KR101186901B1 - 부상 반송 시스템 - Google Patents

부상 반송 시스템 Download PDF

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Publication number
KR101186901B1
KR101186901B1 KR1020107000550A KR20107000550A KR101186901B1 KR 101186901 B1 KR101186901 B1 KR 101186901B1 KR 1020107000550 A KR1020107000550 A KR 1020107000550A KR 20107000550 A KR20107000550 A KR 20107000550A KR 101186901 B1 KR101186901 B1 KR 101186901B1
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KR
South Korea
Prior art keywords
floating
conveyance
conveying
conveyance direction
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020107000550A
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English (en)
Korean (ko)
Other versions
KR20100018616A (ko
Inventor
겐스케 히라타
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20100018616A publication Critical patent/KR20100018616A/ko
Application granted granted Critical
Publication of KR101186901B1 publication Critical patent/KR101186901B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Lining And Supports For Tunnels (AREA)
KR1020107000550A 2007-07-20 2008-06-09 부상 반송 시스템 Active KR101186901B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2007-189569 2007-07-20
JP2007189569A JP5012278B2 (ja) 2007-07-20 2007-07-20 浮上搬送システム
PCT/JP2008/060537 WO2009013946A1 (ja) 2007-07-20 2008-06-09 浮上搬送システム

Publications (2)

Publication Number Publication Date
KR20100018616A KR20100018616A (ko) 2010-02-17
KR101186901B1 true KR101186901B1 (ko) 2012-10-02

Family

ID=40281205

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000550A Active KR101186901B1 (ko) 2007-07-20 2008-06-09 부상 반송 시스템

Country Status (5)

Country Link
JP (1) JP5012278B2 (https=)
KR (1) KR101186901B1 (https=)
CN (1) CN101743185B (https=)
TW (1) TW200920673A (https=)
WO (1) WO2009013946A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009006215A1 (de) * 2009-01-27 2010-07-29 Knut Lange Vorrichtung zur Aufnahme eines pneumatischen Ventils
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5645709B2 (ja) * 2011-02-25 2014-12-24 オイレス工業株式会社 非接触搬送装置
CN107660196B (zh) * 2017-08-07 2020-06-05 大族激光科技产业集团股份有限公司 非接触搬运装置
CN108502505A (zh) * 2018-03-07 2018-09-07 佛山科学技术学院 一种流水线转角输送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4313080B2 (ja) * 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
KR100527241B1 (ko) * 2004-11-17 2005-11-09 주식회사 에스에프에이 기판이송장치
JP4508856B2 (ja) * 2004-12-22 2010-07-21 三菱重工業株式会社 ガラス基板の成膜装置
KR100713815B1 (ko) * 2005-07-08 2007-05-02 주식회사 태성기연 판유리 이송장치

Also Published As

Publication number Publication date
CN101743185A (zh) 2010-06-16
CN101743185B (zh) 2012-10-17
JP2009023797A (ja) 2009-02-05
JP5012278B2 (ja) 2012-08-29
WO2009013946A1 (ja) 2009-01-29
KR20100018616A (ko) 2010-02-17
TWI365840B (https=) 2012-06-11
TW200920673A (en) 2009-05-16

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