JP5048005B2 - 金属バンプを持つプリント基板及びその製造方法 - Google Patents
金属バンプを持つプリント基板及びその製造方法 Download PDFInfo
- Publication number
- JP5048005B2 JP5048005B2 JP2009049589A JP2009049589A JP5048005B2 JP 5048005 B2 JP5048005 B2 JP 5048005B2 JP 2009049589 A JP2009049589 A JP 2009049589A JP 2009049589 A JP2009049589 A JP 2009049589A JP 5048005 B2 JP5048005 B2 JP 5048005B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- carrier
- forming
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4007—Surface contacts, e.g. bumps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0367—Metallic bump or raised conductor not used as solder bump
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0323—Working metal substrate or core, e.g. by etching, deforming
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0376—Etching temporary metallic carrier substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
- Y10T29/49208—Contact or terminal manufacturing by assembling plural parts
- Y10T29/49222—Contact or terminal manufacturing by assembling plural parts forming array of contacts or terminals
Description
また、パッド13はメッキ方式で形成されるので、メッキ偏差によって厚さが互いに異なり、ソルダペースト19を印刷する工程においても、印刷量を均一に調整することが難しいため、バンプ23の高さが均一でなく、これによって半導体チップと連結されないバンプ23も形成される問題点がある。
前記(D)段階の後、前記上部回路層及び前記下部回路層を電気的に接続するビアを形成する段階をさらに含むことができる。
これら図に示すように、本実施例による金属バンプを持つプリント基板は、絶縁層400上に埋め込まれた電気伝導性金属でなる回路パターン610を含む上部回路層、及び回路パターン610と一体を成す金属バンプ615を含む構成である。
200 エッチングレジスト
210 凹部形成用開口部
115 凹部
310 第1バリアー層
400 絶縁層
500 メッキレジスト
610 回路パターン
615 金属バンプ
130 第2キャリア
330 第2バリアー層
630 下部回路層
650 表面保護層
Claims (18)
- (A)メタルキャリア上に金属バンプ形成用凹部を形成する段階;
(B)前記凹部を含む前記メタルキャリア上にバリアー層を形成する段階;
(C)前記バリアー層上に、前記凹部を充填する金属バンプ及び回路パターンを含む上部回路層を形成する段階;
(D)絶縁層を提供し、前記上部回路層を前記絶縁層上に転写する段階;及び
(E)前記メタルキャリア及び前記バリアー層を除去する段階;
を含むことを特徴とする、金属バンプを持つプリント基板の製造方法。 - 前記(E)段階の後、前記絶縁層上に、前記金属バンプを露出する開放ホールを持つソルダレジスト層を形成する段階をさらに含むことを特徴とする、金属バンプを持つプリント基板の製造方法。
- 前記(A)段階は、
(I)メタルキャリアを提供する段階;
(II)前記メタルキャリア上にエッチングレジストを塗布する段階;
(III)前記エッチングレジストに凹部形成用開口部をパターニングする段階;
(IV)前記凹部形成用開口部を通じて露出した前記メタルキャリアをエッチングして凹部を形成する段階;及び
(V)前記エッチングレジストを除去する段階;
を含むことを特徴とする、請求項1に記載の金属バンプを持つプリント基板の製造方法。 - 前記(B)段階の後、前記バリアー層上にシード層を形成する段階をさらに含むことを特徴とする、請求項1に記載の金属バンプを持つプリント基板の製造方法。
- 前記(C)段階は、
(I)前記バリアー層上にメッキレジストルを塗布する段階;
(II)前記メッキレジストに前記凹部の少なくとも一部を露出する開口部を含む回路パターン形成用開口部をパターニングする段階;及び
(III)前記開口部をメッキして、前記凹部を充填する金属バンプ及び回路パターンを含む上部回路層を形成する段階;
を含むことを特徴とする、請求項1に記載の金属バンプを持つプリント基板の製造方法。 - 前記メタルキャリア及び前記回路層は電気伝導性金属でなり、前記バリアー層は前記メタルキャリア及び前記上部回路層を成す金属に対して選択的にエッチングされる金属でなることを特徴とする、請求項1に記載の金属バンプを持つプリント基板の製造方法。
- 前記メタルキャリアは銅でなり、前記上部回路層は、銅(Cu)、すず(Sn)、またはすず(Sn)及び銀(Ag)の合金の中でいずれか一種でなり、前記バリアー層はニッケルでなることを特徴とする、請求項6に記載の金属バンプを持つプリント基板の製造方法。
- (A)第1キャリア上に金属バンプ形成用凹部を形成し、前記凹部を含む前記第1キャリア上に第1バリアー層を形成し、前記第1バリアー層上に、前記凹部を充填する金属バンプ及び回路パターンを含む上部回路層を形成する段階;
(B)第2キャリア上に第2バリアー層を形成して前記第2バリアー層上に下部回路層を形成する段階;
(C)絶縁層を提供し、前記絶縁層の上下面に前記上部回路層及び前記下部回路層を転写する段階;
(D)前記第1キャリア及び前記第2キャリアを除去する段階;及び
(E)前記第1バリアー層及び前記第2バリアー層を除去する段階;
を含むことを特徴とする、金属バンプを持つプリント基板の製造方法。 - 前記(E)段階の後、前記絶縁層の上下部にソルダレジスト層を形成する段階をさらに含むことを特徴とする、請求項8に記載の金属バンプを持つプリント基板の製造方法。
- 前記第1キャリア、第2キャリア、上部回路層及び下部回路層は電気伝導性金属でなり、前記第1バリアー層及び第2バリアー層は前記第1キャリア、第2キャリア、上部回路層及び下部回路層を成す金属に対して選択的にエッチングされる金属でなることを特徴とする、請求項8に記載の金属バンプを持つプリント基板の製造方法。
- 前記(D)段階の後、前記上部回路層及び前記下部回路層を電気的に接続するビアを形成する段階をさらに含むことを特徴とする、請求項8に記載の金属バンプを持つプリント基板の製造方法。
- 絶縁層の上部に埋め込まれた電気伝導性金属でなる回路パターンを含む上部回路層;及び
前記回路パターンと同様の物質で一体形成され、前記回路パターンの上部に突出し、前記絶縁層の上部に突出した金属バンプ;
を含むことを特徴とする、金属バンプを持つプリント基板。 - 前記金属バンプの下面の一部が前記回路パターンに連結されたことを特徴とする、請求項12に記載の金属バンプを持つプリント基板。
- 前記絶縁層上に形成され、前記金属バンプを露出する開放ホールを持つソルダレジスト層をさらに含むことを特徴とする、請求項12に記載の金属バンプを持つプリント基板。
- 前記絶縁層の下部に埋め込まれた下部回路層をさらに含むことを特徴とする、請求項12に記載の金属バンプを持つプリント基板。
- 前記金属バンプ上に形成され、OSP表面処理層またはニッケル及び金メッキ層でなる表面保護層をさらに含むことを特徴とする、請求項12に記載の金属バンプを持つプリント基板。
- 前記回路パターン及び前記金属バンプは、銅(Cu)、すず(Sn)、またはすず(Sn)及び銀(Ag)の合金の中でいずれか一種でなることを特徴とする、請求項12に記載の金属バンプを持つプリント基板。
- 前記回路パターンと前記下部回路層を電気的に連結するビアをさらに含むことを特徴とする、請求項15に記載の金属バンプを持つプリント基板。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080119895A KR101022912B1 (ko) | 2008-11-28 | 2008-11-28 | 금속범프를 갖는 인쇄회로기판 및 그 제조방법 |
KR10-2008-0119895 | 2008-11-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010129998A JP2010129998A (ja) | 2010-06-10 |
JP5048005B2 true JP5048005B2 (ja) | 2012-10-17 |
Family
ID=42221765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009049589A Active JP5048005B2 (ja) | 2008-11-28 | 2009-03-03 | 金属バンプを持つプリント基板及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (4) | US8141241B2 (ja) |
JP (1) | JP5048005B2 (ja) |
KR (1) | KR101022912B1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101077380B1 (ko) * | 2009-07-31 | 2011-10-26 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
KR101235386B1 (ko) * | 2011-12-21 | 2013-02-20 | 주식회사 심텍 | 미세 피치 범프를 구비하는 인쇄회로기판 및 그 제조 방법 |
KR101255958B1 (ko) * | 2011-12-28 | 2013-04-23 | 삼성전기주식회사 | 회로기판의 제조방법 |
KR101585554B1 (ko) * | 2014-01-22 | 2016-01-14 | 앰코 테크놀로지 코리아 주식회사 | 임베디드 트레이스 기판과 그의 범프 형성 방법 |
CN105097758B (zh) * | 2014-05-05 | 2018-10-26 | 日月光半导体制造股份有限公司 | 衬底、其半导体封装及其制造方法 |
CN105451430A (zh) * | 2014-09-02 | 2016-03-30 | 富葵精密组件(深圳)有限公司 | 部分内埋式线路结构及其制造方法 |
KR20160032524A (ko) * | 2014-09-16 | 2016-03-24 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
WO2018212498A1 (ko) | 2017-05-15 | 2018-11-22 | 엘지이노텍 주식회사 | 올인원 칩 온 필름용 연성 회로기판 및 이를 포함하는 칩 패키지, 및 이를 포함하는 전자 디바이스 |
CN108112189A (zh) * | 2017-12-29 | 2018-06-01 | 京信通信系统(中国)有限公司 | 金属导体微波网络电路的焊点结构及焊接结构 |
CN108770219B (zh) * | 2018-08-03 | 2021-07-30 | 诚亿电子(嘉兴)有限公司 | 无引线板面镀金与osp表面处理的pcb板制作方法 |
Family Cites Families (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3213740A1 (de) * | 1982-04-14 | 1983-12-15 | Oerlikon-Boehringer GmbH, 7320 Göppingen | Wirbelgeraet |
US4597177A (en) * | 1984-01-03 | 1986-07-01 | International Business Machines Corporation | Fabricating contacts for flexible module carriers |
US4712161A (en) * | 1985-03-25 | 1987-12-08 | Olin Corporation | Hybrid and multi-layer circuitry |
US5323035A (en) * | 1992-10-13 | 1994-06-21 | Glenn Leedy | Interconnection structure for integrated circuits and method for making same |
JPH045844A (ja) * | 1990-04-23 | 1992-01-09 | Nippon Mektron Ltd | Ic搭載用多層回路基板及びその製造法 |
US5158466A (en) * | 1991-03-04 | 1992-10-27 | Hughes Aircraft Company | Metallically encapsulated elevated interconnection feature |
JPH07105420B2 (ja) * | 1991-08-26 | 1995-11-13 | ヒューズ・エアクラフト・カンパニー | 成形された接点をもった電気接続 |
JP2910398B2 (ja) * | 1992-04-22 | 1999-06-23 | 日本電気株式会社 | 半田バンプ形成方法 |
US5412539A (en) * | 1993-10-18 | 1995-05-02 | Hughes Aircraft Company | Multichip module with a mandrel-produced interconnecting decal |
CA2135241C (en) * | 1993-12-17 | 1998-08-04 | Mohi Sobhani | Cavity and bump interconnection structure for electronic packages |
US5629835A (en) * | 1994-07-19 | 1997-05-13 | Olin Corporation | Metal ball grid array package with improved thermal conductivity |
US5977783A (en) * | 1994-10-28 | 1999-11-02 | Nitto Denko Corporation | Multilayer probe for measuring electrical characteristics |
US5619072A (en) * | 1995-02-09 | 1997-04-08 | Advanced Micro Devices, Inc. | High density multi-level metallization and interconnection structure |
US5613861A (en) * | 1995-06-07 | 1997-03-25 | Xerox Corporation | Photolithographically patterned spring contact |
JP3666955B2 (ja) * | 1995-10-03 | 2005-06-29 | 日本メクトロン株式会社 | 可撓性回路基板の製造法 |
US5886877A (en) * | 1995-10-13 | 1999-03-23 | Meiko Electronics Co., Ltd. | Circuit board, manufacturing method therefor, and bump-type contact head and semiconductor component packaging module using the circuit board |
JPH09186162A (ja) * | 1995-12-28 | 1997-07-15 | Fujitsu Ltd | 金属バンプの形成方法 |
US5936847A (en) * | 1996-05-02 | 1999-08-10 | Hei, Inc. | Low profile electronic circuit modules |
US5738530A (en) * | 1996-05-28 | 1998-04-14 | Packard Hughes Interconnect Company | Contact pad having metallically anchored elastomeric electrical contacts |
JPH1064954A (ja) | 1996-08-21 | 1998-03-06 | Nitto Denko Corp | 半導体装置の製造方法および製造装置 |
DE69740139D1 (de) * | 1996-12-19 | 2011-04-14 | Ibiden Co Ltd | Mehrlagige Leiterplatte |
JP2934202B2 (ja) * | 1997-03-06 | 1999-08-16 | 山一電機株式会社 | 配線基板における導電バンプの形成方法 |
US5965944A (en) * | 1997-11-12 | 1999-10-12 | International Business Machines Corporation | Printed circuit boards for mounting a semiconductor integrated circuit die |
JP3502776B2 (ja) * | 1998-11-26 | 2004-03-02 | 新光電気工業株式会社 | バンプ付き金属箔及び回路基板及びこれを用いた半導体装置 |
US6578264B1 (en) * | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
JP3239335B2 (ja) * | 1999-08-18 | 2001-12-17 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 電気的接続用構造体の形成方法およびはんだ転写用基板 |
US6400016B2 (en) * | 2000-01-14 | 2002-06-04 | I-Ming Chen | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
JP3760731B2 (ja) * | 2000-07-11 | 2006-03-29 | ソニーケミカル株式会社 | バンプ付き配線回路基板及びその製造方法 |
TW494548B (en) * | 2000-08-25 | 2002-07-11 | I-Ming Chen | Semiconductor chip device and its package method |
GB2374984B (en) * | 2001-04-25 | 2004-10-06 | Ibm | A circuitised substrate for high-frequency applications |
EP1436773A1 (fr) * | 2001-10-09 | 2004-07-14 | NagraID S.A. | Module electronique avec bossage de protection |
TWI245402B (en) * | 2002-01-07 | 2005-12-11 | Megic Corp | Rod soldering structure and manufacturing process thereof |
JP3801158B2 (ja) * | 2002-11-19 | 2006-07-26 | セイコーエプソン株式会社 | 多層配線基板の製造方法、多層配線基板、電子デバイス及び電子機器 |
JP4193479B2 (ja) | 2002-12-04 | 2008-12-10 | ソニー株式会社 | 素子実装基板の製造方法 |
US7173342B2 (en) * | 2002-12-17 | 2007-02-06 | Intel Corporation | Method and apparatus for reducing electrical interconnection fatigue |
JP2004221502A (ja) * | 2003-01-17 | 2004-08-05 | Nec Electronics Corp | バンプ電極付き配線基板及びその製造方法 |
US7005751B2 (en) * | 2003-04-10 | 2006-02-28 | Formfactor, Inc. | Layered microelectronic contact and method for fabricating same |
JP4290070B2 (ja) * | 2003-06-06 | 2009-07-01 | キヤノン株式会社 | 面状ケーブル部材の接続部の補強方法及び画像表示装置の製造方法 |
JP4627632B2 (ja) * | 2004-05-17 | 2011-02-09 | Okiセミコンダクタ株式会社 | 半導体装置 |
US7176583B2 (en) * | 2004-07-21 | 2007-02-13 | International Business Machines Corporation | Damascene patterning of barrier layer metal for C4 solder bumps |
FR2876243B1 (fr) * | 2004-10-04 | 2007-01-26 | Commissariat Energie Atomique | Composant a protuberances conductrices ductiles enterrees et procede de connexion electrique entre ce composant et un composant muni de pointes conductrices dures |
JP4619223B2 (ja) * | 2004-12-16 | 2011-01-26 | 新光電気工業株式会社 | 半導体パッケージ及びその製造方法 |
JP2006310530A (ja) * | 2005-04-28 | 2006-11-09 | Sanyo Electric Co Ltd | 回路装置およびその製造方法 |
US7534652B2 (en) * | 2005-12-27 | 2009-05-19 | Tessera, Inc. | Microelectronic elements with compliant terminal mountings and methods for making the same |
JP2007250925A (ja) | 2006-03-17 | 2007-09-27 | Ricoh Co Ltd | 配線構造体及びその製造方法 |
US7569471B2 (en) * | 2006-06-29 | 2009-08-04 | Intel Corporation | Method of providing mixed size solder bumps on a substrate using a solder delivery head |
TWI317164B (en) * | 2006-07-28 | 2009-11-11 | Taiwan Tft Lcd Ass | Contact structure having a compliant bump and a testing area and manufacturing method for the same |
KR100771467B1 (ko) * | 2006-10-30 | 2007-10-30 | 삼성전기주식회사 | 회로기판 및 그 제조방법 |
JP2008182163A (ja) | 2007-01-26 | 2008-08-07 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法と半導体装置 |
KR100797682B1 (ko) | 2007-02-07 | 2008-01-23 | 삼성전기주식회사 | 인쇄회로기판의 제조방법 |
TWI334183B (en) * | 2007-02-15 | 2010-12-01 | Chipmos Technologies Inc | Conductive structure for a semiconductor integrated circuit and method for forming the same |
US7923645B1 (en) * | 2007-06-20 | 2011-04-12 | Amkor Technology, Inc. | Metal etch stop fabrication method and structure |
US8323771B1 (en) * | 2007-08-15 | 2012-12-04 | Amkor Technology, Inc. | Straight conductor blind via capture pad structure and fabrication method |
US7897880B1 (en) * | 2007-12-07 | 2011-03-01 | Force 10 Networks, Inc | Inductance-tuned circuit board via crosstalk structures |
JP5627097B2 (ja) * | 2009-10-07 | 2014-11-19 | ルネサスエレクトロニクス株式会社 | 配線基板 |
-
2008
- 2008-11-28 KR KR1020080119895A patent/KR101022912B1/ko active IP Right Grant
-
2009
- 2009-02-26 US US12/379,684 patent/US8141241B2/en active Active
- 2009-03-03 JP JP2009049589A patent/JP5048005B2/ja active Active
-
2011
- 2011-11-14 US US13/373,387 patent/US8464423B2/en active Active
- 2011-11-14 US US13/373,388 patent/US20120061132A1/en not_active Abandoned
-
2014
- 2014-03-26 US US14/226,584 patent/US20160242284A9/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR20100061026A (ko) | 2010-06-07 |
US20160242284A9 (en) | 2016-08-18 |
US8464423B2 (en) | 2013-06-18 |
US8141241B2 (en) | 2012-03-27 |
US20140202748A1 (en) | 2014-07-24 |
US20120060365A1 (en) | 2012-03-15 |
US20120061132A1 (en) | 2012-03-15 |
JP2010129998A (ja) | 2010-06-10 |
US20100132985A1 (en) | 2010-06-03 |
KR101022912B1 (ko) | 2011-03-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5048005B2 (ja) | 金属バンプを持つプリント基板及びその製造方法 | |
JP5267604B2 (ja) | 配線板及びその製造方法 | |
US8207450B2 (en) | Printed circuit board comprising metal bumps integrated with connection pads | |
US20100139962A1 (en) | Wiring board and method of manufacturing the same | |
US20100252304A1 (en) | Wiring board and method of manufacturing the same | |
KR20150092881A (ko) | 인쇄회로기판, 패키지 기판 및 이의 제조 방법 | |
US8209860B2 (en) | Method of manufacturing printed circuit board having metal bump | |
JP2015510686A (ja) | 基板コア層に関する方法及び装置 | |
KR101516072B1 (ko) | 반도체 패키지 및 그 제조 방법 | |
JP2010135720A (ja) | 金属バンプを持つプリント基板及びその製造方法 | |
JP2016063130A (ja) | プリント配線板および半導体パッケージ | |
KR20150064976A (ko) | 인쇄회로기판 및 그 제조방법 | |
JP2010171387A (ja) | 回路基板構造及びその製造方法 | |
JP4170266B2 (ja) | 配線基板の製造方法 | |
JP5599860B2 (ja) | 半導体パッケージ基板の製造方法 | |
KR20150065029A (ko) | 인쇄회로기판, 그 제조방법 및 반도체 패키지 | |
JP5432800B2 (ja) | 配線基板の製造方法 | |
JP4282161B2 (ja) | 多層プリント配線板及び多層プリント配線板の製造方法 | |
KR101044154B1 (ko) | 절연층 아래로 매립된 최외각 회로층을 갖는 인쇄회로기판 및 그 제조방법 | |
JP2018195600A (ja) | 配線基板、配線基板の製造方法 | |
KR101340349B1 (ko) | 패키지 기판 및 이의 제조 방법 | |
KR101730468B1 (ko) | 범프가 포함된 인쇄회로기판 및 그 제조방법 | |
KR20160097799A (ko) | 인쇄회로기판 및 그 제조방법 | |
TW201507562A (zh) | 電路板及其製作方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110524 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110819 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111025 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120118 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120710 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120718 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150727 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5048005 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |