JP5039987B2 - 複数誘電体のfinfet構造および方法 - Google Patents
複数誘電体のfinfet構造および方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 26
- 239000003989 dielectric material Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 9
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Description
Claims (8)
- 基板と、
前記基板から伸長し、各々が中央チャネル領域、ならびに前記中央チャネル領域の両端にソース領域およびドレイン領域を備える、第1のフィンおよび第2のフィンと、
前記第1のフィンの前記中央チャネル領域の両側面を覆う第1のゲート誘電体と、
前記第2のフィンの前記中央チャネル領域の両側面を覆う第2のゲート誘電体と、を備え、
前記第1のフィンの厚さ(幅)が前記第2のフィンの厚さ(幅)よりも薄く、前記第1のゲート誘電体の厚さが前記第2のゲート誘電体の厚さよりも厚い、フィン型電界効果トランジスタ(FinFET)構造。 - 前記第1のゲート誘電体が複数層の誘電体を含み、前記第2のゲート誘電体が前記複数層よりも少ない層数の誘電体を含む、請求項1に記載のFinFET構造。
- 前記第1および前記第2のフィンの各々を覆うキャップをさらに備える、請求項1または2に記載のFinFET構造。
- 前記キャップが、前記第1および前記第2のゲート誘電体とは異なる材料を含む、請求項3に記載のFinFET構造。
- 基板から伸長する第1のフィンおよび前記第1のフィンの厚さ(幅)よりも厚い厚さ(幅)の第2のフィンを形成することと、
前記第1および第2のフィンに第1のゲート誘電体を形成すること、
マスクを使用して前記第1のフィンを保護すること、
保護されていない前記第2のフィンから前記第1のゲート誘電体を取り除くこと、
前記第1のフィンから前記マスクを取り除くこと、
前記第1のゲート誘電体が取り除かれた前記第2のフィンと、前記第1のフィンを覆う前記第1のゲート誘電体とに追加のゲート誘電体を形成すること、
前記第1および第2のフィンの各々の中央チャネル領域によって分離されるソース領域およびドレイン領域を形成するために前記第1および第2のフィンの端部をドーピングすること、ならびに
前記中央チャネル領域の各々を覆うゲート導電体を形成することを含み、
前記ゲート誘電体が、前記ゲート導電体から前記中央チャネル領域を絶縁する、フィン型電界効果トランジスタ(FinFET)構造の形成方法。 - 追加のゲート誘電体を形成する前記工程が、前記第1のフィンには複数層の誘電体を形成し、前記第2のフィンには前記追加のゲート誘電体のみを形成する、請求項5に記載の方法。
- 前記第1および第2のフィンを形成する前記工程が、前記第1および第2のフィンの各々を覆うキャップを形成することを含む、請求項5または6に記載の方法。
- 前記キャップが、前記ゲート誘電体とは異なる材料を含む、請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/708,674 US7115947B2 (en) | 2004-03-18 | 2004-03-18 | Multiple dielectric finfet structure and method |
US10/708,674 | 2004-03-18 | ||
PCT/US2005/008940 WO2005089440A2 (en) | 2004-03-18 | 2005-03-18 | Multiple dielectric finfet structure and method |
Publications (3)
Publication Number | Publication Date |
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JP2007533121A JP2007533121A (ja) | 2007-11-15 |
JP2007533121A5 JP2007533121A5 (ja) | 2008-04-03 |
JP5039987B2 true JP5039987B2 (ja) | 2012-10-03 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007504118A Active JP5039987B2 (ja) | 2004-03-18 | 2005-03-18 | 複数誘電体のfinfet構造および方法 |
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US (4) | US7115947B2 (ja) |
EP (1) | EP1787331A4 (ja) |
JP (1) | JP5039987B2 (ja) |
KR (1) | KR100945799B1 (ja) |
CN (1) | CN101421850B (ja) |
TW (1) | TWI341586B (ja) |
WO (1) | WO2005089440A2 (ja) |
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US7301210B2 (en) * | 2006-01-12 | 2007-11-27 | International Business Machines Corporation | Method and structure to process thick and thin fins and variable fin to fin spacing |
US7678648B2 (en) * | 2006-07-14 | 2010-03-16 | Micron Technology, Inc. | Subresolution silicon features and methods for forming the same |
US7456471B2 (en) * | 2006-09-15 | 2008-11-25 | International Business Machines Corporation | Field effect transistor with raised source/drain fin straps |
US7855411B2 (en) * | 2007-05-25 | 2010-12-21 | Macronix International Co., Ltd. | Memory cell |
US7692254B2 (en) * | 2007-07-16 | 2010-04-06 | International Business Machines Corporation | Fin-type field effect transistor structure with merged source/drain silicide and method of forming the structure |
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WO2005089440A2 (en) | 2005-09-29 |
US20070290250A1 (en) | 2007-12-20 |
KR100945799B1 (ko) | 2010-03-08 |
WO2005089440A3 (en) | 2009-04-02 |
US7378357B2 (en) | 2008-05-27 |
US20050205944A1 (en) | 2005-09-22 |
CN101421850B (zh) | 2010-10-13 |
EP1787331A2 (en) | 2007-05-23 |
TW200532915A (en) | 2005-10-01 |
US20060054978A1 (en) | 2006-03-16 |
US20060231881A1 (en) | 2006-10-19 |
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