JP5030624B2 - 回転式電極子装置 - Google Patents

回転式電極子装置 Download PDF

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Publication number
JP5030624B2
JP5030624B2 JP2007063102A JP2007063102A JP5030624B2 JP 5030624 B2 JP5030624 B2 JP 5030624B2 JP 2007063102 A JP2007063102 A JP 2007063102A JP 2007063102 A JP2007063102 A JP 2007063102A JP 5030624 B2 JP5030624 B2 JP 5030624B2
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JP
Japan
Prior art keywords
electrode
chip
type electronic
electronic component
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007063102A
Other languages
English (en)
Japanese (ja)
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JP2008224418A (ja
Inventor
規与仁 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Humo Laboratory Ltd
Original Assignee
Humo Laboratory Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Humo Laboratory Ltd filed Critical Humo Laboratory Ltd
Priority to JP2007063102A priority Critical patent/JP5030624B2/ja
Priority to TW096111893A priority patent/TWI404934B/zh
Priority to CN2007101010481A priority patent/CN101266272B/zh
Priority to KR1020070041203A priority patent/KR101345697B1/ko
Publication of JP2008224418A publication Critical patent/JP2008224418A/ja
Application granted granted Critical
Publication of JP5030624B2 publication Critical patent/JP5030624B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2007063102A 2007-03-13 2007-03-13 回転式電極子装置 Active JP5030624B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007063102A JP5030624B2 (ja) 2007-03-13 2007-03-13 回転式電極子装置
TW096111893A TWI404934B (zh) 2007-03-13 2007-04-03 Rotary electrode subassembly
CN2007101010481A CN101266272B (zh) 2007-03-13 2007-04-26 旋转式电极头装置
KR1020070041203A KR101345697B1 (ko) 2007-03-13 2007-04-27 회전식 전극부재장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007063102A JP5030624B2 (ja) 2007-03-13 2007-03-13 回転式電極子装置

Publications (2)

Publication Number Publication Date
JP2008224418A JP2008224418A (ja) 2008-09-25
JP5030624B2 true JP5030624B2 (ja) 2012-09-19

Family

ID=39843225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007063102A Active JP5030624B2 (ja) 2007-03-13 2007-03-13 回転式電極子装置

Country Status (4)

Country Link
JP (1) JP5030624B2 (ko)
KR (1) KR101345697B1 (ko)
CN (1) CN101266272B (ko)
TW (1) TWI404934B (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101451499B1 (ko) * 2013-02-07 2014-10-17 삼성전기주식회사 전자부품 검사장치
JP6459882B2 (ja) * 2015-10-06 2019-01-30 株式会社村田製作所 通電装置
JP6727651B2 (ja) * 2016-09-30 2020-07-22 株式会社ヒューモラボラトリー チップ電子部品の電気特性の連続的な検査方法
JP6679552B2 (ja) 2017-10-02 2020-04-15 株式会社ヒューモラボラトリー チップ電子部品の検査選別方法
KR102247261B1 (ko) * 2020-12-15 2021-04-30 김상길 내마모성 및 윤활성능이 개선된 전자부품 검사용 회전접촉롤러, 이를 포함하는 프로브 조립체 및 전자부품 검사장치
TWI800405B (zh) * 2022-06-14 2023-04-21 國巨股份有限公司 測試探針與測試探針固定裝置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63118672A (ja) * 1986-11-06 1988-05-23 Murata Mfg Co Ltd チツプ状電子部品の電気特性測定装置
EP1085327B1 (en) * 1999-09-15 2006-06-07 Capres A/S Multi-point probe
US6194979B1 (en) * 1999-03-18 2001-02-27 Cts Corporation Ball grid array R-C network with high density
KR100350513B1 (ko) * 2000-04-03 2002-08-28 박태욱 피디피 전극 검사 프로브장치
CN100353171C (zh) * 2004-12-23 2007-12-05 中国科学院半导体研究所 用于电调制光致发光光谱测量的样品架
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置
JP2006214727A (ja) * 2005-02-01 2006-08-17 Fuchigami Micro:Kk コンタクトプローブカード
CN100445709C (zh) * 2005-03-07 2008-12-24 大赢数控设备(深圳)有限公司 发光二极管测试机台的自动化装置

Also Published As

Publication number Publication date
TW200837354A (en) 2008-09-16
KR101345697B1 (ko) 2013-12-30
KR20080084517A (ko) 2008-09-19
CN101266272B (zh) 2012-11-07
CN101266272A (zh) 2008-09-17
JP2008224418A (ja) 2008-09-25
TWI404934B (zh) 2013-08-11

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