JP5058277B2 - 半導体装置及びその製造方法 - Google Patents
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Description
図1乃至図4は本発明の第1の実施形態に係わる半導体装置を説明するためのもので、図1はn型FETの素子構造を示す断面図、図2(a)(b)は図1のn型FETの動作を説明するためのエネルギーバンド図、図3はp型FETの素子構造を示す断面図、図4(a)(b)は図3のp型FETの動作を説明するためのエネルギーバンド図である。
図5乃至図7は、本発明の第2の実施形態に係わる半導体装置の製造工程を示す断面図である。この実施形態は、歪みGOIチャネル Germanide S/D TFETによる相補型トランジスタである。
なお、本発明は上述した各実施形態に限定されるものではない。実施形態では、n型FETとp型FETの両方を有する相補型のFETの例で説明したが、必ずしも相補型に限らずn型FETのみ又はp型FETのみの構成であっても良い。
11…Si基板
12…埋め込み絶縁膜
13…Ge層
21,31…ゲート絶縁膜
22,32…ゲート電極
23,33…側壁絶縁膜
24,34…NiGeソース電極
25,35…NiGeドレイン電極
26,36…Si薄膜
41…素子分離層
42…酸化膜
43…Ge層
45,48…レジストマスク
46…ニッケル膜
Claims (9)
- Si1-x Gex (0<x≦1)の第1の半導体層上にゲート絶縁膜を介して形成されたゲート電極と、
前記第1の半導体層の少なくとも表面部を挟む2つの領域の一方に形成され、且つ選択ジャーマナイド法によりGeを主成分とする第2の半導体と金属との化合物で形成されたソース電極と、
前記第1の半導体層の少なくとも表面部を挟む2つの領域の他方に形成され、且つ前記第1の半導体と前記金属との化合物で形成されたドレイン電極と、
前記ソース電極と前記第1の半導体層との間に前記第1の半導体層からのエピタキシャル成長により形成されたSi薄膜と、
を具備し、
前記ゲート電極に対し、前記ソース電極のゲート側の端部と前記ドレイン電極のゲート側の端部とは非対称の位置関係にあり、前記ドレイン電極のゲート側の端部の方が前記ソース電極のゲート側の端部よりも、前記ゲート電極の端部からゲート外側方向に遠く離れていることを特徴とする半導体装置。 - 前記ゲート電極のソース側の端部は、前記Si薄膜と前記ソース電極との界面に一致しているか、又は前記ソース電極上にオーバーラップしており、前記ドレイン電極のゲート電極側の端部は、前記ゲート電極のドレイン側の端部からゲート外側方向に離間していることを特徴とする請求項1記載半導体装置。
- 前記第1の半導体層,前記ゲート電極,前記ゲート絶縁膜,前記ソース電極,前記ドレイン電極,及び前記Si薄膜はn型FETを形成するものであり、前記第1の半導体層は歪みを有することを特徴とする請求項1又は2に記載の半導体装置。
- 前記第1の半導体層,前記ゲート電極,前記ゲート絶縁膜,前記ソース電極,前記ドレイン電極,及び前記Si薄膜はn型FETを形成するものであり、前記ソース電極と前記Si薄膜との界面及び前記ドレイン電極と前記第1の半導体層との界面に、S及びSeの少なくとも一方が偏析していることを特徴とする請求項1〜3の何れかに記載の半導体装置。
- 前記第1の半導体層,前記Si薄膜,前記ソース電極,及び前記ドレイン電極は、絶縁膜上に形成されていることを特徴とする請求項1〜4の何れかに記載の半導体装置。
- 請求項1の構成で、前記Si薄膜の伝導帯端のエネルギーが前記第1の半導体層の伝導帯端のエネルギーよりも高く、前記ソース電極及びドレイン電極のフェルミエネルギーが前記第1の半導体層のミッドギャップよりも伝導帯寄りとなるn型FETと、
請求項1の構成で、前記Si薄膜の価電子帯端のエネルギーが前記第1の半導体層の価電子帯端のエネルギーよりも低く、前記ソース電極及びドレイン電極のフェルミエネルギーが前記第1の半導体層のミッドギャップよりも価電子帯寄りとなるp型FETと、
を備えたことを特徴とする半導体装置。 - Si1-x Gex (0<x≦1)の第1の半導体層上の一部にゲート絶縁膜を介してゲート電極を形成する工程と、
前記第1の半導体層の前記ゲート電極に対応するチャネル領域を挟むソース/ドレイン領域のうち、ソース領域をエッチングして溝部を形成する工程と、
前記溝部に露出した前記チャネル領域の側面にSi薄膜をエピタキシャル成長する工程と、
前記Si薄膜を有する溝部内にGeを主成分とする第2の半導体層をエピタキシャル成長により埋め込み形成する工程と、
前記第2の半導体層が埋め込み形成された前記ソース領域及び前記ドレイン領域の各表面に金属膜を堆積した後、熱処理により前記ソース領域及び前記ドレイン領域を選択ジャーマナイド法により金属化合物化する工程と、
を含むことを特徴とする半導体装置の製造方法。 - 前記Si薄膜及び前記第2の半導体層の形成後で、前記ソース領域及び前記ドレイン領域を金属化合物化する前又は後に、前記ソース領域及び前記ドレイン領域にS及びSeの少なくとも一方のイオンを注入し、前記ソース領域と前記Si薄膜との界面及び前記ドレイン領域と前記第1の半導体層との界面にS及びSeの少なくとも一方を偏析させることを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記溝部を形成する工程として、前記ソース領域をリアクティブイオンエッチングによりエッチングした後に、前記チャネル領域の側面をアンモニアと過酸化水素の混合液又は塩酸と過酸化水素の混合液によりエッチングすることを特徴とする請求項7又は8に記載の半導体装置の製造方法。
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