JP5012278B2 - 浮上搬送システム - Google Patents

浮上搬送システム Download PDF

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Publication number
JP5012278B2
JP5012278B2 JP2007189569A JP2007189569A JP5012278B2 JP 5012278 B2 JP5012278 B2 JP 5012278B2 JP 2007189569 A JP2007189569 A JP 2007189569A JP 2007189569 A JP2007189569 A JP 2007189569A JP 5012278 B2 JP5012278 B2 JP 5012278B2
Authority
JP
Japan
Prior art keywords
levitation
transport
conveyance
thin plate
virtual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007189569A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009023797A (ja
Inventor
賢輔 平田
刈入 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2007189569A priority Critical patent/JP5012278B2/ja
Priority to KR1020107000550A priority patent/KR101186901B1/ko
Priority to PCT/JP2008/060537 priority patent/WO2009013946A1/ja
Priority to CN200880024656XA priority patent/CN101743185B/zh
Priority to TW097125117A priority patent/TW200920673A/zh
Publication of JP2009023797A publication Critical patent/JP2009023797A/ja
Application granted granted Critical
Publication of JP5012278B2 publication Critical patent/JP5012278B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Lining And Supports For Tunnels (AREA)
JP2007189569A 2007-07-20 2007-07-20 浮上搬送システム Active JP5012278B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007189569A JP5012278B2 (ja) 2007-07-20 2007-07-20 浮上搬送システム
KR1020107000550A KR101186901B1 (ko) 2007-07-20 2008-06-09 부상 반송 시스템
PCT/JP2008/060537 WO2009013946A1 (ja) 2007-07-20 2008-06-09 浮上搬送システム
CN200880024656XA CN101743185B (zh) 2007-07-20 2008-06-09 浮起传送系统
TW097125117A TW200920673A (en) 2007-07-20 2008-07-03 Levitation transportation system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007189569A JP5012278B2 (ja) 2007-07-20 2007-07-20 浮上搬送システム

Publications (2)

Publication Number Publication Date
JP2009023797A JP2009023797A (ja) 2009-02-05
JP5012278B2 true JP5012278B2 (ja) 2012-08-29

Family

ID=40281205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007189569A Active JP5012278B2 (ja) 2007-07-20 2007-07-20 浮上搬送システム

Country Status (5)

Country Link
JP (1) JP5012278B2 (https=)
KR (1) KR101186901B1 (https=)
CN (1) CN101743185B (https=)
TW (1) TW200920673A (https=)
WO (1) WO2009013946A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009006215A1 (de) * 2009-01-27 2010-07-29 Knut Lange Vorrichtung zur Aufnahme eines pneumatischen Ventils
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5645709B2 (ja) * 2011-02-25 2014-12-24 オイレス工業株式会社 非接触搬送装置
CN107660196B (zh) * 2017-08-07 2020-06-05 大族激光科技产业集团股份有限公司 非接触搬运装置
CN108502505A (zh) * 2018-03-07 2018-09-07 佛山科学技术学院 一种流水线转角输送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4313080B2 (ja) * 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
KR100527241B1 (ko) * 2004-11-17 2005-11-09 주식회사 에스에프에이 기판이송장치
JP4508856B2 (ja) * 2004-12-22 2010-07-21 三菱重工業株式会社 ガラス基板の成膜装置
KR100713815B1 (ko) * 2005-07-08 2007-05-02 주식회사 태성기연 판유리 이송장치

Also Published As

Publication number Publication date
CN101743185A (zh) 2010-06-16
CN101743185B (zh) 2012-10-17
JP2009023797A (ja) 2009-02-05
WO2009013946A1 (ja) 2009-01-29
KR20100018616A (ko) 2010-02-17
KR101186901B1 (ko) 2012-10-02
TWI365840B (https=) 2012-06-11
TW200920673A (en) 2009-05-16

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