TW200800069A - Washing roller - Google Patents

Washing roller Download PDF

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Publication number
TW200800069A
TW200800069A TW096110300A TW96110300A TW200800069A TW 200800069 A TW200800069 A TW 200800069A TW 096110300 A TW096110300 A TW 096110300A TW 96110300 A TW96110300 A TW 96110300A TW 200800069 A TW200800069 A TW 200800069A
Authority
TW
Taiwan
Prior art keywords
rinsing
roller
substrate
internal space
rinsing liquid
Prior art date
Application number
TW096110300A
Other languages
Chinese (zh)
Other versions
TWI327897B (en
Inventor
Futoshi Shimai
Shigeru Kawata
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006168613A priority Critical patent/JP4805033B2/en
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200800069A publication Critical patent/TW200800069A/en
Application granted granted Critical
Publication of TWI327897B publication Critical patent/TWI327897B/zh

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Abstract

To provide a washing roller which performs washing effectively by preventing a contaminated washing liquid from staying on a substrate. The washing roller has a roller main body 10, and brush bristles 15 are implanted on the outer peripheral surface to the roller main body. The roller main body has an internal space constituting a channel of the washing liquid, and the internal space is connected with a washing liquid supply pipe 14 through a coupling 12b. At the roller main body 10, two or more nozzles 16 communicated with the internal space and jetting the washing liquid are formed spirally along the axis of the roller main body.

Description

200800069 (1) Description of the Invention [Technical Field] The present invention relates to a rinsing roll used for rinsing a surface of various substrates such as a glass substrate or a semiconductor substrate. [Prior Art] The glass substrate or the semiconductor substrate for liquid crystal is subjected to a rinsing treatment using a rinsing liquid such as pure water after the Φ kinds of processes such as development processing are performed. In the rinsing operation, a rinsing brush having a plurality of bristles is used, and the rinsing liquid is sprayed while rinsing the rinsing liquid (see, for example, Patent Document 1). [Patent Document 1] JP-A-2001_204052 Disclosure of the Invention [Problems to be Solved by the Invention] φ The rinsing brush described in the above patent document has a fluid outlet that can discharge the rinsing liquid in a circumferential shape, so that the rinsing liquid discharged from the rinsing brush is retained on the surface of the substrate. The rinsing liquid contaminated by a substance such as a developer which should be washed causes a problem on the surface of the substrate. Further, since the rinsing liquid sprayed from the rinsing brush is supplied in a strip shape on the substrate, an unfavorable situation in which the rinsing unevenness occurs in the substrate forming the transport state occurs. SUMMARY OF THE INVENTION An object of the present invention is to provide a rinsing roll which can prevent the contaminated rinsing liquid from remaining on the substrate and further improve the rinsing effect. (2) (2) 200800069 [Means for Solving the Problem] The rinsing roll of the present invention is characterized in that it has a hollow cylindrical roller body having an internal space for rinsing liquid flow path formation; a bristles on a peripheral surface of the roller body; and a coupling member that rotatably connects the roller body to the rinsing liquid supply conduit, wherein an internal space of the roller body is connected to the rinsing liquid supply conduit y to the roller body, and the The plurality of injection holes in which the internal space communicates with the jettable rinsing liquid are formed in a spiral shape along the axis of the roller body. In the rinsing roll of the present invention, since the blasting hole for ejecting the rinsing liquid is formed in a spiral shape along the axis of the roller, the rinsing liquid ejected from the rinsing roll is ejected to the oblique side without being pushed back to the rear. Contaminated rinse on. As a result, the contaminated rinsing liquid remaining on the substrate can be quickly removed from the surface of the substrate, thereby eliminating the disadvantages caused by the residual rinsing liquid remaining on the substrate, and the substrate rinsing liquid is not sprayed into strips but instead The substrate is uniformly sprayed with the rinsing fluid, so that the disadvantages caused by uneven rinsing can also be eliminated. A preferred embodiment of the rinsing roll of the present invention is characterized in that the bristles are arranged in a spiral shape between the adjacent injection holes at the same pitch as the spiral pitch formed by the injection holes. Since both the bristles and the ejection holes are formed at the same spiral pitch, the action of pushing the contaminated rinsing liquid toward the side of the substrate has a further effect. -5- 200800069 (3) [Effect of the Invention] In the present invention, since the residual liquid remaining on the substrate is swept away and the ejection holes for ejecting the rinsing liquid are formed in a spiral shape, the disadvantages caused by the residual rinsing liquid remaining on the substrate can be eliminated. . In addition, since the rinsing liquid is uniformly sprayed on the entire surface of the substrate, it is possible to prevent uneven rinsing. [Embodiment] [Best Embodiment of the Invention] Fig. 1 is a view showing rinsing of various treated glass substrates. An example of a line drawing of the rinsing roll of the present invention used in the rinsing operation. The rinsing glass substrate 1 is conveyed by the conveyance roller 2 at a constant conveyance speed in the direction of the arrow. The pair of rinsing rolls 2 are arranged in two rows on the upper and lower sides with the glass substrate 1 being conveyed interposed therebetween. Each of the rinsing rolls 3a, 3b, 3c, and 3d is mounted so as to be vertically movable, and the amount of pressing of the bristles of the respective rinsing rolls to the glass substrate is controlled. Further, the rotation direction of each of the rinsing brush rolls is clockwise rotation, that is, it is set to be the opposite direction to the conveyance direction of the glass substrate. The rinsing rolls 3a, 3b, 3c, 3d are knuckled against the surface of the glass substrate 1, and the glass substrate is brushed by the sweeping force, and the surface of the glass substrate is rinsed from the rinsing roll toward the glass substrate. Therefore, the glass substrate 1 is washed by the rinsing force of the rinsing liquid sprayed while being brushed by the mechanical sweeping force of the bristles during transportation. 2 and 3 are views showing an example of the rinsing roll of the present invention, and 2 -6 - (4) (4) 200800069 are external views of the line drawing, and Fig. 3 is a view showing the surface including the roll axis. Its line graph profile when cutting. The rinsing roll of the present invention has a hollow roller body 10, and both ends of the roller body 10 are rotatably supported by bearings 11a and lib. One end side to which the bearing 11a is coupled is coupled to the motor 13 through the coupler 12a. Further, the other end side of the roller body is rotatably coupled to the rinsing liquid supply pipe 14 through another coupling 1 2b. Further, one end side of the roller body 1 封闭 is closed by the closing member 12. The rinsing liquid supply conduit 14 is connected to a rinsing liquid tank (not shown), thereby supplying rinsing liquid into the internal space of the roller body 1 。. On the outer peripheral surface of the roller body 10, for example, nylon bristles 15 are arranged in a spiral shape along the axial direction. The bristle row can be arranged in a row by arranging the bristles on the fixed iron members and then mounting the fixed iron members in a spiral shape on the outer peripheral surface of the shaft. A plurality of spiral injection holes 16 for rinsing liquid ejection are formed in the roller body 10. The spiral pitch of the orifices is set to be the same as the pitch of the rows of the bristles, and is not formed between the adjacent rows of bristles and overlaps with the bristles. When the glass substrate passes through the brush rolls 3a to 3d, the rinsing action of the rinsing roller is received from the vertical direction, and the residual liquid remaining on the surface of the glass substrate is removed by the mechanical cleaning action of the bristles and the rinsing action of the rinsing liquid sprayed from the rinsing roll. At the same time, since the rinsing roller is rotated in the opposite direction to the glass substrate conveying direction, the contaminated rinsing liquid remaining on the substrate is pushed out to the oblique side of the glass substrate to prevent the contaminated rinsing liquid from remaining on the substrate to cause an unfavorable condition. (5) 200800069 [Simplified description of the drawings] Fig. 1 is a diagram showing an example of the operation of the rinsing roller of the present invention for the rinsing operation. Fig. 2 is a plan view showing an example of a rinsing roll of the present invention. Fig. 3 is a line cross-sectional view showing the surface of the roll axis including the rinsing roll shown in Fig. 2, taken along the line.
[Description of main component symbols] 1 : Glass substrate 2 : conveying roller 3 a to 3 d : rinsing roller 1 〇: roller body 1 la, 1 lb : bearing 12a , 12b : coupling • 1 3 : motor 1 4 : conduit 1 5: bristles, 1 6 : injection holes -8-

Claims (1)

  1. 200800069 (1) X. Patent application scope 1. A rinsing roller characterized by having a hollow cylindrical roller body having an internal space for constituting a rinsing liquid flow path, and being disposed on a peripheral surface of the roller body a bristles; and a connecting structure for rotatably connecting the roller body to the rinsing liquid supply conduit, wherein an internal space of the roller body is communicated with the rinsing liquid supply conduit to form the roller body and communicate with the internal space to be sprayable The plurality of injection holes of the liquid are formed in a spiral shape along the axis of the roller body. 2. The rinsing roll according to claim 1, wherein the bristles are arranged in a spiral shape at the same pitch as the spiral pitch formed by the injection holes between the injection holes adjacent to each other in the axial direction of the roller.
    -9-
TW096110300A 2006-06-19 2007-03-26 TWI327897B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006168613A JP4805033B2 (en) 2006-06-19 2006-06-19 Cleaning roller

Publications (2)

Publication Number Publication Date
TW200800069A true TW200800069A (en) 2008-01-01
TWI327897B TWI327897B (en) 2010-08-01

Family

ID=38934946

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096110300A TWI327897B (en) 2006-06-19 2007-03-26

Country Status (4)

Country Link
JP (1) JP4805033B2 (en)
KR (1) KR100889455B1 (en)
CN (1) CN100496332C (en)
TW (1) TWI327897B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI594811B (en) * 2010-05-19 2017-08-11 湯瑪士衛斯特公司 Apparatuses and methods for scrubbing substrates
CN102755980A (en) * 2011-04-25 2012-10-31 中芯国际集成电路制造(上海)有限公司 Wafer cleaning brush and wafer cleaning device
KR101203652B1 (en) 2011-06-16 2012-11-23 주식회사 포스코 Apparatus for cleaning and drying brush roll
KR101318533B1 (en) * 2012-08-16 2013-10-16 주식회사 케이씨텍 Substrate cleaning apparatus
CN103894354B (en) * 2012-12-27 2017-02-08 北京汉能创昱科技有限公司 Substrate cleaner
KR101590863B1 (en) * 2014-03-03 2016-02-18 주식회사 한길이에스티 Cleaner for printed circuit board
CN104043604A (en) * 2014-06-26 2014-09-17 深圳市华星光电技术有限公司 Cleaning brush structure
CN104117517A (en) * 2014-06-26 2014-10-29 苏州一合光学有限公司 Rolling brush roller structure of glass air knife cleaning machine
CN107051930A (en) * 2016-12-26 2017-08-18 重庆荣易达铝业有限公司 The curved hole cleaning device of cylinder cap
CN106733795A (en) * 2016-12-26 2017-05-31 重庆荣易达铝业有限公司 The method for removing cylinder cap duct metal fillings
CN108638944A (en) * 2018-03-26 2018-10-12 合肥市富园汽车改装有限公司 A kind of outdoor publicity vehicle display screen deashing device
CN109037116B (en) * 2018-08-31 2021-05-28 上海华力微电子有限公司 Wafer cleaning device
CN110664106A (en) * 2019-09-12 2020-01-10 安徽名扬刷业有限公司 Brush roller brush for cleaning machine
CN111014123B (en) * 2019-11-22 2021-07-13 沈阳丰晟电力设备有限公司 Corrugated sheet cleaning device for corrugated oil tank
CN112007882A (en) * 2020-08-26 2020-12-01 安徽普冈电子材料有限公司 High-efficient belt cleaning device of etched foil

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774132A (en) * 1993-09-06 1995-03-17 Fujitsu Ltd Brush scrubber and method of brush-scrubbing
JP2000015190A (en) * 1998-07-03 2000-01-18 Matsushita Electric Ind Co Ltd Method and device for substrate washing
JP2000202379A (en) * 1999-01-14 2000-07-25 Nikon Corp Screw hole washing apparatus and washing of part
KR100685919B1 (en) * 2000-12-29 2007-02-22 엘지.필립스 엘시디 주식회사 Cleaning Device
KR20040104062A (en) * 2003-06-03 2004-12-10 삼성전자주식회사 Apparatus For Cleaning a Waffer
JP2005138053A (en) * 2003-11-07 2005-06-02 Sumitomo Precision Prod Co Ltd Substrate washing apparatus

Also Published As

Publication number Publication date
KR20070120423A (en) 2007-12-24
CN101091604A (en) 2007-12-26
CN100496332C (en) 2009-06-10
JP2007335796A (en) 2007-12-27
JP4805033B2 (en) 2011-11-02
TWI327897B (en) 2010-08-01
KR100889455B1 (en) 2009-03-17

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