JP2018103515A - 液体吐出ヘッドの製造方法 - Google Patents
液体吐出ヘッドの製造方法 Download PDFInfo
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- 238000004891 communication Methods 0.000 claims abstract description 65
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/22—Manufacturing print heads
Abstract
Description
図1は、本発明の第1実施形態に係る液体吐出装置10の部分的な構成図である。第1実施形態の液体吐出装置10は、液体の例示であるインクを印刷用紙等の媒体11に吐出するインクジェット方式の印刷装置である。図1に示す液体吐出装置10は、制御装置12と搬送機構15とキャリッジ18と液体吐出ヘッド20とを具備する。液体吐出装置10にはインクを貯留する液体容器14が装着される。
図2は、液体吐出ヘッド20の分解斜視図である。図3は、図2に示す液体吐出ヘッド20のIII−III断面図である。図2および図3に示すように、液体吐出ヘッド20は、インクを吐出するノズルNが形成される吐出面を有するヘッド本体30に、ケース部材40を固定(接合)して構成される。ヘッド本体30は、連通基板32を備え、その一方側(Z方向の正側の面)に、複数のノズルNが形成されたノズル板52と封止板(コンプライアンス基板)54が設置され、他方側(Z方向の負側の面)に、圧力室基板382を含む積層部38が積層された構造体である。これらのヘッド本体30の各要素は、例えば接着剤で相互に固定される。
次に、第1実施形態に係る液体吐出ヘッド20の製造方法について、図面を参照しながら説明する。液体吐出ヘッド20の製造方法には、連通基板32に流路を形成する製造方法が含まれる。ここでは、連通基板32に流路を形成する製造方法について、詳細に説明する。
本発明の第2実施形態について説明する。以下に例示する各形態において作用や機能が第1実施形態と同様である要素については、第1実施形態の説明で使用した符号を流用して各々の詳細な説明を適宜に省略する。図7は、第2実施形態に係る液体吐出ヘッド20の連通基板32を上方(Z方向)から見た平面図であり、図8は、図7に示すVIII−VIII断面図である。
以上に例示した各実施形態は多様に変形され得る。具体的な変形の態様を以下に例示する。以下の例示から任意に選択された2以上の態様は、相互に矛盾しない範囲で適宜に併合され得る。
Claims (7)
- ノズルに連通する圧力室が形成される圧力室基板に積層される連通基板を含み、前記連通基板には、複数の前記圧力室に連通する共通液室を構成する凹部と、前記ノズルと前記圧力室とを連通するノズル側連通流路を構成する第1孔部と、前記共通液室と前記圧力室とを連通する供給側連通流路を構成する第2孔部と、前記共通液室に連通する開口部を構成する第3孔部が形成される液体吐出ヘッドの製造方法であって、
前記凹部と前記凹部に連通する前記第1孔部乃至前記第3孔部とを形成するためのマスク層を、前記連通基板に形成するマスク層形成工程と、
前記第1孔部乃至前記第3孔部に下孔を形成する下孔形成工程と、
前記凹部と前記第1孔部乃至前記第3孔部とを異方性エッチングするエッチング工程と、
前記マスク層を除去するマスク層除去工程と、を含む
液体吐出ヘッドの製造方法。 - 前記下孔は、前記連通基板の第1面から反対側の第2面まで板厚方向に貫通する貫通孔である
請求項1の液体吐出ヘッドの製造方法。 - 前記下孔形成工程においては、前記第1孔部乃至前記第3孔部のうち1つ以上の孔部に、複数の前記貫通孔を形成する
請求項2の液体吐出ヘッドの製造方法。 - 前記下孔形成工程において、前記第1孔部乃至前記第3孔部のうち、複数の前記貫通孔を形成する前記孔部については、前記孔部の径方向の両端部に少なくとも1つずつ前記貫通孔を形成する
請求項3の液体吐出ヘッドの製造方法。 - 前記下孔形成工程においてはさらに、前記孔部の中央部に少なくとも1つ以上の前記貫通孔を形成する
請求項4の液体吐出ヘッドの製造方法。 - 前記下孔形成工程においては、前記下孔をレーザー加工または深掘り反応性イオンエッチングにより形成する
請求項1から請求項5の何れかの液体吐出ヘッドの製造方法。 - 前記下孔形成工程においては、前記レーザー加工で下孔を形成する前に、前記下孔を形成する部位にマーキングする
請求項6の液体吐出ヘッドの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016253678A JP2018103515A (ja) | 2016-12-27 | 2016-12-27 | 液体吐出ヘッドの製造方法 |
CN201711099112.7A CN108237777A (zh) | 2016-12-27 | 2017-11-09 | 液体喷出头的制造方法 |
EP17206704.3A EP3351390A1 (en) | 2016-12-27 | 2017-12-12 | Method of manufacturing liquid ejecting head |
US15/839,557 US20180178518A1 (en) | 2016-12-27 | 2017-12-12 | Method of manufacturing liquid ejecting head |
Applications Claiming Priority (1)
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JP2016253678A JP2018103515A (ja) | 2016-12-27 | 2016-12-27 | 液体吐出ヘッドの製造方法 |
Publications (1)
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JP2018103515A true JP2018103515A (ja) | 2018-07-05 |
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ID=60673175
Family Applications (1)
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JP2016253678A Pending JP2018103515A (ja) | 2016-12-27 | 2016-12-27 | 液体吐出ヘッドの製造方法 |
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Country | Link |
---|---|
US (1) | US20180178518A1 (ja) |
EP (1) | EP3351390A1 (ja) |
JP (1) | JP2018103515A (ja) |
CN (1) | CN108237777A (ja) |
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JP2007045123A (ja) * | 2005-08-12 | 2007-02-22 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置並びに液滴吐出ヘッドの製造方法 |
JP2009006536A (ja) * | 2007-06-27 | 2009-01-15 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置及び液滴吐出ヘッドの製造方法 |
JP2013043437A (ja) * | 2011-08-26 | 2013-03-04 | Dainippon Printing Co Ltd | 液体吐出装置の流路板の製造方法 |
US20160031216A1 (en) * | 2013-02-13 | 2016-02-04 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
JP2016022582A (ja) * | 2014-07-16 | 2016-02-08 | セイコーエプソン株式会社 | シリコン基板の加工方法および液滴吐出ヘッド |
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WO2000050198A1 (fr) * | 1999-02-25 | 2000-08-31 | Seiko Epson Corporation | Procede d'usinage de pieces par faisceau laser |
US7578943B2 (en) * | 2005-05-23 | 2009-08-25 | Canon Kabushiki Kaisha | Liquid discharge head and producing method therefor |
JP4506717B2 (ja) * | 2005-07-20 | 2010-07-21 | セイコーエプソン株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
JP4968428B2 (ja) | 2005-10-05 | 2012-07-04 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
JP4835828B2 (ja) * | 2005-10-05 | 2011-12-14 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
US7637601B2 (en) * | 2006-08-18 | 2009-12-29 | Seiko Epson Corporation | Droplet discharging head, droplet discharging apparatus, method for manufacturing droplet discharging head and method for manufacturing droplet discharging apparatus |
JP4656670B2 (ja) * | 2008-12-19 | 2011-03-23 | キヤノン株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
JP2010240869A (ja) * | 2009-04-01 | 2010-10-28 | Canon Inc | 液体吐出ヘッド用基板の製造方法 |
US8757782B2 (en) * | 2011-11-21 | 2014-06-24 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting apparatus |
JP2013146885A (ja) * | 2012-01-18 | 2013-08-01 | Seiko Epson Corp | 液体噴射ヘッド、液体噴射装置、液体噴射ヘッドの製造方法 |
JP6094239B2 (ja) * | 2013-02-06 | 2017-03-15 | セイコーエプソン株式会社 | シリコン基板の加工方法 |
JP2016049726A (ja) * | 2014-09-01 | 2016-04-11 | セイコーエプソン株式会社 | 流路部品、液体吐出ヘッド、および、液体吐出装置 |
JP6767666B2 (ja) * | 2016-01-29 | 2020-10-14 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びに液体噴射装置の製造方法 |
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2016
- 2016-12-27 JP JP2016253678A patent/JP2018103515A/ja active Pending
-
2017
- 2017-11-09 CN CN201711099112.7A patent/CN108237777A/zh active Pending
- 2017-12-12 EP EP17206704.3A patent/EP3351390A1/en not_active Withdrawn
- 2017-12-12 US US15/839,557 patent/US20180178518A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007045123A (ja) * | 2005-08-12 | 2007-02-22 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置並びに液滴吐出ヘッドの製造方法 |
JP2009006536A (ja) * | 2007-06-27 | 2009-01-15 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置及び液滴吐出ヘッドの製造方法 |
JP2013043437A (ja) * | 2011-08-26 | 2013-03-04 | Dainippon Printing Co Ltd | 液体吐出装置の流路板の製造方法 |
US20160031216A1 (en) * | 2013-02-13 | 2016-02-04 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
JP2016022582A (ja) * | 2014-07-16 | 2016-02-08 | セイコーエプソン株式会社 | シリコン基板の加工方法および液滴吐出ヘッド |
Also Published As
Publication number | Publication date |
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US20180178518A1 (en) | 2018-06-28 |
CN108237777A (zh) | 2018-07-03 |
EP3351390A1 (en) | 2018-07-25 |
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