JP4984412B2 - 磁気センサおよび磁気センサの製造方法 - Google Patents

磁気センサおよび磁気センサの製造方法 Download PDF

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Publication number
JP4984412B2
JP4984412B2 JP2005091617A JP2005091617A JP4984412B2 JP 4984412 B2 JP4984412 B2 JP 4984412B2 JP 2005091617 A JP2005091617 A JP 2005091617A JP 2005091617 A JP2005091617 A JP 2005091617A JP 4984412 B2 JP4984412 B2 JP 4984412B2
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JP
Japan
Prior art keywords
magnetic sensor
substrate
slope
axis
film
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Expired - Fee Related
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JP2005091617A
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English (en)
Japanese (ja)
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JP2006278440A (ja
JP2006278440A5 (https=
Inventor
秀樹 佐藤
寛 内藤
昌良 大村
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Yamaha Corp
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Yamaha Corp
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Priority to JP2005091617A priority Critical patent/JP4984412B2/ja
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to TW095108810A priority patent/TWI313078B/zh
Priority to EP06729152A priority patent/EP1860450B1/en
Priority to PCT/JP2006/305131 priority patent/WO2006098367A1/ja
Priority to AT06729152T priority patent/ATE512370T1/de
Priority to US10/584,666 priority patent/US8178361B2/en
Priority to CN200680008164.2A priority patent/CN101142494B/zh
Publication of JP2006278440A publication Critical patent/JP2006278440A/ja
Publication of JP2006278440A5 publication Critical patent/JP2006278440A5/ja
Priority to US13/459,644 priority patent/US9054028B2/en
Application granted granted Critical
Publication of JP4984412B2 publication Critical patent/JP4984412B2/ja
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  • Hall/Mr Elements (AREA)
JP2005091617A 2005-03-17 2005-03-28 磁気センサおよび磁気センサの製造方法 Expired - Fee Related JP4984412B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2005091617A JP4984412B2 (ja) 2005-03-28 2005-03-28 磁気センサおよび磁気センサの製造方法
EP06729152A EP1860450B1 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method thereof
PCT/JP2006/305131 WO2006098367A1 (ja) 2005-03-17 2006-03-15 磁気センサ及びその製造方法
AT06729152T ATE512370T1 (de) 2005-03-17 2006-03-15 Magnetsensor und herstellungsverfahren dafür
TW095108810A TWI313078B (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
US10/584,666 US8178361B2 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
CN200680008164.2A CN101142494B (zh) 2005-03-17 2006-03-15 磁传感器及其制造方法
US13/459,644 US9054028B2 (en) 2005-03-17 2012-04-30 Magnetic sensor and manufacturing method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005091617A JP4984412B2 (ja) 2005-03-28 2005-03-28 磁気センサおよび磁気センサの製造方法

Publications (3)

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JP2006278440A JP2006278440A (ja) 2006-10-12
JP2006278440A5 JP2006278440A5 (https=) 2008-05-15
JP4984412B2 true JP4984412B2 (ja) 2012-07-25

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JP2005091617A Expired - Fee Related JP4984412B2 (ja) 2005-03-17 2005-03-28 磁気センサおよび磁気センサの製造方法

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JP (1) JP4984412B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104122514B (zh) * 2013-04-24 2018-01-02 上海矽睿科技有限公司 磁传感装置的制备工艺
JP7107330B2 (ja) * 2020-03-27 2022-07-27 Tdk株式会社 磁気センサおよびその製造方法
JP7302612B2 (ja) * 2021-01-18 2023-07-04 Tdk株式会社 磁気センサ
JP7298630B2 (ja) * 2021-01-25 2023-06-27 Tdk株式会社 磁気センサ
US12044753B2 (en) * 2021-09-21 2024-07-23 Tdk Corporation Sensor having at least part of sensor element disposed on inclined surface of protruding portion of support member
JP2023046259A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11305055A (ja) * 1998-04-22 1999-11-05 Sharp Corp 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法
JP4085859B2 (ja) * 2002-03-27 2008-05-14 ヤマハ株式会社 磁気センサおよびその製造方法
JP3881290B2 (ja) * 2002-08-20 2007-02-14 株式会社日立ハイテクノロジーズ プラズマ処理装置

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