JP4776154B2 - 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法 - Google Patents

圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法 Download PDF

Info

Publication number
JP4776154B2
JP4776154B2 JP2003311305A JP2003311305A JP4776154B2 JP 4776154 B2 JP4776154 B2 JP 4776154B2 JP 2003311305 A JP2003311305 A JP 2003311305A JP 2003311305 A JP2003311305 A JP 2003311305A JP 4776154 B2 JP4776154 B2 JP 4776154B2
Authority
JP
Japan
Prior art keywords
lower electrode
diaphragm
piezoelectric element
piezoelectric film
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003311305A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005079507A (ja
JP2005079507A5 (enExample
Inventor
純 久保田
本和 小林
信二 襟立
久男 鈴木
文生 内田
千恵美 清水
憲二 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Fuji Chemical Co Ltd
Original Assignee
Canon Inc
Fuji Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Fuji Chemical Co Ltd filed Critical Canon Inc
Priority to JP2003311305A priority Critical patent/JP4776154B2/ja
Priority to US10/928,277 priority patent/US7399066B2/en
Priority to CNB2004100686169A priority patent/CN100376395C/zh
Publication of JP2005079507A publication Critical patent/JP2005079507A/ja
Publication of JP2005079507A5 publication Critical patent/JP2005079507A5/ja
Application granted granted Critical
Publication of JP4776154B2 publication Critical patent/JP4776154B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14298—Structure of print heads with piezoelectric elements of disc type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1617—Production of print heads with piezoelectric elements of disc type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2003311305A 2003-09-03 2003-09-03 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法 Expired - Fee Related JP4776154B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003311305A JP4776154B2 (ja) 2003-09-03 2003-09-03 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法
US10/928,277 US7399066B2 (en) 2003-09-03 2004-08-30 Piezoelectric element, ink jet recording head and producing method for piezoelectric element
CNB2004100686169A CN100376395C (zh) 2003-09-03 2004-09-03 压电体元件、喷墨记录头和压电体元件的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003311305A JP4776154B2 (ja) 2003-09-03 2003-09-03 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法

Publications (3)

Publication Number Publication Date
JP2005079507A JP2005079507A (ja) 2005-03-24
JP2005079507A5 JP2005079507A5 (enExample) 2006-09-14
JP4776154B2 true JP4776154B2 (ja) 2011-09-21

Family

ID=34412908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003311305A Expired - Fee Related JP4776154B2 (ja) 2003-09-03 2003-09-03 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法

Country Status (3)

Country Link
US (1) US7399066B2 (enExample)
JP (1) JP4776154B2 (enExample)
CN (1) CN100376395C (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005083809A1 (en) 2004-02-27 2005-09-09 Canon Kabushiki Kaisha Piezoelectric thin film, method of manufacturing piezoelectric thin film, piezoelectric element, and ink jet recording head
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP4793568B2 (ja) * 2005-07-08 2011-10-12 セイコーエプソン株式会社 アクチュエータ装置、液体噴射ヘッド及び液体噴射装置
US8669694B2 (en) * 2005-11-29 2014-03-11 Kyocera Corporation Multi-layer electronic component and method for manufacturing the same
US8623737B2 (en) * 2006-03-31 2014-01-07 Intel Corporation Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same
US7456548B2 (en) * 2006-05-09 2008-11-25 Canon Kabushiki Kaisha Piezoelectric element, piezoelectric actuator, and ink jet recording head
JP5300184B2 (ja) * 2006-07-18 2013-09-25 キヤノン株式会社 圧電体、圧電体素子、圧電体素子を用いた液体吐出ヘッド及び液体吐出装置
JP2010167570A (ja) * 2009-01-20 2010-08-05 Seiko Epson Corp 液体噴射ヘッドの製造方法、アクチュエーター装置の製造方法、液体噴射ヘッド及び液体噴射装置
JP5463816B2 (ja) * 2009-09-16 2014-04-09 セイコーエプソン株式会社 液滴噴射ヘッド、液滴噴射装置及び圧電アクチュエーター
US8499453B2 (en) * 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
JP5734040B2 (ja) * 2011-03-22 2015-06-10 京セラ株式会社 インクジェットヘッド及び記録装置
JP2012054560A (ja) * 2011-09-02 2012-03-15 Seiko Epson Corp 圧電素子の製造方法、インクジェット式記録ヘッドの製造方法およびインクジェットプリンタの製造方法
US10618285B2 (en) 2016-06-17 2020-04-14 Canon Kabushiki Kaisha Piezoelectric substrate and method of manufacturing the piezoelectric substrate, and liquid ejection head

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0992897A (ja) 1995-09-28 1997-04-04 Seiko Epson Corp 圧電体薄膜素子及びその製造方法、及び圧電体薄膜素子を用いたインクジェット記録ヘッド
JPH09109392A (ja) 1995-10-13 1997-04-28 Canon Inc インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
JPH10139594A (ja) 1996-10-30 1998-05-26 Seiko Epson Corp 圧電体薄膜およびその製造法ならびにそれを用いたインクジェット記録ヘッド
JPH10290035A (ja) 1997-04-16 1998-10-27 Seiko Epson Corp 圧電体素子及びその製造方法
JP3379479B2 (ja) * 1998-07-01 2003-02-24 セイコーエプソン株式会社 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、
US6688729B1 (en) 1999-06-04 2004-02-10 Canon Kabushiki Kaisha Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same
US6402302B1 (en) 1999-06-04 2002-06-11 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method thereof, and microelectromechanical device
JP2001196547A (ja) * 2000-01-12 2001-07-19 Fujitsu Ltd 半導体装置
JP2002047011A (ja) * 2000-08-02 2002-02-12 Mitsubishi Materials Corp 緻密質ペロブスカイト型金属酸化物薄膜の形成方法及び緻密質ペロブスカイト型金属酸化物薄膜
JP2002151656A (ja) * 2000-11-14 2002-05-24 Toshiba Corp 半導体装置及びその製造方法
JP2003136715A (ja) * 2001-11-05 2003-05-14 Hitachi Metals Ltd 液体吐出ヘッドおよびその製造方法
JP3817729B2 (ja) * 2001-11-08 2006-09-06 セイコーエプソン株式会社 圧電アクチュエータ及び液体吐出ヘッド
JP3817730B2 (ja) * 2001-12-10 2006-09-06 セイコーエプソン株式会社 圧電アクチュエータの製造方法、インクジェット式記録ヘッド、及びプリンタ
JP2003282987A (ja) * 2002-03-25 2003-10-03 Seiko Epson Corp 電子デバイスおよびインクジェットプリンタ
JP3974096B2 (ja) 2002-09-20 2007-09-12 キヤノン株式会社 圧電体素子及びインクジェット記録ヘッド

Also Published As

Publication number Publication date
CN1590102A (zh) 2005-03-09
JP2005079507A (ja) 2005-03-24
US20050082943A1 (en) 2005-04-21
US7399066B2 (en) 2008-07-15
CN100376395C (zh) 2008-03-26

Similar Documents

Publication Publication Date Title
JP5407094B2 (ja) 圧電体薄膜、これを用いた圧電体素子、圧電アクチュエータ、インクジェット記録ヘッド
JP3971279B2 (ja) 圧電体素子の製造方法
JP4189504B2 (ja) 圧電体薄膜の製造方法
JP4776154B2 (ja) 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法
JP3974096B2 (ja) 圧電体素子及びインクジェット記録ヘッド
JP2004107179A (ja) 圧電体前駆体ゾル、圧電体膜の製造方法、圧電体素子およびインクジェット記録ヘッド
JP5943178B2 (ja) 圧電素子の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法、超音波デバイスの製造方法及びセンサーの製造方法
JP3847689B2 (ja) バリウム含有ルテニウム酸ストロンチウム電極を用いた圧電体素子、薄膜キャパシタおよびこれらの製造方法並びに該圧電体素子を用いたインクジェット式記録ヘッド
JP3955001B2 (ja) 圧電体膜形成用組成物、圧電体膜の製造方法
JP2004111835A (ja) 圧電体素子の製造方法、圧電体素子及びインクジェット式記録ヘッド
JP2011243722A (ja) 圧電素子、液滴噴射ヘッドおよび液滴噴射装置
JP6690253B2 (ja) Ｐｚｔ前駆体溶液及びその製造方法、ｐｚｔ膜の製造方法、電気機械変換素子の製造方法、液体吐出ヘッドの製造方法
JP5354876B2 (ja) 圧電体の製造方法、圧電体素子及び液体吐出ヘッド
JP2013001680A (ja) ニッケル酸ランタン膜形成用組成物の製造方法、ニッケル酸ランタン膜の製造方法、及び圧電素子の製造方法
JP2004235553A (ja) 圧電体膜成膜用支持基板、圧電体素子、インクジェット記録ヘッド
JP5790131B2 (ja) 圧電体膜の前駆体溶液および圧電素子の製造方法
JP2012243837A (ja) セラミックス膜の製造方法、圧電素子の製造方法、液体噴射ヘッドの製造方法、及び液体噴射装置の製造方法
JP2006282456A (ja) Ｐｚｔ薄膜形成用組成物及びｐｚｔ薄膜の製造方法
JP2007134566A (ja) 圧電材料、圧電素子、圧電アクチュエータ、液体噴射ヘッド、表面弾性波素子およびデバイス
JP5998537B2 (ja) 電気−機械変換素子、液滴吐出ヘッド及び液滴吐出装置
JP2007305779A (ja) 圧電体素子の製造方法、圧電体素子およびインクジェット式記録ヘッド
JP2006278986A (ja) 誘電体薄膜の形成方法及びそれを用いて製造された誘電体膜を備えた圧電体装置
JP2007134565A (ja) 圧電材料、圧電素子、圧電アクチュエータ、液体噴射ヘッド、表面弾性波素子およびデバイス

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060731

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060731

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100318

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100324

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100524

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110615

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110628

R150 Certificate of patent or registration of utility model

Ref document number: 4776154

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140708

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees