JP4896260B2 - 裏面支持構造付きウエハ収納容器 - Google Patents

裏面支持構造付きウエハ収納容器 Download PDF

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Publication number
JP4896260B2
JP4896260B2 JP2010500523A JP2010500523A JP4896260B2 JP 4896260 B2 JP4896260 B2 JP 4896260B2 JP 2010500523 A JP2010500523 A JP 2010500523A JP 2010500523 A JP2010500523 A JP 2010500523A JP 4896260 B2 JP4896260 B2 JP 4896260B2
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Japan
Prior art keywords
wafer
shelf
storage container
support
support plate
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JP2010500523A
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English (en)
Japanese (ja)
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JPWO2009107254A1 (ja
Inventor
千明 松鳥
康治 飯村
剛 永島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
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Miraial Co Ltd
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Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Priority to JP2010500523A priority Critical patent/JP4896260B2/ja
Publication of JPWO2009107254A1 publication Critical patent/JPWO2009107254A1/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP2010500523A 2008-02-27 2008-07-18 裏面支持構造付きウエハ収納容器 Active JP4896260B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010500523A JP4896260B2 (ja) 2008-02-27 2008-07-18 裏面支持構造付きウエハ収納容器

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008046176 2008-02-27
JP2008046176 2008-02-27
PCT/JP2008/062999 WO2009107254A1 (fr) 2008-02-27 2008-07-18 Conteneur de stockage de tranches avec structure de support arrière
JP2010500523A JP4896260B2 (ja) 2008-02-27 2008-07-18 裏面支持構造付きウエハ収納容器

Publications (2)

Publication Number Publication Date
JPWO2009107254A1 JPWO2009107254A1 (ja) 2011-06-30
JP4896260B2 true JP4896260B2 (ja) 2012-03-14

Family

ID=41015664

Family Applications (1)

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JP2010500523A Active JP4896260B2 (ja) 2008-02-27 2008-07-18 裏面支持構造付きウエハ収納容器

Country Status (3)

Country Link
JP (1) JP4896260B2 (fr)
TW (1) TWI519456B (fr)
WO (1) WO2009107254A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220102175A1 (en) * 2020-09-30 2022-03-31 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor substrate boat and methods of using the same

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5449974B2 (ja) * 2009-10-16 2014-03-19 ゴールド工業株式会社 精密基板収納容器
JP2011108715A (ja) * 2009-11-13 2011-06-02 Shin Etsu Polymer Co Ltd 基板収納容器
JP5473691B2 (ja) * 2010-03-16 2014-04-16 株式会社ディスコ 収容カセット
JP2011253960A (ja) * 2010-06-02 2011-12-15 Shin Etsu Polymer Co Ltd 基板収納容器
JP5459787B2 (ja) * 2010-06-17 2014-04-02 信越ポリマー株式会社 基板収納容器
KR101738219B1 (ko) * 2011-11-08 2017-05-19 미라이얼 가부시키가이샤 웨이퍼 수납용기
JP6190726B2 (ja) * 2014-01-17 2017-08-30 信越ポリマー株式会社 基板収納容器
WO2015118775A1 (fr) * 2014-02-07 2015-08-13 村田機械株式会社 Dispositif d'injection de gaz et élément auxiliaire
CN105083739B (zh) * 2014-05-23 2019-06-18 宁波市北仑区大矸德鑫精密模具制造厂 一种用于模具的防尘帽
JP2016119408A (ja) * 2014-12-22 2016-06-30 ミライアル株式会社 基板収納容器
KR101637498B1 (ko) 2015-03-24 2016-07-07 피코앤테라(주) 웨이퍼 수납용기
CN107431036B (zh) * 2015-04-10 2021-09-28 信越聚合物株式会社 基板收纳容器
EP3291289B1 (fr) * 2016-08-30 2022-08-03 Brooks Automation (Germany) GmbH Compartiment de réticule et plaque de diffuseur
KR102677319B1 (ko) * 2017-02-27 2024-06-24 미라이얼 가부시키가이샤 기판 수납 용기
JP6653788B1 (ja) * 2018-06-12 2020-02-26 ミライアル株式会社 基板収納容器
JP2021049126A (ja) * 2019-09-25 2021-04-01 くら寿司株式会社 飲食物収容皿組み付け具
KR102342156B1 (ko) * 2020-04-16 2021-12-22 주식회사 글린트머티리얼즈 미끄럼 방지 패드를 포함한 반도체 웨이퍼 이송용 캐리어
JP7388712B2 (ja) 2020-07-22 2023-11-29 信越ポリマー株式会社 収納容器の製造方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62295429A (ja) * 1986-02-20 1987-12-22 Mitsui Toatsu Chem Inc ウエハ−キヤリヤ−
JPH06204195A (ja) * 1993-01-06 1994-07-22 Tokuyama Ceramics Kk ウエハ洗浄装置用ウエハボート
JPH07161805A (ja) * 1993-12-02 1995-06-23 Mitsubishi Electric Corp 半導体ウェハ収納ケースおよびその搬送装置，投入・払出し装置
JPH08222622A (ja) * 1995-02-10 1996-08-30 Hitachi Electron Eng Co Ltd ウェハキャリア
WO1998056676A1 (fr) * 1997-06-13 1998-12-17 Kakizaki Manufacturing Co., Ltd. Recipient en feuille mince pourvu d'un couvercle
WO1999052140A1 (fr) * 1998-04-06 1999-10-14 Dainichi Shoji K. K. Recipient
JP2000040736A (ja) * 1998-07-23 2000-02-08 Seiko Epson Corp ウェハ収納装置
JP2003197728A (ja) * 2001-12-27 2003-07-11 Aitec:Kk 基板収納カセット
JP2004095942A (ja) * 2002-09-02 2004-03-25 Kokusai Electric Semiconductor Service Inc ウェーハカセット
JP2004247598A (ja) * 2003-02-14 2004-09-02 Kyocera Corp 基板載置治具
JP2008034879A (ja) * 2007-10-15 2008-02-14 Miraial Kk 薄板支持容器

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62295429A (ja) * 1986-02-20 1987-12-22 Mitsui Toatsu Chem Inc ウエハ−キヤリヤ−
JPH06204195A (ja) * 1993-01-06 1994-07-22 Tokuyama Ceramics Kk ウエハ洗浄装置用ウエハボート
JPH07161805A (ja) * 1993-12-02 1995-06-23 Mitsubishi Electric Corp 半導体ウェハ収納ケースおよびその搬送装置，投入・払出し装置
JPH08222622A (ja) * 1995-02-10 1996-08-30 Hitachi Electron Eng Co Ltd ウェハキャリア
WO1998056676A1 (fr) * 1997-06-13 1998-12-17 Kakizaki Manufacturing Co., Ltd. Recipient en feuille mince pourvu d'un couvercle
WO1999052140A1 (fr) * 1998-04-06 1999-10-14 Dainichi Shoji K. K. Recipient
JP2000040736A (ja) * 1998-07-23 2000-02-08 Seiko Epson Corp ウェハ収納装置
JP2003197728A (ja) * 2001-12-27 2003-07-11 Aitec:Kk 基板収納カセット
JP2004095942A (ja) * 2002-09-02 2004-03-25 Kokusai Electric Semiconductor Service Inc ウェーハカセット
JP2004247598A (ja) * 2003-02-14 2004-09-02 Kyocera Corp 基板載置治具
JP2008034879A (ja) * 2007-10-15 2008-02-14 Miraial Kk 薄板支持容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220102175A1 (en) * 2020-09-30 2022-03-31 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor substrate boat and methods of using the same

Also Published As

Publication number Publication date
TWI519456B (zh) 2016-02-01
TW200946418A (en) 2009-11-16
JPWO2009107254A1 (ja) 2011-06-30
WO2009107254A1 (fr) 2009-09-03

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