JP5135759B2 - 超接合半導体装置の製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 239000012535 impurity Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 22
- 230000015556 catabolic process Effects 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 14
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 25
- 239000010410 layer Substances 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000000059 patterning Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000005380 borophosphosilicate glass Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229910018125 Al-Si Inorganic materials 0.000 description 3
- 229910018520 Al—Si Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- -1 diborane Chemical compound 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000007567 mass-production technique Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- XUIMIQQOPSSXEZ-IGMARMGPSA-N silicon-28 atom Chemical compound [28Si] XUIMIQQOPSSXEZ-IGMARMGPSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
Description
図2(b)の実線の階段接合の場合、n型領域の1層分の電気伝導度σ1は次式で表される。
s0は図2(a)のn型領域切断面の幅、Dは、同じくn型領域奥行き長さ、lは同じくn型領域高さである。qは素電荷量、ρn0はn型ネットドーピング濃度である。μnは電子の移動度である。
相互拡散を考慮した図2(b)の破線の場合、同じくn型領域の電気伝導度σ2は次のようになる。
ρnは切断線に沿って分布を持つネットドーピング濃度である。sは切断線に沿った距離である。積分はn領域幅に渡って行う。移動度が一定であるとすると、式(2)は次のようになる。
相互拡散有り無しの場合で、n型領域の総ネットドーピング量が同等であるので、
が成り立ち、式(3)および(4)より
が得られる。
従って相互拡散有り無しの場合のオン抵抗は等しい。実際には、ネットドーピング総量が等しいとは言え、相互拡散によりトータルドーピング濃度(すなわちp型ドーピング濃度とn型ドーピング濃度の和)が増加するので、移動度が若干低下する(移動度はトータルドーピング濃度に依存する)。このため相互拡散によってn型領域の抵抗は若干上昇する。
実際には工程バラツキにより、p型とn型の各不純物量がばらついてしまう。例えばp型領域(カラム)およびn型領域(カラム)の濃度がそれぞれ1×1015cm−3の階段接合のp型領域(カラム)とn型領域(カラム)を考えてみる。工程バラツキによる不純物濃度のバラツキを±10%、すなわち±1×1014cm−3と仮定すると、最悪ケースではp型濃度が1.1×1015cm−3、n型濃度が0.9×1015cm−3になり、p型とn型間の電荷バランスは、1.1/0.9=122%となる。この電荷バランスの崩れにより、耐圧が低下する。
また、前述の方法で両面パターンの位置を相互に厳密に合致させるには、精密な両面マスクアライナーを必要とする。
本発明は、以上説明した問題点に鑑みてなされたものであり、本発明の目的は、トレンチ埋め込みエピタキシャル方式によるSJ−MOSFETの製造において、前記特許文献1における問題点を解消または回避しつつ、異なる製造方法によりp型領域(カラム)、n型領域(カラム)形成後の熱履歴を削減し、p型領域(カラム)およびn型領域(カラム)の不純物ドーピング量のバラツキを低減して耐圧良品率を改善できる超接合半導体装置の製造方法を提供することである。
本発明は、要するにp型n型カラム構造を形成する前に、MOSゲート構造を形成しておくことにより、カラム構造形成後の熱履歴を抑えるようにするものである。つまり、n型エピタキシャル層に、エッチングによりp型領域(カラム)用トレンチを形成する前に、MOSゲート構造を構成するpベース領域およびn+ソース領域を拡散形成しておく。その後、前記カラム用トレンチを形成し、p型エピタキシャル層を埋め込む。次に、破壊耐量を向上させるため、前記p型エピタキシャル層表面に高不純物濃度のp+型領域を形成し、ポリシリコンゲート電極構造を形成する。その上にBPSG(Boro Phospho Silicate Glass)などによる層間絶縁膜、Al−Siソース電極および裏面側にTi、Ni、Auなどの積層膜からなるドレイン金属電極を形成して超接合半導体装置のウエハが完成する。
図1−1乃至図1−4は、それぞれ、本発明にかかるSJ−MOSFETの製造方法の一部を示す半導体基板の要部断面図である。図3は本発明にかかるトレンチゲート型SJ−MOSFETの要部断面図である。。
図1−1乃至図1−4は、本発明を600V耐圧のSJ−MOSFETに適用した場合の製造工程の一部を示す半導体基板の要部断面図である。比抵抗0.01Ωcmのn型単結晶シリコン基板(アンチモンドーピング)1にリン濃度4×1015cm−3のn型エピタキシャル層4を50μmの厚さに成長させた総厚500μmのウエハを準備する(図1−1(a))。まず1100℃の熱酸化により、厚さ1.6μmの酸化膜5を成長させる。主電流の流れる活性部のパターニング/エッチングにより、幅6μmおよび間隔6μmで酸化膜を等間隔に除去して酸化膜マスクを形成する(図1−1(b))。ドーズ量4×1014cm−2のボロンを全面イオン注入し、1150℃で3時間ドライブし、チャネル形成領域となる深さ2μmのpベース領域6を形成する。ドーズ量4×1015cm−2のリンをイオン注入し、1100℃で1時間ドライブして深さ1μmのnソース領域7を形成する(図1−1(c))。
2、22… n型領域、n型領域(カラム)
3、28… p型領域、p型領域(カラム)
4、… nエピタキシャル層、
5、… マスク酸化膜
6、23… pベース領域
7、27… n+ソース領域
8、24… トレンチ
9、28… pエピタキシャル層
10、29… 第2p+領域
13、25… ゲート酸化膜
14、26… ゲート電極
15、30… 層間絶縁膜
16、… コンタクトホール
17、31… ソース金属電極
18、… ポリイミド膜。
Claims (2)
- 一導電型低抵抗半導体基板上に、少なくとも、ドリフト層となる一導電型エピタキシャル層を堆積する第一工程、主電流の流れる活性部内にプレーナMOSゲート構造を形成するために前記一導電型エピタキシャル層上に設けられた絶縁膜マスクの開口部からの選択的イオン注入と熱拡散により該絶縁膜マスク直下まで拡がる他導電型ベース領域と一導電型ソース領域を形成する第二工程、絶縁膜マスクを用いた異方性エッチングにより、前記他導電型ベース領域を貫通して前記一導電型低抵抗半導体基板に達するかまたは近傍に達するトレンチを形成する第三工程、該トレンチに他導電型エピタキシャル層を埋め込む第四工程、前記トレンチに埋め込まれた他導電型エピタキシャル層の表面を前記一導電型エピタキシャル層の表面とほぼ面一にする第五工程、該他導電型エピタキシャル層の表面に、該層より高不純物濃度の他導電型領域を前記他導電型ベース領域の深さに形成する第六工程、該高不純物濃度の他導電型領域の表面に所要のパターンで高不純物濃度の一導電型領域を前記一導電型ソース領域の深さに形成する第七工程、前記絶縁膜マスクを除去し、前記活性部を取り巻く周辺耐圧構造部上に形成されるフィールド酸化膜の形成後、所要のプレーナMOSゲート構造を形成する第八工程をこの順に含むことを特徴とする超接合半導体装置の製造方法。
- 前記フィールド酸化膜がCVD酸化膜であることを特徴とする請求項1記載の超接合半導体装置の製造方法。
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US11/855,093 US7601597B2 (en) | 2006-10-19 | 2007-09-13 | Manufacturing method of a super-junction semiconductor device |
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JP4416007B2 (ja) * | 2007-05-17 | 2010-02-17 | 株式会社デンソー | 半導体装置 |
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JP5400405B2 (ja) * | 2009-02-05 | 2014-01-29 | 株式会社東芝 | 半導体装置の製造方法 |
WO2012034078A1 (en) * | 2010-09-10 | 2012-03-15 | Shih-Ping Wang | Photovoltaic nanowire structures and related fabrication methods |
JP5659558B2 (ja) * | 2010-05-20 | 2015-01-28 | 富士電機株式会社 | 超接合半導体装置の製造方法 |
JP5740108B2 (ja) | 2010-07-16 | 2015-06-24 | 株式会社東芝 | 半導体装置 |
KR101261928B1 (ko) * | 2011-11-07 | 2013-05-08 | 현대자동차주식회사 | 실리콘 카바이드 쇼트키 베리어 다이오드의 제조방법 |
US20130307058A1 (en) * | 2012-05-18 | 2013-11-21 | Infineon Technologies Austria Ag | Semiconductor Devices Including Superjunction Structure and Method of Manufacturing |
JP5812029B2 (ja) * | 2012-06-13 | 2015-11-11 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
CN103578999A (zh) * | 2012-08-01 | 2014-02-12 | 上海华虹Nec电子有限公司 | 一种超级结的制备工艺方法 |
US8564058B1 (en) | 2012-08-07 | 2013-10-22 | Force Mos Technology Co., Ltd. | Super-junction trench MOSFET with multiple trenched gates in unit cell |
JP6135178B2 (ja) * | 2013-02-25 | 2017-05-31 | 富士電機株式会社 | 超接合半導体装置の製造方法 |
US10446700B2 (en) | 2013-05-22 | 2019-10-15 | W&Wsens Devices, Inc. | Microstructure enhanced absorption photosensitive devices |
US10700225B2 (en) | 2013-05-22 | 2020-06-30 | W&Wsens Devices, Inc. | Microstructure enhanced absorption photosensitive devices |
US11121271B2 (en) | 2013-05-22 | 2021-09-14 | W&WSens, Devices, Inc. | Microstructure enhanced absorption photosensitive devices |
WO2014190189A2 (en) | 2013-05-22 | 2014-11-27 | Shih-Yuan Wang | Microstructure enhanced absorption photosensitive devices |
US10468543B2 (en) | 2013-05-22 | 2019-11-05 | W&Wsens Devices, Inc. | Microstructure enhanced absorption photosensitive devices |
JP2015018951A (ja) * | 2013-07-11 | 2015-01-29 | 株式会社東芝 | 半導体装置 |
EP3221895A4 (en) | 2014-11-18 | 2018-08-15 | Shih-Yuan Wang | Microstructure enhanced absorption photosensitive devices |
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CN105914233B (zh) * | 2016-05-26 | 2018-09-18 | 东南大学 | 一种高鲁棒性快恢复超结功率半导体晶体管及其制备方法 |
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