JP4972356B2 - 気相成長装置 - Google Patents
気相成長装置 Download PDFInfo
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- JP4972356B2 JP4972356B2 JP2006190230A JP2006190230A JP4972356B2 JP 4972356 B2 JP4972356 B2 JP 4972356B2 JP 2006190230 A JP2006190230 A JP 2006190230A JP 2006190230 A JP2006190230 A JP 2006190230A JP 4972356 B2 JP4972356 B2 JP 4972356B2
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- substrate
- vapor phase
- flow channel
- phase growth
- growth apparatus
- Prior art date
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- 239000000758 substrate Substances 0.000 claims description 50
- 238000001947 vapour-phase growth Methods 0.000 claims description 31
- 239000007795 chemical reaction product Substances 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 9
- 238000010926 purge Methods 0.000 claims description 8
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 230000005457 Black-body radiation Effects 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 claims description 2
- 239000012071 phase Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 19
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- 229910002601 GaN Inorganic materials 0.000 description 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 nitride compound Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Description
ヒーターパージ :N2 1slm
圧力:常圧
回転:2rpm
Claims (5)
- フローチャンネル内に設置したサセプタに保持した基板を、サセプタを介してヒーターで加熱するとともに、前記フローチャンネル内に原料ガスを供給して基板面に反応生成物を堆積させて薄膜を成長させる気相成長装置において、
前記基板面に対向するフローチャンネルの壁面と基板両側の側壁面とに、前記反応生成物よりも熱反射率が高い反射部材をそれぞれ設けたことを特徴とする気相成長装置。 - 前記反射部材は、基板面に対向する前記壁面及び基板両側の側壁面の外側に設けられていることを特徴とする請求項1記載の気相成長装置。
- 前記反射部材は、基板面に対向する前記壁面及び基板両側の側壁面の内側に設けられていることを特徴とする請求項1記載の気相成長装置。
- 前記反射部材は、1300℃における黒体輻射ピーク位置である1.8μm帯での熱反射率が前記反応生成物よりも高い窒化ホウ素であることを特徴とする請求項1乃至3のいずれか1項記載の気相成長装置。
- 前記フローチャンネル内に、前記基板面側に前記原料ガスを、前記反射部材側にパージガスをそれぞれ導入するガス導入流路を設けたことを特徴とする請求項1乃至4のいずれか1項記載の気相成長装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006190230A JP4972356B2 (ja) | 2006-07-11 | 2006-07-11 | 気相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006190230A JP4972356B2 (ja) | 2006-07-11 | 2006-07-11 | 気相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008021708A JP2008021708A (ja) | 2008-01-31 |
JP4972356B2 true JP4972356B2 (ja) | 2012-07-11 |
Family
ID=39077486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006190230A Active JP4972356B2 (ja) | 2006-07-11 | 2006-07-11 | 気相成長装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4972356B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009108221A2 (en) * | 2008-02-27 | 2009-09-03 | S.O.I.Tec Silicon On Insulator Technologies | Thermalization of gaseous precursors in cvd reactors |
JP5209395B2 (ja) * | 2008-07-25 | 2013-06-12 | 大陽日酸株式会社 | 気相成長装置 |
JP5341959B2 (ja) * | 2011-07-21 | 2013-11-13 | 株式会社東芝 | 半導体製造装置 |
JP6054733B2 (ja) * | 2012-03-02 | 2016-12-27 | スタンレー電気株式会社 | 気相成長装置 |
JP6622597B2 (ja) | 2016-01-12 | 2019-12-18 | 大陽日酸株式会社 | 気相成長装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6417423A (en) * | 1987-07-10 | 1989-01-20 | Matsushita Electric Ind Co Ltd | Semiconductor crystal growth device |
JPH0397221A (ja) * | 1989-09-11 | 1991-04-23 | Meidensha Corp | 多結晶シリコン薄膜の作製方法 |
JPH03228322A (ja) * | 1990-02-02 | 1991-10-09 | Nec Corp | 常圧気相成長装置 |
JPH05259082A (ja) * | 1992-03-10 | 1993-10-08 | Komatsu Denshi Kinzoku Kk | エピタキシャル成長装置およびエピタキシャル成長方法 |
JP3785650B2 (ja) * | 1995-03-17 | 2006-06-14 | 東京エレクトロン株式会社 | 枚葉式熱処理装置 |
JP4374786B2 (ja) * | 2001-02-23 | 2009-12-02 | 住友電気工業株式会社 | Cvd装置および薄膜製造方法 |
JP2006013269A (ja) * | 2004-06-29 | 2006-01-12 | Sanyo Electric Co Ltd | 気相成長装置および気相成長方法 |
JP4345617B2 (ja) * | 2004-09-01 | 2009-10-14 | トヨタ自動車株式会社 | Cvd装置 |
JP2006080374A (ja) * | 2004-09-10 | 2006-03-23 | Sharp Corp | 窒化物半導体の製造装置および窒化物半導体レーザ素子 |
JP2007149774A (ja) * | 2005-11-24 | 2007-06-14 | Sharp Corp | 気相成長装置 |
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2006
- 2006-07-11 JP JP2006190230A patent/JP4972356B2/ja active Active
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