JP4786604B2 - 誘電体磁器及びそれを用いた積層セラミックコンデンサ - Google Patents
誘電体磁器及びそれを用いた積層セラミックコンデンサ Download PDFInfo
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Description
このような要求を満たす誘電体磁器組成物の発明が公知であり(特許文献1及び2参照)、これらの発明には、誘電体磁器組成物を積層セラミックコンデンサに用いることが示されている。
(1)内部電極としてCuを用いた積層セラミックコンデンサの誘電体磁器層に用いられる誘電体磁器であって、
CaxZrO3+aMn+bLi+cB+dSiで表され、
CaxZrO3(但し、1.00≦x≦1.10)100molに対して、
0.5≦a≦4.0mol、
6.0≦(b+c+d)≦15.0molを含有し、
0.15≦(b/(c+d))≦0.55、
0.20≦(d/c)≦3.30
であることを特徴とする誘電体磁器である。
(2)複数の誘電体磁器層と、前記誘電体磁器層間に形成されたCu若しくはCu合金からなる内部電極と、前記内部電極に電気的に接続された外部電極とを備えた積層セラミックコンデンサにおいて、前記誘電体磁器層が、前記(1)の誘電体磁器で構成されていることを特徴とする積層セラミックコンデンサである。
また、Cu内部電極を用いるために、寿命を低下させないようにLi及びBの含有量を抑えた状態でも、CaZrO3系誘電体磁器が1000℃以下で緻密化するCa/Zr比やLi−B−Si組成比の条件を見出した。
原料としてCaCO3、ZrO 2 を準備し、これらの原料を、所定の組成が得られるように秤量する。その後、これらの原料を湿式混合し、乾燥した後、800〜1200℃にて仮焼し、CaxZrO3を得る。
上記のように合成したCaxZrO3に対して、Mn原料(酸化物、炭酸塩等)、Li原料(Li2CO3等)、B原料(B2O3等)、Si原料(SiO2等)を所定組成が得られるように秤量する。その後、これらの原料を湿式混合し、乾燥することで、誘電体粉末を得る。
上記のようにして得た誘電体粉末にPVBバインダ(又はアクリルバインダ)、可塑剤、溶媒となる有機溶剤を適宜添加してスラリーを作製し、所定の厚み(5〜50μm)のグリーンシートを作製する。グリーンシートに内部電極用Cuペーストを印刷し、積層・圧着後、所定の形状に切り出す。その後、(Cuが酸化されない)不活性雰囲気下、300〜600℃で脱バインダ処理を行い、還元雰囲気下、900〜1050℃で1〜5時間、焼成を行う。得られた焼結体に端子電極としてCu外電ペーストを塗布した後、N2雰囲気で焼き付ける。
原料としてCaCO3、ZrO2を準備する。これらの原料を秤量し、表1のようにCa/Zr比を0.98〜1.12の範囲で変化させた。その後、これらの原料をボールミルにて湿式混合し、乾燥した後、1000℃にて仮焼し、CaxZrO3(0.98≦x≦1.12)を得た。
上記のCaxZrO3(以下、「CaZrO3」と省略)に対して、MnCO3、Li2CO3、B2O3、SiO2を秤量し、表1のように、CaZrO3100molに対して、Mn含有量を、0〜5.0molの範囲で変化させ、Li/(B+Si)比を0.37、Si/B比を0.61で一定とし、Li+B+Siのトータル含有量を3.0〜18.0molの範囲で変化させた。その後、これらの原料をボールミルにて湿式混合し、乾燥することで、誘電体粉末を得た。
上記の誘電体粉末にPVBバインダ、可塑剤、溶媒となる有機溶剤を適宜添加してスラリーを作製し、ダイ・コーターにて12μm厚みのグリーンシートを作製した。グリーンシートにスクリーン印刷法にて内部電極用Cuペーストを印刷し、電極枚数11層(層間 10層)に積層・圧着後、4.0mm×2.0mmに切り出した。その後、不活性雰囲気下、300〜600℃で脱バインダ処理を行い、還元雰囲気下(窒素−水素混合ガス:水素比率1〜3%)、980℃、2hrで焼成を行った。その後、端子電極としてCuペーストを塗布し、N2雰囲気で焼き付けた。
以上のような工程で、積層セラミックコンデンサ(試料番号101〜114)を作製した。
焼結性:980℃で焼成した時の吸水率が0.1%以下を◎、その他を×とした。
信頼性:HALT試験(条件:30V/um,150℃)においてMTTFが100hr以上のものを◎、それ未満を×とした。
試料番号101〜114について、誘電体の組成とコンデンサの特性の評価を表1に示す。
Ca/Zr比が1.00のCaZrO3100molに対して、Mn含有量を0.5又は4.0molとし、Li+B+Siのトータル含有量を6.0又は15.0molとし、Li/(B+Si)比、Si/B比を表2のように変化させて混合したこと以外は、実施例1と同様にして誘電体粉末を得た。その後、実施例1と同様に、積層セラミックコンデンサ(試料番号201〜217)を作製し、特性について評価をした。
試料番号201〜217について、誘電体の組成とコンデンサの特性の評価を表2に示す。
Claims (2)
- 内部電極としてCuを用いた積層セラミックコンデンサの誘電体磁器層に用いられる誘電体磁器であって、
CaxZrO3+aMn+bLi+cB+dSiで表され、
CaxZrO3(但し、1.00≦x≦1.10)100molに対して、
0.5≦a≦4.0mol、
6.0≦(b+c+d)≦15.0molを含有し、
0.15≦(b/(c+d))≦0.55、
0.20≦(d/c)≦3.30
であることを特徴とする誘電体磁器。 - 複数の誘電体磁器層と、前記誘電体磁器層間に形成されたCu若しくはCu合金からなる内部電極と、前記内部電極に電気的に接続された外部電極とを備えた積層セラミックコンデンサにおいて、前記誘電体磁器層が、請求項1に記載の誘電体磁器で構成されていることを特徴とする積層セラミックコンデンサ。
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JP2007171337A JP4786604B2 (ja) | 2007-06-29 | 2007-06-29 | 誘電体磁器及びそれを用いた積層セラミックコンデンサ |
US12/163,913 US7830645B2 (en) | 2007-06-29 | 2008-06-27 | Dielectric ceramics and multi-layer ceramic capacitor using same |
CN2008101319216A CN101333108B (zh) | 2007-06-29 | 2008-06-27 | 电介质陶瓷及使用其的层合陶瓷电容器 |
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JP4786604B2 true JP4786604B2 (ja) | 2011-10-05 |
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WO2012043427A1 (ja) * | 2010-10-01 | 2012-04-05 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
WO2012061633A2 (en) | 2010-11-03 | 2012-05-10 | Netlist, Inc. | Method and apparatus for optimizing driver load in a memory package |
JP5751259B2 (ja) | 2011-01-21 | 2015-07-22 | 株式会社村田製作所 | 積層セラミックコンデンサおよび積層セラミックコンデンサの製造方法 |
CN103460316B (zh) * | 2011-09-29 | 2016-08-17 | 株式会社村田制作所 | 层叠陶瓷电容器、以及层叠陶瓷电容器的制造方法 |
JP5478672B2 (ja) * | 2012-06-27 | 2014-04-23 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
KR101452077B1 (ko) * | 2012-12-28 | 2014-10-16 | 삼성전기주식회사 | 유전체 조성물 및 이를 포함하는 적층 세라믹 커패시터 |
KR102183423B1 (ko) * | 2014-12-08 | 2020-11-26 | 삼성전기주식회사 | 유전체 자기 조성물 및 이를 포함하는 적층 세라믹 커패시터 |
JP6570478B2 (ja) * | 2016-05-31 | 2019-09-04 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP6801517B2 (ja) * | 2017-03-02 | 2020-12-16 | Tdk株式会社 | 誘電体組成物および電子部品 |
US10593475B2 (en) | 2017-09-22 | 2020-03-17 | Taiyo Yuden Co., Ltd. | Multi-layer ceramic capacitor |
JP7347926B2 (ja) | 2018-03-02 | 2023-09-20 | 太陽誘電株式会社 | 積層セラミックコンデンサの製造方法及び積層セラミックコンデンサ |
CN110357618B (zh) * | 2019-06-20 | 2021-08-24 | 安徽理工大学 | 低温烧结温度稳定型锆酸盐微波介质陶瓷材料及其制备方法 |
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