JP4862404B2 - Ｆｐｄ用ガラス基板の研磨方法及びその装置 - Google Patents

Ｆｐｄ用ガラス基板の研磨方法及びその装置 Download PDF

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Publication number
JP4862404B2
JP4862404B2 JP2006012772A JP2006012772A JP4862404B2 JP 4862404 B2 JP4862404 B2 JP 4862404B2 JP 2006012772 A JP2006012772 A JP 2006012772A JP 2006012772 A JP2006012772 A JP 2006012772A JP 4862404 B2 JP4862404 B2 JP 4862404B2
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JP
Japan
Prior art keywords
polishing
glass substrate
fpd
circular
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006012772A
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English (en)
Japanese (ja)
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JP2007190657A (ja
Inventor
康成 生田
健雄 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2006012772A priority Critical patent/JP4862404B2/ja
Priority to CN200680051523.2A priority patent/CN101360584B/zh
Priority to KR1020117031579A priority patent/KR101273729B1/ko
Priority to KR1020087010821A priority patent/KR101143290B1/ko
Priority to PCT/JP2006/323020 priority patent/WO2007083438A1/fr
Priority to TW095143579A priority patent/TW200728019A/zh
Publication of JP2007190657A publication Critical patent/JP2007190657A/ja
Application granted granted Critical
Publication of JP4862404B2 publication Critical patent/JP4862404B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/06—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving conveyor belts, a sequence of travelling work-tables or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • B24B7/244—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass continuous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/247—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass using reciprocating grinding tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2006012772A 2006-01-20 2006-01-20 Ｆｐｄ用ガラス基板の研磨方法及びその装置 Active JP4862404B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006012772A JP4862404B2 (ja) 2006-01-20 2006-01-20 Ｆｐｄ用ガラス基板の研磨方法及びその装置
CN200680051523.2A CN101360584B (zh) 2006-01-20 2006-11-17 板状体的研磨方法及其装置
KR1020117031579A KR101273729B1 (ko) 2006-01-20 2006-11-17 판상체의 연마 방법 및 그 장치
KR1020087010821A KR101143290B1 (ko) 2006-01-20 2006-11-17 판상체의 연마 방법 및 그 장치
PCT/JP2006/323020 WO2007083438A1 (fr) 2006-01-20 2006-11-17 Procédé et dispositif de polissage de corps de type plaque
TW095143579A TW200728019A (en) 2006-01-20 2006-11-24 A method and a device for polishing a plate-like body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006012772A JP4862404B2 (ja) 2006-01-20 2006-01-20 Ｆｐｄ用ガラス基板の研磨方法及びその装置

Publications (2)

Publication Number Publication Date
JP2007190657A JP2007190657A (ja) 2007-08-02
JP4862404B2 true JP4862404B2 (ja) 2012-01-25

Family

ID=38287397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006012772A Active JP4862404B2 (ja) 2006-01-20 2006-01-20 Ｆｐｄ用ガラス基板の研磨方法及びその装置

Country Status (5)

Country Link
JP (1) JP4862404B2 (fr)
KR (2) KR101273729B1 (fr)
CN (1) CN101360584B (fr)
TW (1) TW200728019A (fr)
WO (1) WO2007083438A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010140595A1 (fr) * 2009-06-04 2010-12-09 旭硝子株式会社 Procédé de meulage d'un corps de type plaque
CN102548709A (zh) * 2009-07-06 2012-07-04 旭硝子株式会社 板状体的研磨装置以及板状体的研磨方法
JP5605554B2 (ja) * 2009-09-17 2014-10-15 旭硝子株式会社 ガラス板局所研磨装置、ガラス板局所研磨方法、ガラス製品の製造装置、及びガラス製品の製造方法
KR20120115272A (ko) * 2009-12-18 2012-10-17 아사히 가라스 가부시키가이샤 판상물의 연마 방법 및 연마 장치
JP5762721B2 (ja) * 2010-11-04 2015-08-12 株式会社東芝 原子炉用制御棒の表面処理装置
JP5316910B2 (ja) * 2011-06-02 2013-10-16 旭硝子株式会社 板状体の研磨装置及び板状体の研磨方法
KR101377654B1 (ko) * 2013-09-09 2014-03-25 주식회사 엘지화학 대형기판 및 대형기판의 균일한 연마를 위한 연마 방법
JP6027664B2 (ja) * 2015-01-29 2016-11-16 株式会社松田製作所 研磨装置
KR102544765B1 (ko) * 2018-03-02 2023-06-19 주식회사 케이씨텍 기판 연마 장치
CN109759955B (zh) * 2019-03-11 2020-08-28 佛山市南海区卓迪机械有限公司 一种石板抛光设备
CN111558865A (zh) * 2020-05-23 2020-08-21 安徽财经大学 一种大尺寸tft-lcd玻璃基板的面研磨装置及方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1097851B (de) * 1951-10-16 1961-01-19 Saint Gobain Vorrichtung zum Polieren von Scheiben aus Glas od. ae. Werkstoffen
US3050913A (en) * 1959-08-11 1962-08-28 Pittsburgh Plate Glass Co Glass manufacture
JPS5775767A (en) * 1980-10-30 1982-05-12 Kawasaki Steel Corp Method of grinding scale of hot rolled steel strip
JPS61169563A (ja) * 1985-01-22 1986-07-31 株式会社竹中工務店 階段ユニット
JPH05253821A (ja) * 1992-03-11 1993-10-05 Nippon Steel Corp ステンレス鋼帯の研削方法
JPH06246623A (ja) * 1993-02-26 1994-09-06 Asahi Glass Co Ltd 板状体の連続研磨方法及び装置
JP3334817B2 (ja) * 1993-12-24 2002-10-15 日本電気硝子株式会社 ガラス板の研磨方法
JP2001293656A (ja) * 2000-04-17 2001-10-23 Asahi Glass Co Ltd 板状体の連続式研磨装置及びその方法
US6585572B1 (en) * 2000-08-22 2003-07-01 Lam Research Corporation Subaperture chemical mechanical polishing system
JP2002239894A (ja) * 2001-02-20 2002-08-28 Ebara Corp ポリッシング装置
JP3965969B2 (ja) * 2001-11-02 2007-08-29 株式会社ニコン 研磨装置、研磨方法、半導体デバイス及び半導体デバイス製造方法
JP2004195601A (ja) * 2002-12-19 2004-07-15 Toppan Printing Co Ltd 液晶表示装置用カラーフィルタの研磨方法
DE20319366U1 (de) * 2003-12-13 2004-03-11 Jakob Löwer Inh. von Schumann GmbH & Co. KG Durchlaufschleifmaschine zum Bearbeiten einer ebenen Werkstückoberfläche

Also Published As

Publication number Publication date
JP2007190657A (ja) 2007-08-02
WO2007083438A1 (fr) 2007-07-26
KR20080075497A (ko) 2008-08-18
TWI331068B (fr) 2010-10-01
CN101360584A (zh) 2009-02-04
KR101273729B1 (ko) 2013-06-12
CN101360584B (zh) 2014-01-01
TW200728019A (en) 2007-08-01
KR101143290B1 (ko) 2012-05-11

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