-29 | Walter Ag | Coated cutting tool insert with MT-CVD TiCN on TiAI(C,N) |
| WO2016114157A1 (ja) * | 2015-01-14 | 2016-07-21 | 宇部興産株式会社 | 金属炭窒化膜又は半金属炭窒化膜の製造方法、金属炭窒化膜又は半金属炭窒化膜及び金属炭窒化膜又は半金属炭窒化膜の製造装置 |
| JP2016130337A (ja) * | 2015-01-14 | 2016-07-21 | 宇部興産株式会社 | 金属又は半金属炭窒化膜の製造方法 |
| JP2016138325A (ja) * | 2015-01-29 | 2016-08-04 | 宇部興産株式会社 | 金属又は半金属炭窒化膜の製造方法 |
| US11939670B2 (en) | 2018-09-28 | 2024-03-26 | Corning Incorporated | Low temperature methods for depositing inorganic particles on a metal substrate and articles produced by the same |
| JP7141601B2 (ja) * | 2019-12-19 | 2022-09-26 | 株式会社タンガロイ | 被覆切削工具 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3846162A (en) * | 1968-10-21 | 1974-11-05 | Texas Instruments Inc | Metal carbonitride coatings |
| US3771976A (en) | 1971-01-08 | 1973-11-13 | Texas Instruments Inc | Metal carbonitride-coated article and method of producing same |
| FR2216276B1 (enExample) * | 1973-02-06 | 1976-11-05 | Roussel Uclaf | |
| FR2216273B1 (enExample) * | 1973-02-06 | 1977-07-22 | Roussel Uclaf | |
| CH590339A5 (enExample) | 1974-02-07 | 1977-08-15 | Ciba Geigy Ag | |
| CA1047899A (en) * | 1974-02-07 | 1979-02-06 | Diethelm Bitzer | Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides |
| US4196233A (en) * | 1974-02-07 | 1980-04-01 | Ciba-Geigy Corporation | Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides |
| DD276603A3 (de) * | 1984-12-03 | 1990-03-07 | Akad Wissenschaften Ddr | Verschleissfester ueberzug, insbesondere fuer werkzeuge, und verfahren zu seiner herstellung |
| DD279603A1 (de) | 1985-12-06 | 1990-06-13 | Inst F Pflanzenschutzforsch Kl | Mittel zur larvenschlupfinduktion bei zystenbildenden nematoden |
| US5223337A (en) * | 1988-12-10 | 1993-06-29 | Fried. Krupp Gmbh | Tool produced by a plasma-activated CVD process |
| US5436071A (en) | 1990-01-31 | 1995-07-25 | Mitsubishi Materials Corporation | Cermet cutting tool and process for producing the same |
| US5223945A (en) * | 1990-01-31 | 1993-06-29 | Sony Corporation | Recording mode discrimination circuit |
| JP2775955B2 (ja) | 1990-01-31 | 1998-07-16 | 三菱マテリアル株式会社 | 耐摩耗性に優れたコーティングサーメットの製造法 |
| DE19530518A1 (de) * | 1995-08-19 | 1997-02-20 | Widia Gmbh | Verfahren zur Herstellung von Multikomponenten-Carbonitrid-Hartstoffschichten und Verbundkörper |
| DE19722728A1 (de) * | 1996-12-24 | 1998-06-25 | Widia Gmbh | Verbundkörper, bestehend aus einem Hartmetall-, Cermet-, oder Keramiksubstratkörper und Verfahren zu seiner Herstellung |
| US6472060B1 (en) | 2000-01-19 | 2002-10-29 | Seco Tools Ab | Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction |
| JP4437353B2 (ja) | 2000-03-30 | 2010-03-24 | 株式会社タンガロイ | 被覆切削工具およびその製造方法 |
| US6638571B2 (en) * | 2000-05-31 | 2003-10-28 | Mitsubishi Materials Corporation | Coated cemented carbide cutting tool member and process for producing the same |
| US6650498B1 (en) * | 2000-09-12 | 2003-11-18 | Hitachi Global Storage Technologies Netherlands B.V. | Actuator retract circuit for dual speed hard disk drive |
| DE10258282A1 (de) * | 2002-12-13 | 2004-07-08 | Walter Ag | CVD-Beschichtungsverfarhen für ZrBx CyNz-Schichten (x+y+z = 1) sowie beschichtetes Schneidwerkzeug |
| SE527346C2 (sv) | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| SE527349C2 (sv) | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| DE10320652A1 (de) * | 2003-05-07 | 2004-12-02 | Kennametal Widia Gmbh & Co.Kg | Werkzeug, insbesondere Schneidwerkzeug und Verfahren zur CVD-Abscheidung einer zweiphasigen Schicht auf einem Substratkörper |
-
2005
- 2005-10-15 DE DE102005049393.9A patent/DE102005049393B4/de not_active Expired - Lifetime
-
2006
- 2006-10-07 CN CN2006800345265A patent/CN101305112B/zh active Active
- 2006-10-07 EP EP06805375A patent/EP1934382A1/de not_active Withdrawn
- 2006-10-07 US US12/067,897 patent/US8012535B2/en active Active
- 2006-10-07 WO PCT/DE2006/001755 patent/WO2007045209A1/de not_active Ceased
- 2006-10-07 JP JP2008534863A patent/JP5184364B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20090042059A1 (en) | 2009-02-12 |
| WO2007045209A1 (de) | 2007-04-26 |
| EP1934382A1 (de) | 2008-06-25 |
| DE102005049393A1 (de) | 2007-04-19 |
| US8012535B2 (en) | 2011-09-06 |
| CN101305112A (zh) | 2008-11-12 |
| CN101305112B (zh) | 2010-11-10 |
| DE102005049393B4 (de) | 2019-08-08 |
| JP2009511283A (ja) | 2009-03-19 |
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