JP5139498B2 - 磁気抵抗効果素子の製造方法 - Google Patents
磁気抵抗効果素子の製造方法 Download PDFInfo
- Publication number
- JP5139498B2 JP5139498B2 JP2010236446A JP2010236446A JP5139498B2 JP 5139498 B2 JP5139498 B2 JP 5139498B2 JP 2010236446 A JP2010236446 A JP 2010236446A JP 2010236446 A JP2010236446 A JP 2010236446A JP 5139498 B2 JP5139498 B2 JP 5139498B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- magnetic film
- ion beam
- multilayer magnetic
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 61
- 238000000034 method Methods 0.000 title claims description 30
- 230000005291 magnetic effect Effects 0.000 claims description 121
- 238000010884 ion-beam technique Methods 0.000 claims description 112
- 238000005530 etching Methods 0.000 claims description 104
- 238000001020 plasma etching Methods 0.000 claims description 86
- 239000000758 substrate Substances 0.000 claims description 59
- 230000000694 effects Effects 0.000 claims description 47
- 238000012545 processing Methods 0.000 claims description 25
- 238000012546 transfer Methods 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 13
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 description 156
- 239000010410 layer Substances 0.000 description 120
- 230000001681 protective effect Effects 0.000 description 21
- 239000007789 gas Substances 0.000 description 20
- 238000004544 sputter deposition Methods 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000005290 antiferromagnetic effect Effects 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910019041 PtMn Inorganic materials 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910017090 AlO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F41/308—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices lift-off processes, e.g. ion milling, for trimming or patterning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
- H01F10/3259—Spin-exchange-coupled multilayers comprising at least a nanooxide layer [NOL], e.g. with a NOL spacer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hall/Mr Elements (AREA)
- Drying Of Semiconductors (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Thin Magnetic Films (AREA)
- Magnetic Heads (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
加速電圧 :50〜600V
イオン電流 :50〜500mA
不活性ガス圧力(Arの場合):6mPa〜130mPa
不活性ガス圧力(Krの場合):1mPa〜130mPa
不活性ガス圧力(Xeの場合):1mPa〜130mPa
基板温度 :80℃以下
基板の回転速度 :30〜300rpm
エッチング時間 :10sec〜3min
イオンビームの加速電圧、イオン電流をこの範囲にすることが、多層磁性膜に対するイオンビームの衝撃を小さくする上で好ましいからである。
図1(b)において、符号11で示されている部分が多層磁性膜である。この多層磁性膜11は、例えば、TMR(トンネル磁気抵抗効果)多層体、CPP(current perpendicular to plane)構造のGMR(巨大磁気抵抗化効果)多層体、フリー層に対する磁化方向を規定するバイアス層を含んだTMR積層休もしくはCPP構造のGMR積層体、反強磁性結合型多層膜を有するCPP構造のGMR多層体、スペキュラー型スピンバルブ磁性多層膜を有するCPP構造のGMR多層体、デュアルスピンバルブ型磁性多層膜を有するCPP構造のGMR多層体などで構成される(以下、総称して多層磁性膜という)。
ト層13をPRマスク14とし、ハードマスク層12のエッチングを行う(ステップ101)。
エッチングガスの流量:326mg/min(50sccm)
ハードマスク層12 :Ta層
ソース電力 :500W
バイアス電力 :70W
第1の反応性イオンエッチング室22内の圧力:0.8Pa
基板10を保持する基板ホルダーの温度 :80℃
エッチングガスの流量 :18.756mg/min
(15sccm)
ソース電力 :1000W
バイアス電力 :800W
第2の反応性イオンエッチング室23内の圧力:0.4Pa
基板10を保持する基板ホルダーの温度 :40℃
エッチング時間 :3min
イオンビームの入射角度(θ):50〜80度
加速電圧 :250V
イオン電流 :70mA
不活性ガス圧力(Arの場合):6mPa〜130mPa
基板の温度 :80℃
基板の回転速度 :10rpm
エッチング時間 :3min
(エッチング速度:0.2オングストローム/sec)
成膜室25内の圧力 :8Pa
基板10を保持する基板ホルダーの温度:200℃
11 多層磁性膜
12 ハードマスク層
13 フォトレジスト層
14 PRマスク
15 ダメージ層
16 保護膜
20 製造装置
21 真空搬送室
22 第1の反応性イオンエッチング室
23 第2の反応性イオンエッチング室
24 イオンビームエッチング室
25 成膜室
26 ウエハローダ
Claims (4)
- 磁気抵抗効果素子を構成する多層磁性膜が形成された基板に対して、反応性イオンエッチングにより前記多層磁性膜を多層磁性膜構造体に加工する工程を含んでいる磁気抵抗効果素子の製造方法において、
反応性イオンエッチング室内にて水酸基を少なくとも一つ以上持つアルコールを含むガスを用いた前記反応性イオンエッチングにより前記多層磁性膜を多層磁性膜構造体に加工する工程と、
該反応性イオンエッチング室からイオンビームエッチング室内へと該多層磁性膜構造体を搬送する工程と、
該イオンビームエッチング室内にて前記反応性イオンエッチングにより加工された前記多層磁性膜構造体の表面に対してイオンビームの加速電圧が50〜200Vであるイオンビームを照射し、該反応性イオンエッチングによるエッチング加工の際に生じた該多層磁性膜構造体の表面のダメージを除去する工程と、
を含むことを特徴とする磁気抵抗効果素子の製造方法。 - 前記反応性イオンエッチングは、前記多層磁性膜の上表面に形成されているハードマスク層をマスクとし、エッチングガスとして水酸基を少なくとも一つ以上持つアルコールを用いて前記多層磁性膜をエッチングするものであることを特徴とする請求項1記載の磁気抵抗効果素子の製造方法。
- 前記イオンビームを照射する工程は、前記多層磁性膜構造体を回転させながら行っていることを特徴とする請求項1又は2に記載の磁気抵抗効果素子の製造方法。
- 前記反応性イオンエッチング室と前記イオンビームエッチング室とが真空搬送室に連通して設けられ、外部雰囲気に処理基板を曝すことなく該処理基板を該反応性イオンエッチング室から該真空搬送室内へと搬入し、該処理基板を該真空搬送室から該イオンビームエッチング室内へと搬出するよう構成された製造装置を用いている請求項1に記載の磁気抵抗効果素子の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010236446A JP5139498B2 (ja) | 2005-09-13 | 2010-10-21 | 磁気抵抗効果素子の製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005265257 | 2005-09-13 | ||
JP2005265257 | 2005-09-13 | ||
JP2010236446A JP5139498B2 (ja) | 2005-09-13 | 2010-10-21 | 磁気抵抗効果素子の製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007535502A Division JPWO2007032379A1 (ja) | 2005-09-13 | 2006-09-13 | 磁気抵抗効果素子の製造方法及び製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011071526A JP2011071526A (ja) | 2011-04-07 |
JP5139498B2 true JP5139498B2 (ja) | 2013-02-06 |
Family
ID=37864971
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007535502A Pending JPWO2007032379A1 (ja) | 2005-09-13 | 2006-09-13 | 磁気抵抗効果素子の製造方法及び製造装置 |
JP2010236446A Active JP5139498B2 (ja) | 2005-09-13 | 2010-10-21 | 磁気抵抗効果素子の製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007535502A Pending JPWO2007032379A1 (ja) | 2005-09-13 | 2006-09-13 | 磁気抵抗効果素子の製造方法及び製造装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8540852B2 (ja) |
EP (1) | EP1926158B1 (ja) |
JP (2) | JPWO2007032379A1 (ja) |
KR (1) | KR100950897B1 (ja) |
TW (1) | TWI413117B (ja) |
WO (1) | WO2007032379A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8504054B2 (en) | 2002-09-10 | 2013-08-06 | Qualcomm Incorporated | System and method for multilevel scheduling |
JP4354519B2 (ja) * | 2006-09-13 | 2009-10-28 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
WO2009107485A1 (ja) * | 2008-02-27 | 2009-09-03 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法及び製造装置 |
CN101794658B (zh) * | 2008-05-09 | 2011-10-19 | 南京航空航天大学 | 一种提高FeNi/AlOx/NiFe/FeMn自旋隧道结结构多层膜结构中偏置场稳定性的方法 |
JP4468469B2 (ja) * | 2008-07-25 | 2010-05-26 | 株式会社東芝 | 磁気記録媒体の製造方法 |
JP4489132B2 (ja) * | 2008-08-22 | 2010-06-23 | 株式会社東芝 | 磁気記録媒体の製造方法 |
JP4575499B2 (ja) * | 2009-02-20 | 2010-11-04 | 株式会社東芝 | 磁気記録媒体の製造方法 |
US8912012B2 (en) * | 2009-11-25 | 2014-12-16 | Qualcomm Incorporated | Magnetic tunnel junction device and fabrication |
JP5238780B2 (ja) | 2010-09-17 | 2013-07-17 | 株式会社東芝 | 磁気記録媒体とその製造方法及び磁気記録装置 |
JP5719579B2 (ja) * | 2010-12-06 | 2015-05-20 | 株式会社アルバック | プラズマエッチング方法 |
JP2012204591A (ja) * | 2011-03-25 | 2012-10-22 | Toshiba Corp | 膜形成方法および不揮発性記憶装置 |
WO2013099372A1 (ja) | 2011-12-27 | 2013-07-04 | キヤノンアネルバ株式会社 | 放電容器及びプラズマ処理装置 |
JP2013232497A (ja) * | 2012-04-27 | 2013-11-14 | Renesas Electronics Corp | 磁性体装置及びその製造方法 |
US9129690B2 (en) * | 2012-07-20 | 2015-09-08 | Samsung Electronics Co., Ltd. | Method and system for providing magnetic junctions having improved characteristics |
TWI517463B (zh) | 2012-11-20 | 2016-01-11 | 佳能安內華股份有限公司 | 磁阻效應元件之製造方法 |
WO2014080823A1 (ja) * | 2012-11-26 | 2014-05-30 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法及びデバイスの製造方法 |
US20140210021A1 (en) * | 2013-01-25 | 2014-07-31 | Qualcomm Incorporated | Method and apparatus for ameliorating peripheral edge damage in magnetoresistive tunnel junction (mtj) device ferromagnetic layers |
KR102078849B1 (ko) | 2013-03-11 | 2020-02-18 | 삼성전자 주식회사 | 자기저항 구조체, 이를 포함하는 자기 메모리 소자 및 자기저항 구조체의 제조 방법 |
KR102109644B1 (ko) * | 2013-03-26 | 2020-05-12 | 주성엔지니어링(주) | 기판 처리 방법 및 기판 처리 장치 |
KR101862632B1 (ko) * | 2013-09-25 | 2018-05-31 | 캐논 아네르바 가부시키가이샤 | 자기 저항 효과 소자의 제조 방법 및 제조 시스템 |
KR101602869B1 (ko) | 2014-08-21 | 2016-03-11 | 캐논 아네르바 가부시키가이샤 | 자기 저항 효과 소자의 제조 방법 및 제조 시스템 |
US10516101B2 (en) * | 2015-07-30 | 2019-12-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Physical cleaning with in-situ dielectric encapsulation layer for spintronic device application |
US9935261B1 (en) * | 2017-04-05 | 2018-04-03 | Headway Technologies, Inc. | Dielectric encapsulation layer for magnetic tunnel junction (MTJ) devices using radio frequency (RF) sputtering |
US10263179B2 (en) * | 2017-07-18 | 2019-04-16 | Nxp B.V. | Method of forming tunnel magnetoresistance (TMR) elements and TMR sensor element |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3703348B2 (ja) * | 1999-01-27 | 2005-10-05 | アルプス電気株式会社 | スピンバルブ型薄膜素子とそのスピンバルブ型薄膜素子を備えた薄膜磁気ヘッド |
US6238582B1 (en) * | 1999-03-30 | 2001-05-29 | Veeco Instruments, Inc. | Reactive ion beam etching method and a thin film head fabricated using the method |
JP3558951B2 (ja) * | 2000-03-16 | 2004-08-25 | シャープ株式会社 | 磁気メモリ素子及びそれを用いた磁気メモリ |
JP3944341B2 (ja) * | 2000-03-28 | 2007-07-11 | 株式会社東芝 | 酸化物エピタキシャル歪格子膜の製造法 |
JP2002214092A (ja) * | 2001-01-19 | 2002-07-31 | Mitsubishi Electric Corp | 被検試料の作製方法及び半導体装置の検査方法 |
JP3558996B2 (ja) * | 2001-03-30 | 2004-08-25 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド、磁気再生装置及び磁気記憶装置 |
EP1388900A1 (en) * | 2001-05-15 | 2004-02-11 | Matsushita Electric Industrial Co., Ltd. | Magnetoresistive element |
WO2003001614A1 (fr) * | 2001-06-26 | 2003-01-03 | Matsushita Electric Industrial Co., Ltd. | Dispositif magneto-resistif et procede de production |
JP2003078185A (ja) | 2001-09-03 | 2003-03-14 | Nec Corp | 強磁性トンネル接合構造及びその製造方法並びに該強磁性トンネル接合を用いた磁気メモリ |
JP3774388B2 (ja) * | 2001-09-14 | 2006-05-10 | アルプス電気株式会社 | 磁気検出素子 |
JP3823882B2 (ja) | 2001-11-01 | 2006-09-20 | Tdk株式会社 | 磁気抵抗効果素子を有する薄膜磁気ヘッドの製造方法 |
US20030224620A1 (en) * | 2002-05-31 | 2003-12-04 | Kools Jacques C.S. | Method and apparatus for smoothing surfaces on an atomic scale |
JP2004118954A (ja) * | 2002-09-27 | 2004-04-15 | Hitachi Ltd | 薄膜磁気ヘッド装置の製造方法 |
JP4188125B2 (ja) | 2003-03-05 | 2008-11-26 | Tdk株式会社 | 磁気記録媒体の製造方法及び製造装置 |
JP4111274B2 (ja) * | 2003-07-24 | 2008-07-02 | キヤノンアネルバ株式会社 | 磁性材料のドライエッチング方法 |
JP4223348B2 (ja) | 2003-07-31 | 2009-02-12 | Tdk株式会社 | 磁気記録媒体の製造方法及び製造装置 |
JP2005064050A (ja) * | 2003-08-14 | 2005-03-10 | Toshiba Corp | 半導体記憶装置及びそのデータ書き込み方法 |
JP4215609B2 (ja) * | 2003-09-29 | 2009-01-28 | 株式会社東芝 | 磁気セル及び磁気メモリ |
JP4364669B2 (ja) * | 2004-02-20 | 2009-11-18 | 富士通マイクロエレクトロニクス株式会社 | ドライエッチング方法 |
JP4822680B2 (ja) * | 2004-08-10 | 2011-11-24 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
US20060158790A1 (en) * | 2005-01-14 | 2006-07-20 | Hitachi Global Storage Technologies | Magnetoresistive sensor having a novel junction structure for improved track width definition and pinned layer stability |
US20060168794A1 (en) * | 2005-01-28 | 2006-08-03 | Hitachi Global Storage Technologies | Method to control mask profile for read sensor definition |
-
2006
- 2006-09-13 JP JP2007535502A patent/JPWO2007032379A1/ja active Pending
- 2006-09-13 TW TW095133876A patent/TWI413117B/zh active
- 2006-09-13 EP EP06810098.1A patent/EP1926158B1/en active Active
- 2006-09-13 US US11/991,967 patent/US8540852B2/en active Active
- 2006-09-13 KR KR1020087006361A patent/KR100950897B1/ko active IP Right Grant
- 2006-09-13 WO PCT/JP2006/318141 patent/WO2007032379A1/ja active Application Filing
-
2010
- 2010-10-21 JP JP2010236446A patent/JP5139498B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP1926158A4 (en) | 2012-07-25 |
JPWO2007032379A1 (ja) | 2009-03-19 |
US8540852B2 (en) | 2013-09-24 |
TW200717470A (en) | 2007-05-01 |
US20100155231A1 (en) | 2010-06-24 |
EP1926158B1 (en) | 2016-04-27 |
JP2011071526A (ja) | 2011-04-07 |
KR20080044298A (ko) | 2008-05-20 |
EP1926158A1 (en) | 2008-05-28 |
WO2007032379A1 (ja) | 2007-03-22 |
KR100950897B1 (ko) | 2010-04-06 |
TWI413117B (zh) | 2013-10-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5139498B2 (ja) | 磁気抵抗効果素子の製造方法 | |
JP4354519B2 (ja) | 磁気抵抗効果素子の製造方法 | |
EP1598865B1 (en) | Mram with a novel buffer layer | |
JP5650760B2 (ja) | 製造装置 | |
US20110198314A1 (en) | Method to fabricate small dimension devices for magnetic recording applications | |
JP4876708B2 (ja) | トンネル磁気抵抗効果素子の製造方法、薄膜磁気ヘッドの製造方法及び磁気メモリの製造方法 | |
US20160276583A1 (en) | Method of manufacturing tunnel magnetoresistive effect element and sputtering apparatus | |
CN111566831A (zh) | 用于高性能磁性随机存取存储器装置的自由层氧化与间隔物辅助磁性穿隧结蚀刻 | |
JP5113170B2 (ja) | 磁気デバイスの製造方法、磁気デバイスの製造装置、及び磁気デバイス | |
WO2007105472A1 (ja) | 磁気抵抗効果素子の製造方法及び製造装置 | |
JP5190316B2 (ja) | 高周波スパッタリング装置 | |
JP5101266B2 (ja) | 磁気デバイスの製造方法 | |
JP5038117B2 (ja) | トンネル型磁気抵抗多層膜製造方法 | |
WO2009107485A1 (ja) | 磁気抵抗効果素子の製造方法及び製造装置 | |
CN111373559A (zh) | 对来自图案化的磁穿隧结的侧壁材料的高温挥发 | |
JP2005123412A (ja) | 磁気抵抗多層膜製造方法及び製造装置 | |
JP2009055050A (ja) | スピンバルブ型巨大磁気抵抗薄膜またはtmr膜の製造方法 | |
US8354034B2 (en) | Method of manufacturing a magnetic head | |
CN101236746B (zh) | 防止磁头体之隧道磁电阻阻抗降低的方法及磁头制造方法 | |
JP2007158137A (ja) | 薄膜の表面平坦化方法 | |
JP2007311015A (ja) | スライダのトンネル磁気抵抗の磁気抵抗低下防止方法及び微構造の形成方法 | |
JP2009158089A (ja) | スピンバルブ型巨大磁気抵抗薄膜またはtmr膜の製造方法 | |
JP2009055049A (ja) | マルチチャンバ成膜装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120425 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120608 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20120926 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121106 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121115 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5139498 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151122 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |