WO2009013946A1 - 浮上搬送システム - Google Patents

浮上搬送システム Download PDF

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Publication number
WO2009013946A1
WO2009013946A1 PCT/JP2008/060537 JP2008060537W WO2009013946A1 WO 2009013946 A1 WO2009013946 A1 WO 2009013946A1 JP 2008060537 W JP2008060537 W JP 2008060537W WO 2009013946 A1 WO2009013946 A1 WO 2009013946A1
Authority
WO
WIPO (PCT)
Prior art keywords
imaginary
parallel
bisector
lines
parallel lines
Prior art date
Application number
PCT/JP2008/060537
Other languages
English (en)
French (fr)
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to KR1020107000550A priority Critical patent/KR101186901B1/ko
Priority to CN200880024656XA priority patent/CN101743185B/zh
Publication of WO2009013946A1 publication Critical patent/WO2009013946A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lining And Supports For Tunnels (AREA)

Abstract

 ストレート部における複数の浮上ユニット（１７，２９）の配列状態は、千鳥配列になってあって、コーナ部における大部分の浮上ユニット（４５）のユニット中心は、第１搬送方向（Ｄ１）と第２搬送方向（Ｄ２）との交角を二等分する仮想の二等分線（Ｖ）に平行でかつ仮想の二等分線（Ｖ）に直交する方向に沿って等間隔に設定された複数の仮想の第１平行線（ＶＰ）と、仮想の二等分線（Ｖ）に直交する仮想の直交線（ＶＣ）に平行でかつ仮想の二等分線（Ｖ）の長手方向に沿って等間隔に設定された複数の仮想の第２平行線（ＶＣＰ）との交点に一致するようになっていること。
PCT/JP2008/060537 2007-07-20 2008-06-09 浮上搬送システム WO2009013946A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020107000550A KR101186901B1 (ko) 2007-07-20 2008-06-09 부상 반송 시스템
CN200880024656XA CN101743185B (zh) 2007-07-20 2008-06-09 浮起传送系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-189569 2007-07-20
JP2007189569A JP5012278B2 (ja) 2007-07-20 2007-07-20 浮上搬送システム

Publications (1)

Publication Number Publication Date
WO2009013946A1 true WO2009013946A1 (ja) 2009-01-29

Family

ID=40281205

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060537 WO2009013946A1 (ja) 2007-07-20 2008-06-09 浮上搬送システム

Country Status (5)

Country Link
JP (1) JP5012278B2 (ja)
KR (1) KR101186901B1 (ja)
CN (1) CN101743185B (ja)
TW (1) TW200920673A (ja)
WO (1) WO2009013946A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット
EP2210833A3 (de) * 2009-01-27 2011-03-16 Knut Lange Vorrichtung zum Fördern von Objekten auf einem Luftkissen

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5645709B2 (ja) * 2011-02-25 2014-12-24 オイレス工業株式会社 非接触搬送装置
WO2019028601A1 (zh) * 2017-08-07 2019-02-14 大族激光科技产业集团股份有限公司 非接触搬运装置
CN108502505A (zh) * 2018-03-07 2018-09-07 佛山科学技术学院 一种流水线转角输送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004352375A (ja) * 2003-04-02 2004-12-16 Daiichi Shisetsu Kogyo Kk 非接触浮上ユニット
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP2007015849A (ja) * 2005-07-08 2007-01-25 Taesung Engineering Corp 板ガラス移送装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100527241B1 (ko) * 2004-11-17 2005-11-09 주식회사 에스에프에이 기판이송장치
JP4508856B2 (ja) * 2004-12-22 2010-07-21 三菱重工業株式会社 ガラス基板の成膜装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004352375A (ja) * 2003-04-02 2004-12-16 Daiichi Shisetsu Kogyo Kk 非接触浮上ユニット
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP2007015849A (ja) * 2005-07-08 2007-01-25 Taesung Engineering Corp 板ガラス移送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2210833A3 (de) * 2009-01-27 2011-03-16 Knut Lange Vorrichtung zum Fördern von Objekten auf einem Luftkissen
JP2010173829A (ja) * 2009-01-30 2010-08-12 Ihi Corp 浮上搬送装置及び浮上ユニット

Also Published As

Publication number Publication date
CN101743185B (zh) 2012-10-17
KR101186901B1 (ko) 2012-10-02
JP2009023797A (ja) 2009-02-05
TW200920673A (en) 2009-05-16
TWI365840B (ja) 2012-06-11
JP5012278B2 (ja) 2012-08-29
CN101743185A (zh) 2010-06-16
KR20100018616A (ko) 2010-02-17

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