JP4913603B2 - プラズマ反応器のエッチング速度ドリフトを低減するための温度制御されたホットエッジリングアセンブリ - Google Patents

プラズマ反応器のエッチング速度ドリフトを低減するための温度制御されたホットエッジリングアセンブリ Download PDF

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JP4913603B2
JP4913603B2 JP2006545785A JP2006545785A JP4913603B2 JP 4913603 B2 JP4913603 B2 JP 4913603B2 JP 2006545785 A JP2006545785 A JP 2006545785A JP 2006545785 A JP2006545785 A JP 2006545785A JP 4913603 B2 JP4913603 B2 JP 4913603B2
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ring
assembly
substrate
plasma
lower ring
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JP2007515081A5 (enExample
JP2007515081A (ja
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アンドレアス フィッシャー，
ピーター ローベンハルト，
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Lam Research Corp
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Lam Research Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP2006545785A 2003-12-17 2004-12-10 プラズマ反応器のエッチング速度ドリフトを低減するための温度制御されたホットエッジリングアセンブリ Expired - Lifetime JP4913603B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/736,666 US7244336B2 (en) 2003-12-17 2003-12-17 Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift
US10/736,666 2003-12-17
PCT/US2004/041768 WO2005059962A2 (en) 2003-12-17 2004-12-10 Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift

Publications (3)

Publication Number Publication Date
JP2007515081A JP2007515081A (ja) 2007-06-07
JP2007515081A5 JP2007515081A5 (enExample) 2008-02-07
JP4913603B2 true JP4913603B2 (ja) 2012-04-11

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JP2006545785A Expired - Lifetime JP4913603B2 (ja) 2003-12-17 2004-12-10 プラズマ反応器のエッチング速度ドリフトを低減するための温度制御されたホットエッジリングアセンブリ

Country Status (7)

Country Link
US (1) US7244336B2 (enExample)
EP (1) EP1706898B1 (enExample)
JP (1) JP4913603B2 (enExample)
KR (1) KR101131022B1 (enExample)
CN (1) CN100474521C (enExample)
TW (1) TWI368274B (enExample)
WO (1) WO2005059962A2 (enExample)

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EP1706898A2 (en) 2006-10-04
US20050133164A1 (en) 2005-06-23
EP1706898A4 (en) 2010-01-20
US7244336B2 (en) 2007-07-17
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WO2005059962A3 (en) 2006-02-23
WO2005059962A2 (en) 2005-06-30
TWI368274B (en) 2012-07-11
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JP2007515081A (ja) 2007-06-07
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