JP4598506B2 - 気相成長装置 - Google Patents
気相成長装置 Download PDFInfo
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- JP4598506B2 JP4598506B2 JP2004367893A JP2004367893A JP4598506B2 JP 4598506 B2 JP4598506 B2 JP 4598506B2 JP 2004367893 A JP2004367893 A JP 2004367893A JP 2004367893 A JP2004367893 A JP 2004367893A JP 4598506 B2 JP4598506 B2 JP 4598506B2
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- temperature
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Claims (3)
- フローチャンネル内に設けたサセプタに支持される基板を前記サセプタを介して加熱するとともに、基板面に対して平行に原料ガスを流して窒化物系化合物半導体薄膜の気相成長を行う気相成長装置において、前記サセプタより原料ガス流れ方向上流側のフローチャンネルに、該フローチャンネル内に導入される原料ガスの温度を、その熱分解温度以下に制御する第1温度制御領域を設けるとともに、該第1温度制御領域と前記サセプタとの間に、前記第1温度制御領域によって制御される温度より高く、かつ、前記基板の加熱温度よりも低い温度に制御する第2温度制御領域を設け、前記第1温度制御領域と前記第2温度制御領域との間に断熱部材を設けたことを特徴とする気相成長装置。
- 前記断熱部材は、原料ガス流れ方向に対して直交する方向の平面、あるいは、フローチャンネル中央部が原料ガス流れ方向上流側に向かって凸となる曲面を有する板状部材であることを特徴とする請求項1記載の気相成長装置。
- 前記断熱部材は、炭化ケイ素、モリブデン、窒化ホウ素、アルミナセラミックのいずれかの材料で形成されていることを特徴とする請求項1又は2記載の気相成長装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004367893A JP4598506B2 (ja) | 2004-12-20 | 2004-12-20 | 気相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004367893A JP4598506B2 (ja) | 2004-12-20 | 2004-12-20 | 気相成長装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006173540A JP2006173540A (ja) | 2006-06-29 |
JP4598506B2 true JP4598506B2 (ja) | 2010-12-15 |
Family
ID=36673923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004367893A Expired - Fee Related JP4598506B2 (ja) | 2004-12-20 | 2004-12-20 | 気相成長装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4598506B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4899958B2 (ja) * | 2007-03-19 | 2012-03-21 | 日立電線株式会社 | 成膜方法及び成膜装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6126772A (ja) * | 1984-07-16 | 1986-02-06 | Canon Inc | 堆積膜形成方法 |
JPS62174913A (ja) * | 1986-01-28 | 1987-07-31 | Fujitsu Ltd | Mocvd成長方法及び装置 |
JPH06163415A (ja) * | 1992-11-18 | 1994-06-10 | Fujitsu Ltd | 気相エピタキシャル成長装置 |
JPH1174202A (ja) * | 1997-08-29 | 1999-03-16 | Sharp Corp | 窒化ガリウム系iii−v族化合物半導体の気相成長装置並びに窒化ガリウム系iii−v族化合物半導体装置及びその製造方法 |
JP2001220288A (ja) * | 2000-02-03 | 2001-08-14 | Nikko Materials Co Ltd | 気相成長方法および気相成長装置 |
-
2004
- 2004-12-20 JP JP2004367893A patent/JP4598506B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6126772A (ja) * | 1984-07-16 | 1986-02-06 | Canon Inc | 堆積膜形成方法 |
JPS62174913A (ja) * | 1986-01-28 | 1987-07-31 | Fujitsu Ltd | Mocvd成長方法及び装置 |
JPH06163415A (ja) * | 1992-11-18 | 1994-06-10 | Fujitsu Ltd | 気相エピタキシャル成長装置 |
JPH1174202A (ja) * | 1997-08-29 | 1999-03-16 | Sharp Corp | 窒化ガリウム系iii−v族化合物半導体の気相成長装置並びに窒化ガリウム系iii−v族化合物半導体装置及びその製造方法 |
JP2001220288A (ja) * | 2000-02-03 | 2001-08-14 | Nikko Materials Co Ltd | 気相成長方法および気相成長装置 |
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Publication number | Publication date |
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JP2006173540A (ja) | 2006-06-29 |
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