JP4769376B2 - 磁気記録媒体を製造する方法 - Google Patents

磁気記録媒体を製造する方法 Download PDF

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Publication number
JP4769376B2
JP4769376B2 JP2001192251A JP2001192251A JP4769376B2 JP 4769376 B2 JP4769376 B2 JP 4769376B2 JP 2001192251 A JP2001192251 A JP 2001192251A JP 2001192251 A JP2001192251 A JP 2001192251A JP 4769376 B2 JP4769376 B2 JP 4769376B2
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Japan
Prior art keywords
carbon
layer
carbon layer
sputtering
coating
Prior art date
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Expired - Fee Related
Application number
JP2001192251A
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English (en)
Japanese (ja)
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JP2002063717A5 (https=
JP2002063717A (ja
Inventor
ラーソン ブルース
ジャッキー ツォイ チン
リュー ウェン
重人 橋本
ウー ホック ヨン エリック
トム ヤマシタ ツトム
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WD Media LLC
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Komag Inc
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Publication date
Application filed by Komag Inc filed Critical Komag Inc
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Publication of JP2002063717A5 publication Critical patent/JP2002063717A5/ja
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Publication of JP4769376B2 publication Critical patent/JP4769376B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2001192251A 2000-06-27 2001-06-26 磁気記録媒体を製造する方法 Expired - Fee Related JP4769376B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/604,490 US6565719B1 (en) 2000-06-27 2000-06-27 Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content
US09/604490 2000-06-27

Publications (3)

Publication Number Publication Date
JP2002063717A JP2002063717A (ja) 2002-02-28
JP2002063717A5 JP2002063717A5 (https=) 2008-10-23
JP4769376B2 true JP4769376B2 (ja) 2011-09-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001192251A Expired - Fee Related JP4769376B2 (ja) 2000-06-27 2001-06-26 磁気記録媒体を製造する方法

Country Status (3)

Country Link
US (3) US6565719B1 (https=)
JP (1) JP4769376B2 (https=)
DE (1) DE10130942A1 (https=)

Families Citing this family (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6312798B1 (en) * 1998-09-25 2001-11-06 Seagate Technology Llc Magnetic recording medium having a nitrogen-doped hydrogenated carbon protective overcoat
US6902773B1 (en) * 2000-11-21 2005-06-07 Hitachi Global Storage Technologies Netherlands, B.V. Energy gradient ion beam deposition of carbon overcoats on rigid disk media for magnetic recordings
US6875492B1 (en) * 2001-11-15 2005-04-05 Maxtor Corporation Carbon overcoat for magnetic recording medium
US20040161578A1 (en) * 2003-02-19 2004-08-19 Seagate Technology Llc Dual-layer protective overcoat system for disk recording media
US7175926B2 (en) * 2004-02-12 2007-02-13 Seagate Technology Llc Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition
JP2005350652A (ja) * 2004-05-12 2005-12-22 Matsushita Electric Ind Co Ltd 潤滑剤、ならびに磁気記録媒体および磁気記録媒体の製造方法
US20090263592A1 (en) * 2004-08-05 2009-10-22 Seagate Technology Llc Plasma-enhanced chemical vapor deposition of advanced lubricant for thin film storage medium
DE102004041234A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
JP4131720B2 (ja) 2004-08-31 2008-08-13 富士通株式会社 磁気記録媒体、ヘッドスライダおよびそれらの製造方法
US7695820B2 (en) * 2005-07-26 2010-04-13 The Board Of Trustees Of The University Of Illinois Aliphatic polyesters and lubricants containing the polyesters
JP2007056721A (ja) * 2005-08-23 2007-03-08 Sanden Corp 斜板式圧縮機
JP2007070667A (ja) † 2005-09-05 2007-03-22 Kobe Steel Ltd ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
DE102007054181A1 (de) 2007-11-14 2009-05-20 Schaeffler Kg Korrosionsfeste Beschichtung sowie Herstellverfahren hierfür
JP5117895B2 (ja) 2008-03-17 2013-01-16 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気記録媒体及びその製造方法
JP2009238299A (ja) * 2008-03-26 2009-10-15 Hoya Corp 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
JP5453666B2 (ja) 2008-03-30 2014-03-26 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスク及びその製造方法
JP2011034603A (ja) * 2008-03-31 2011-02-17 Hoya Corp 垂直磁気記録媒体
JP2009256749A (ja) * 2008-04-18 2009-11-05 Osaka Univ 炭素膜の製造法
KR101004917B1 (ko) * 2008-06-24 2010-12-28 이주희 탁자용 접철식 프레임
WO2010038773A1 (ja) 2008-09-30 2010-04-08 Hoya株式会社 磁気ディスク及びその製造方法
US8877359B2 (en) 2008-12-05 2014-11-04 Wd Media (Singapore) Pte. Ltd. Magnetic disk and method for manufacturing same
WO2010116908A1 (ja) 2009-03-28 2010-10-14 Hoya株式会社 磁気ディスク用潤滑剤化合物及び磁気ディスク
US8431258B2 (en) 2009-03-30 2013-04-30 Wd Media (Singapore) Pte. Ltd. Perpendicular magnetic recording medium and method of manufacturing the same
US20100300884A1 (en) 2009-05-26 2010-12-02 Wd Media, Inc. Electro-deposited passivation coatings for patterned media
US20110032640A1 (en) * 2009-08-10 2011-02-10 Hitachi Global Storage Technologies Netherlands B.V. Multi-layer, thin film overcoat for magnetic media disk
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
JP5643516B2 (ja) * 2010-01-08 2014-12-17 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体
JP5574414B2 (ja) 2010-03-29 2014-08-20 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスクの評価方法及び磁気ディスクの製造方法
JP5634749B2 (ja) 2010-05-21 2014-12-03 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP5645476B2 (ja) 2010-05-21 2014-12-24 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP2011248968A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248969A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248967A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスクの製造方法
JP2012009086A (ja) 2010-06-22 2012-01-12 Wd Media (Singapore) Pte. Ltd 垂直磁気記録媒体及びその製造方法
US8889275B1 (en) 2010-08-20 2014-11-18 WD Media, LLC Single layer small grain size FePT:C film for heat assisted magnetic recording media
US8743666B1 (en) 2011-03-08 2014-06-03 Western Digital Technologies, Inc. Energy assisted magnetic recording medium capable of suppressing high DC readback noise
US8711499B1 (en) 2011-03-10 2014-04-29 WD Media, LLC Methods for measuring media performance associated with adjacent track interference
US8491800B1 (en) 2011-03-25 2013-07-23 WD Media, LLC Manufacturing of hard masks for patterning magnetic media
US9028985B2 (en) 2011-03-31 2015-05-12 WD Media, LLC Recording media with multiple exchange coupled magnetic layers
US8565050B1 (en) 2011-12-20 2013-10-22 WD Media, LLC Heat assisted magnetic recording media having moment keeper layer
US9029308B1 (en) 2012-03-28 2015-05-12 WD Media, LLC Low foam media cleaning detergent
US9269480B1 (en) 2012-03-30 2016-02-23 WD Media, LLC Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording
US8941950B2 (en) 2012-05-23 2015-01-27 WD Media, LLC Underlayers for heat assisted magnetic recording (HAMR) media
JP6290525B2 (ja) * 2012-06-07 2018-03-07 トーヨーエイテック株式会社 摺動部材及びその製造方法
JP6046379B2 (ja) * 2012-06-07 2016-12-14 トーヨーエイテック株式会社 ボールペンチップ、ボールペン及びその製造方法
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
US8559136B1 (en) * 2012-11-14 2013-10-15 HGST Netherlands B.V. Hard amorphous carbon film containing ultratrace hydrogen for magnetic recording media and magnetic heads
US9034492B1 (en) 2013-01-11 2015-05-19 WD Media, LLC Systems and methods for controlling damping of magnetic media for heat assisted magnetic recording
US10115428B1 (en) 2013-02-15 2018-10-30 Wd Media, Inc. HAMR media structure having an anisotropic thermal barrier layer
US9153268B1 (en) 2013-02-19 2015-10-06 WD Media, LLC Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure
US9183867B1 (en) 2013-02-21 2015-11-10 WD Media, LLC Systems and methods for forming implanted capping layers in magnetic media for magnetic recording
US9196283B1 (en) 2013-03-13 2015-11-24 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a chemical buffer
US8787130B1 (en) 2013-03-15 2014-07-22 WD Media, LLC Systems and methods for providing heat assisted magnetic recording media configured to couple energy from a near field transducer
US9190094B2 (en) 2013-04-04 2015-11-17 Western Digital (Fremont) Perpendicular recording media with grain isolation initiation layer and exchange breaking layer for signal-to-noise ratio enhancement
US9093122B1 (en) 2013-04-05 2015-07-28 WD Media, LLC Systems and methods for improving accuracy of test measurements involving aggressor tracks written to disks of hard disk drives
US8716150B1 (en) * 2013-04-11 2014-05-06 Globalfoundries Inc. Method of forming a low-K dielectric film
US8947987B1 (en) 2013-05-03 2015-02-03 WD Media, LLC Systems and methods for providing capping layers for heat assisted magnetic recording media
US8867322B1 (en) 2013-05-07 2014-10-21 WD Media, LLC Systems and methods for providing thermal barrier bilayers for heat assisted magnetic recording media
US9296082B1 (en) 2013-06-11 2016-03-29 WD Media, LLC Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer
US9406330B1 (en) 2013-06-19 2016-08-02 WD Media, LLC Method for HDD disk defect source detection
US9607646B2 (en) 2013-07-30 2017-03-28 WD Media, LLC Hard disk double lubrication layer
US9389135B2 (en) 2013-09-26 2016-07-12 WD Media, LLC Systems and methods for calibrating a load cell of a disk burnishing machine
US9177585B1 (en) 2013-10-23 2015-11-03 WD Media, LLC Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
US9382496B1 (en) 2013-12-19 2016-07-05 Western Digital Technologies, Inc. Lubricants with high thermal stability for heat-assisted magnetic recording
US9824711B1 (en) 2014-02-14 2017-11-21 WD Media, LLC Soft underlayer for heat assisted magnetic recording media
US9447368B1 (en) 2014-02-18 2016-09-20 WD Media, LLC Detergent composition with low foam and high nickel solubility
US9431045B1 (en) 2014-04-25 2016-08-30 WD Media, LLC Magnetic seed layer used with an unbalanced soft underlayer
US9042053B1 (en) 2014-06-24 2015-05-26 WD Media, LLC Thermally stabilized perpendicular magnetic recording medium
US9159350B1 (en) 2014-07-02 2015-10-13 WD Media, LLC High damping cap layer for magnetic recording media
US10054363B2 (en) 2014-08-15 2018-08-21 WD Media, LLC Method and apparatus for cryogenic dynamic cooling
US9082447B1 (en) 2014-09-22 2015-07-14 WD Media, LLC Determining storage media substrate material type
US8995078B1 (en) 2014-09-25 2015-03-31 WD Media, LLC Method of testing a head for contamination
US9685184B1 (en) 2014-09-25 2017-06-20 WD Media, LLC NiFeX-based seed layer for magnetic recording media
US9227324B1 (en) 2014-09-25 2016-01-05 WD Media, LLC Mandrel for substrate transport system with notch
US9449633B1 (en) 2014-11-06 2016-09-20 WD Media, LLC Smooth structures for heat-assisted magnetic recording media
US9818442B2 (en) 2014-12-01 2017-11-14 WD Media, LLC Magnetic media having improved magnetic grain size distribution and intergranular segregation
US9401300B1 (en) 2014-12-18 2016-07-26 WD Media, LLC Media substrate gripper including a plurality of snap-fit fingers
US9218850B1 (en) 2014-12-23 2015-12-22 WD Media, LLC Exchange break layer for heat-assisted magnetic recording media
US9257134B1 (en) 2014-12-24 2016-02-09 Western Digital Technologies, Inc. Allowing fast data zone switches on data storage devices
US9990940B1 (en) 2014-12-30 2018-06-05 WD Media, LLC Seed structure for perpendicular magnetic recording media
US9280998B1 (en) 2015-03-30 2016-03-08 WD Media, LLC Acidic post-sputter wash for magnetic recording media
US9822441B2 (en) 2015-03-31 2017-11-21 WD Media, LLC Iridium underlayer for heat assisted magnetic recording media
US9275669B1 (en) 2015-03-31 2016-03-01 WD Media, LLC TbFeCo in PMR media for SNR improvement
US20170069345A1 (en) * 2015-09-09 2017-03-09 Seagate Technology Llc Methods of forming overcoats on magnetic storage media and magnetic storage media formed thereby
US11074934B1 (en) 2015-09-25 2021-07-27 Western Digital Technologies, Inc. Heat assisted magnetic recording (HAMR) media with Curie temperature reduction layer
US10236026B1 (en) 2015-11-06 2019-03-19 WD Media, LLC Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media
US9406329B1 (en) 2015-11-30 2016-08-02 WD Media, LLC HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers
US10121506B1 (en) 2015-12-29 2018-11-06 WD Media, LLC Magnetic-recording medium including a carbon overcoat implanted with nitrogen and hydrogen
US11348613B2 (en) 2019-01-04 2022-05-31 Seagate Technology Llc Adding a cap-layer to improve magnetic recording media
US20220178026A1 (en) * 2020-12-03 2022-06-09 Applied Materials, Inc. Carbon cvd deposition methods to mitigate stress induced defects
US12260889B1 (en) * 2023-11-03 2025-03-25 Western Digital Technologies, Inc. Magnetic recording media with sacrificial layer and corresponding etching processes to minimize head to media spacing
US12400680B1 (en) 2024-05-01 2025-08-26 Western Digital Technologies, Inc. Head and media overcoats for heat assisted magnetic recording

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE32464E (en) 1971-05-03 1987-07-28 Thin film recording and method of making
JPS62183022A (ja) 1986-02-06 1987-08-11 Ulvac Corp 耐摩耗性磁気記録体
JP2600297B2 (ja) 1988-06-23 1997-04-16 松下電器産業株式会社 磁気記録媒体
JPH03130919A (ja) * 1989-07-07 1991-06-04 Matsushita Electric Ind Co Ltd 磁気記録媒体
US5268216A (en) * 1990-12-21 1993-12-07 Ovonic Synthetic Materials Company, Inc. Multilayer solid lubricant composite structures and method of making same
US5232570A (en) 1991-06-28 1993-08-03 Digital Equipment Corporation Nitrogen-containing materials for wear protection and friction reduction
JPH05143972A (ja) 1991-11-19 1993-06-11 Kubota Corp 金属薄膜型磁気記録媒体およびその製造法
JPH05225556A (ja) 1991-12-16 1993-09-03 Internatl Business Mach Corp <Ibm> 保護膜を改良した磁気記録ディスク
JPH06145975A (ja) * 1992-03-20 1994-05-27 Komag Inc 炭素フィルムをスパタリングする方法及びその製造物
EP0580164B1 (en) 1992-07-24 1999-01-07 Matsushita Electric Industrial Co., Ltd. Magnetic recording medium and its manufacturing method
US5637373A (en) * 1992-11-19 1997-06-10 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US5476691A (en) 1994-01-21 1995-12-19 International Business Machines, Inc. Surface treatment of magnetic recording heads
JPH07210865A (ja) * 1994-01-21 1995-08-11 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
WO1996001303A1 (en) 1994-07-01 1996-01-18 Hmt Technology Corporation Lubricant composition and method
JP3934697B2 (ja) 1994-12-06 2007-06-20 昭和電工株式会社 磁気記録媒体
JPH0944844A (ja) 1995-07-27 1997-02-14 Hitachi Ltd 磁気記録媒体の製造方法
US5714044A (en) 1995-08-07 1998-02-03 Hmt Technology Corporation Method for forming a thin carbon overcoat in a magnetic recording medium
JP3058066B2 (ja) 1995-11-06 2000-07-04 富士電機株式会社 磁気記録媒体及びその製造方法
JPH09212814A (ja) 1996-01-31 1997-08-15 Nec Corp 保護被膜と保護被膜を有する磁気ヘッドスライダおよび磁気ディスク装置
US5855746A (en) 1996-02-28 1999-01-05 Western Digital Corporation Buffered nitrogenated carbon overcoat for data recording disks and method for manufacturing the same
JPH09288818A (ja) 1996-04-22 1997-11-04 Hitachi Metals Ltd 磁気記録媒体
US5858477A (en) * 1996-12-10 1999-01-12 Akashic Memories Corporation Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon
WO1997045834A1 (en) * 1996-05-31 1997-12-04 Akashic Memories Corporation Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
JPH101305A (ja) * 1996-06-11 1998-01-06 Denki Kagaku Kogyo Kk 炭素膜および炭素膜製造方法
JPH1050235A (ja) 1996-08-02 1998-02-20 Toshiba Corp 陰極線管装置
JPH10172130A (ja) 1996-12-09 1998-06-26 Hitachi Ltd 磁気記録媒体及びその製造方法並びに磁気記憶装置
JPH10229012A (ja) 1997-02-17 1998-08-25 Minebea Co Ltd 磁気記録媒体の製造方法
US5858182A (en) 1997-03-20 1999-01-12 Headway Technoloies, Inc. Bilayer carbon overcoating for magnetic data storage disks and magnetic head/slider constructions
JP3029407B2 (ja) 1997-04-24 2000-04-04 千葉特殊コンクリート工業株式会社 連結ピンによる接合構造
WO1999003099A1 (en) 1997-07-10 1999-01-21 Seagate Technology, Inc. Magnetic recording medium comprising multilayered carbon-containing protective overcoats
JPH1139647A (ja) 1997-07-23 1999-02-12 Hitachi Ltd 磁気記録媒体及びその製造方法並びに磁気記憶装置
JP3192109B2 (ja) * 1997-08-07 2001-07-23 株式会社半導体エネルギー研究所 電気用部材
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
US6238780B1 (en) * 1998-04-16 2001-05-29 Seagate Technology Llc Magnetic recording medium comprising multilayered carbon-containing protective overcoats
US6303214B1 (en) * 1999-04-14 2001-10-16 Seagate Technology Llc Magnetic recording medium with high density thin dual carbon overcoats
US6086730A (en) * 1999-04-22 2000-07-11 Komag, Incorporated Method of sputtering a carbon protective film on a magnetic disk with high sp3 content

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US20030027019A1 (en) 2003-02-06
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US6855232B2 (en) 2005-02-15
US20040137207A1 (en) 2004-07-15
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US6682807B2 (en) 2004-01-27

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