JP4968428B2 - 液体噴射ヘッドの製造方法 - Google Patents

液体噴射ヘッドの製造方法 Download PDF

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Publication number
JP4968428B2
JP4968428B2 JP2005292856A JP2005292856A JP4968428B2 JP 4968428 B2 JP4968428 B2 JP 4968428B2 JP 2005292856 A JP2005292856 A JP 2005292856A JP 2005292856 A JP2005292856 A JP 2005292856A JP 4968428 B2 JP4968428 B2 JP 4968428B2
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JP
Japan
Prior art keywords
reservoir
forming substrate
mask pattern
mask
reservoir forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005292856A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007098813A5 (enExample
JP2007098813A (ja
Inventor
佳直 宮田
健一 北村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2005292856A priority Critical patent/JP4968428B2/ja
Priority to US11/538,382 priority patent/US7841085B2/en
Publication of JP2007098813A publication Critical patent/JP2007098813A/ja
Publication of JP2007098813A5 publication Critical patent/JP2007098813A5/ja
Application granted granted Critical
Publication of JP4968428B2 publication Critical patent/JP4968428B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2005292856A 2005-10-05 2005-10-05 液体噴射ヘッドの製造方法 Expired - Lifetime JP4968428B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005292856A JP4968428B2 (ja) 2005-10-05 2005-10-05 液体噴射ヘッドの製造方法
US11/538,382 US7841085B2 (en) 2005-10-05 2006-10-03 Method for manufacturing liquid jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005292856A JP4968428B2 (ja) 2005-10-05 2005-10-05 液体噴射ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2007098813A JP2007098813A (ja) 2007-04-19
JP2007098813A5 JP2007098813A5 (enExample) 2008-11-13
JP4968428B2 true JP4968428B2 (ja) 2012-07-04

Family

ID=37900569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005292856A Expired - Lifetime JP4968428B2 (ja) 2005-10-05 2005-10-05 液体噴射ヘッドの製造方法

Country Status (2)

Country Link
US (1) US7841085B2 (enExample)
JP (1) JP4968428B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5218730B2 (ja) * 2007-10-18 2013-06-26 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5088487B2 (ja) 2008-02-15 2012-12-05 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法
JP5228952B2 (ja) * 2008-03-17 2013-07-03 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP4809447B2 (ja) * 2009-01-30 2011-11-09 日本電波工業株式会社 水晶振動子の製造方法
JP6277677B2 (ja) * 2013-11-01 2018-02-14 大日本印刷株式会社 エッチングマスクの設計方法、構造体の製造方法及びエッチングマスク
EP3362289B8 (en) * 2015-10-13 2020-04-01 Canon Production Printing Netherlands B.V. Process of manufacturing droplet jetting devices
JP2018103515A (ja) 2016-12-27 2018-07-05 セイコーエプソン株式会社 液体吐出ヘッドの製造方法
CN108817222B (zh) * 2018-05-31 2020-10-09 马鞍山冠成科技信息咨询有限公司 一种汽车机油滤清器盖板自脱模冲压模具

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0524204A (ja) 1991-07-17 1993-02-02 Fuji Xerox Co Ltd インクジエツト記録ヘツドの製造方法
JP3067354B2 (ja) 1991-12-10 2000-07-17 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JPH0722605A (ja) 1993-06-22 1995-01-24 Nippon Steel Corp 量子細線の製造方法
JP3436299B2 (ja) * 1998-08-21 2003-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3552024B2 (ja) * 1998-12-14 2004-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3945097B2 (ja) * 1999-10-28 2007-07-18 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP2001179996A (ja) * 1999-12-22 2001-07-03 Samsung Electro Mech Co Ltd インクジェットプリンタヘッド及びその製造方法
JP2002292868A (ja) * 2001-03-28 2002-10-09 Ricoh Co Ltd 液滴吐出ヘッド、インクカートリッジ及びインクジェット記録装置
JP2003200578A (ja) * 2002-01-09 2003-07-15 Seiko Epson Corp 液体吐出ヘッドの製造方法
JP3726909B2 (ja) 2002-07-10 2005-12-14 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP4492059B2 (ja) * 2003-08-05 2010-06-30 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2005178019A (ja) * 2003-12-16 2005-07-07 Canon Inc 微小溝を持つ構造体、その製造方法、及びこれを用いて形成されるインクジェット用記録ヘッド
JP2005183419A (ja) 2003-12-16 2005-07-07 Ricoh Co Ltd シリコン基板の加工方法
JP4415385B2 (ja) * 2005-02-21 2010-02-17 セイコーエプソン株式会社 液体噴射ヘッドおよびその製造方法
US7585423B2 (en) * 2005-05-23 2009-09-08 Canon Kabushiki Kaisha Liquid discharge head and producing method therefor
US7523553B2 (en) * 2006-02-02 2009-04-28 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head

Also Published As

Publication number Publication date
US20070074394A1 (en) 2007-04-05
US7841085B2 (en) 2010-11-30
JP2007098813A (ja) 2007-04-19

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