JP4947656B2 - 積重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 - Google Patents
積重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 Download PDFInfo
- Publication number
- JP4947656B2 JP4947656B2 JP2007317306A JP2007317306A JP4947656B2 JP 4947656 B2 JP4947656 B2 JP 4947656B2 JP 2007317306 A JP2007317306 A JP 2007317306A JP 2007317306 A JP2007317306 A JP 2007317306A JP 4947656 B2 JP4947656 B2 JP 4947656B2
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- JP
- Japan
- Prior art keywords
- integrated circuit
- package
- recess
- stacked
- interconnect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
- H10W74/117—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/121—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by multiple encapsulations, e.g. by a thin protective coating and a thick encapsulation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/24—Configurations of stacked chips at least one of the stacked chips being laterally offset from a neighbouring stacked chip, e.g. chip stacks having a staircase shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/288—Configurations of stacked chips characterised by arrangements for thermal management of the stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/608,827 US7772683B2 (en) | 2006-12-09 | 2006-12-09 | Stacked integrated circuit package-in-package system |
| US11/608,827 | 2006-12-09 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011285712A Division JP5397964B2 (ja) | 2006-12-09 | 2011-12-27 | 積み重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008147669A JP2008147669A (ja) | 2008-06-26 |
| JP2008147669A5 JP2008147669A5 (https=) | 2011-01-27 |
| JP4947656B2 true JP4947656B2 (ja) | 2012-06-06 |
Family
ID=39497000
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007317306A Active JP4947656B2 (ja) | 2006-12-09 | 2007-12-07 | 積重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 |
| JP2011285712A Active JP5397964B2 (ja) | 2006-12-09 | 2011-12-27 | 積み重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011285712A Active JP5397964B2 (ja) | 2006-12-09 | 2011-12-27 | 積み重ねられた集積回路パッケージインパッケージシステムおよびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7772683B2 (https=) |
| JP (2) | JP4947656B2 (https=) |
| KR (1) | KR101454883B1 (https=) |
| TW (1) | TWI345298B (https=) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7746656B2 (en) * | 2005-05-16 | 2010-06-29 | Stats Chippac Ltd. | Offset integrated circuit package-on-package stacking system |
| US7518224B2 (en) * | 2005-05-16 | 2009-04-14 | Stats Chippac Ltd. | Offset integrated circuit package-on-package stacking system |
| US7622333B2 (en) * | 2006-08-04 | 2009-11-24 | Stats Chippac Ltd. | Integrated circuit package system for package stacking and manufacturing method thereof |
| US7645638B2 (en) * | 2006-08-04 | 2010-01-12 | Stats Chippac Ltd. | Stackable multi-chip package system with support structure |
| US8432026B2 (en) * | 2006-08-04 | 2013-04-30 | Stats Chippac Ltd. | Stackable multi-chip package system |
| US8642383B2 (en) * | 2006-09-28 | 2014-02-04 | Stats Chippac Ltd. | Dual-die package structure having dies externally and simultaneously connected via bump electrodes and bond wires |
| US7759783B2 (en) * | 2006-12-07 | 2010-07-20 | Stats Chippac Ltd. | Integrated circuit package system employing thin profile techniques |
| US7635913B2 (en) * | 2006-12-09 | 2009-12-22 | Stats Chippac Ltd. | Stacked integrated circuit package-in-package system |
| US8304874B2 (en) * | 2006-12-09 | 2012-11-06 | Stats Chippac Ltd. | Stackable integrated circuit package system |
| US7772683B2 (en) * | 2006-12-09 | 2010-08-10 | Stats Chippac Ltd. | Stacked integrated circuit package-in-package system |
| US8163600B2 (en) * | 2006-12-28 | 2012-04-24 | Stats Chippac Ltd. | Bridge stack integrated circuit package-on-package system |
| US9466545B1 (en) | 2007-02-21 | 2016-10-11 | Amkor Technology, Inc. | Semiconductor package in package |
| US7683469B2 (en) * | 2008-05-30 | 2010-03-23 | Stats Chippac Ltd. | Package-on-package system with heat spreader |
| US8310061B2 (en) * | 2008-12-17 | 2012-11-13 | Qualcomm Incorporated | Stacked die parallel plate capacitor |
| US7785925B2 (en) * | 2008-12-19 | 2010-08-31 | Stats Chippac Ltd. | Integrated circuit packaging system with package stacking and method of manufacture thereof |
| KR101686553B1 (ko) | 2010-07-12 | 2016-12-14 | 삼성전자 주식회사 | 반도체 패키지 및 패키지 온 패키지 |
| US8553420B2 (en) | 2010-10-19 | 2013-10-08 | Tessera, Inc. | Enhanced stacked microelectronic assemblies with central contacts and improved thermal characteristics |
| KR101118711B1 (ko) | 2010-12-17 | 2012-03-12 | 테세라, 인코포레이티드 | 중앙 콘택을 구비한 적층형 마이크로전자 조립체 |
| US8928153B2 (en) | 2011-04-21 | 2015-01-06 | Tessera, Inc. | Flip-chip, face-up and face-down centerbond memory wirebond assemblies |
| US8970028B2 (en) | 2011-12-29 | 2015-03-03 | Invensas Corporation | Embedded heat spreader for package with multiple microelectronic elements and face-down connection |
| US8952516B2 (en) | 2011-04-21 | 2015-02-10 | Tessera, Inc. | Multiple die stacking for two or more die |
| US8338963B2 (en) | 2011-04-21 | 2012-12-25 | Tessera, Inc. | Multiple die face-down stacking for two or more die |
| US8304881B1 (en) | 2011-04-21 | 2012-11-06 | Tessera, Inc. | Flip-chip, face-up and face-down wirebond combination package |
| US8633576B2 (en) | 2011-04-21 | 2014-01-21 | Tessera, Inc. | Stacked chip-on-board module with edge connector |
| US9013033B2 (en) | 2011-04-21 | 2015-04-21 | Tessera, Inc. | Multiple die face-down stacking for two or more die |
| KR20150046117A (ko) * | 2012-08-23 | 2015-04-29 | 피에스5 뤽스코 에스.에이.알.엘. | 장치 및 그 제조 방법 |
| WO2014167871A1 (ja) * | 2013-04-10 | 2014-10-16 | 株式会社村田製作所 | 半導体装置 |
| US9123555B2 (en) | 2013-10-25 | 2015-09-01 | Invensas Corporation | Co-support for XFD packaging |
| US9871007B2 (en) * | 2015-09-25 | 2018-01-16 | Intel Corporation | Packaged integrated circuit device with cantilever structure |
| US10083920B1 (en) * | 2018-02-01 | 2018-09-25 | Google Llc | Package stiffener for protecting semiconductor die |
| KR102556518B1 (ko) * | 2018-10-18 | 2023-07-18 | 에스케이하이닉스 주식회사 | 상부 칩 스택을 지지하는 서포팅 블록을 포함하는 반도체 패키지 |
| US11495505B2 (en) | 2019-06-03 | 2022-11-08 | Amkor Technology Singapore Holding Pte. Ltd. | Semiconductor devices and related methods |
| US11398455B2 (en) * | 2019-06-03 | 2022-07-26 | Amkor Technology Singapore Holding Pte. Ltd. | Semiconductor devices and related methods |
| KR102767617B1 (ko) * | 2019-08-12 | 2025-02-17 | 에스케이하이닉스 주식회사 | 적층 반도체 칩을 포함하는 반도체 패키지 |
| KR20230164794A (ko) | 2022-05-25 | 2023-12-05 | 삼성전자주식회사 | 반도체 패키지 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH05144982A (ja) * | 1991-11-19 | 1993-06-11 | Nippon Precision Circuits Kk | 集積回路装置 |
| US5854507A (en) * | 1998-07-21 | 1998-12-29 | Hewlett-Packard Company | Multiple chip assembly |
| KR100319608B1 (ko) * | 1999-03-09 | 2002-01-05 | 김영환 | 적층형 반도체 패키지 및 그 제조방법 |
| US6414396B1 (en) * | 2000-01-24 | 2002-07-02 | Amkor Technology, Inc. | Package for stacked integrated circuits |
| JP2002076252A (ja) * | 2000-08-31 | 2002-03-15 | Nec Kyushu Ltd | 半導体装置 |
| SG97938A1 (en) * | 2000-09-21 | 2003-08-20 | Micron Technology Inc | Method to prevent die attach adhesive contamination in stacked chips |
| TW461064B (en) * | 2000-12-26 | 2001-10-21 | Siliconware Precision Industries Co Ltd | Thin-type semiconductor device having heat sink structure |
| JP2002231885A (ja) * | 2001-02-06 | 2002-08-16 | Mitsubishi Electric Corp | 半導体装置 |
| JP2002231882A (ja) * | 2001-02-06 | 2002-08-16 | Mitsubishi Electric Corp | 半導体装置 |
| KR20050016540A (ko) * | 2002-06-11 | 2005-02-21 | 리플렉티버티 인코퍼레이티드 | 웨이퍼 기판 상에 마이크로-전기기계식 장치를 적층,현출, 및 패키지하는 방법 |
| US7071547B2 (en) * | 2002-09-11 | 2006-07-04 | Tessera, Inc. | Assemblies having stacked semiconductor chips and methods of making same |
| KR100480437B1 (ko) * | 2002-10-24 | 2005-04-07 | 삼성전자주식회사 | 반도체 칩 패키지 적층 모듈 |
| US6686656B1 (en) * | 2003-01-13 | 2004-02-03 | Kingston Technology Corporation | Integrated multi-chip chip scale package |
| US20050067694A1 (en) * | 2003-09-30 | 2005-03-31 | Pon Florence R. | Spacerless die stacking |
| KR100510556B1 (ko) * | 2003-11-11 | 2005-08-26 | 삼성전자주식회사 | 초박형 반도체 패키지 및 그 제조방법 |
| JP2005302815A (ja) * | 2004-04-07 | 2005-10-27 | Toshiba Corp | 積層型半導体パッケージおよびその製造方法 |
| JP2005302871A (ja) * | 2004-04-08 | 2005-10-27 | Toshiba Corp | 積層半導体装置及びその製造方法。 |
| US7116002B2 (en) * | 2004-05-10 | 2006-10-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Overhang support for a stacked semiconductor device, and method of forming thereof |
| JP3842272B2 (ja) * | 2004-06-02 | 2006-11-08 | 株式会社Genusion | インターポーザー、半導体チップマウントサブ基板および半導体パッケージ |
| JP4494240B2 (ja) * | 2005-02-03 | 2010-06-30 | 富士通マイクロエレクトロニクス株式会社 | 樹脂封止型半導体装置 |
| US7271496B2 (en) * | 2005-02-04 | 2007-09-18 | Stats Chippac Ltd. | Integrated circuit package-in-package system |
| JP4934022B2 (ja) * | 2005-03-17 | 2012-05-16 | パナソニック株式会社 | モジュール基板 |
| JP2006310649A (ja) * | 2005-04-28 | 2006-11-09 | Sharp Corp | 半導体装置パッケージおよびその製造方法、ならびに半導体装置パッケージ用一括回路基板 |
| US7288835B2 (en) * | 2006-03-17 | 2007-10-30 | Stats Chippac Ltd. | Integrated circuit package-in-package system |
| US9202776B2 (en) * | 2006-06-01 | 2015-12-01 | Stats Chippac Ltd. | Stackable multi-chip package system |
| US7622333B2 (en) * | 2006-08-04 | 2009-11-24 | Stats Chippac Ltd. | Integrated circuit package system for package stacking and manufacturing method thereof |
| US7645638B2 (en) * | 2006-08-04 | 2010-01-12 | Stats Chippac Ltd. | Stackable multi-chip package system with support structure |
| US7772683B2 (en) * | 2006-12-09 | 2010-08-10 | Stats Chippac Ltd. | Stacked integrated circuit package-in-package system |
-
2006
- 2006-12-09 US US11/608,827 patent/US7772683B2/en active Active
-
2007
- 2007-12-04 TW TW096146010A patent/TWI345298B/zh active
- 2007-12-07 KR KR1020070127171A patent/KR101454883B1/ko active Active
- 2007-12-07 JP JP2007317306A patent/JP4947656B2/ja active Active
-
2011
- 2011-12-27 JP JP2011285712A patent/JP5397964B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20080136006A1 (en) | 2008-06-12 |
| JP2008147669A (ja) | 2008-06-26 |
| TWI345298B (en) | 2011-07-11 |
| JP2012064983A (ja) | 2012-03-29 |
| TW200834873A (en) | 2008-08-16 |
| US7772683B2 (en) | 2010-08-10 |
| KR20080053233A (ko) | 2008-06-12 |
| JP5397964B2 (ja) | 2014-01-22 |
| KR101454883B1 (ko) | 2014-10-28 |
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