JP4805033B2 - 洗浄ローラ - Google Patents

洗浄ローラ Download PDF

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Publication number
JP4805033B2
JP4805033B2 JP2006168613A JP2006168613A JP4805033B2 JP 4805033 B2 JP4805033 B2 JP 4805033B2 JP 2006168613 A JP2006168613 A JP 2006168613A JP 2006168613 A JP2006168613 A JP 2006168613A JP 4805033 B2 JP4805033 B2 JP 4805033B2
Authority
JP
Japan
Prior art keywords
cleaning
roller
cleaning liquid
substrate
brush
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006168613A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007335796A (ja
Inventor
太 島井
茂 河田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP2006168613A priority Critical patent/JP4805033B2/ja
Priority to TW096110300A priority patent/TW200800069A/zh
Priority to KR1020070047376A priority patent/KR100889455B1/ko
Priority to CNB2007101111834A priority patent/CN100496332C/zh
Publication of JP2007335796A publication Critical patent/JP2007335796A/ja
Application granted granted Critical
Publication of JP4805033B2 publication Critical patent/JP4805033B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Brushes (AREA)
  • Liquid Crystal (AREA)
JP2006168613A 2006-06-19 2006-06-19 洗浄ローラ Expired - Fee Related JP4805033B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006168613A JP4805033B2 (ja) 2006-06-19 2006-06-19 洗浄ローラ
TW096110300A TW200800069A (en) 2006-06-19 2007-03-26 Washing roller
KR1020070047376A KR100889455B1 (ko) 2006-06-19 2007-05-16 세정 롤러
CNB2007101111834A CN100496332C (zh) 2006-06-19 2007-06-14 清洗辊子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006168613A JP4805033B2 (ja) 2006-06-19 2006-06-19 洗浄ローラ

Publications (2)

Publication Number Publication Date
JP2007335796A JP2007335796A (ja) 2007-12-27
JP4805033B2 true JP4805033B2 (ja) 2011-11-02

Family

ID=38934946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006168613A Expired - Fee Related JP4805033B2 (ja) 2006-06-19 2006-06-19 洗浄ローラ

Country Status (4)

Country Link
JP (1) JP4805033B2 (https=)
KR (1) KR100889455B1 (https=)
CN (1) CN100496332C (https=)
TW (1) TW200800069A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12091348B2 (en) 2017-07-12 2024-09-17 Corning Incorporated Apparatus and methods for manufacturing a glass substrate

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI594811B (zh) * 2010-05-19 2017-08-11 湯瑪士衛斯特公司 用於擦洗基材的裝置與方法
CN102755980A (zh) * 2011-04-25 2012-10-31 中芯国际集成电路制造(上海)有限公司 晶圆清洗刷和晶圆清洗装置
KR101203652B1 (ko) 2011-06-16 2012-11-23 주식회사 포스코 브러쉬 롤의 세정건조장치
KR101318533B1 (ko) * 2012-08-16 2013-10-16 주식회사 케이씨텍 기판 세정 장치
CN103894354B (zh) * 2012-12-27 2017-02-08 北京汉能创昱科技有限公司 一种基板清洗装置
KR101590863B1 (ko) * 2014-03-03 2016-02-18 주식회사 한길이에스티 인쇄회로기판 세척기
CN104117517A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的滚刷辊结构
CN104043604A (zh) * 2014-06-26 2014-09-17 深圳市华星光电技术有限公司 清洁刷结构
CN106733795A (zh) * 2016-12-26 2017-05-31 重庆荣易达铝业有限公司 清除缸盖孔道金属屑的方法
CN107051930A (zh) * 2016-12-26 2017-08-18 重庆荣易达铝业有限公司 缸盖弯孔清洗装置
CN108638944A (zh) * 2018-03-26 2018-10-12 合肥市富园汽车改装有限公司 一种户外宣传车显示屏清灰装置
CN109037116B (zh) * 2018-08-31 2021-05-28 上海华力微电子有限公司 晶圆清洗装置
CN110664106A (zh) * 2019-09-12 2020-01-10 安徽名扬刷业有限公司 一种清洗机用毛辊刷
CN111014123B (zh) * 2019-11-22 2021-07-13 沈阳丰晟电力设备有限公司 一种波纹油箱波纹片清理装置
CN111851374B (zh) * 2020-07-22 2022-06-07 山东城邦建设有限公司 一种市政环保用道路中间防护栏清洁机构
CN112007882A (zh) * 2020-08-26 2020-12-01 安徽普冈电子材料有限公司 一种腐蚀箔高效清洗装置
CN113208265A (zh) * 2020-12-08 2021-08-06 安徽立森刷业有限公司 Tft-lcd显示屏生产中用清洗毛刷辊及其制作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774132A (ja) * 1993-09-06 1995-03-17 Fujitsu Ltd ブラシスクラバとブラシスクラブ方法
JP2000015190A (ja) * 1998-07-03 2000-01-18 Matsushita Electric Ind Co Ltd 基板洗浄方法及び装置
JP2000202379A (ja) * 1999-01-14 2000-07-25 Nikon Corp ネジ穴洗浄装置および部品の洗浄方法
KR100685919B1 (ko) * 2000-12-29 2007-02-22 엘지.필립스 엘시디 주식회사 세정 장치
KR20040104062A (ko) * 2003-06-03 2004-12-10 삼성전자주식회사 웨이퍼 세정 장치
JP2005138053A (ja) * 2003-11-07 2005-06-02 Sumitomo Precision Prod Co Ltd 基板洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12091348B2 (en) 2017-07-12 2024-09-17 Corning Incorporated Apparatus and methods for manufacturing a glass substrate

Also Published As

Publication number Publication date
CN100496332C (zh) 2009-06-10
TW200800069A (en) 2008-01-01
JP2007335796A (ja) 2007-12-27
CN101091604A (zh) 2007-12-26
KR100889455B1 (ko) 2009-03-17
KR20070120423A (ko) 2007-12-24
TWI327897B (https=) 2010-08-01

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