JP2006278440A5 - - Google Patents

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Publication number
JP2006278440A5
JP2006278440A5 JP2005091617A JP2005091617A JP2006278440A5 JP 2006278440 A5 JP2006278440 A5 JP 2006278440A5 JP 2005091617 A JP2005091617 A JP 2005091617A JP 2005091617 A JP2005091617 A JP 2005091617A JP 2006278440 A5 JP2006278440 A5 JP 2006278440A5
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JP
Japan
Prior art keywords
slopes
magnetic sensor
dummy
substrate
giant magnetoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005091617A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006278440A (ja
JP4984412B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005091617A external-priority patent/JP4984412B2/ja
Priority to JP2005091617A priority Critical patent/JP4984412B2/ja
Priority to CN200680008164.2A priority patent/CN101142494B/zh
Priority to PCT/JP2006/305131 priority patent/WO2006098367A1/ja
Priority to AT06729152T priority patent/ATE512370T1/de
Priority to TW095108810A priority patent/TWI313078B/zh
Priority to US10/584,666 priority patent/US8178361B2/en
Priority to EP06729152A priority patent/EP1860450B1/en
Publication of JP2006278440A publication Critical patent/JP2006278440A/ja
Publication of JP2006278440A5 publication Critical patent/JP2006278440A5/ja
Priority to US13/459,644 priority patent/US9054028B2/en
Publication of JP4984412B2 publication Critical patent/JP4984412B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005091617A 2005-03-17 2005-03-28 磁気センサおよび磁気センサの製造方法 Expired - Fee Related JP4984412B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2005091617A JP4984412B2 (ja) 2005-03-28 2005-03-28 磁気センサおよび磁気センサの製造方法
EP06729152A EP1860450B1 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method thereof
PCT/JP2006/305131 WO2006098367A1 (ja) 2005-03-17 2006-03-15 磁気センサ及びその製造方法
AT06729152T ATE512370T1 (de) 2005-03-17 2006-03-15 Magnetsensor und herstellungsverfahren dafür
TW095108810A TWI313078B (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
US10/584,666 US8178361B2 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
CN200680008164.2A CN101142494B (zh) 2005-03-17 2006-03-15 磁传感器及其制造方法
US13/459,644 US9054028B2 (en) 2005-03-17 2012-04-30 Magnetic sensor and manufacturing method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005091617A JP4984412B2 (ja) 2005-03-28 2005-03-28 磁気センサおよび磁気センサの製造方法

Publications (3)

Publication Number Publication Date
JP2006278440A JP2006278440A (ja) 2006-10-12
JP2006278440A5 true JP2006278440A5 (https=) 2008-05-15
JP4984412B2 JP4984412B2 (ja) 2012-07-25

Family

ID=37212925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005091617A Expired - Fee Related JP4984412B2 (ja) 2005-03-17 2005-03-28 磁気センサおよび磁気センサの製造方法

Country Status (1)

Country Link
JP (1) JP4984412B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104122514B (zh) * 2013-04-24 2018-01-02 上海矽睿科技有限公司 磁传感装置的制备工艺
JP7107330B2 (ja) * 2020-03-27 2022-07-27 Tdk株式会社 磁気センサおよびその製造方法
JP7302612B2 (ja) * 2021-01-18 2023-07-04 Tdk株式会社 磁気センサ
JP7298630B2 (ja) * 2021-01-25 2023-06-27 Tdk株式会社 磁気センサ
US12044753B2 (en) * 2021-09-21 2024-07-23 Tdk Corporation Sensor having at least part of sensor element disposed on inclined surface of protruding portion of support member
JP2023046259A (ja) * 2021-09-21 2023-04-03 Tdk株式会社 センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11305055A (ja) * 1998-04-22 1999-11-05 Sharp Corp 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法
JP4085859B2 (ja) * 2002-03-27 2008-05-14 ヤマハ株式会社 磁気センサおよびその製造方法
JP3881290B2 (ja) * 2002-08-20 2007-02-14 株式会社日立ハイテクノロジーズ プラズマ処理装置

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