JP5069770B2 - リソグラフィ装置及びシール構造 - Google Patents
リソグラフィ装置及びシール構造 Download PDFInfo
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- JP5069770B2 JP5069770B2 JP2010112063A JP2010112063A JP5069770B2 JP 5069770 B2 JP5069770 B2 JP 5069770B2 JP 2010112063 A JP2010112063 A JP 2010112063A JP 2010112063 A JP2010112063 A JP 2010112063A JP 5069770 B2 JP5069770 B2 JP 5069770B2
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- seal structure
- substrate
- sensor
- lithographic apparatus
- liquid
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
Claims (13)
- 上部表面の凹所にセンサを有するテーブルと、
前記センサと前記テーブルとの間に配置された、一方の縁部が前記センサに接着され、もう一方の縁部が前記テーブルに接着されたシール構造と、を有するリソグラフィ装置であって、
前記シール構造は、前記センサの周囲を前記テーブルにシールし、
前記シール構造は可撓性であり、接着剤の層を一方の面に有し、液密であり、約5μmから約50μmの厚みを有する
リソグラフィ装置。 - 前記センサが除去可能である、請求項1に記載のリソグラフィ装置。
- 前記シール構造が、前記センサの前記周囲に概ね対応する形状を有する開口を画定する、請求項1又は2に記載のリソグラフィ装置。
- 前記シール構造が前記センサを取り囲んでいる、請求項1乃至3の何れかに記載のリソグラフィ装置。
- 前記シール構造が塑性物質で被覆された金属を含む、請求項1乃至4の何れかに記載のリソグラフィ装置。
- 前記センサの縁及び前記テーブルの縁が、前記テーブルの頂部から前記シール構造までの経路が曲がりくねるように前記可撓性シール構造の上方に配置された相補係合段差を有する、1乃至5の何れかに記載のリソグラフィ装置。
- 前記テーブルの頂部表面の一部を覆うようになされたカバー・プレートをさらに備え、前記テーブルの前記縁が前記カバー・プレート中の開口の縁である、請求項6に記載のリソグラフィ装置。
- 前記シール構造が前記センサの前記段差の一つの上に位置している、請求項6又は7に記載のリソグラフィ装置。
- リソグラフィ投影装置内のテーブルにセンサの周囲をシールする使い捨てシール構造であって、
前記シール構造は、前記センサの前記周囲の形状と概ね対応する形状を有する開口を画定しており、
前記シール構造は可撓性であり、接着剤の層を一方の面に有し、液密であり、約5μmから約50μmの厚みを有する
シール構造。 - 前記センサが除去可能である、請求項9に記載の使い捨てシール構造。
- 前記シール構造が閉ループで形成されている、請求項9又は10に記載の使い捨てシール構造。
- 前記使い捨てシール構造の反対側の面の前記接着剤の層に除去可能に接着されたバッキング・シートをさらに備える、請求項9乃至11の何れかに記載の使い捨てシール構造。
- 塑性物質で被覆された金属を含む、請求項9乃至12の何れかに記載の使い捨てシール構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/075,819 US7684010B2 (en) | 2005-03-09 | 2005-03-09 | Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing |
US11/075,819 | 2005-03-09 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006062036A Division JP4633656B2 (ja) | 2005-03-09 | 2006-03-08 | リソグラフィ装置及びデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010177709A JP2010177709A (ja) | 2010-08-12 |
JP5069770B2 true JP5069770B2 (ja) | 2012-11-07 |
Family
ID=36970468
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006062036A Active JP4633656B2 (ja) | 2005-03-09 | 2006-03-08 | リソグラフィ装置及びデバイス製造方法 |
JP2010112063A Active JP5069770B2 (ja) | 2005-03-09 | 2010-05-14 | リソグラフィ装置及びシール構造 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006062036A Active JP4633656B2 (ja) | 2005-03-09 | 2006-03-08 | リソグラフィ装置及びデバイス製造方法 |
Country Status (2)
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US (2) | US7684010B2 (ja) |
JP (2) | JP4633656B2 (ja) |
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JP2005191393A (ja) * | 2003-12-26 | 2005-07-14 | Canon Inc | 露光方法及び装置 |
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US20060203215A1 (en) | 2006-09-14 |
US20100182578A1 (en) | 2010-07-22 |
US8390778B2 (en) | 2013-03-05 |
JP2006253688A (ja) | 2006-09-21 |
US7684010B2 (en) | 2010-03-23 |
JP2010177709A (ja) | 2010-08-12 |
JP4633656B2 (ja) | 2011-02-16 |
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